Matsusada Precision ECA Series Bedienungsanleitung

Instruction Manual

F-RA-001-3R3

MODEL ECAseries

ECA-1B6ｘ2

ECA-1B30ｘ２

ECA-3B2x2

ECA-3B10x2

ECA-5B1x2

ECA-5B6x2

ECA-10B1x2

ECA-10B0.5

ECA-10B3

B/N: 025.9.027 *025.9.027*Rev. 3.0

Note

◆No part of this publication may be reproduced, stored in a retrieval system, or transmitted,

in any form, or by any means, mechanical, electronic, photocopying, recording, or

otherwise, without the prior written permission of Matsusada Precision.

◆

No patent liability is assumed with respect to the use of the information contained herein.

Moreover, because Matsusada Precision is constantly striving to improve its high-quality

products, the information contained in this manual is subject to change without notice.

Every precaution has been taken in the preparation of this manual. Nevertheless,

Matsusada Precision assumes no responsibility for errors or omissions.

Neither is any liability assumed for damages resulting from the use of the information

contained in this publication.

Trademarks

◆Company names and product names in this document are the trademarks or registered

trademarks of their respective companies.

Warranty

We will repair this product free of charge if it has malfunctioned under normal usage

conditions within one year of delivery. However, repairs will be charged in the following

cases, even if during the warranty period.

1. Failures and damages that occurred due to inappropriate handling

2. Inappropriate repairs, adjustments, or modifications were made.

3. Failures and damages due to fire, natural disaster, abnormal voltage, etc.

This warranty is valid only in Japan.

Matsusada Precision

ECA series

For Safe Use of the Product

◆Introduction

The product generates high-voltage and high-energy.

Therefore, wrongly handling or operating the product may result in death or serious injury and maybe

property damage as well. In order to use the product safely, read the instruction manual thoroughly before

use to understand how to use and operate it properly.

Please note that we will not be held responsible for any damage or loss caused by not following the

warnings, cautions, and procedures described in the manual.

Keep the manual with you so that you can read it whenever you want.

◆Symbols

Symbols are used in the manual and product, which indicate precautions to be observed for safe use.

Understand these symbols first and then read the manual thoroughly.

Some symbols below are not used in products.

Indicates a potentially hazardous situation, which, if not avoided, may

result in serious injury or death.

Indicates a potentially hazardous situation, which, if not avoided, may

result in minor or moderate injury or in property damage.

Indicates danger/warning/caution. Refer to

the instruction manual when this symbol

appears on the unit.

Frame or chassis terminal

Indicates the possible danger of electric

shock under specific conditions, which

may result in serious injury or death.

Ground terminal

High Temperature Caution:

Indicates the possible danger of injury by

high temperature under specific

conditions.

Power ON

Indicates general prohibitions, including

warnings.

Power OFF

Indicates what must be followed.

Standby

Protective earth terminal (ground terminal

for preventing electric shock)

Bistable push button switch

Indicates the possible danger of death if

you drink it and burns or blindness if it

attaches.

Bistable push button switch

OFF

Indicates the possible danger of exposure

to radiation.

Alternative Current

Matsusada Precision

ECA series

Understand the risks.

The Product generates high-voltage and high-energy.

The product is designed for electrical engineers or the equivalents who install, wire, and operate it.

Read the instruction manual thoroughly before use and familiarize yourself with the proper use and

danger of the product.

Make sure to allow only specific people to handle the product.

Make sure to allow only the following people to handle the product:

1. who are electrical engineers or the equivalents and have already familiarized themselves with the

proper use and danger of the product, or

2. who are electrical engineers or the equivalents and have already been trained by the

above-mentioned people, or

3. who work under the supervision of the above-mentioned people.

If people other than those listed above install, wire, or operate the product, it may cause electric

shock, burnout, or injury.

Do not open or remove the case or panel of the product.

Do not disassemble, repair, or modify the product by yourself. High-voltage is applied to the inside of it.

Otherwise, it may cause electric shock, fire, or malfunction.

Moreover, if you do it, the safety and functions are not covered with the warranty.

The product does not suit to install and use in places where children may be present.

The product is designed to be installed in places such as factories or laboratories. Do not install and use it

where children may be present.

Make sure to ground it.

When the product has a protection ground terminal or GND terminal, make sure to ground it.

When theAC line input of it is an inlet type, connect the attached power cable or a power cable suitable for

your area to an outlet with the ground. Otherwise, it may result in electric shock or fire.

Regarding power cable

When a power cable is enclosed or attached to the product, do not use it for other products.

When no power cable is enclosed with the product, prepare the power cable suitable for the usage

environment and area by yourself.

