CCR 400 Bedienungsanleitung

CCR Model 400

4-Channel MFC Power Supply/Controller Manual

CCR

Process Products

5/08

200 Terrence Matthews Crescent Kanata, Ontario, K2M2C6 Canada

Tel: 613-723-3386 Fax: 613-723-9160

PRODUCT DESCRIPTION ------------------------------------------------------------------------------

SPECIFICATIONS -----------------------------------------------------------------------------------------

FRONT PANEL ---------------------------------------------------------------------------------------------

REAR PANEL -----------------------------------------------------------------------------------------------

CONNECTOR PIN DESIGNATIONS

Transducer Connector (J1, J2, J3, J4) ---------------------------------------------------

Analog Output (J5) ----------------------------------------------------------------------------

Alarms (J8) --------------------------------------------------------------------------------------

RS232 (J6) --------------------------------------------------------------------------------------

RS485 (J7, J9) ---------------------------------------------------------------------------------

STARTUP ----------------------------------------------------------------------------------------------------

MANUAL SETUP

Selecting Display (Flow or Total) ----------------------------------------------------------

Selecting Valve Override (Open, Close or Run) ---------------------------------------

Selecting Setpoint (Control Voltage) -----------------------------------------------------

Selecting Units of Measure and Gas Identifiers --------------------------------------

Selecting Filter (-3dB A/D Converter Filter Frequency ------------------------------

Selecting Input (0-5Vdc, 0-10Vdc or 4-20mA Signal Input -------------------------

Selecting Alarms (High and Low with Hysteresis) ------------------------------------

Selecting Ratio (Master/Slave Operation) ----------------------------------------------

MANUAL CAL/RANGE

Calibrate (Zero Only) -------------------------------------------------------------------------

Calibrate (Range Only) ----------------------------------------------------------------------

Calibrate (Zero & Range) -------------------------------------------------------------------



Range (Changing Range) ------------------------------------------------------------------

Calibrate (Multiplier) --------------------------------------------------------------------------

RS232/485 HOOKUP ------------------------------------------------------------------------------------

RS232/485 COMMANDS

Setting/Reading Setpoint & Flow Alarms -----------------------------------------------

Setting/Reading Alarm Hysteresis, Units of Measure & Gas ID ------------------



Setting/Reading Signal Input & Filter ----------------------------------------------------

Setting/Reading Multiplier ------------------------------------------------------------------

Setting/Blanking/Reading Display --------------------------------------------------------

Resetting Total ---------------------------------------------------------------------------------

Setting/Reading Range Value -------------------------------------------------------------

Enable Master/Slave Channels & Setting Local/Remote Operation -------------

UNITS OF MEASURE TABLE -------------------------------------------------------------------------

GAS IDENTIFICATION TABLE

Gas #1 thru 66 --------------------------------------------------------------------------------

Gas #67 thru 130 -----------------------------------------------------------------------------

Gas #131 thru 180 ---------------------------------------------------------------------------

JUMPER LOCATIONS FOR PURGE SIGNAL SELECTION

Jumper Locations for GND and +15V Purge Signals --------------------------------



TABLE OF CONTENTS

The CCR Model 400 is a high performance, microprocessor-based 4-channel power

supply/controller designed for use with Mass Flow Controllers (MFC). A linear regulator

provides a low noise, foldback current limited, thermal overload protected +15Vdc and

-15Vdc power supply @ 250mA each for each of the (4) MFC's. The CCR 400 accepts,

user selectable 0-5Vdc, 0-10Vdc or 4-20mA input signals. It also supplies 0-5Vdc, 0-10Vdc

or 4-20mA setpoint signals, for each channel, for flow control.

The firmware utilizes a Real Time Operating System (RTOS) for real time multitasking

capabilities. This allows continuous monitoring of each channel's flow rates, total flow and

setpoints regardless of the task being performed. A 16-bit multi-channel, high speed,

sigma-delta analog-to-digital converter provides accurate flowrate data. A 32K x 8 battery

backed RAM stores more than 90 Units of Measure and 190 Gas Identifiers selectable by

the user. All pertinent data, required by the microprocessor at power-up to re-initialize the

system, is also stored in the same RAM.

Ratio control is user selectable for master/slave operation. Channel 1 is always the master

and any of the other 3 channels may be selected as slaves. This master/slave arrangement

utilizes the actual flow of Channel 1 as the master signal.

