MICRO-EPSILON capaNCDT 6200 Bedienungsanleitung
CS005
CS02
CSH02
CSH02FL
CS05
CSE05
CSH05
CSH05FL
CS08
CS1
CSE1
CSH1
CSH1FL
CS1HP
CSH1.2
CSH1.2FL
CSH2FL
CSH3FL
CS2
CSH2
CSE2
CS3
CS5
CS10
CSG0.50
CSG1.00
Operating Instructions
capaNCDT 6200
Non-contact Capacitive Displacement Measuring
MICRO-EPSILON
MESSTECHNIK
GmbH & Co. KG
Königbacher Straße 15
94496 Ortenburg / Germany
Tel. +49 (0) 8542 / 168-0
Fax +49 (0) 8542 / 168-90
e-mail [email protected]
www.micro-epsilon.com
capaNCDT 6200
Contents
1. Safety ........................................................................................................................................ 7
1.1 Symbols Used ................................................................................................................................................. 7
1.2 Warnings.......................................................................................................................................................... 7
1.3 Notes on CE Marking ...................................................................................................................................... 8
1.4 Intended Use ................................................................................................................................................... 9
1.5 Proper Environment......................................................................................................................................... 9
2. Functional Principle, Technical Data .................................................................................... 10
2.1 Measuring Principle ....................................................................................................................................... 10
2.2 Structure ........................................................................................................................................................ 11
2.2.1 Sensors......................................................................................................................................... 12
2.2.2 Sensor Cable................................................................................................................................ 14
2.2.3 Controller ...................................................................................................................................... 15
2.3 Technical Data ............................................................................................................................................... 17
2.4 Options .......................................................................................................................................................... 18
3. Delivery .................................................................................................................................. 20
3.1 Unpacking, Included in Delivery.................................................................................................................... 20
3.2 Storage .......................................................................................................................................................... 20
4. Installation and Assembly...................................................................................................... 21
4.1 Precautionary Measures................................................................................................................................ 21
4.2 Sensor............................................................................................................................................................ 21
4.2.1 Radial Point Clamping with Grub Screw, Cylindric Sensors ....................................................... 21
4.2.2 Circumferential Clamping, Cylindric Sensors.............................................................................. 22
4.2.3 Flat Sensors.................................................................................................................................. 22
4.2.4 Dimensional Drawings Sensors ................................................................................................... 23
4.3 Sensor Cable ................................................................................................................................................. 29
4.4 Controller ....................................................................................................................................................... 32
4.4.1 Basic Unit, Demodulator Module ................................................................................................. 32
4.4.2 Housing Cover.............................................................................................................................. 33
4.5 Insert Demodulator Module........................................................................................................................... 34
4.6 Ground Connection, Earthing ....................................................................................................................... 37
capaNCDT 6200
4.7 Electrical Connections................................................................................................................................... 38
4.7.1 Connectivity Options ................................................................................................................... 38
4.7.2 Pin Assignment Supply, Trigger................................................................................................... 39
4.7.3 Pin Assignment Analog Output.................................................................................................... 39
4.7.4 Pin Assignment Synchronization ................................................................................................. 40
5. Operation ................................................................................................................................ 42
5.1 Starting Up..................................................................................................................................................... 42
5.2 Operating or Display Elements ..................................................................................................................... 42
5.2.1 LED‘s ............................................................................................................................................ 42
5.2.2 Poti................................................................................................................................................ 43
5.2.3 Change Ethernet / EtherCAT........................................................................................................ 44
5.3 Changing Limit Frequency ............................................................................................................................ 44
5.4 Triggering....................................................................................................................................................... 45
5.5 Measurement Averaging ............................................................................................................................... 47
5.5.1 Introduction .................................................................................................................................. 47
5.5.2 Moving Average............................................................................................................................ 47
5.5.3 Arithmetic Average Value ............................................................................................................. 48
5.5.4 Median.......................................................................................................................................... 48
5.5.5 Dynamic Noise Rejection ............................................................................................................. 48
6. Ethernet Interface................................................................................................................... 49
6.1 Hardware, Interface ....................................................................................................................................... 49
6.2 Data Format of Measuring Values ................................................................................................................. 53
6.3 Settings .......................................................................................................................................................... 54
6.4 Commands .................................................................................................................................................... 57
6.4.1 Data Rate (STI) ............................................................................................................................. 57
6.4.2 Trigger Mode (TRG)...................................................................................................................... 59
6.4.3 Get Measured Data (GMD)........................................................................................................... 59
6.4.4 Filter, Averaging Type (AVT) ......................................................................................................... 60
6.4.5 Filter, Averaging Number (AVN) ................................................................................................... 60
6.4.6 Channel Status (CHS) .................................................................................................................. 61
