MKS 649B Bedienungsanleitung

MKS TYPE 649B (ROHS COMPLIANT)

PRESSURE CONTROLLER WITH

INTEGRAL MASS FLOW METER

User Manual

PART 1023590-001 REV- C

E-MAIL: [email protected]

WWW.MKS.COM

2 TECH DRIVE

ANDOVER, MA 01810

(800) 227-8766 OR (978) 645-5500

2 649B USER MANUAL

PART 1023590-001 REV- C

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electronic or mechanical, including photocopying and recording, or by any information storage or

retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc.

mksinst™ is a trademark of MKS Instruments, Inc.

Baratron® is a registered trademark of MKS Instruments, Inc., Andover, MA

Swagelok®, VCO®, and VCR® are registered trademarks of Swagelok Company, Solon, OH

Inconel® is a registered trademark of Inco Alloys, Inc. Huntington, WV

Viton® is registered trademark of DuPont Dow Elastomers, Inc., Wilmington, DE

Kel-F® is a registered trademark of 3M, Minneapolis, MN

Elgiloy® is a registered trademark of Elgiloy Limited Partnership, Elgin, IL

Protected by U. S. Patent 5461913; foreign patents pending.

All other product names herein are used for identification purposes only and are recognized as

properties (including trademarks, registered trademarks, and referenced copyrighted materials) of their

respective companies.

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Table of Contents

List of Figures and Tables ......................................................................................................................... 7

1Warranty ............................................................................................................................................... 8

2Safety ................................................................................................................................................... 9

2.1 Safety Information ....................................................................................................................... 9

2.1.1 Symbols Used in This Instruction Manual ............................................................................ 9

2.1.2 Symbols Found on the Unit................................................................................................ 10

2.1.3 Safety Procedures and Precautions .................................................................................. 11

2.2Sicherheitshinweise .................................................................................................................. 13

2.2.1 In dieser Betriebsanleitung vorkommende Symbole ......................................................... 13

2.2.2 Erklärung der am Gerät angebrachten Symbole ............................................................... 14

2.2.3 Sicherheitsvorschriften und Vorsichtsmaßnahmen ........................................................... 15

2.3Informations de Sécurité ........................................................................................................... 17

2.3.1 Symboles utilisés dans ce manuel d'utilisation .................................................................. 17

2.3.2 Symboles figurant sur l'unité .............................................................................................. 18

2.3.3 Mesures de sécurité et précautions ................................................................................... 19

2.4Medidas de Seguridad .............................................................................................................. 21

2.4.1 Símbolos usados en este manual de instrucciones .......................................................... 21

2.4.2 Símbolos hallados en la unidad ......................................................................................... 22

2.4.3 Procedimientos y precauciones de seguridad ................................................................... 23

2.5安全に関する情報 ..................................................................................................................... 25

2.5.1 本取扱説明書のマーク ....................................................................................................... 25

2.5.2 本機器のマーク .................................................................................................................. 26

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2.5.3 安全対策について .............................................................................................................. 27

2.6장치 안전 정보 ........................................................................................................................... 29

2.6.1 본 지침 매뉴얼에 사용되는 기호들 .................................................................................... 29

2.6.2 장치에 표시된 기호들 ......................................................................................................... 30

2.6.3 안전 절차 및 예방조치 ........................................................................................................ 31

3Chapter 3 General Information ........................................................................................................... 33

3.1 Introduction................................................................................................................................ 33

3.1.1 Design Features of the Integral Mass Flow Meter ............................................................. 33

3.1.2 Cleanliness Features ......................................................................................................... 34

3.2 How This Manual is Organized ................................................................................................. 34

3.2.1 Manual Conventions .......................................................................................................... 35

3.3 Customer Support ..................................................................................................................... 35

4Chapter 4 Installation ......................................................................................................................... 36

4.1 How To Unpack the Type 649 Unit ........................................................................................... 36

4.1.1 Opening the Package ........................................................................................................ 36

4.1.2 Unpacking Checklist .......................................................................................................... 36

4.2Interface Cables ........................................................................................................................ 37

