DISCO DAD522 Bedienungsanleitung
2002-09
disco INSTALLATION MANUAL
Automatic Dicing/Cutting Saws
DAD522
DAC552
DAD562
SOFTWARE VERSION 7.00 SERIES AND NEWER
UHRSNE*070AA
Copyright of this document is owned by Disco Corporation ("Disco").
No part of this document may be copied or reproduced in any form
or by any means, without the express written permission of Disco.
Also, this document may not be disclosed or transferred to third
parties.
This document is printed on recyclable Lint-Free Paper.
- The blue paper is recyclable as used paper just like plain paper.
- The cover paper and adhesive portions are non-recyclable.
(Remove the cover and adhesive portions before recycling.
Recycle the blue paper only.)
Sample
READ CAREFULLY BEFORE USING THIS
MANUAL
Introduction
This machine is a dicing/cutting saw for cutting silicon wafers, glass, ceramics
and VTR heads (workpieces, hereafter).
It has the rotary sections which rotate at high speed, the high-voltage sections
which may cause electric shock hazards and the drive sections which may
catch the operator's body or clothing.
If the machine is not properly operated, safety hazards may cause serious
injury or death.
Read before using the machine
Before using the machine, thoroughly read this manual and follow the
instructions set forth in this manual.
To assure safety in the operation and maintenance of the machine, it is
important that you know the location of potential safety hazards. It is difficult
for DISCO to foresee each and every potential safety hazard. However, this
manual carries various precautionary notes and warnings to indicate the
presence of all foreseeable potential safety hazards. For increased safety
assurance, it is therefore essential that you observe all the precautions and
other relevant instructions set forth in this manual.
If you modify the machine without prior consent of DISCO or repair it in a
manner not stated in this manual, the safety assurance features of the machine
may be seriously affected.
Never attempt to modify or repair the machine in a manner not approved by
DISCO.
Sample
Hazard level
The safety precautions set forth in this document are classified into DANGER,
WARNING and CAUTION categories which represent three degree of hazards
latent in the machine. These categories are defined as detailed below in
accordance with the seriousness and probability level of the hazard. In addition
to the above three safety precaution levels, CAUTION without the safety alert
symbol ( ) and NOTICE are used to give safety usage instructions to the
user.
Before using the machine, be sure to read and understand all the associated
safety precautions set forth in the manual.
Hazard levels are classified as follows:
DANGER
If you cannot avoid the incident in question, a critical
situation in which either critical injury or death is very
likely to result.
This symbol is used for the incident in which the injury
is critical and there is high probability of occurrence.
WARNING
If you cannot avoid the incident in question, a serious
situation in which either critical injury or death may
result.
This symbol is used for the incident in which the injury
is serious but there is not high probability of occurrence.
CAUTION
If you cannot avoid the incident in question, a medium
or slight injury may result.
This symbol is used for the incident in which the injury
is slight and there is not high probability of occurrence.
CAUTION If you cannot avoid the incident in question, an accident
of physical damage may be caused.
NOTICE Indicates the safe way of using the machine as well as
precautions to avoid accidents resulting damage to
property.
Sample
Safety label
Safety labels are affixed to the hazardous sections of the machine. Before
using the machine, verify the label positions and thoroughly understand the
precautions and warning indicated by the safety labels.
Label Hazard Level Meaning of Label
Rotary Blade
Label
WARNING WARNING
It is possible that your hands and
fingers may be cut by the rotating
blade.
Observe the following precautions
for at least 15 seconds until the
spindle comes to a complete stop:
- Do not place your hands or fingers
near the blade or flange.
- Ensure that the waterproof cover is
kept closed.
Driving Section
Label
CAUTION CAUTION
It is possible that yours hands and
fingers may be caught and injured by
the driving section.
While the power is ON, ensure that
the cover is kept closed.
Electrical Shock
Hazard Label WARNING
Use care to avoid possible electrical
shock hazard.
General Label
WARNING
General caution/warning/danger
label.
Laser Beam Label
WARNING WARNING
The DAC552 has sections where
laser beam is used. It is possible that
you will lose your eyesight if you
see a laser beam directly.
Do not disassemble the part where
laser beam is used.
Sample
Intro-1
INTRODUCTION
About this manual
This Installation Manual describes the installation and adjustment procedures
of Automatic Dicing/Cutting Saws 5*2 Series Models DAD522, DAC552 and
DAD562.
To ensure safety
To ensure safety, be sure to thoroughly read and understand the contents of this
manual before installing and adjusting the machine.
Note that this manual is based on the software of version 7.00 and newer.
When installing or adjusting the machine, be sure to follow the procedures set
forth in this manual.
