Miyachi AX5000 Kurzanleitung

0 Document #107-00092-001 Dec, 2013

MIYACHI AMERICA CORPORATION

The World Leader in Hermetic Sealing Systems

A 5000

Operational

Manual

Document #107-00092-001 1

AX5000 Operational Manual

 Miyachi America Corporation

1820 S. Myrtle Ave

Monrovia, CA 91017

Phone 626.303.5676 • Fax 626.359.7930

R E V I S I O N R E C O R D

Rev E O Date Basis of Revision

001

None

December

2010

None. Original edition.

002

None

March 2011

Add possible faulty component to

Error Table

003

None

November 2011

Add new

graphics

None

ecember

201

Update

omp

any name

Document #107-00092-001 2

FOREWORD

The purpose of this manual is to supply operating, maintenance and service personnel with the

information needed to operate the Miyachi America A 5000 gloveboxes.

Should questions arise, or if you have suggestions for improving this manual, please contact:

 Miyachi America Corporation

1820 S. Myrtle Ave

Monrovia, CA 91017

Phone 626.303.5676 • Fax 626.359.7930

NOTI E

Miyachi America may be released from all

warranty obligations if repairs or modifications

are made by persons other than its own service

personnel, or its authorized representatives,

unless such repairs or modifications are

specifically authorized in writing by Miyachi

America orporation.

Document #107-00092-001 3

Table of ontents

GETTING STARTED WITH THE GLOVEBOX........................................................ 4

POWERING UP THE GLOVEBOX..................................................................................................... 4

POWERING DOWN THE GLOVEBOX............................................................................................. 4

RUNNING THE GLOVEBOX........................................................................................ 4

START THE GLOVEBOX APPLICATION ....................................................................................... 4

GLOVEBOX STATUS WINDOW INFORMATION ......................................................................... 5

RUN AN OVEN SCHEDULE................................................................................................................ 6

CREATE AND EDIT AN OVEN SCHEDULE.................................................................................... 7

EDITING AND CREATING OVEN SCHEDULE.............................................................................. 8

ADD A NEW SEGMENT................................................................................................................................................................10

EDIT AN EXISTING SEGMENT .................................................................................................................................................11

DELETE AN EXISTING SEGMENT...........................................................................................................................................11

CREATE A NEW SCHEDULE........................................................................................................... 12

DELETE AN EXISTING OVEN SCHEDULE.................................................................................. 12

CREATE AND EDIT A PUMP DOWN SCHEDULE....................................................................... 13

CREATE A NEW PUMP DOWN SCHEDULE..........................................................................................................................13

EDIT AN EXISTING PUMP DOWN SCHEDULE....................................................................................................................14

DELETE AN EXISTING PUMP DOWN SCHEDULE.............................................................................................................14

ENVIRONMENT SETTINGS....................................................................................... 15

ENVIRONMENT PRESSURE SETTINGS ....................................................................................... 15

MOISTURE SETTINGS...................................................................................................................... 16

OXYGEN SETTINGS .......................................................................................................................... 16

HELIUM SETTINGS........................................................................................................................... 17

CHAMBER SETTINGS................................................................................................. 17

GRAPHICAL DATA DISPLAY................................................................................... 18

VIEW REAL TIME GRAPH DATA .................................................................................................. 18

VIEW HISTORY GRAPH DATA....................................................................................................... 19

EXPORT TO CSV FORMAT.............................................................................................................. 19

BATCH REPORT........................................................................................................... 20

BATCH REPORT................................................................................................................................. 20

BATCH SETTING................................................................................................................................ 21

VERSION ........................................................................................................................ 21

USING THE LOGIN ADMINISTRATOR (PASSWORD ADMINISTRATION) .. 22

ADD USER ............................................................................................................................................ 23

EDIT USER ........................................................................................................................................... 24

CHANGE USER (TO SIGN-ON TO A DIFFERENT USER ID)..................................................... 25

DELETE USER..................................................................................................................................... 26

GLOVEBOX CONFIGURATOR................................................................................. 27

CREATE A NEW CHAMBER............................................................................................................ 28

REMOVE AN EXISTING CHAMBER.............................................................................................. 28

ERROR TABLE.............................................................................................................. 29

DIGITAL AND ANALOG I/O...................................................................................... 32

DIGITAL AND ANALOG I/O GALIL DMC SMART TERMINAL DISPLAY

DATA RECORD SCREEN............................................................................................ 34

Document #107-00092-001 4

Getting Started with the GLOVEBOX

Powering up the GLOVEBOX

Verify the electrical service input requirements are met, and all power

connections are plugged in.

