Aerotech MPS75SLE-025 Bedienungsanleitung

Revision: 1.00.00

MPS75SLE

Hardware Manual

Global Technical Support

Go to www.aerotech.com/global-technical-support for information and support about your Aerotech products. The website

provides downloadable resources (such as up-to-date software, product manuals, and Help files), training schedules, and PC-

to-PC remote technical support. You can also complete Product Return (RMA) forms and get information about repairs and

spare or replacement parts. For immediate help, contact a service office or your sales representative. Have your customer

order number available before you call or include it in your email.

United States (World Headquarters)

Phone: +1-412-967-6440

Fax: +1-412-967-6870

Email: service@aerotech.com

101 Zeta Drive

Pittsburgh, PA 15238-2897

www.aerotech.com

United Kingdom Japan

Phone: +44 (0)1256 855055

Fax: +44 (0)1256 855649

Email: service@aerotech.co.uk

Phone: +81 (0)50 5830 6814

Fax: +81 (0)43 306 3773

Email: service@aerotechkk.com.jp

Germany China

Phone: +49 (0)911 967 9370

Fax: +49 (0)911 967 93720

Email: service@aerotechgmbh.de

Phone: +86 (21) 3319 7715

Email: saleschina@aerotech.com

France Taiwan

Phone: +33 1 64 93 58 67

Email: sales@aerotech.co.uk

Phone: +886 (0)2 8751 6690

Email: service@aerotech.tw

This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the

express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and

may be trademarks of their respective companies.

MPS75SLE Hardware Manual Table of Contents

Table of Contents

Table of Contents iii

List of Figures iv

List of Tables v

Safety Procedures and Warnings vii

EC Declaration of Incorporation ix

Chapter 1: Overview 1

1.1. Environmental Specifications 2

1.2. Accuracy and Temperature Effects 2

1.3. Basic Specifications 3

1.4. Vacuum Operation 4

Chapter 2: Mechanical Specifications and Installation 5

2.1. Unpacking and Handling the Stage 5

2.2. Dimensions 6

2.3. Securing the Stage to the Mounting Surface 10

2.3.1. For XYAssemblies and Special Cases 11

2.4. Attaching the Payload to the Stage 12

Chapter 3: Electrical Specifications and Installation 15

3.1. Motor and Feedback Connectors 16

3.2. Motor and Feedback Wiring 19

3.3. Motor and Feedback Specifications 21

3.4. Limits, Marker, and Machine Direction 23

3.5. Motor and Feedback Phasing 24

Chapter 4: Maintenance 25

4.1. Service and Inspection Schedule 25

4.2. Cleaning and Lubrication 26

4.2.1. Bellows Removal for Re-Lubrication 28

4.3. Bellows Installation 29

4.4. Troubleshooting 32

Appendix A: Warranty and Field Service 33

Appendix B: Revision History 35

Index 37

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Table of Contents MPS75SLE Hardware Manual

List of Figures

Figure 2-1: MPS75SLEDimensions 6

Figure 2-2: MPS75SLEwith Bellows Dimensions 7

Figure 2-3: MPS75SLEMounting Plate Dimensions 8

Figure 2-4: MPS75SLEHDZ Angle Bracket Dimensions 9

Figure 2-5: Mounting Hole Location 10

Figure 2-6: Access To All Mounting Holes 11

Figure 2-7: Load Capability of MPS75SLE Series Stages 12

Figure 2-8: Stage Orientations 13

Figure 2-9: Torque Required to Turn Ball-Screw in Vertical Orientation 14

Figure 3-1: DCMotor and Feedback Wiring 19

Figure 3-2: Stepper Motor and Feedback Wiring 20

Figure 3-3: Machine Direction 23

Figure 3-4: Analog Encoder Phasing Reference Diagram 24

Figure 3-5: Encoder Phasing Reference Diagram (Standard) 24

Figure 4-1: Remove the Bellows Bolts 28

Figure 4-2: Slide the Stage Carriage and Bellow Compression 28

Figure 4-3: Motor Cover Screw Location 29

Figure 4-4: Bellows Support Rods 29

Figure 4-5: Secure the Bellows Support Rods 30

Figure 4-6: Attach the Bellows 30

Figure 4-7: Attach the Bellows Cover 30

Figure 4-8: Attach the Bellows Tabletop 31

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MPS75SLE Hardware Manual Table of Contents

