GRIPPING POWER EPS200 Bedienungsanleitung

EPS200

Electrostatic Chuck DC Power Supply

Users Manual

http://www.GrippingPower.com

G r i p p i n g P o w e r , I n c.

11930 44th St. North, Suite B

Clearwater, FL 33762

(727) 572

-4100

Gripping Power, Inc

2 EPS200 User s Manual

Products newly manufactured by

ipping Power, Inc.

(GPI), Clearwater, Florida are

warranted against defects in materials and workmanship for a period of one year from the

original date of delivery.

This warranty does not cover damage from, or failure attributable to, acts of nature, ab

use,

misuse, improper usage, faulty installation, or any modifications not expressly authorized in

writing by GPI.

Within the warranty period, GPI will, at our option, repair or replace the item determined to be

defective within the terms of this warranty

. After the warranty period, there will be charges

rendered for any repairs, adjustments or upgrades made to the product by GPI, including, but

not limited to, charges for shipping, insurance, parts and labor.

Factory reconditioned and refurbished GPI eq

uipment is warranted against defects in materials

and workmanship for a period of 90 days from the date of delivery.

GPI is not responsible or liable for indirect, special, or consequential damages arising out of, or

in connection with, the use or perfor

mance of the product or other damages with respect to loss

of property, loss of revenues or profit, or costs of removal, installation or reinstallation.

Except as provided herein, GPI makes no express warranties, and any implied warranty,

including warra

nties of merchantability or fitness for a particular purpose, is limited to a period

of ninety days from the original date of delivery.

This warranty gives you specific legal rights. You may have additional rights that vary from

state to state.

cument G29303

01, Rev A (printed July 2005)

No part of this publication may be reproduced, stored in a retrieval system, or transmitted, in

any form or by any means without prior written permission of Gripping Power, Inc.

The information contained herein

is subject to change without notice.

http://www.GrippingPower.com

Gripping Power, Inc

3 EPS200 User s Manual

Table of Contents

INTRODUCTION

1.1.

Introduction

1.2.

Features

1.3.

Local Operation

1.4.

Remote Operation 5

1.5.

Programmability

INS

TALLATION

2.1.

Installation

2.2.

AC Power Requirements

2.3.

232 Serial Interface

2.4.

Digital/Analog Remote Interface

2.5.

High Voltage Connections

2.6.

Load Connections

OPERATION

3.1.

Operation

3.2.

The Front Panel

3.3.

Setting the Operating Mode

3.4.

Local Operating Mode

3.5.

Digital R

emote Mode 9

3.6.

Analog Remote Mode

3.7.

232 Remote Mode

3.8.

232 Command Lockout

3.9.

DeviceNet Mode

PROGRAM AND CONTROL COMMANDS

4.1.

Introduction

4.2.

High Voltage Control Commands

4.3.

Status Information Commands

4.4.

T1, T2 and T3 Timer Commands

4.5.

Digital Output

Control

PROGRAMMING

5.1.

Introduction

5.2.

Program Specific Commands

5.3.

Special Program Commands

5.4.

Program Control Commands

5.5.

Entering Program Commands

Gripping Power, Inc

4 EPS200 User s Manual

TROUBLESHOOTING

6.1.

Introduction

6.2.

Overload Fault

6.3.

Alarm Output

6.4.

No Output

6.5.

Component Replacement

APPENDIX A

Programming Examples

APPENDIX B

Technical Specifications

APPENDIX C

232 Connector Specification

APPENDIX D

Remote Control Interface Specifications

APPENDIX E

Ordering and Service Information

Gripping Power, Inc

5 EPS200 User s Manual

INTRODUCTION

1.1.

Introduction.

e Gripping Power, Inc. EPS200 high voltage DC power supply was

designed to drive semiconductor wafer electrostatic chucks in all process conditions, with

years of reliable performance.

1.2.

Features.

The EPS200 is microprocessor based and is fully programma

ble. One local

and three remote operating modes are provided. The unit is available with either 1kV or

2.5kV true floating, bipolar outputs. The high voltage output is continuously variable, with

output load voltage tracking and user defined current limi

ting. A back

lit LCD displays

voltage, current and status information.

1.3.

Local Operation.

The local operation mode provides the user the means of testing

programs and diagnosing hardware problems, via the EPS200 front panel, without the use of

a host

computer interface.

1.4.

Remote Operation.

Serial RS

232, digital, and analog remote control modes are

provided. All electrical interfaces are isolated from the high

voltage output and are ground

referenced. The high

voltage can be turned on and off via a s

ingle digital bit input. An

analog input is provided for remote high voltage control. Two digital output signals are

provided to minimize interface problems when replacing mechanical chuck mechanisms

with electrostatic chucks. A digital alarm output sign

al is also provided.