4.2.1Generic Shielded Cable Description .................................................................................. 37

4.3Product Location and Requirements ......................................................................................... 38

4.4Dimensions................................................................................................................................ 39

4.4.1 Front and Back Views ........................................................................................................ 39

4.4.2 Side View ........................................................................................................................... 41

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4.4.3 Bottom View ....................................................................................................................... 41

4.5Dimensions................................................................................................................................ 42

4.5.1 Fittings ................................................................................................................................ 42

4.5.2 Mounting Hardware ............................................................................................................ 42

4.5.3 Gas Pressure ..................................................................................................................... 42

4.5.4 Installing the Unit ............................................................................................................... 43

4.6Electrical Information ................................................................................................................. 43

4.6.1 I/O Connector ..................................................................................................................... 43

4.7Initial Configuration ................................................................................................................... 46

5Chapter 5 Overview ............................................................................................................................ 47

5.1 General Information .................................................................................................................. 47

5.1.1 Pressure Control Range .................................................................................................... 47

5.1.2 Flow Range ........................................................................................................................ 47

5.1.3 A Typical Control System ................................................................................................... 48

5.2 How The 649 Pressure Controller Works ................................................................................. 48

5.3 Flow Measurement Overview .................................................................................................... 49

5.3.1 Flow Path ........................................................................................................................... 49

5.3.2 Measurement Technique ................................................................................................... 49

5.4 Tuning the 649B Pressure Controller ........................................................................................ 50

5.4.1 Proportional Term .............................................................................................................. 50

5.4.2 Integral Term ...................................................................................................................... 51

5.4.3 Tuning the 649B Controller ................................................................................................ 51

5.5 Priority of Commands ................................................................................................................ 54

5.6 Trip Points ................................................................................................................................. 55

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5.6.1Action of the Trip Points ..................................................................................................... 55

5.7 Applications with a Large Differential Pressure ........................................................................ 56

5.8 Labels ........................................................................................................................................ 56

6Chapter 6 Operation ........................................................................................................................... 57

6.1 How To Check the Pressure Transducer Zero ......................................................................... 57

6.2 How To Adjust the Pressure Transducer Span ......................................................................... 58

6.3 How To Zero the Integral Mass Flow Meter .............................................................................. 58

6.4 How To Tune the 649B Controller ............................................................................................ 59

6.5 How To Adjust the Trip Point Values ........................................................................................ 59

6.6 How To Select the Trip Point Action ......................................................................................... 61

6.7 How To Use Trip Points as Error Indicators .............................................................................. 62

6.8 How To Change the Pressure Output Signal Range ................................................................ 64

7Chapter 7 Maintenance ...................................................................................................................... 66

7.1 General Information .................................................................................................................. 66

7.2 Zero Adjustment ........................................................................................................................ 66

Appendix .................................................................................................................................................. 67

Appendix A: Product Specifications .................................................................................................. 67

Appendix B: Model Code Explanation ............................................................................................... 70

Appendix C: Valve Orifice Selection.................................................................................................. 73

Index ........................................................................................................................................................ 76

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List of Figures and Tables

Figure 1: Front View ................................................................................................................................ 40

Figure 2: Rear View ................................................................................................................................. 40

Figure 3: Side View .................................................................................................................................. 41

Figure 4: Bottom View ............................................................................................................................. 42

Figure 5: Downstream Pressure Control ................................................................................................. 43

Figure 6: Top View ................................................................................................................................... 47

Figure 7: Location of Flow Meter Adjustments ........................................................................................ 48

Figure 8: Effects of the Proportional Control Term .................................................................................. 50

Figure 9: Effects of the Integral Control Term ......................................................................................... 51

Figure 10: Controller Response with Initial P Term and I Term Values .................................................. 52

Figure 11: Controller Response with Increased P Term ......................................................................... 53

Figure 12: Controller Response with Increased I Term ........................................................................... 53

Figure 13: Serial Number Label ............................................................................................................... 56

Figure 14: Jumper Positions on the Transducer Board ........................................................................... 62