Regarding the connection of power cable

Electrical engineers or the equivalents who have already been familiarized with the proper use and danger

of the product should connect the power cable to the AC input by referring to the instruction manual.

Regarding products that have acquired the safety standard, check the page describing the over-voltage

categories too.

Do not process or damage power cables

It may result in electric shock or fire.

Regarding the input voltage

Check the page describing the input terminals and input voltage in the instruction manual.

Do not provide any voltage out of the specifications.

iii

Matsusada Precision

ECA series

Regarding the fuse

The product builds in a protective fuse. In the case where a fuse holder is arranged outside of the product,

you can replace it by yourself. Refer to the instruction manual to replace it.

In the case where a fuse holder is not arranged outside of the product, you cannot replace it by yourself.

In this case, do not open the case or panel of the product and contact us.

The product is designed for indoor use.

Use the product indoors only, not outdoors. Even indoors, do not use it if there is a possibility of water

leakage, flooding, or snow covering.

Regarding operating temperature and humidity

Use the product within the range of the specifications describing in the instruction manual.

Do not use it in a place where the ambient temperature exceeds the specified range or a closed place.

Do not install the product in places where condensation may occur.

Otherwise, insulation deteriorates and it may cause electric shock, fire, or malfunction.

Do not place anything on top of the product.

Otherwise, they may fall or tumble from it.

Do not put anything into the product.

Do not put foreign objects such as metal or liquid into the product through the air inlets, air outlets, or other

openings. Otherwise, it may result in electric shock, fire, or malfunction.

Operate the product with the right hand.

Use only your right hand to operate the product and keep your left hand away from it, which can reduce

the risk of electric current flowing through the left hand to the vital organs of the body in the event of an

electric shock.

Do not touch the wiring/load connected to the output and any terminals/connectors during the

operation or just after turning output off.

Very high-voltage is on the terminals and connectors during the operation and even just after the output is

turned off. Touching them may result in serious injury or death by electric shock.

The terminals here mean all terminals like input and output terminals and terminals for communications

and remote controls.

Turn off the product before touching the wiring/load connected to the product and any

terminals/connectors on the product and cut it off from the AC input.

Before touching the terminals/connectors and wiring/load, turn off the product and unplug the AC input

cable from the outlet or turn off the AC input breaker. Then, check there is no voltage remained using a

tester.

Since the output and sense terminals are connected to condensers in it, there is high-voltage remained on

them even just after it is turned off.

In order to avoid electric shock, ground the terminals to discharge using a short-circuit grounding

apparatus and check the voltage again.

The terminals here mean all terminals like input and output terminals and terminals for communications

and remote controls.

Matsusada Precision

ECA series

Level the product out to use for good heat dissipation.

Do not install the product upside down or sideways. If not, the inner heat dissipation will be insufficient.

It may result in smoke or fire due to components deterioration.

Do not install the product in a place where cold air directly blows to it.

It may result in electric leakage or burnout due to condensation.

Do not install the product in a place where it is exposed to corrosive gases or liquids.

It may result in smoke or burnout due to components deterioration.

Do not install the product in a dusty place.

Accumulating dust in the air inlet will make hard to cool it down it, it may result in malfunction.

In that case, remove dust immediately.

Do not block the air inlet and outlet.

Secure 30 cm space at least around the openings.

If they are blocked, the product cannot show the rated performance due to the internal temperature

increase. Moreover, components deteriorate and it may result in smoke or fire.

Remove wiring to and from the product when work like welding near it is done.

Do not wipe the equipment with a dust cloth wet with chemicals (thinner or the like) or water.

Otherwise, it may result in an electric shock, electric leakage, or burnout due to water getting inside.

Regarding fan replacement

When products equip a fan, it has a lifetime. It will be worn out and deteriorated with the time passed and

its operation may become unstable. Also, its lifetime greatly varies depending on the usage environment

such as temperature, humidity, dust. It requires to be replaced at regular intervals to extend the lifetime.

For the replacement, contact us.

(It requires a replacement charge separately. Do not replace it by yourself, as there is a risk of electric

shock.)