Verify the proper line pressures for all gases are correct and that all tube

connections are tight.

Check to see that the power connection is made.

Verify that all component circuit breakers are in the “OFF” position, and proceed

to energize the system by turning on the “CB1” main circuit breaker. Then turn

on all the remaining component circuit breakers.

Next turn on the computer power and log on to the system.

Powering down the GLOVEBOX

Stop all oven cycles.

Close down the Windows application software. Shut down the computer. Wait

for the computer to shut down.

De-energize the system by turning off the “CB1” main circuit breaker.

Next turn on the computer power and log on to the system.

Running the GLOVEBOX

Start the GLOVEBOX application

Double-click the GloveBox icon on the desktop to start up the GLOVEBO user interface. The

Figure 1 Login Screen

Different user groups have different levels of access to the GLOVEBO system. The

administrator users can access all the GLOVEBO functions, whereas the operator users only

have access to very limited functions. The system is configured on shipment with a single

administrator account with user name of “admin”. Other user names can be added by starting the

GloveBox software and logging on to the system using this user name and the associated

password. The details are explained in the log on section.

Document #107-00092-001 5

Figure 1 Login Screen

GloveBox Status Window nformation

After entering a valid User Name and Password, the GLOVEBO application establish

communication with the system’s controller, which monitors and controls all GloveBox status.

Then it tries to turn on the oven temperature controllers and puts them in the standby mode.

The main Glovebox display window will be presented which has five pull down menu choices:

File, Logon, Glovebox, Batch and Help (see Figure 2).

The oven temperatures, oven vacuum pressures, enclosure pressure, moisture, Oxygen and

Helium levels are displayed on this window. If the communications with the Galil controller and

the oven temperature controllers are established successfully, these parameters are updated

dynamically.

In addition, the environment enclosure purging status (on or off), the left and right chamber

working statuses (Pumping Down, Backfilling or Standby), the chamber cleanness status (clean or

need pump down) and the inner/outer door statuses (open or close) are also updated dynamically

on this window.

At the bottom of this status window, there are four square-shaped alarms designed to alert the

operator of any unfavorable moisture, oxygen, helium and process conditions of the enclosure.

Under normal conditions, the color of these alarms is green. If any one of these four parameters

goes beyond the preset safe limits, the color of the corresponding alarm turns red.

Document #107-00092-001 6

Figure 2 GLOVEBO Main window and the GloveBox Status window.

At the upper center of the GloveBox status window is information on GloveBox

activities, controls and errors. f none of these are present or happening, this area

of the window is blank.

For each chamber, the status of the outer door and inner door is shown. If the outer door lock is

engaged, a closed lock icon is shown to the left of the graphical pressure level. If the outer door

lock is disengaged, the lock icon is open. If the inner door is closed, a graphical line is in the lower

position to the right of the graphical pressure level. If the inner door is not closed, then the

graphical line is above the lower position.

Run an oven Schedule

When the GLOVEBO program is started, as mentioned previously, the oven temperature

controllers are turned on and are put in the standby mode. The left or right oven can be started by

first selecting an oven schedule and then click the corresponding Start Oven button. To select an

oven schedule for the left or right oven, click the drop down list box under the Label “Left Oven

Schedule” or “Right Oven Schedule” and then highlight the schedule you would like to use. The

Document #107-00092-001 7

selected oven schedule will become active. If batch report is not active, the oven will start

immediately after the Start Oven button is pressed. If batch report is active, the user will be

promped to enter the operator name and batch id.

As soon as the oven is started, the text for the Start Oven button changes to Stop Oven. The

current segment number in the schedule and the time remaining for that segment are displayed in

the corresponding text boxes under the Stop Oven button.

An oven schedule is a series of programmed steps that complete an entire vacuum bake-out

process.

For a wall heated oven, there are four temperatures displayed just under the label “Left Oven

Temperatures” or “Right Oven Temperatures” for the left or right oven, each representing the

temperature of side (left or right), top, bottom and rear walls of the oven. The temperatures are

updated every second.

The oven stops when the oven schedule is done or when the Stop Oven button is pressed. The

text of the Stop Oven button changes back to “Start Oven” after the oven stops.

