MKS PR 4000 F Bedienungsanleitung
PR 4000 F
2 Channel Power Supply and
Readout for Flow and Pressure
Instruction Manual
MKS Instruments
Deutschland GmbH
Release 05/2000
Copyright © 2000 by MKS Instruments Deutschland GmbH
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any
means, electronic or mechanical, including photocopying and recording, or by any information storage
or retrieval system, except as may be expressly permitted in writing by MKS Instruments.
Printed in the Federal Republic of Germany
PR4000F Table of Contents
iii
Table of Contents
Safety Information......................................................................................................................1
Symbols Used in This Instruction Manual................................................................................ 1
Symbols Found on the Unit.................................................................................................... 2
Safety Procedures and Precautions........................................................................................ 3
Chapter 1: General Information..................................................................................................5
1.1 General Description..................................................................................................... 5
1.2 How This Manual Is Organized..................................................................................... 6
1.1 Customer Support ....................................................................................................... 6
Chapter 2: Installation................................................................................................................7
2.1 Unpacking................................................................................................................... 7
2.2 Unpacking Checklist.................................................................................................... 7
2.3 Cables........................................................................................................................ 8
Interconnection Cabels from MKS....................................................................................... 8
Generic Shielded Cable Description.................................................................................... 9
2.4 Installation, Mounting..................................................................................................10
Dimensions ......................................................................................................................11
Line Power and Fuses.......................................................................................................12
2.5 Switching on the unit...................................................................................................12
Chapter 3: Overview................................................................................................................13
3.1 Front Panel................................................................................................................13
3.2 Rear Panel.................................................................................................................14
Connections .....................................................................................................................14
3.3 Connectors ................................................................................................................15
Table of Contents PR4000F
iv
Chapter 4: Operation............................................................................................................... 19
4.1 Structure of the Menu.................................................................................................19
4.2 Editor........................................................................................................................20
Switching on Edit mode.....................................................................................................20
Switching off Edit mode.....................................................................................................20
Decimal point ...................................................................................................................20
4.3 Setup........................................................................................................................21
Entering Setup .................................................................................................................21
Trip Limits........................................................................................................................29
Interface RS485 ...............................................................................................................31
Exit Setup........................................................................................................................32
4.4 Control......................................................................................................................33
Display for measurement values and setpoints...................................................................33
Status Displays................................................................................................................34
Control Display.................................................................................................................34
4.5 Operation with pressure transducers ...........................................................................35
Operation with Baratron Type 120 .....................................................................................36
4.6 Operation with mass flow controllers (MFC).................................................................37
Control Modes with Mass Flow Controllers:........................................................................37
4.7 Operation with flow meters .........................................................................................38
4.8 Operation with pressure controllers .............................................................................38
4.9 Limit switches and relays............................................................................................39
SLEEP ............................................................................................................................39
LIMIT...............................................................................................................................39
BAND..............................................................................................................................39
MLIMIT............................................................................................................................39
MBAND ...........................................................................................................................39
4.10 Relay Settings ...........................................................................................................40
PR4000F Table of Contents
v
Chapter 5: Interface.................................................................................................................43
5.1 General..........................................................................................................................43
5.2 Command syntax............................................................................................................43
5.3 Reply syntax ..................................................................................................................44
5.4 Error reply syntax ...........................................................................................................44
5.5 Commands.....................................................................................................................45
Sample Command ............................................................................................................45
Display Text (DT)..............................................................................................................45
Request Key (KY).............................................................................................................45
Dialog (DG) ......................................................................................................................45
ID String (ID)....................................................................................................................46
Remote Mode (RT) ...........................................................................................................46
Access Channel (AC)........................................................................................................46
Actual Value (AV)..............................................................................................................46
Setpoint (SP)....................................................................................................................47
External Input (EX)............................................................................................................47
Status (ST) .......................................................................................................................47
Valves (VL).......................................................................................................................47
Relays (RL) ......................................................................................................................48
Displays (DP)...................................................................................................................48
Display 4 (DP4).................................................................................................................48
Range (RG)......................................................................................................................48
Gain (GN).........................................................................................................................49
Offset (OF).......................................................................................................................49
RTD Offset (RO)...............................................................................................................49
Autozero (AZ) ...................................................................................................................49
Input Range (IN)...............................................................................................................49
Output Range (OT) ...........................................................................................................50
External Input Range (EI)..................................................................................................50
External Output Range (EO)..............................................................................................50
Signal Mode (SM).............................................................................................................50
Scale (SC)........................................................................................................................51
Linearization (LN, LS)........................................................................................................51
Limit Mode (LM)................................................................................................................51
Dead Band (DB)...............................................................................................................51
Table of Contents PR4000F
vi
Upper Limit (UL)...............................................................................................................52
Lower Limit (LL)...............................................................................................................52
Formula Relay (FR)..........................................................................................................52
Formula Temporary (FT)...................................................................................................52
Parity (PY).......................................................................................................................53
Baudrate (BD)..................................................................................................................53
Address (AD) ...................................................................................................................53
Interface Mode (IM) ..........................................................................................................53
Resolution (RS)................................................................................................................54
Reset Status (RE).............................................................................................................54
Default (DF).....................................................................................................................54
Appendix A: Specifications...................................................................................................... 55
Appendix B: Error Messages................................................................................................... 57
Appendix C: Default - Configuration......................................................................................... 59
MKS Worldwide Calibration & Service Centers.......................................................................... 61
PR4000F List of Figures and Tables
vii
List of Figures and Tables
Figures
Figure 1: Dimensions ..............................................................................................................11
Figure 2: Front Panel ..............................................................................................................13
Figure 3: Rear Panel of the PR4000F.......................................................................................14
Figure 4: Structure of the menu................................................................................................19
Tables
Table 1: Definition of Symbols Found on the Unit....................................................................... 2
Table 2: Standard Interconnecting Cables ................................................................................. 9
Table 3: Fuse Information........................................................................................................12
List of Figures and Tables PR4000F
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PR4000F Safety Information
1
Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning The WARNING sign denotes a hazard. It calls attention to a
procedure, practice, condition, or the like, which, if not correctly
performed or adhered to, could result in injury to personnel.
Caution The CAUTION sign denotes a hazard. It calls attention to an
operating procedure, practice, or the like, which, if not correctly
performed or adhered to, could result in damage to or destruction of
all or part of the product.
Note The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to highlight.
Safety information PR4000F
2
Symbols Found on the Unit
The following table describes symbols that may be found on the unit.
Definition of Symbols Found on the Unit
|
On (Supply)
IEC 417, No.5007 Off (Supply)
IEC 417, No.5008 Earth (ground)
IEC 417, No.5017
Protective earth
(ground)
IEC 417, No.5019
Frame or chassis
IEC 417, No.5020 Equipotentiality
IEC 417, No.5021 Direct current
IEC 417, No.5031
Alternating current
IEC 417, No.5032
Both direct and
alternating current
IEC 417, No.5033-a
Class ll equipment
IEC 417, No.5172-a
Three phase
alternating current
IEC 617-2 No.020206
Caution, refer to
accompanying
documents
ISO 3864, No.B.3.1
Caution, risk of
electric shock
ISO 3864, No.B.3.6
Caution, hot surface
IEC 417, No.5041
Table 1: Definition of Symbols Found on the Unit
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