MKS GMW-25 Bedienungsanleitung

OPERATION MANUAL

Revision Level: B 10/07/04 MATCHWORK ®is a registered trademark of MKS Instruments, Inc.

GMW-25

RF Plasma Generator

HIGH RF VOLTAGES MAY BE PRESENT AT THE OUTPUT OF THIS

UNIT. All operating personnel should use extreme caution in handling

these voltages and be thoroughly familiar with this manual.

CFC's

DO NOT USE ANY CFC (CHLOROFLUOROCARBON) SOLVENT IN THE

MAINTENANCE OF THIS PRODUCT. In recognition of our responsibility to protect

the environment, this product has been manufactured without the use of CFC's. The

no-clean flux now used in all soldering operations may leave a small inert residue that

will not affect the performance of the product. The use of CFC's for cleaning or

maintenance may result in partial liquification of the no-clean flux residue, which will

damage the unit and void the warranty.

ISO 9001

QUALITY

SYSTEM

This product is manufactured at an MKS Instruments’ ISO-9001:2000-Quality-

System-compliant facility.

Notice

The material contained in this manual is subject to change without notice. No part of this manual may be

reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying or

electronic transmission or other means of reproduction or distribution without prior written consent of MKS,

ENI Products. The drawings, specifications and other technical information contained in this manual are the

property of MKS, ENI Products and shall not be copied, reproduced or used in any way, in whole or in part, as

the basis of manufacture or sale of similar items without the prior written consent of MKS, ENI Products.

Warranty

MKS, ENI Products warrants to the original purchaser for a period of one year from the date of

delivery, each instrument to be free from defects in materials and workmanship. For a period of one

year, MKS, ENI Products will, at its option, adjust, repair, or replace defective parts, without charge to

the original purchaser, so that the instrument performs according to its specifications.

When warranty service is required, the instrument must be returned, transportation prepaid, to

the factory or to one of MKS, ENI Products' designated service centers. If, in our opinion, the

instrument has been damaged by accident, unreasonable use, buyer-supplied software or interfacing,

improper site preparation or maintenance, or abnormal conditions of operation, repairs will be billed

at standard rates. In this case, an estimate will be submitted before the work is started.

THIS LIMITED WARRANTY IS EXCLUSIVE AND MKS, ENI PRODUCTS MAKES NO OTHER

WARRANTIES, EXPRESS OR IMPLIED, AND ALL OTHER EXPRESS ORAL OR WRITTEN

WARRANTIES AND ALL WARRANTIES IMPLIED BY LAW, INCLUDING ANY WARRANTIES OF

MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE OR OTHER WARRANTY OF

QUALITY ARE EXCLUDED AND DISCLAIMED. IN NO EVENT SHALL MKS, ENI PRODUCTS BE

LIABLE FOR SPECIAL, INDIRECT, INCIDENTAL OR CONSEQUENTIAL DAMAGES RESULTING

FROM BREACH OF ANY WARRANTY, WHETHER EXPRESS OR IMPLIED, INCLUDING ANY

IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE, OR

FROM ANY CAUSE WHATSOEVER, INCLUDING NEGLIGENCE. Buyer's sole and exclusive

remedy under this warranty shall be repair or replacement as set forth above, or if MKS, ENI

Products is unable to repair or replace the defective part within a reasonable time, a refund of the

price of the part or goods that give rise to the warranty claim.

Service And Technical Assistance

For Service or Repair contact the closest Customer Service Department with the following

information:

• Model and serial number

• Purchase order number

• Detailed description of malfunction

• Your company's "Bill To" and "Ship To" address

You will receive a RMA (Return Materials Authorization) number, the warranty status of the unit to be

returned and estimated repair charge, if any. The RMA number is your authorization number. Please

type this number on your purchase order and shipping label. After MKS, ENI Products receives the

unit, a firm quote and estimated date of completion will be given.

