Alicat MC Series Bedienungsanleitung

Precision Gas Mass Flow Controllers

The Fastest Flow Controller Company in the World!

Operating Manual

MC-Series MCS-Series

MCR-Series

WHISPER

MCV-Series

Thank you for purchasing an Alicat ow controller.

We know you are going to love your new ow controller. If you have any

questions about operating it, or if something is not working as expected,

please let us know. We are eager to help you in any way possible.

Alicat Scientic, Inc.

info@alicat.com • alicat.com

7641 N Business Park Drive, Tucson, AZ 85743 USA

1-888-290-6060

Serial Number: ____________________________

Next Calibration: ___________________________

Recalibrate your ow controller every year.

Your calibration date is labeled on the back of the ow controller. Write that

date in the space above. When it's time for your ow controller's annual

recalibration, contact us by phone, email or live chat to set it up, or ll out the

Service Request Form at alicat.com/service.

07/31/2018 Rev.43 DOC-ALIMAN16C

This Alicat device comes with a NIST traceable calibration

certicate.

This Alicat ow controller conforms to the European

Union’s Restriction of Use of Hazardous Substances in

Electrical and Electronic Equipment (RoHS) Directive

2011/65/EU.

This Alicat ow controller complies with the requirements

of the Low Voltage Directive 2014/35/EU and the

EMC Directive 2014/30/EU and carries the CE Marking

accordingly.

This Alicat ow controller complies with the requirements

of the European Union's Waste Electrical & Electronic

Equipment (WEEE) Directive 2002/96/EC.

Welcome to the Alicat way.

You're busy, and the last thing you want to do is waste time wrestling with

your ow controller. We're here to make your life a little easier so you can do

what you do best. It's our pleasure to introduce you to your new Alicat:

• High-accuracy performance for all your gases. Use your ow controller

with any of the 98 or more gases that are part of Gas Select™, page 31.

• Control pressure while monitoring ow rate. Set the closed loop control

algorithm for pressure control, page 26.

• Backlit display with adjustable contrast is easy to read in direct sunlight.

In dimly lit areas, press the Alicat logo to turn on the backlight, page 7.

• Change your STP to match any standard temperature and pressure

reference, page 35.

• Log data to your PC. Talk to the ow controller serially to capture all ow

data for logging and analysis, page 39.

This manual covers the following Alicat Scientic instruments:

• MC and MCR-Series Mass Gas Flow Controllers

• MCD and MCRD-Series Dual Valve Mass Gas Flow Controllers

• MCE-Series Mass Gas Flow Controllers

• MCP-Series Mass Gas Flow Controllers

• MCQ and MCRQ-Series High PressureMass Gas Flow Controllers

• MCS and MCRS-Series Mass Gas Flow Controllers

• MCV-Series Mass Gas Flow Controllers

• MCW (WHISPER) Low Pressure Drop Mass Flow Controllers

This includes Alicat ow controllers labeled as approved for CSA Class 1 Div 2

and ATEX Class 1 Zone 2 hazardous environments. See page 98 for Special

Conditions regarding the use of CSA/ATEX labeled devices.

Please contact Alicat at 1-888-290-6060 or info@alicat.com if you have

any questions regarding the use or operation of this device.

Table of Contents

Quick-Start Guide ________________________________________6

Getting Started__________________________________________7

Getting to KnowYour Alicat.........................................................................................7

Connectorsand Buttons......................................................................................7

TheFlowControllerDisplay.................................................................................8

Status Messages.................................................................................................8

Mounting.....................................................................................................................9

Plumbing.....................................................................................................................9

Filters ..........................................................................................................................9

ConnectingYour Gas Flow Controller..........................................................................10

MCV ControllerOperatingNotes........................................................................11

MCDDual ValveMass FlowControllerOperatingNotes......................................12

Power and Signal Connections...................................................................................14

RS-232 /RS-485 Digital Input/ Output Signal..................................................15

Analog Signals..................................................................................................16

Option: ColorTFT Display ...........................................................................................17

Navigating and Customizing Your Flow Controller__________________ 18

Flow Controller Menu Map.........................................................................................18

Collecting Live Flow Data...........................................................................................19

Choosing Engineering Units.......................................................................................20

Option: CollectingTotalized Flow Data and Batch Dispensing....................................21