Matsusada Precision

ECA series

Table of Contents

Page

For Safe Use of the Product············································································································i

Table of Contents·························································································································v

1 Introduction······························································································································1

Introduction ························································································································11-1 Features····························································································································11-2 Lineup·······························································································································11-3 Specifications ·····················································································································21-4 Unpacking··························································································································21-5 Initial inspection···················································································································31-6 Installation··························································································································31-7

1-7-1 Installation conditions ·····································································································3

1-7-2 AC input cord connection·································································································4

1-7-3 GROUND connection······································································································4

1-7-4 Load connection ············································································································6

1-7-5 Troubleshooting·············································································································6

2 External View ···························································································································7

ECA-10B0.5/3·····················································································································72-1 ECA-1B/3B/5B/10B1 ············································································································82-2

3 Operation·······························································································································10

Overview ·························································································································103-1 How to Operate·················································································································103-2 Other Function··················································································································103-3

3-3-1 Protections ·················································································································10

3-3-2 Control connector: D-Sub 25-pin·····················································································11

3-3-3 Remote switch ON/OFF ································································································11

3-3-4 Interlock·····················································································································12

3-3-5 External voltage control·································································································12

3-3-6 Output current monitor ··································································································12

3-3-7 Output voltage monitor··································································································12

3-3-8 Power ON status signal·································································································13

3-3-9 Overcurrent status signal·······························································································13

3-3-10 Local/Remote status signal ··························································································13

3-3-11 Forced grounding ·······································································································14

4 Option···································································································································15

Output relay (-LRy) ············································································································154-1 RF filter 13.56MHz (-LRf(13.56M)) ························································································154-2 RF filter 500kHz (-LRf(500k)) ·······························································································154-3 Polarity change (-LPo)········································································································164-4 Output voltage limiter (-LVl)··································································································164-5

1 Introduction

1 ECA series

Matsusada Precision

1 Introduction

Introduction

1-1

Thank you very much for your purchase of our HIGH VOLTAGE POWER SUPPLY unit.

We have done our best for the quality control of the unit.

Please handle the unit properly according to this instruction manual so that you can use the full

performance of the unit safely for long.

We have carefully prepared this instruction manual, but if you find any doubtful or unclear points or

any omission, please contact us immediately.

Features1-2

・Designed for electrostatic chuck application

・Combining 2 channels* of output

・Available in unipolar and bipolar systems

・Built-in RF filter (option)

・No relay, high stability, long service life

*1 channel for Model: ECA-10B0.5/3

Lineup1-3

Model

Output voltage

(by channel)

Output current

(by channel)

Channel

Input current

(at 115 Vac) MAX

ECA-1B6x2

-1kV to +1kV

6mA

2ch

ECA-1B30x2

30mA

ECA-3B2x2

-3kV to +3kV

2mA

ECA-3B10x2

10mA

ECA-5B1x2

-5kV to +5kV

1mA

ECA-5B6x2

6mA

ECA-10B1x2

-10kV to+10kV

1mA

ECA-10B0.5

-10kV to +10kV

0.5mA

1ch

ECA-10B3

3mA

1 Introduction

2 ECA series

Matsusada Precision

Specifications1-4

Model

ECA-

1B6x2

1B30x2

3B2x2

3B10x2

5B1x2

5B6x2

10B1x2

10B0.5

10B3

Input voltage

100 to 240Vac 50/60Hz single phase

Chuck ON/OFF

Local: HV switch on the front panel ON/OFF (simultaneously for

2chanels)

Remote: Remote switch ON/OFF（separately for each channel）

Output voltage control with the potentiometer on the front panel

(separately for each channel）

Output voltage control with the external control voltage

(separately for each channel）

Ac input voltage ON/OFF (simultaneously for all channels)

1ch

Output voltage

control

Local: 10-turn potentiometer on the front panel (separately for

each channel）

Remote: External control voltage source (separately for each

channel）

Vcon-in = -10V to +10V (Input impedance 10kΩor more)

The toggle switch on the front panel can change

Remote/Local control simultaneously for both channels.

1ch

Ripple

0.1rms

Output display

3-digit digital meter for each channel(Switching display of voltage or current)

Output monitor

Output voltage: -10V to +10V（separately for each channel）

Output current: -10V to +10V（separately for each channel）

Output impedance: 1kΩ

1ch

Protections

Overcurrent protection: dropping characteristic of output voltage in high voltage

Overvoltage protection: limited at 110% of rated voltage

Output short circuit

Protection against arc discharge

Interlock

Fuse: Normal break, 3A、φ6.4x30mm

Forced

discharge

Output is forcedly grounded with the external signal.

(by contact shortcut separately for each channel)

1ch

Temperature

Humidity

Operating temperature: 0℃to +40℃, Storage humidity: -20℃to +60℃, Humidity: 20%

to 80% (no condensation)

Dimension

HDW: mm

89x550x483

89x610x483

133x550x483

Weight

Approx. 10kg

Approx.15kg

Unpacking1-5

When unpacking, check the following accessories are enclosed with the unit.

If the accessories are different, missing, or broken, contact us immediately.

□

Instruction manual

AC input cord

Output cable

1 pc

2 pcs (or 1 pc for ECA-10B0.5/3)

□

D-Sub connector

1 pc

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