1.5.

Programmability.

The EPS200 can store up to ten user defined programs that control

the chuck and dechucking operation. Each program can be up to 32 steps long. The unit

may be directed to execute any one of the ten stored programs,

giving the user maximum

flexibility in both the setup phase, when testing chuck reliability, and in production

operation. All ten of the EPS200 programs are stored in nonvolatile RAM and can be

downloaded to a host computer. The EPS200 programming comman

d set provides the user

optimum flexibility for developing sophisticated chucking algorithms for multiple process

conditions.

Gripping Power, Inc

6 EPS200 User s Manual

INSTALLATION

2.1.

Installation.

The EPS200 is designed for installation in a standard 9.5 inch equipment

half

rack or it can be use

as a desktop instrument.

Figure 2.1

EPS200 Rear Panel

2.2.

AC Power Requirements.

Power is supplied to the unit via the IEC 320 receptacle,

located on the real panel. The AC power cord provided with the EPS 200 is for North

Amer

ican usage at 120 VAC, 60 Hz. The unit can operate from 90 to 264 VAC at a line

frequency of 47 to 63 Hz and is internally fused for safety. Contact the factory for power

cords and accessories for installation and operation in other areas of the world.

2.3.

232 Serial Interface.

The RS

232 serial interface is a 9

pin, D

style subminiature

female connector, located on the rear panel. The unit is configured as DCE without modem

control lines such as CTS, RTS or DTR. The host terminal or computer should be

configured for 9600 baud, no parity, eight data bits, one stop bit. When uploading ASCII

text programming files, use a 100 millisecond line

line delay. Additional information

detailing the communication specifications and serial interface is availabl

e in Appendix C.

2.4.

Digital/Analog Remote Interface.

The digital and analo

g interface is a 15

pin, D

style subminiature female connector, located on the rear panel. The remote high voltage go

on, analog setpoint, clamp is up, clamp is down, and alarm outputs are contained in this

connector. The connector definition is shown in

Appendix D.

2.5.

High Voltage Connections.

The power supply high voltage output is via the two BNC

connectors located at rear of the unit. The outer ring of these connectors is electrically

isolated from ground and is not referenced to the high

voltage o

utput. Connections to the

outer conductors can be terminated at a common ground point, or left floating without

affecting the performance of the EPS200.

WARNING:

High

voltages are produced by the EPS200.

Installation and operation of the unit should be performed

only by qualified and authorized personnel.

Gripping Power, Inc

7 EPS200 User s Manual

2.6.

Load Connections

. For proper operation and continued reliability, the high voltage

outputs of the EP

S200 must be electrically isolated from extremely high DC bias voltages,

high power RF fields or other sources of potential damage.

It is highly recommended that only accessories manufactured, or specifically authorized, by

Gripping Power, Inc. should b

e used with the EPS200 when developing an electrostatic

chuck application for plasma processes. Gripping Power, Inc. can provide interconnect

cables, RF decouplers and other accessories to meet any specific need.

A typical electrostatic chuck applicatio

n for a semiconductor plasma process is shown

below. All of the components are required for proper chucking operation and protection of

the EPS200 power supply.

Figure 2.2

Typical Installa

tion

Gripping Power, Inc

8 EPS200 User s Manual

OPERATION

3.1.

Operation.

The EPS200 is specifically designed to operate electrostatic chucks and it

provides many features that are not normally associated with a general purpose, high

voltage power supply.

Figure 3

EPS200 Front Panel

3.2.

The Front Panel.

The EPS200 front panel user interface is simple to operate. The

operation of the various switches is explained in the following sections. The four line,

backlit LCD panel provides program and status information.

Figure 3.2

LCD Status Display

3.3.

Setting the Operating Mode.

The EPS200 has a local operating mode and four

remote operating modes. The local mode can be used for testing and developing new

programs. The remote mode, which disables the

front panel setpoint adjustment, is

normally used in a production process where repeatability and automated processing is

desired.

3.4.

Local Operating Mode.

The local mode is entered by setting the LOCAL/REMOTE

switch on the front panel to the LOCAL positi

on. The mode indicator will display Local

when the unit is in local mode.

If the HV ON switch is in the ON position, when the mode is set to local, the HV ON fault

indicator will blink. The fault will not clear until the switch is set to the off posit

ion. When

the HV ON switch is depressed, and all pending faults have been cleared, the power supply

executes the currently active program, without a remote control interface required.

Gripping Power, Inc

9 EPS200 User s Manual

The high voltage output voltage setpoint can be changed via the setpoi

nt adjust switch on

the front panel. Changes made to the high voltage setpoint in the local mode will alter the

remote mode high voltage setpoint as well. No provision is provided in the local mode to

adjust the overcurrent trip point, or change the acti

ve program. All other parameters must

be adjusted via the RS

232 remote mode.