The CCR400 utilizes a 4-line by 20 character back lighted LCD display. A built in Totalizer, one

for each channel automatically recognizes the units of measure selected and adjusts the

time base for the integrator accordingly. The user can select either Flow or Total to be

displayed for each channel. When selected, the setpoint signal is displayed and can be

altered via the front panel switches. Override controls for opening or closing the MFC

valves are also available for each channel. Annunciator LED's display the selected valve

override conditions.

Both RS232 and RS485 serial communications are available. All functions selectable from

the front panel switches are also accessible via the RS232/RS485 serial ports. Only one,

either RS232 or RS485, serial port is active at any one time. Selection, including a baud

rate of 9600 or 19.2K, is made via the front panel switches.

Each flow channel has a high and low user programmable alarm. The alarms activate an

opto-isolated open collector transistor output capable of switching 25Vdc @ 10mA.

The unit can be rack mounted using standard half-rack hardware or can be bench mounted

using the retractable stand provided. Input power is selectable, via the rear panel power

selector for 100, 115 or 230 Vac, 50-400 Hz.

PRODUCT DESCRIPTION

PAGE 1

Signal Input

Number of Channels ------------------------

Signal Type ------------------------------------

Input Resistance

 Voltage ---------------------------------

 Current ---------------------------------

Setpoint Output (Control Signal)

Signal Type -------------------------------------

Accuracy (typ) ---------------------------------

Analog-to-Digital Converter

Inputs --------------------------------------------

Technique --------------------------------------

Resolution --------------------------------------

Speed (max) -----------------------------------

Totalizer (Each Channel)

Technique --------------------------------------

Time Base (Quartz Crystal) ---------------

Accuracy (typ) --------------------------------

Microprocessor

Type ---------------------------------------------

Speed -------------------------------------------

Operating System ----------------------------

Non-volatile memory ------------------------

Serial Communications

RS232 -------------------------------------------

RS485 -------------------------------------------

Baud Rate --------------------------------------

Transducer Power Supply (Each Channel)

Voltage ------------------------------------------

Current (min) ----------------------------------

Input Power

Voltage ------------------------------------------

Current (typ) -----------------------------------

Fuse ---------------------------------------------

SPECIFICATIONS

0-5Vdc, 0-10Vdc, 4-20mA , user selectable

>10 Megohm

120 ohms

0-5Vdc, 0-10Vdc, 4-20mA (user selectable)

+/-0.05% FS (Voltage), +/-0.1% FS (Current)

Sigma-Delta

16-bit (bi-polar)

100 Hz

Integrated (Riemann Sum) Value

20MHz

+/- 30ppm

80C31

20MHz

RTOS with multitasking capabilities

32K x 8 Battery backed Ram

Bi-directional (user-selectable)

Full-duplex (user-selectable)

9600 or 19.2K baud (user-selectable)

+/-15Vdc, +/-0.75Vdc

250mA

100/115/230 Vac, +/-10% (switch selectable)

500 mA

1 amp SLO BLO (Time Delay)

PAGE 2

 

ANNUNCIATORS: Displays OVERRIDE signal status of each channel. If annunciators are not   

illuminated, the Setpoint (Control) voltage is active.

DISPLAY AREA

Column 1: Reserved for displaying (*) Active Channel, (M) Master Channel, (S) Slave Channel or (T) Totalizer.

Column 2: Reserved for polarity indicator (minus sign for negative signal, none for positive).

Col's 3 - 8: Actual scaled value of input signal. Displays FLOW or TOTAL in normal display mode. Displays  

the Setpoint (Control) value when CH SEL is depressed.

Column 9: Space

Col's 10-14: Units of Measure

Column 15: Space

Col's 16-20: Gas Identifier

ESC: Escape key used to exit MENU sequence without updating current settings.

ENTER: Key used to enter new settings.

KEYPAD: Used to quickly enter new settings.

OVERRIDE: Used with CH SEL to override Setpoint (Control) voltage inputs with valve OPEN or valve  

CLOSE signals. RUN disables OPEN or CLOSE selection.     

CH SEL: Used to scroll through Channels 1, 2, 3 and 4 to update the selected Channel's   

Setpoint (Control) voltage or to send the selected OVERRIDE signal.

 

MENU: Key used to enter MENU or manual setup sequence.