For Technical Assistance for your particular application, contact the nearest MKS, ENI Products

Sales and Service Center. The following information will help us provide you with prompt and

efficient service:

• All of the information contained on the unit's nameplate.

• Names and telephone numbers of important contacts.

• Detailed description (i.e. physical damage and/or performance anomalies, quantitative

and/or qualitative deviation from specifications), including miscellaneous symptoms, dates

and times.

• The environment and circumstances under which the issue developed.

• Supporting test data and/or records that can be provided.

• Any previous, related conversations and/or correspondence with MKS, ENI Products.

Sales & Service Locations

ROCHESTER, NY MKS Instruments, Inc.

100 Highpower Road

Rochester, NY 14623

Toll Free USA Sales Hotline:

Toll Free USA Service

Hotline:

Tel:

Fax: (585) 427-8300

(585) 427-7839

1-800-267-5362

1-800-724-ENI1 (3641)

SAN JOSE, CA MKS Instruments, Inc.

70 Rio Robles

San Jose, CA 95134

Tel:

Fax: (408) 750-0300

(408) 428-0390

AUSTIN, TX MKS Instruments, Inc.

1321 Rutherford Lane

Suite 200

Austin, TX 78753

Tel:

Fax: (512) 719-8000

(512) 719-8095

ENGLAND 1 Anchorage Court

Caspian Road

Altrincham, Cheshire

WA14 5HH, England

Tel:

Fax: 44-161-929-5500

44-161-929-5511

GERMANY Sielminger Str. 63

D-70771 Leinfelden-

Echterdingen (Stetten)

Stuttgart, Germany

Tel:

Fax: 49-711-947700

49-711-9477025

JAPAN 1-21-15 Aoyagi Kunitachi

Tokyo 186-0013

Japan

Tel:

Fax: 81-425-229-011

81-425-222-636

KOREA 1ST Floor, DK Plaza-I

375-1, Geumgok-dong City

Bundangogu, Seongnam

Kyonggi-do, Korea 463-805

Tel:

Fax: 82-31-717-9244

82-31-717-9244

SINGAPORE Blk 4010 Techplace 1

#01-07/08/09

Ang Mo Ko Ave 10

Singapore 569626

Tel:

Fax: 65-6451-1062

65-6451-0172

TAIWAN 2F, No. 47, Ln. 2, Sect. 2

Kuang Fu Rd.

Hsinchu 300

Taiwan, ROC

Tel:

Fax: 886-3-575-3040

886-3-575-3048

P.R. of CHINA West end of 2nd floor,

No. 3 building (T20-3)

No. 258 Jinzang Rd.,

Shanghai Jin Qiao Export

Processing Zone

Pudong, Shanghai 201206

P.R. of China

Tel:

Fax:

86-21-5834-7934 or

86-21-5834-7914

86-21-5834-7794

Product and Applications information also available on the Internet at:

http://www.mksinst.com

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Contents

GMW-25 i

TABLE OF CONTENTS

Chapter 1 - Introduction................................................................1-1

1.1 About This Manual.......................................................................................1-2

1.1.1 Finding Your Way Around..............................................................1-3

1.1.2 Documentation Conventions..........................................................1-4

Commands .............................................................1-4

Definitions...............................................................1-4

1.2 Safety Considerations .................................................................................1-5

1.2.1 Operating and Maintenance Cautions............................................1-5

1.2.2 Shock Hazard Warnings................................................................1-5

1.2.3 Service ..........................................................................................1-6

1.2.4 Safety Labels.................................................................................1-7

RF Radiation Warning Label...................................1-7

Heavy Object Warning Label..................................1-7

1.2.5 Technical Support..........................................................................1-7

1.3 Name Plate ..........................................................................................1-8

1.4 Generator Options at a glance.....................................................................1-9

1.5 Getting Started Quickly..............................................................................1-12

Chapter 2 - System Installation ....................................................2-1