Be sure that the machine is installed and adjusted by a qualified person who
has completed DISCO's education curriculum (hereafter referred to as the
maintenance personnel).
Definition of a manager and an operator
This manual defines a manager and an operator as follows:
Category Applicable
Personnel Job
Manager Management
representative The person who is responsible for overall
management of machines and operators.
Maintenance
personnel The qualified person who received DISCO
machine maintenance training.
Operator Data maintenance
personnel The qualified person who is responsible for
management of software data of the machine.
Operator The person who operates the machine to
process workpieces.
Sample
Intro-2
Documentation for this machine
The following five written manuals are provided for this machine.
This manual is the Installation Manual indicated by the arrow.
Manual Who should read Contents
Installation
Manual Maintenance
personnel Operational procedures for
machine installation and
adjustment
Operation Manual Operator Operational procedures to be
performed by operators
Data Maintenance
Manual Data maintenance
personnel Screen contents for data entry and
data entry procedures
Maintenance
Manual Maintenance
personnel Servicing, inspection and
adjustment procedures to be
performed by customers
Technical
Reference Maintenance
personnel Machine specifications,
circuit diagrams, illustrations and
part lists
Unit notation
International System of Unit is adopted to express any unit. The values in the
parenthesis are reference data. Also, all the pressure values are expressed in
gauge pressure.
Sample
Intro-3
Section diagram
The diagram and table below show names and functions of each section.
Cutting section
Operating control
section
Name Function
Cutting Section Cuts workpieces.
Operating Control
Section Keys on the operation panel are used for data entries
and operations.
Also, the monitor displays operation-related
information in accordance with operation panel
manipulation. On the DAD522 and DAD562, it also
displays microscope images. (Camera is an optional
accessory for the DAC552.)
Sample
Intro-4
External view
The diagram and the table below show the external view, names and functions
of main constituents.
Pilot lamp [Optional accessory]
Waterproof cover
Microscope
Spindle coolant water
flow rate sensor
[Optional accessory]
Wheel coolant water flowmeter
Monitor
EMO switch
Direct light intensity
adjustment dial
Power switch
Maintenance
switch
Floppy disk drive
[Optional accessory]
POWER lamp
Vacuum gauge
Oblique light intensity
adjustment dial
[Optional accessory]
Operation panel
Slide cover
Name Function
Operation panel Consists of operation control keys.
Waterproof cover Prevents water from splashing around during spindle
rotation and functions as a safety device.
Slide cover Prevents water from splashing around during spindle
rotation and functions as a safety device.
Vacuum gauge Indicates the chuck table vacuum pressure to attract the
workpiece to the chuck table.
Flowmeter Indicates the flow rate of the wheel coolant water.
Floppy disk drive Functions as an external storage device.
[Optional accessory]
Pilot lamp Indicates the machine operating status with the blue, green
and yellow lamps. If an error occurs, the red lamp flashes on
and off. [Optional accessory]
Monitor Displays operating information and microscope images.
POWER lamp Lights while the power is ON.
POWER switch Used to turn ON and OFF the machine by inserting and
rotating the key.
Maintenance switch Used by the maintenance personnel.
Direct light intensity
adjustment dial Adjusts the microscope image light intensity for direct
lighting.
Oblique light intensity
adjustment dial Adjusts the microscope image light intensity for oblique
lighting. [Optional accessory]
EMO switch Functions as the emergency stop switch. When pressed,
shuts off the electrical power supply.
Microscope Used to view workpieces for alignment or other purposes.
Sample
Intro-5
Axis arrangement diagram [DAD522]
The diagram and the table below show axis arrangement, names and functions
of each axis for the DAD522.
X-axis
Spindle shaft
Y-axis
Z-axis
θ-axis
Main body frame
Front
Name Function
X-axis Moves the chuck table to the right and the left.
Y-axis Moves the spindle shaft and the microscope
forward and backward.
Z-axis Moves the spindle up and down.
θ-axis Rotates the chuck table.
Spindle Shaft Section Rotates a blade at a high speed.
Main Body Frame Supports the machine main body.
Sample
Intro-6
Axis arrangement diagram [DAC552]
The diagram and the table below show axis arrangement, names and functions
of each axis for the DAC552.
X-axis
Spindle shaft
Y-axis
Z-axis
Main body frame
Front
Name Function
X-axis Moves the chuck table to the right and the left.
Y-axis Moves the spindle shaft and the microscope
forward and backward.
Z-axis Moves the spindle up and down.
Spindle Shaft Section Rotates a blade at a high speed.
Main Body Frame Supports the machine main body.
Sample
Dieses Handbuch passt für folgende Modelle
2
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