List of Tables

Table 1-1: Model Numbers and Ordering Options 1

Table 1-2: Environmental Specifications 2

Table 1-3: MPS75SLE Series Mechanical Specifications 3

Table 3-1: Connector Pin Assignments (DC Motor) 17

Table 3-2: Encoder Connector Pin Assignments (DC Motor) 18

Table 3-3: Connector Pin Assignments (Stepper Motor) 18

Table 3-4: Feedback Specifications 21

Table 3-5: Motor Specifications 22

Table 3-6: Encoder Specifications 22

Table 4-1: Troubleshooting 32

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Table of Contents MPS75SLE Hardware Manual

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MPS75SLE Hardware Manual Electrical Safety

Safety Procedures and Warnings

Read this manual in its entirety before installing, operating, or servicing this product. If you do not understand

the information contained herein, contact an Aerotech representative before proceeding. Strictly adhere to

the statements given in this section and other handling, use, and operational information given throughout

the manual to avoid injury to you and damage to the equipment.

The following statements apply wherever the Warning or Danger symbol appears within this manual. Failure

to observe these precautions could result in serious injury to those individuals performing the procedures

and/or damage to the equipment.

D A N G E R : This product contains potentially lethal voltages. To reduce the possibility of

electrical shock, bodily injury, or death the following precautions must be followed.

1. Access to the MPS75SLE and component parts must be restricted while connected to a

power source.

2. Do not connect or disconnect any electrical components or connecting cables while

connected to a power source.

3. Disconnect electrical power before servicing equipment.

4. Make sure the MPS75SLE and all components are properly grounded in accordance with

local electrical safety requirements.

5. Operator safeguarding requirements must be addressed during final integration of the

product.

W A R N I N G : To minimize the possibility of electrical shock, bodily injury or death the

following precautions must be followed.

1. Moving parts can cause crushing or shearing injuries. Access to all stage and motor parts

must be restricted while connected to a power source.

2. Cables can pose a tripping hazard. Securely mount and position all system cables to avoid

potential hazards.

3. Do not expose the MPS75SLEto environments or conditions outside of the listed

specifications. Exceeding environmental or operating specifications can cause damage to

the equipment.

4. The MPS75SLE must be mounted securely. Improper mounting can result in injury and

damage to the equipment.

5. Use care when moving the MPS75SLE. Lifting or transporting the MPS75SLE improperly

can result in injury or damage to the MPS75SLE.

6. The MPS75SLE is intended for light industrial manufacturing or laboratory use. Use of the

MPS75SLE for unintended applications can result in injury and damage to the equipment.

7. If the MPS75SLE is used in a manner not specified by the manufacturer, the protection

provided by the MPS75SLE can be impaired and result in damage, shock, injury, or death.

8. Operators must be trained before operating this equipment.

9. All service and maintenance must be performed by qualified personnel.

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Electrical Safety MPS75SLE Hardware Manual

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MPS75SLE Hardware Manual Declaration of Conformity

EC Declaration of Incorporation

Manufacturer:

Aerotech, Inc.

101 Zeta Drive

Pittsburgh, PA 15238-2897

USA

herewith declares that the product:

MPS75SLE Stage

is intended to be incorporated into machinery to constitute machinery covered by the Directive

2006/42/EC as amended;

and that the following harmonized European standards have been applied:

ISO 12100

Safety of machinery - General principles for design

- Risk assessment and risk reduction

EN 60204-1

Safety of machinery - Electrical equipment of machines

and

further

declares

that

it is not allowed to put the equipment into service until the machinery into which it

is to be incorporated or of which it is to be a component has been found and

declared to be in conformity with the provisions of the Directive 2006/42/EC and

with national implementing legislation, i.e. as a whole, including the equipment

referred to in this Declaration.

Authorized Representative:

Simon Smith, European Director

Address:

Aerotech Ltd

The Old Brick Kiln

Ramsdell, Tadley

Hampshire RG26 5PR

Name

/ Alex Weibel

Position

Engineer Verifying Compliance

Location

Pittsburgh, PA

www.aerotech.com ix

This is to certify that the aforementioned product is in accordance with the applicable requirements of

the following Directive(s):

2011/65/EU RoHS 2 Directive

Declaration of Conformity MPS75SLE Hardware Manual

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