2.1 Unpacking/Inspection ..................................................................................2-1

2.1.1 Mechanical Inspection ...................................................................2-1

2.1.2 Claim for Damage..........................................................................2-1

2.1.3 Packaging for Reshipment.............................................................2-1

2.2 Installation Requirements............................................................................2-2

2.2.1 Dimension Requirements...............................................................2-2

2.3 Rack Installation..........................................................................................2-3

2.3.1 Installing into a Cabinet Assembly.................................................2-3

19-inch Cabinet.......................................................2-3

Contents

ii GMW-25

2.4 System Interconnect.................................................................................... 2-4

2.4.1 Standard 25-pin Analog I/O Interface (ENI P/N: 1050-235)........... 2-4

2.4.2 37-pin Analog I/O Interface (ENI P/N: 1050-295) .......................... 2-8

2.4.3 9-pin PL-2HF Analog I/O Interface (ENI P/N: 1050-290)............. 2-11

2.4.4 15-pin Analog I/O Interface.......................................................... 2-12

2.4.5 DeviceNet Pin Out....................................................................... 2-13

2.5 Remote Digital Interface............................................................................ 2-14

2.5.1 Communication Configuration ..................................................... 2-15

2.5.2 RS-422 Bussing........................................................................... 2-16

2.6 MATCHWORK®Interconnection............................................................... 2-17

2.6.1 MATCHWORK®Power Requirements......................................... 2-18

2.6.2 AC Power Cable Connections..................................................... 2-18

2.6.3 RF Power Connections................................................................ 2-19

2.6.4 Fiber Optic Control and Debug Cables........................................ 2-19

2.7 Safety Interlocks........................................................................................ 2-20

2.8 Panels and Controls.................................................................................. 2-22

2.8.1 Front Panel.................................................................................. 2-23

Display.................................................................. 2-23

LEDs..................................................................... 2-24

Controls................................................................ 2-25

2.8.2 Front Panel Options..................................................................... 2-26

Fully Functional Front Panel................................. 2-27

Remote Front Panel ............................................. 2-28

2.8.3 Rear Panel................................................................................... 2-29

Connections ......................................................... 2-29

Rear Panel Drawing ............................................. 2-30

2.9 Power Requirements................................................................................. 2-31

2.9.1 AC Mains Connection.................................................................. 2-31

2.10 Cooling Water Requirements .................................................................. 2-32

2.10.1 Water Fittings Connection ......................................................... 2-33

2.11 Maintenance & Cleaning ......................................................................... 2-34

2.12 System Check ........................................................................................ 2-35

2.13 Initial Power Up....................................................................................... 2-36

Contents

GMW-25 iii

Chapter 3 - GMW-25 Operation.....................................................3-1