Dispensing Gas inBatches ................................................................................22

Menu.........................................................................................................................24

TaringYour FlowController...............................................................................24

Control Menus............................................................................................................25

Commanding anew setpoint............................................................................26

Changingthesetpoint source............................................................................26

Changingthecontrol loopvariable ...................................................................26

Adjustingthe PID controller ..............................................................................27

About.........................................................................................................................29

Diagnostic Information.....................................................................................29

Basic Conguration Menu..........................................................................................30

ChoosingDeviceEngineeringUnitsfrom the Basic Conguration Menu.............30

Gas Select™................................................................................................................31

Gas Select™ Gas List..........................................................................................32

UsingCOMPOSER™ toPersonalize MixedGas Compositions...............................33

Addinga new mixedgas compositiontoCOMPOSER.........................................34

Dening STP/NTP ReferenceValues...........................................................................35

Advanced Setup.........................................................................................................36

Display Setup.............................................................................................................36

Sensor Setup..............................................................................................................37

ConguringYour Flow Controller for Serial Communications.....................................38

Serial Communications____________________________________39

Establishing Serial Communications..........................................................................39

Serial Streaming vs Polling ........................................................................................40

Taring Serially............................................................................................................41

Collecting Flow Data Serially......................................................................................41

Commanding a New Setpoint Serially........................................................................42

Quick Serial Command Guide.....................................................................................43

Using Gas Select and COMPOSER Serially...................................................................44

Troubleshooting Your Flow Controller __________________________45

Maintenance and Recalibration______________________________48

Gas Properties Data ______________________________________49

Numerical List of Gases____________________________________57

Device Units ___________________________________________60

Accessories____________________________________________62

Accessories.................................................................................................................63

Specication Sheets______________________________________64

Optional Pinouts ________________________________________ 94

Additional Information for Alicat CSA and ATEX Approved Devices _______98

Limited LifetimeWarranty ________________________________ 101

Quick-Start Guide

Setup

• Tare your ow controller. After you connect the ow controller, ensure

that no air is owing through the device, power it on and ensure it has a zero

setpoint. After a few seconds, it will auto-tare.

• Choose your engineering units. Press the button above or below any

parameter to enlarge it in the middle of the display. If you select that same

item a second time, you can change the engineering unit for that parameter.

You can chosse units for all of the parameters at once by selecting MENU >

BASIC CONFIG > DEVICE UNITS.

• Connect your ow controller. Ensure that ow through your device will be

in the same direction as the arrow on the ow body (usually left to right).

Operation: Flow Control

• Choose your setpoint. Select SETPT from the Main Display to select your ow

rate. Press SET, and the controller immediately adjusts to the new setpoint.

• Monitor live ow readings. You can monitor live readings of ow, pressure

and temperature by viewing the screen. Readings are updated in real time.

• (Optional) Capture a totalized reading. The totalizer option displays the

total ow that has passed through the device since the last time the totalizer

was reset. Press TOTAL/MENU to access the totalizer.

Operation: Pressure Control with Flow Monitoring

• Switch the closed loop control to pressure. Select MENU > CONTROL > ADV

CONTROL > LOOP SETUP > LOOP VAR, and then choose Absolute Pressure. Your Alicat

will now control absolute pressure while monitoring ow rate.

• Choose your setpoint. Select SETPT from the Main Display to select a pressure

setpoint. Press SET, and the controller immediately adjusts to the new setpoint.

Maintenance and Care

• If your gas is clean, your ow controller will require no periodic cleaning.

• Calibrate your ow controller annually. Request an Alicat factory

calibration at alicat.com/service or by calling Alicat at 1-888-290-6060.

Getting to KnowYour Alicat

Getting Started

Connectors and Buttons

The drawings below represent the default conguration of a standard Alicat

mass ow controller (MC series) with an upstream valve. Your ow controller's

appearance and connections may dier, especially if it has been ordered with

a large Rolamite valve or a downstream valve.

DATE

MC-20SLPM-D NO DIM

6/7/2018

REV.

DATE

MC-20SLPM-D NO DIM

6/7/2018

REV.

DATE

MC-20SLPM-D NO DIM

6/7/2018

REV.

Process ports

LCD display

Softkey buttons

Communications/Power

Power Jack

Backlight on/o button

Mounting holes

Getting Started

The Flow Controller Display

The gure below identies the various features of the ow controller display.