If the user presses the Start Oven Button when the selected oven schedule is empty, a message

will be issued telling the operator that the schedule is empty and ask the operator to select a

different oven schedule to run.

If an oven is currently running an oven schedule, any attempt to open the inner or outer door of

that oven is denied and a message is displayed. At the completion of the oven schedule, the

operator is allowed to open the oven’s inner door to pass the parts in the oven to the enclosure.

Access to the outer door is allowed only after the inner door is opened at least once at the

completion of an oven schedule.

If the oven is stopped prematurely by pressing the Stop Oven button, then access to either the

inner door or the outer door is allowed.

reate and Edit an Oven Schedule

An oven schedule defines the required oven states and the time duration for each state for a

particular bake-out cycle. The oven states in an oven schedule include oven temperature, oven

vacuum or backfill condition, and oven chamber vacuum pressure. Each oven state and its time

duration in an oven schedule are called a segment. Generally, an oven schedule contains one or

more segments.

A segment consists of four to five parameters depending on the Segment Condition parameter

setting. The first parameter in a segment is the Segment Number starting from one for the first

segment in the schedule. The second parameter is the Temperature Set Point in degree centigrade

for the segment. The third parameter is the Time Duration of the segment in hours. The fourth

parameter is the Segment Condition parameter. The Segment Condition can be set to Vacuum or

Backfill. The last parameter is the Vacuum Pressure Set Point, with pressure units of Torr, and is

only valid if the Segment Condition for the segment is set to Vacuum.

There is one more parameter in an oven schedule called Oven Control Method, which controls

how the time duration for each segment is calculated. This parameter can be set to one of three

Document #107-00092-001 8

choices; Time or Temperature or Temperature & Pressure. This parameter applies to all the

segments in a given oven schedule. If this parameter is set to Time, the time duration is counted

from the start of the oven schedule (for the first segment) or from the completion of the previous

segment (for segments other than the first segment). If this parameter is set to Temperature, the

time duration is counted from the time when the oven temperature, averaged over the oven walls

or heated shelves, depending on if the oven has wall or shelf heating, rises above the Temperature

Set point. If this parameter is set to Temperature & Pressure, the time duration is counted from

the time when both the oven temperature and pressure reach their respective set points.

Oven Type determines which type of oven the glovebox currently have. Depending on the types

of oven, there are usually 3-5 heating zones.

OverTemp SP Abort can be set to a certain temperature where the oven schedule will abort if the

oven temperature overshoots by the amount of the temperature value. To disable this feature,

simply put 0 as the temperature value.

Check the Batch Log to generate batch report for the selected schedule.

Oven Assignment determines which oven can use the selected schedule. Selecting all means all

ovens can use the schedule.

The following (Figure 3) is an example oven schedule containing one segment and the control

method is set to Time. The Segment Condition is set to Backfill for 1 hour and then Vacuum for

another hour.

Figure 3 Example Oven Schedule

Editing and Creating Oven Schedule

Oven schedules are created and edited using a visual schedule editor (Figure 4). The Schedule

Editor is accessed by clicking the “GloveBox” Main window menu, then select “Pump Down and

Oven Settings”. The user must have schedule editing “password rights” to be able to change the

oven schedule parameters or create new schedules.

Document #107-00092-001 9

Figure 4 Pump Down and Oven Settings Screen

Please note that the Oven Schedule Editor and the Pump Down Schedule Editor are both located

on the same USER INTERFACE SCREEN shown above.

To edit an existing oven schedule, first select the schedule by highlighting it in the Oven Schedule

list box located at the lower left part of the USER INTERFACE SCREEN. The selected oven

schedule is then displayed next to it on the right on the USER INTERFACE SCREEN. Each

segment in an oven schedule can be removed (deleted) or edited and a new segment can also be

added to the schedule using the Remove, Edit and Add buttons.

After you have made all the desired changes, click the SAVE button located at the bottom of the

Pump Down and Oven Settings USER INTERFACE SCREEN to save the changes to the oven

schedule.

Click the Save As button to generate a new schedule using with the parameters of the current

schedule.

The import button is used to create a new schedule from a .T T file created by user. The export

button is used to save as the selected schedule into a .T T file.

Click the View/Print button to display the schedule information as shown below. This can also be

used to print the schedule information.

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