3.5.

Digital Remote Mode.

The digital remote operating mode is entered by setting the

LOCAL/REMOTE switch on the front panel to the REMOTE position. Press the mode

select switch

until 'DigRem' is displayed in the mode indicator area of the status display.

Note that the HV ON switch is ignored when in digital remote mode.

The default output voltage used during the HV ON cycle is displayed and may not be

changed while in this oper

ating mode. The HV ON command is given in this mode via the

pin control connector in the rear of the unit. Refer to Appendix D for digital remote

mode interface information.

When the HV ON signal is activated, the power supply executes the currently

selected

program. As with any other program, the execution of the program may change the output

voltage from the stored value. If the previously stored high voltage setting is desired, the

selected program should not contain a SV commands, which will alter

the stored output

voltage setpoint.

3.6.

Analog Remote Mode. The analog remote operating mode is entered by setting the

LOCAL/REMOTE switch on the front panel to the REMOTE position. Press the mode

select switch until 'AlgRem' is displayed in the mode ind

icator area of the status display.

Note that the HV ON switch is ignored when in analog remote mode.

The high voltage output setpoint used during the HV ON cycle is obtained from the 15

control connector, on the rear of the unit. The analog voltage

is converted to a setpoint and

displayed on the status display. The high voltage output will not track the analog input.

The analog input is sampled only when the HV ON command is given. The HV ON

command is given in this mode via the 15

pin control conn

ector in the rear of the unit via

the digital remote interface. Refer to Appendix D for interface information.

When the HV ON signal is activated, the power supply executes the currently selected

program. As with any other program, the execution of the

program may change the output

voltage from the stored value. If the exclusive use of the analog input voltage setting is

desired, the selected program should not contain a SV commands, which will alter the stored

output voltage setpoint.

3.7.

232 Remote Mod

The RS

232 remote operating mode is entered by setting the

LOCAL/REMOTE switch on the front panel to the REMOTE position. Press the mode

select switch until 'RS

-232 is displayed in the mode indicator area of the status display.

Note that the HV ON s

witch is ignored when in RS

232 remote mode.

he host computer must be capable of supporting a 9600 baud DTE RS

232 device and have

the proper software installed, to communicate with the EPS200 via the RS

232 serial port.

Refer to Appendix C for RS

232 i

nterface specifications.

A versatile command protocol has been developed for the EPS200 with the intent to make it a

flexible production or development instrument designed to fit any need. Refer to sections four

Gripping Power, Inc

EPS200 User s Manual

and five for additional information on the

EPS200 command set and program development.

There are two immediate command formats used with the EPS200.

Immediate mode command only format:

> a [sp] cc [cr]

Immediate mode command with parameters format:

> a [sp] cc [sp] dddd [cr]

All messages sent to

the EPS200 must start with an ASCII '>' (hex 3E) or the following fields

will be ignored. The following one byte code [a] is the unique address of the target unit. This

code is a hex

ASCII value ranging from 0

9 and A

F. The EPS200 currently only suppor

address zero (hex 32).

ASCII space characters [sp] (hex 32) act as delimiters and must be inserted as shown between

fields. No space is permitted after the attention character and the address field. The following

field [cc] is the command field, whic

h contains a two byte ASCII character from the EPS200

instruction set.

The data field, if it is used, may contain up to four ASCII bytes. For example, if the desired

target voltage is 850 volts, then an ASCII '850' should be in the data field.

After t

he complete message has been sent, a carriage return (hex 0D) must be sent to unit to

indicate the end of the message. If the last byte after the command message is not a carriage

return, of the command does not pass syntax checks, the data will be ignore

d and a ?

character will be returned. Multiple commands per line are not allowed.

Except where indicated, the EPS200 buffers the incoming data, tests for a valid command,

executes or stores it. The acknowledge message will be returned to the host only

after the

command has been processed. The unit will not respond to further polls until the previously

received command has been processed and acknowledged.

3.8.

232 Command Lockout.

If the EPS200 is running a program the unit will only

respond to a subs

et of commands, which provide limited control and status information only.

This feature prevents conflicting or improper settings from being received by the unit.

Abort the current program

Measure volts at terminals

Measure current at termina

High voltage off/stop program

Read timer 1 (user time delay)

Read timer 2 (HV on time)

Read timer 3 (OEM odometer)

Return compliance value

Return overcurrent trip point

Report maximum voltage

Return program number/step/ru

stop

Return hardware status

Return voltage setpoint

HELP command

Table 3.1

Valid RS

232 Commands When a Program is Executing

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