SCROLL: Used to scroll MENU selections UP or DOWN





FRONT PANEL

PAGE 3

12345

678

CH 1

CH 2

CH 3

CH 4

ENTERESC

SELECT

OPEN

RUN

OPEN

M 100.00 SCCM C4H6

T 2750.0 SCCM N2

S 500.00 SLM Ar

* 115.00 SCCM C02

CCR

Model 400

POWER INLET WITH FUSE (1 amp TIME DELAY or SLO BLO)



POWER SELECTOR SWITCH

 

RS232 SERIAL PORT (J6)

TRANSDUCER CONNECTORS (J1, J2, J3, J4)



ANALOG OUTPUT (J5)

ALARMS (J8)

RS-485 SERIAL PORT (J7, J9)

POWER ON/OFF SWITCH





REAR PANEL

CHANNEL 1

CHANNEL 3

CHANNEL 2

CHANNEL 4

ALARMS

ANALOG OUT

RS485

RS232

230

115

100

T250 1A

VAC

678

PAGE 4

TRANSDUCER CONNECTORS (J1, J2, J3, J4)

ANALOG OUTPUT (J5)

CONNECTOR PIN DESIGNATIONS

PAGE 5

1SIGNAL COMMON

2SIGNAL INPUT

3GROUND

4VALVE OPEN

5SETPOINT COMMON

6-15Vdc

7NC

8SETPOINT SIGNAL

9GROUND

10GROUND

11NC

12VALVE OFF

13+15Vdc

14NC

15NC

Transducer Connector (Female)

Rear Panel View

1SIGNAL CH 1

2SIGNAL COMMON CH 1

3SIGNAL CH2

4SIGNAL COMMON CH2

5NC

6NC

7NC

8NC

9NC

10NC

11SIGNAL CH3

12SIGNAL COMMON CH3

13SIGNAL CH4

14SIGNAL COMMON CH4

15NC

Analog Output Connector (Female)

Rear Panel View

ALARMS (J8)

RS232 (J6)

RS485 (J7, J9)

CONNECTOR PIN DESIGNATIONS

PAGE 6

1CH1 HIGH ALARM

2CH 1 LO W ALARM

3CH1 ALARM COMMON

4CH2 HIGH ALARM

5CH2 LOW ALARM

6CH2 ALARM COMMON

7NC

8NC

9NC

10NC

11NC

12NC

13NC

14NC

15NC

16NC

17NC

18NC

19CH3 HIGH ALARM

20CH3 LOW ALARM

21CH3 ALARM COMMON

22CH4 HIGH ALARM

23CH4 LOW ALARM

24CH4 ALARM COMMON

25NC

26NC

Alarm Connector (Female)

Rear Panel View

1NC   6 DSR

2RXD   7 NC

3TXD   8 NC

4DTR   9 NC

5DIGITAL GROUND

1NC   6 NC

2RXD(-)   7 RXD(+)

3TXD(+)  8 TXD(-)

4DIGITAL GROUND 9 NC

5NC

RS232 Connector (Female)

Rear Panel View

RS485 Connector (Female)

Rear Panel View

TXD

RXD

The CCR 400 has a 100 Vac, 115 Vac or 230 Vac, 50/60 Hz power selector switch located at the rear of the

instrument. Please refer to page 4 to locate this switch. Verify the power selector switch is in the proper position

prior to connecting the power cable to the unit. Verify power ON/OFF switch is in the OFF position. Then perform

the following steps.

1. Connect the power cable to the instrument and apply the proper input power. Do not make any other  

 connections to the instrument.

2. Turn power ON/OFF switch ON.

3. The display will momentarily display the current version of the firmware utilized, then show the following 

factory default display.

 

126.72 SCCM #1

  126.72 SCCM #2

  126.71 SCCM C3H6O 

  126.72 SCCM C2H3N



Note: All 4 channels should have the CLOSE annunciators illuminated. The values 126.71 and 126.72 

are approximate and is the display for an open signal input . It may not correspond exactly to the  

display shown on this unit.

4. Change the Units of Measure and Gas Identifiers as desired. Please refer to page 10. To blank the Units 

 of Measure select "00" then "ENT". To blank the Gas Identifier select "000" then "ENT". To blank the  

entire line, please refer to RS232/485 Commands, Selecting/Blanking/Reading Display on page 21.

