AIXTRON CRIUS II Benutzerhandbuch
CONFIDENTIAL
CRIUS II
System Manual
Edition 06/2010
crius_II_en_00, Edition 06/2010
Imprint System Manual
CRIUS II
0
2CONFIDENTIAL AIXTRON - Dokumentation
Publisher AIXTRON AG
Kaiserstr. 98
D-52134 Herzogenrath
GERMANY
Technical Support Please contact your local AIXTRON subsidiary
Technical Support Line (emergency only): +49 (241) 8909 - 999
Editors Isartext GmbH, 81367 Munich, Germany
Language Original language: German
English translation: Isartext GmbH
Copyright © AIXTRON AG 2010. All rights reserved.
The legal end user of the AIXTRON CRIUS II may reproduce this document
for use with his CRIUS II only. For safety reasons complete copies must be
made. Any other reproduction without written permission by AIXTRON is for-
bidden.
The system software may be used for theCRIUS II only. It is strictly forbidden
to make copies or give the software to third parties.
The use of trademarks, brand names etc. in this document does not entitle
third parties to consider these names to be unprotected.
Subject to changes without notice.
Phone: +49 (241) 8909 - 0
Fax: +49 (241) 8909 - 677
E-mail: [email protected]
Website: www.aixtron.com
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crius_II_en_00, Edition 06/2010
System Manual Chapter overview
CRIUS II
AIXTRON - Dokumentation CONFIDENTIAL 3
Chapter overview
Use, data
Intended use. User qualifications. Technical data. 5
Safety
Regulations. Danger areas. Safety circuit. LOTO. 17
Description
Process technology. System overview. Components. 55
Installation
Transport. Assembly. Initial commissioning. 99
Operation
Operating elements. Switching on/off. Production. 109
Maintenance
Maintenance schedule. Maintenance work. 131
Storage, disposal
Deactivating. Storage. Disposal. 183
Appendix
Glossary. Tables and lists. Forms. 189
Index
Alphabetically sorted index. 193
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System Manual Use, data
CRIUS II
1Use,data
1Use,data
1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.1.1 Validity of this System Manual . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.1.2 Intended use of the CRIUS II . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.1.3 Other uses and applications . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
1.1.4 Use of this System Manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
1.1.5 Worldwide AIXTRON service centers. . . . . . . . . . . . . . . . . . . . 7
1.2 User qualifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
1.3 Training . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.4 System identification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.4.1 Type label. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
1.5 Dimensions and weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.5.1 Dimensions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.5.2 Weight. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
1.6 Installation data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
1.6.1 Amperes interrupting capacity (AIC). . . . . . . . . . . . . . . . . . . . 13
1.6.2 Environmental conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
1.6.3 Pneumatic supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
1.6.4 Cooling water . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
1.7 Conformance statement. . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
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Use, data System Manual
Introduction CRIUS II
1
1.1 Introduction
1.1.1 Validity of this System Manual
Document identification: System Manual, crius_II_en_00, Edition 06/2010
This System Manual describes the CRIUS II.
You find the project number on the type label of your system.
This System Manual may show or describe components which are not part of
the AIXTRON scope of delivery. Such information is intended for better under-
standing. However, AIXTRON excludes any liability for such components and
the corresponding information.
1.1.2 Intended use of the CRIUS II
The CRIUS II is intended for epitaxial deposition of materials on wafers using
CVD technology. (CVD = chemical vapor deposition).
To guarantee that the system is run in accordance with the binding stipula-
tions, you must:
• Be qualified for working with the CRIUS II
• Read and observe the information contained in this System Manual
• Adhere to the technical data
• Perform maintenance work punctually
1.1.3 Other uses and applications
Written permission from AIXTRON AG (AIXTRON) is required for uses other
than those stipulated above. Any use beyond the applications described
above will be regarded as not conforming to provisions. AIXTRON declines all
liability for damages which occur when stipulations are disregarded.
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System Manual Use, data
CRIUS II Introduction
1.1.4 Use of this System Manual
This System Manual contains the information required to ensure that the
CRIUS II is used correctly. The System Manual is consideredto be anintegral
part of the CRIUS II. It must always be at hand near the CRIUS II.
The System Manual describes all stages of the serviceable life of the
CRIUS II: Transport, installation, initial commissioning, operation, mainte-
nance (preventive work), service (corrective work, repair), storage, disposal.
Check the table of contents to locate the relevant chapter.
AIXTRON delivers user documentation along with the product. Documents
can be re-ordered:
Contact us if you have queries about the contents of the documentation or if
you wish to give us feedback.
1.1.5 Worldwide AIXTRON service centers
For contact addresses of the worldwide AIXTRON service centers, please
refer to:
www.aixtron.com
NOTE:
Read Chapter 2 Safety, 17 prior to any work at the CRIUS II! It contains
important information for your own personal safety. This chapter must
have been read and understood by all persons who work at the CRIUS II
during any stage of its serviceable life.
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Use, data System Manual
User qualifications CRIUS II
1
1.2 User qualifications
Access rights The end user assigns access rights to his personnel according to their level of
training, knowledge, experience and responsibility.
The following four access levels are defined for the CRIUS II by default.
• Viewer
•Operator
• Technician
• Supervisor
For more information refer to the AIXACT software manual.
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System Manual Use, data
CRIUS II Training
1.3 Training
This document is intended for technically qualified personnel who have suc-
cessfully passed appropriate training for their access right on the CRIUS II.
This training must have been performed or authorized by AIXTRON. Only
appropriatelytrainedpersonnelcancorrectlyimplementthesafetyregulations
contained in this document.
Personnel without this training are considered as unauthorized. Unauthorized
personnel are not permitted to work on the CRIUS II. AIXTRON declines all lia-
bility for damages which occur when stipulations are disregarded.
AIXTRON offers standard and user-tailored training for AIXTRON products.
The training team will be pleased to provide you with further information.
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Use, data System Manual
System identification CRIUS II
1
1.4 System identification
1.4.1 Type label
The type labels identify the specific system and includes details of any cus-
tomer-specific adaptations.
State all details shown on the type label when you contact AIXTRON. When-
ever possible, also state the displayed software sequence step when you
make diagnosis inquiries in the event of disturbances. This ensures fast and
optimum support.
The following type labels are attached to the CRIUS II:
• System type label
Details of the system
• Heater type label
Details of the heater
Fig. 1-1, 10 and Fig. 1-2, 10 show the type labels.
Fig. 1-1 System type label
Fig. 1-2 Heater type label
Inhaltsverzeichnis
