Section Page
1 Introduction ……………….……………………………………………………………………………….............. 2
1.1 Scope of this manual ……………………………….…………………………………………….………………………………………………………. 2
2 Technical Data ………………………………………………………………………………………………………………. 2
3 Warnings & Safety ………………………………………………………………………………………………………. 4
4 Installation …………………………………………………………………………………….……………………………. 4
4.1 Instrument …………………………………………………………………………………………….………………………………………………………. 4
4.2 Ion Gauge ……………………………………………………………………………………………..……………….............................. 6
5 Front Panel …………………………………………………………………………………………………………………. 7
6 Setup ………………………………………….………………………………………………………………………………. 8
6.1 Switching On …………………………………………………………………………………………………………………………………………………. 8
6.2 Setup …………………………………………………………………………………………………………………….………………………………………. 8
Passwords / Units ………………………………………………………………………………………………………………………………………. 8
Interlock / Autostart …………………………………………………………………………………………………………………………………. 9
Gauges ……………………………………………………………………………………………………………………………………………………….. 9
Relays …………………………………………………………………………………………………………………………………………………………. 10
Bake ………………………………………………………………………………………………………………...……………………………………….. 10
TSP …………………………………………………………………………………………………………...………………………………………………… 11
Degas ………………………………………………………………………………………………………………………………………………………….. 11
7 Operation ……………………………………………………..………………………………….……………………….. 12
7.1 Function switch in Operation ………………………………………………………………………………………………………………………. 12
7.2 Relay Trip Levels ………………………………………………………………………………………………………………………………………….. 12
7.3 Display Sequence ………………………………………………………………………………………………………………………………………….. 13
Pirani …………………………………………………………………………………………………………………………………………………………. 13
Leak Detector ……………………………………………………………………………………………………………………………………………. 13
Ion Gauge Sensitivity …………………………………………………………………………………………………………………………………. 13
Temperature ………………………………………………………………………………………….…………………………………………………. 13
Capacitance Manometer ……………………………………………………………………...………………………………………………….. 13
8 Ion Gauge Operation ………………………………………………………………………………………………….. 14
8.1 Display Sequence in Emission …….…………………………………………………………………………………………………………………. 14
Starting the Ion Gauges ………………………………………………………………………………………………………………………………. 14
Emission Change …………………………………………………………………………………………………………………………………………. 14
8.2 Changing Emission Current ……………………………………………………………………………………………………………………………. 15
8.3 Prompted Emission Change …………………………………………………………………………………………………………………………… 15
9 Degas ……………………………………………..………………………………………………………………………….. 15
Manual ……………………………………………………………………………………………………………………………………………………….…. 16
Programmed …………………………………………………………………………………………………………………………………………………. 16
Quick …………………………………………………………………………………………………………………………………………………………….. 16
10 Bake ……………………..…………………………………………………………………………………………………….. 17
11 Capacitance Manometer ……………………………………………………………………………………………. 18
12 Recorder Output ……………………………………………………………………………………………………….. 18
13 External Inhibit ………………………………………………………………………………………………………….. 18
14 Windows Software ……………………………………………………………………………………………………….. 18
15 Remote Operation ……………………………………………………………………………………………………… 19
16 Troubleshooting ………………………………………………………………………………………………………… 22
15.1 Fan slow / failed …………………….……………………………………….……………………………………………………………………………. 22
15.2 Temperature ……………………………………………..…………………….……………………………………………………………………………. 22
15.3 Emission Fault ………………………………………..……………………….……………………………………………………………………………. 22
15.4 IG Fil O/C ………………………….…………………………………………….……………………………………………………………………………. 22
15.5 Password Forgotten? ………………………….…………………………….……………………………………………………………………………. 22
15.6 Ion Gauge Connections …………………………………………………….……………………………………………………………………………. 23
17 Assistance …………………………………………………………………………………………………………………… 23
Appendix A
Gauge Principals …………………………………………………………………………………………………………………………………………… 24