5. The CCR 400 is factory calibrated at 0.000 and 5.000Vdc to display 0.00 and 100.00 for each channel.  

To change the display range, without recalibration, see MANUAL CAL/RANGE, Range(Changing Range) 

on page 15. To enter a Gas Correction Factor or Multiplier, refer to MANUAL CAL/RANGE, Calibrate  

(Multiplier) on page 16. The factory Multiplier setting is 1.0000.

6. The CCR 400 can accept 0-5Vdc, 0-10Vdc or 4-20mA input signals. If either 0-10Vdc or 4-20mA is  

required, the instrument needs to be recalibrated. Select the proper signal input for the Transducer to be 

used for each channel. Please refer to MANUAL SETUP, Selecting Input on page 11. Do not attempt to  

recalibrate the instrument at this time. The factory Input setting is 0-5Vdc.

7. Select Filter to optimize reading stability and conversion speed. The factory Filter setting is 15Hz.

8. Allow 30 minutes warm-up time.

9. Turn power ON/OFF switch OFF.

10 . Connect Transducer #1 to J1 on the CCR 400 using the Connector Pin Designation information on

page 5. Connect all ground connections available to the transducer. Example: If the transducer has 3  

ground pins, connect all three ground pins shown on J1. All ground pins on J1, J2, J3 and J4 are  

common but are routed on separate wires from the connector to a ground plane on the instrument  

motherboard.

11. Connect Transducers #2, 3 and 4 to the instrument. The instrument is designed to provide

+/-15Vdc @ 250 mA to each transducer. Do not use a Transducer that requires more than

+/-15Vdc @ 350mA on any channel.

12. Verify the display illuminates and the transducer readings are essentially correct. If the selected signal  

input for a channel is 0-5Vdc proceed to Step 11 for that channel. If the selected signal input for a  

channel is 0-10Vdc or 4-20mA, that channel needs to be recalibrated. Refer to MANUAL CAL/RANGE,  

Calibrate section pages 14 and 15 to recalibrate that channel.



START-UP

PAGE 7



13. To utilize the Setpoint (Control) voltage for MFC's, set the Setpoint voltage for each channel to the  

desired setting. Please refer to MANUAL SETUP, Selecting Setpoint (Control Voltage) on page 10.

The factory Setpoint default is 0.0000 for all 4 channels.



The Setpoint voltage, for a 0-5Vdc signal input, is calculated as follows.

Setpoint Voltage = (Setpoint Value/Range Value) * 5.000Vdc

Example: If the Setpoint Value = 120.00 SCCM and the Range Value is 250.00 SCCM,

the Setpoint Voltage = (120.00/250.00)*5.000 = 2.400Vdc.

For a 0-10Vdc signal input

the Setpoint Voltage= (120.00/250.00)*10.000Vdc = 4.800Vdc  

For a 4-20mA signal input

  the Setpoint Current = (120.00/250.00)*16mA + 4mA = 11.68mA.

14. The Flowrate Alarms are used to monitor the flowrate of the MFC. If the flow rate is not within the  

selected HIGH and LOW Alarm values, an opto-isolated open collector output is activated. This output  

can be used to illuminate warning lights to alert the user if the Flow Controller's Setpoint (Control)  

voltage is not controlling the flow within a desired window. Refer to MANUAL SETUP, Selecting Alarms  

on page 12. The factory default is HIGH Alarm set at 75.000, LOW Alarm at 25.000 and HYSTERESIS  

at 010 counts.

15. To activate the Setpoint (Control) voltage to the MFC, select RUN for the desired channel. Reference  

MANUAL SETUP, Selecting Valve Override (Open, Close or Run) on page 9. The default at power-up

is Valve Close.

16. If the Units of Measure are in flow units, the CCR 400 automatically calculates TOTAL flow using a  

Riemann Sum Integration method. To display TOTAL or to reset the TOTAL display, refer to   

MANUAL/SETUP, Selecting Display (Flow or Total) on page 9. If the Units of Measure are not in flow  

units, the TOTAL is not calculated or displayed.

17. The CCR 400 has both RS232 and RS485 serial communications ports. Only one port is active at any  

one time and is user selectable. The RS232 port has (1) 9-pin D-sub connector, while the RS485 port  

has (2) 9-pin D-sub connectors. All Setups described earlier can be performed using the serial   

communications ports. Reference RS232/485 Hookup and Commands on pages 17 through 26.



PAGE 8

START-UP

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