6.4.7 Mode of Linearization (LIN) .......................................................................................................... 61
6.4.8 Set Linearization Point (SLP)........................................................................................................ 62
6.4.9 Get Linearization Point (GLP)....................................................................................................... 63
6.4.10 Status (STS).................................................................................................................................. 63
6.4.11 Version (VER) ............................................................................................................................... 64
6.4.12 Set Mathematic Function (SMF)................................................................................................... 64
6.4.13 Get Mathematic Function (GMF).................................................................................................. 66
capaNCDT 6200
6.4.14 Clear Mathematic Function (CMF) ............................................................................................... 66
6.4.15 Ethernet Settings (IPS)................................................................................................................. 67
6.4.16 Change between Ethernet and EtherCAT (IFC = Interface) ....................................................... 67
6.4.17 Query Data Port (GDP)................................................................................................................. 68
6.4.18 Set Data Port (SDP)...................................................................................................................... 68
6.4.19 Access Channel Information (CHI)............................................................................................... 68
6.4.20 Access Controller Information (COI)............................................................................................ 69
6.4.21 Login for Web Interface (LGI)....................................................................................................... 69
6.4.22 Logout for Web Interface (LGO)................................................................................................... 69
6.4.23 Change Password (PWD)............................................................................................................. 70
6.4.24 Change Language for the Web Interface (LNG).......................................................................... 70
6.4.25 Write Measuring Range Information in Channel (MRA)............................................................... 70
6.4.26 Set Analog Filter (ALP) ................................................................................................................. 71
6.4.27 Default Messages ........................................................................................................................ 71
6.5 Operation Using Ethernet.............................................................................................................................. 72
6.5.1 Requirements ............................................................................................................................... 72
6.5.2 Access via Web Interface ............................................................................................................. 74
6.5.3 Measuring Ranges ....................................................................................................................... 76
6.5.4 Linearization ................................................................................................................................. 77
6.5.5 Math Functions............................................................................................................................. 79
6.5.6 Trigger Mode ................................................................................................................................ 79
6.5.7 Data Rate ...................................................................................................................................... 79
6.5.8 Filter, Averaging............................................................................................................................ 80
6.5.9 Analog Low Pass Filter................................................................................................................. 80
6.5.10 Digital Interfaces........................................................................................................................... 80
6.6 Firmware Update ........................................................................................................................................... 81
7. EtherCAT Interface ................................................................................................................. 82
7.1 Introduction.................................................................................................................................................... 82
7.2 Change Interface ........................................................................................................................................... 82
8. Measurement.......................................................................................................................... 83
9. Operation and Maintenance .................................................................................................. 84
10. Liability for Material Defects.................................................................................................. 85
11. Decommissioning, Disposal .................................................................................................. 85
capaNCDT 6200
Appendix................................................................................................................................................ 86
A 1 Accessories, Service.............................................................................................................. 86
A 1.1 Conversion Kit................................................................................................................................................ 86
A 1.3 PC6200-3/4 .................................................................................................................................................... 88
A 1.4 Optional Accessories..................................................................................................................................... 88
A 1.5 Service ........................................................................................................................................................... 91
A 2 Factory Setting ....................................................................................................................... 92
A 3 Tilt Angle Influence on the Capacitive Sensor ..................................................................... 93
A 4 Measurement on Narrow Targets .......................................................................................... 94
A 5 Measurements on Balls and Shafts ...................................................................................... 95
A 6 EtherCAT Documentation ...................................................................................................... 96
A 6.1 Preamble........................................................................................................................................................ 96
A 6.1.1 Structure of EtherCAT®-Frames .................................................................................................. 96
A 6.1.2 EtherCAT® Services..................................................................................................................... 97
A 6.1.3 Addressing and FMMUs............................................................................................................... 98
A 6.1.4 Sync Manager .............................................................................................................................. 98
A 6.1.5 EtherCAT State Machine .............................................................................................................. 99
A 6.1.6 CANopen over EtherCAT............................................................................................................ 100
A 6.1.7 Process Data PDO Mapping ...................................................................................................... 100
A 6.1.8 Service Data SDO Service.......................................................................................................... 101
A 6.2 CoE – Object Directory................................................................................................................................ 101
A 6.2.1 Communication Specific Standard Objects (CiA DS-301) ........................................................ 101
A 6.2.2 Manufacturer Specific Objects................................................................................................... 104
A 6.3 Measurement Data Format.......................................................................................................................... 107
A 6.4 EtherCAT Configuration with the Beckhoff TwinCAT©-Manager................................................................ 108
Page 7
Safety
capaNCDT 6200
1. Safety
System operation assumes knowledge of the operating instructions.