3.1 Basic Operation ..........................................................................................3-1

3.1.1 Generator Operation through the Front Panel ...............................3-1

Turning on AC Mains Power...................................3-1

Ensuring that the Front Panel/Remote Front Panel is

unLOCKed..............................................................3-2

Setting the RF power..............................................3-3

Entering the frequency menu..................................3-3

3.1.2 Generator Operation through the ENI Monitor...............................3-5

Turning on the generator........................................3-5

Ensuring that the ENI Monitor has control..............3-5

Selecting the mode of operation.............................3-5

Changing the requested power...............................3-7

3.1.3 Matching Network Configuration for Generator Control.................3-8

Setting the MATCHWORK®up for Generator

control.....................................................................3-8

3.1.4 Matching Network Operation through the Generator ...................3-10

Activating the front panel to display MW

status/Readbacks.................................................3-10

3.1.5 Changing the Matching Network parameters...............................3-11

3.2 ENI Monitor Software Commands.............................................................3-12

3.2.1 Basic Monitor...............................................................................3-13

3.2.2 Generator Control........................................................................3-14

3.2.3 Generator Readback....................................................................3-15

3.2.4 MATCHWORK®Control...............................................................3-18

3.2.5 MATCHWORK®Readback via the Generator..............................3-19

3.3 Advanced Operation..................................................................................3-20

3.3.1 Generator Front Panel Operation ................................................3-20

Changing between Auto-Tune and Manual Tune

Mode.....................................................................3-21

Setting the Minimum Search Threshold................3-22

Setting the delay time...........................................3-22

Setting the start frequency....................................3-23

Menu Navigation and Exit.....................................3-23

3.3.2 ENI Monitor Generator Operation................................................3-23

3.3.3 MATCHWORK®Network Operation using the Generator

Front Panel.....................................................................3-23

3.3.4 MATCHWORK Operation using the ENI Monitor.........................3-23

Contents

iv GMW-25

3.4 Remote Control Interface Communication Protocol .................................. 3-24

3.4.1 Space Characters........................................................................ 3-24

3.4.2 Illegal Commands........................................................................ 3-25

3.4.3 Leading Zeros and Missing User Arguments............................... 3-25

3.4.4 Special Characters ...................................................................... 3-25

3.4.5 Power-up Message...................................................................... 3-26

3.4.6 Backspace Characters................................................................. 3-26

3.4.7 Escape from Indefinite Loops...................................................... 3-26

3.4.8 Link Release Character............................................................... 3-27

3.4.9 XON and XOFF........................................................................... 3-27

3.4.10 Key Level................................................................................... 3-27

3.4.11 Link Integrity Checking .............................................................. 3-28

Chapter 4 - Troubleshooting.........................................................4-1

4.1 Hardware Faults.......................................................................................... 4-2

4.2 System Faults .......................................................................................... 4-3

4.3 Analog Remote Interface Faults.................................................................. 4-4

4.3.1 RF OVERHEAT (Hard Fault)......................................................... 4-4

4.3.2 MAX POWER (Soft Fault).............................................................. 4-4

Appendix A - GMW-25 Specifications .........................................A-1

Appendix B - Glossary of Symbols .............................................B-1

Appendix C - Glossary of Terms .................................................C-1

Introduction

GMW-25 1-1

Chapter 1

Introduction

The GMW-25 Plasma Generator is a rugged, highly reliable RF power

source for plasma etching, CVD, and sputtering applications. Featuring

precise power control and digital interfacing and increased load-power

capability, the GMW-25 generator provides the exceptional reliability

and repeatability required for today’s demanding plasma processes.

Operating at a customer-specified frequency in the range of 1.8 MHz to

2.17 MHz, the GMW-25 generator produces 2500 W of power into a

50Ωload. The DSP-based control module automatically measures

forward RF power and reflected RF power, maintaining constant power

output within ±1% of set point over a Dynamic Power Range of 25 to

2500 watts.

Precise power calibration is traceable to NIST (National Institute of

Standards and Technology) through the ENI Power Standard. Low

harmonic distortion and spurious-free performance complement the

unit’s RF power output control and unconditional RF stability.

An extremely rugged and highly efficient RF power section ensures

greater power delivery into fixed match systems. The DSP-based

control constantly monitors internal subsystem status to maximize

system availability. Extensive built-in diagnostics and internal fail-safe

memory simplify maintenance requirements and increase system

uptime.

A new 9-pin digital interface provides remote control, monitoring and

diagnostic capability via the RS-232 serial link to a computer or host

terminal. Optional custom interface cards are also available.

Introduction

1-2 GMW-25

1.1 About This Manual

The manual provides all of the information required to safely install,

setup, and operate your generator. While every attempt has been

made to provide a concise set of installation and operating procedures

in the Getting Started Quickly section, detailed instructions are also

available.

It is essential that you become thoroughly familiar with the contents of

this manual prior to using your generator. If used properly, the

information contained in this manual will not only promote reliable

generator performance but will also encourage a safe operating or

service environment for all individuals.

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