Figure 15: Valve Orifice Index Number ................................................................................................... 74

Table 1: Connector Pin Assignments ...................................................................................................... 44

Table 2: - Initial Configuration .................................................................................................................. 46

Table 3: - Highest Pressure for Zero Adjustment of the Pressure Transducer ....................................... 58

Table 4: - Valve Orific Sizes .................................................................................................................... 73

Table 5 - Valve Orifice Index Number ..................................................................................................... 74

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1 Warranty

MKS Instruments, Inc. (MKS) warrants that for one (1) year from the date of shipment the equipment,

which is described above and manufactured by MKS, shall be free from defects in materials and

workmanship.

For the period commencing with the date of shipment of this equipment and ending one (1) year later,

MKS will, at its option, either repair or replace any part which is defective in materials or workmanship

without charge to the purchaser. The foregoing shall constitute the exclusive and sole remedy of the

purchaser for any breach of MKS of this warranty.

The purchaser, before returning any equipment covered by this warranty, which is asserted to be

defective by the purchaser, shall make specific written arrangements with respect to the responsibility

for shipping the equipment and handling any other incidental charges with the MKS Sales

Representative or distributor from which the equipment was purchased or, in the case of a direct

purchase from MKS, with the MKS home office in Andover, Massachusetts, USA.

This warranty does not apply to any equipment which has not been installed and used in accordance

with the specifications recommended by MKS for the proper and normal use of the equipment. MKS

shall not be liable under any circumstances for indirect, special, consequential, or incidental damages

in connection with, or arising out of, the sale, performance, or use of the equipment covered by this

warranty.

MKS recommends that all MKS pressure and flow products be calibrated periodically (typically) every 6

to 12 months) to ensure accurate readings. When a product is returned to MKS for this periodic re-

calibration it is considered normal preventative maintenance not covered by any warranty.

THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES, EXPRESSED OR

IMPLIED, INCLUDING THE IMPLIED WARRANTY OF MERCHANTABILITY AND THE IMPLIED

WARRANTY OF FITNESS FOR A PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST

INFRINGEMENT OF ANY PATENT.

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2 Safety

2.1 Safety Information

The following general safety precautions must be observed during all phases of operation of this

instrument. Failure to comply with these precautions or with specific warnings elsewhere in this manual

violates safety standards of intended use of the instrument and may impair the protection provided by

the equipment. MKS Instruments, Inc. assumes no liability for the customer’s failure to comply with

these requirements.

2.1.1 Symbols Used in This Instruction Manual

The following are definitions of WARNING, CAUTION, and NOTE messages used throughout the

manual.

NOTE

The NOTE sign denotes important information. It calls attention to a

procedure, practice, condition, or the like, which is essential to

highlight.

CAUTION

The CAUTION sign denotes a hazard. It calls attention to an operating

procedure, practice, or the like, which, if not correctly performed or

adhered to, could result in damage to or destruction of all or part of the

product.

WARNING

The WARNING sign denotes a hazard. It calls attention to a procedure,

practice, condition, or the like, which, if not correctly performed or

adhered to, could result in injury to personnel.

DANGER

The DANGER sign Indicates an imminently hazardous situation that, if

not avoided, will result in death or serious injury.

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2.1.2 Symbols Found on the Unit

The following table describes symbols that may be found on the unit.

ON (Supply)

IEC 417, No. 5007

OFF (Supply)

IEC 417, No. 5008

Earth (ground)

IEC 417, No. 5017

Protective earth

(ground)

IEC 417, No. 5019

Frame or Chassis

IEC 417, No. 5020

Equipotentiality

IEC 417, No. 5021

Direct current

IEC 417, No. 5031

Alternating current

IEC 417, No. 5032

Both direct and

alternating current

IEC 417, No. 5019

Class II equipment

IEC 417, No. 5172-a

Three phase

alternating current

IEC 617-2, No. 020206

Caution refers to

acompanying

documents

ISO 3864, No. B.3 1

Caution risk of

electric shock

ISO 3864, No. B.3 6

Caution hot surface

IEC 417, No. 5021

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