Press the large button with the Alicat logo to toggle the backlight on and o.

For more details, see the Menu Map on page 18 and the menu-by-menu

descriptions that follow it.

Main Display

Flow Temp

+24.38

SLPM

Air

MassFlow

+15.44

TOTAL/

+15.44

SLPM

+16.67

LPM

SETPT

0.000

+24.38

PSIA

+13.60

TOTAL Accesses the optional

ow totalizer (page 21).

MENU Enters the Menu system

(page 24).

SETPT Sets the ow or pressure

control setpoint (page 26).

Engineering unit for the

highlighted parameter.

Status messages will display

here (below).

Selected gas calibration

(page 31).

Mass Flow

+15.44

SLPM

Highlights mass ow rate

in the center:

Volu Flow

+16.67

LPM

Highlights volumetric (actual)

ow rate in the center:

Highlights temperature in

the center:

Highlights pressure in

the center. Push a second

time to choose pressure

parameter:

Abs Press

+13.60

PSIA

Internal absolute pressure:

Gage Press

-0.12

PSIG

Internal gauge pressure:

(optional):

Baro Press

+13.72

PSIA

Barometric pressure

(optional):

Status Messages

Analog-digital converter error: ADC

Valve exhaust is active: EXH

Valve hold is active: HLD

Front display is locked: LCK

Mass ow over range of device: MOV

Overpressure limit exceeded (optional): OPL

Totalizer rolled over to 0: OVR

Pressure over range of device: POV

Totalizer missed out of range ow: TMF

Temperature over range of device: TOV

Volumetric ow over range of device: VOV

Getting Started

Mounting

No straight runs of pipe are required upstream or downstream of the ow

controller. Most Alicat ow controllers can be mounted in any position,

including upside-down. (MCS/MCRS series ow controllers use media-isolated

sensors that must be tared after changing orientation.)

Caution: Flow controllers that use large Rolamite valves (MCR/MCRW/

MCRQ/MCRS) should be mounted with their valve oriented vertically

(right-side up). If another orientation is desired, please contact Alicat.

Plumbing

Your controller has been shipped with plastic plugs tted into its ports. To

lessen the chance of contaminating the ow stream, do not remove these

plugs until you are ready to install the device.

Standard Alicat Gas Flow controllers have female inlet and outlet ports.

Welded VCR and other specialty ttings may have male connections.

» If you are using a tting that does not have a face seal, use thread-sealing

Teon tape to prevent leakage around the port threads, but do not wrap

the rst two threads. This will minimize the possibility of getting tape into

the ow stream and clogging the laminar ow elements (LFE).

» If you are using a tting that has a face seal, there is no need to apply

Teon tape to the threads.

Warning: Do not use pipe dopes or sealants on the process connections

as these compounds can cause permanent damage to the controller

should they get into the ow stream.

Filters

When pressure drop is not an issue, use in-line sintered lters to prevent

large particulates from entering the ow controller. Suggested maximum

particulate sizes are as follows:

» 5 microns for units with ow ranges of 1 sccm or less.

» 20 microns for units with ow ranges between 2 sccm and 1 slpm.

» 50 microns for units with ow ranges of 1 slpm or more.

Getting Started

Connecting Your Gas Flow Controller

Inlet Connection Port

Outlet Connection Port

Flow Direction Arrow

Control Valve

(upstream valve shown)

Warning: Using the ow controller above the maximum specied

internal line pressure, or above the maximum recommended

dierential pressure between the inlet and outlet, will result in

permanent damage to the internal pressure sensors.

A common cause of this problem is the instantaneous application

of high-pressure gas, as from a snap-acting solenoid valve either

upstream or downstream of the ow controller. If you suspect that

your pressure sensor is damaged, please discontinue use of the device

and contact Alicat.

See the chart below for pressure limits.

Model Max Pressure at Sensor Max Dierential Pressure

MC//MCR/MCS 145 psig 75 psid

MCW/MCRW 45 psig 15 psid

MCQ/MCRQ 305 psig 100 psid

Your Alicat ow controller can measure and control ow generated by

positive pressure and/or suction. Connect the controller so that the ow

travels in the same direction as the ow arrow, usually from left to right as you

look at the front of the device.

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