1.1 Symbols Used
The following symbols are used in these operating instructions:
Indicates a hazardous situation which, if not avoided, may result in minor or moder-
ate injury.
Indicates a situation that may result in property damage if not avoided.
Indicates a user action.
iIndicates tip for users.
1.2 Warnings
Disconnect the power supply before touching the sensor surface.
> Risk of injury
> Static discharge
Connect the power supply and the display/output device in accordance with the safety regulations for electri-
cal equipment.
> Risk of injury
> Damage to or destruction of the sensor and/or controller
Avoid shocks and impacts to the sensor and controller.
> Damage to or destruction of the sensor and/or controller
The supply voltage must not exceed the specified limits.
> Damage to or destruction of the sensor and/or controller
Page 8
Safety
capaNCDT 6200
Protect the sensor cable against damage
> Destruction of the sensor
> Failure of the measuring device
1.3 Notes on CE Marking
The following apply to the capaNCDT 6200:
- EU directive 2014/30/EU
- EU directive 2011/65/EU, “RoHS“ Category 9
Products which carry the CE mark satisfy the requirements of the EU directives cited and the European
harmonized standards (EN) listed therein. The EU Declaration of Conformity is available to the responsible
authorities according to EU Directive, article 10, at:
MICRO-EPSILON Messtechnik GmbH & Co. KG
Königbacher Straße 15
94496 Ortenburg / Germany
The measuring system is designed for use in industrial environments and meets the requirements.
Page 9
Safety
capaNCDT 6200
1.4 Intended Use
- The capaNCDT 6200 measuring system is designed for use in industrial areas. It is used for
displacement, distance, thickness and movement measurement
position measuring of parts or machine components
- The system must only be operated within the limits specified in the technical data, see Chap. 2.3.
The system must be used in such a way that no persons are endangered or machines and other mate-
rial goods are damaged in the event of malfunction or total failure of the system.
Take additional precautions for safety and damage prevention in case of safety-related applications.
1.5 Proper Environment
- Protection class: IP 40
- Operating temperature:
Sensor: -50 ... +200 °C (-58 to +392 °F) 1
Sensor cable: -100 ... +200 C (-58 to +392 °F) (CCmx and CCmx/90)
-20 ... +80 °C (-58 to +392 °F) (CCgx and CCgx/90 - permanently)
-20 ... +100 °C (-58 to +392 °F) (CCgx and CCgx/90 - 10,000 h)
Controller: +10 ... +60 °C (+50 to +140 °F)
- Humidity: 5 - 95 % (non-condensing)
- Ambient pressure: Atmospheric pressure
- Storage temperature:
Sensor: -50 ... +200 °C (-58 to +392 °F) 2
Sensor cable: -50 ... +200 °C (-58 to +392 °F) (CCmx and CCmx/90)
-50 ... +80 °C (-58 to +176 °F) (CCgx and CCgx/90)
Controller: -10 ... +75 °C (+14 to +167 °F)
- The space between the sensor surface and the target must have an unvarying dielectric constant.
- The space between the sensor surface and the target may not be contaminated (for example water,
rubbed-off parts, dust, etc.)
1) An operating temperature of -50 ... +100 °C (-58 to +212 °F) applies for the sensors CSG0.50-CA and
CSG1.00-CA -50
2) A storage temperature of -50 ... +100 °C (-58 to +212 °F) applies for the sensors CSG0.50-CA and
CSG1.00-CA -50
Page 10
Functional Principle, Technical Data
capaNCDT 6200
2. Functional Principle, Technical Data
2.1 Measuring Principle
The principle of capacitive distance measurement with the capaNCDT system is based on the principle of the
parallel plate capacitor. For conductive targets, the sensor and the target opposite form the two plate elec-
trodes.
If a constant AC current flows through the sensor capacitor, the amplitude of the AC voltage at the sensor is
proportional to the distance between the capacitor electrodes. The AC voltage is demodulated, amplified and
output as an analog signal.
The capaNCDT system evaluates the reactance XCof the plate capacitor which changes strictly in proportion
to the distance.
X = ; capacitance C = * *
c
1
jC
area
distance
ro
iA small target and bent (uneven) surfaces cause a non-linear characteristic.
This theoretical relationship is realized almost ideally in
practice by designing the sensors as guard ring capaci-
tors.
The linear characteristic of the measuring signal is
achieved for electrically conductive target materials
(metals) without any additional electronic linearization.
Slight changes in the conductivity or magnetic proper-
ties do not affect the sensitivity or linearity.
Electrical conductor
Ground
Screening electrode
Measuring electrode
Fig. 1 Functional principle of the guard ring
capacitor
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