Pfeiffer Vacuum TM 700 Bedienungsanleitung

OPERATING INSTRUCTIONS

Translation of the Original

TM 700

Electronic drive unit

Dear Customer,

Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to

support you by its performance, its perfect operation and without interfering your individual

application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a

comprehensive and complete range of top-quality products and first-class service. With this

expertise, we have acquired a multitude of skills contributing to an efficient and secure

implementation of our product.

Knowing that our product must not interfere with your actual work, we are convinced that our

product offers you the solution that supports you in the effective and trouble-free execution of

your individual application.

Please read these operating instructions before putting your product into operation for the

first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-

vacuum.de.

Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on

our website.

Disclaimer of liability

These operating instructions describe all models and variants of your product. Note that your

product may not be equipped with all features described in this document. Pfeiffer Vacuum

constantly adapts its products to the latest state of the art without prior notice. Please take

into account that online operating instructions can deviate from the printed operating

instructions supplied with your product.

Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from

the use of the product that contradicts its proper use or is explicitly defined as foreseeable

misuse.

This document is the intellectual property of Pfeiffer Vacuum and all contents of this

document are protected by copyright. They may not be copied, altered, reproduced or

published without the prior written permission of Pfeiffer Vacuum.

We reserve the right to make changes to the technical data and information in this document.

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Table of contents

1 About this manual 7

1.1 Validity 7

1.2 Applicable documents 7

1.3 Target group 7

1.4 Conventions 7

1.4.1 Instructions in the text 7

1.4.2 Pictographs 7

1.4.3 Stickers on the product 8

1.4.4 Abbreviations 8

2 Safety 9

2.1 General safety information 9

2.2 Safety instructions 9

2.3 Safety precautions 10

2.4 Limits of use of the product 11

2.5 Proper use 11

2.6 Foreseeable improper use 11

3 Product description 12

3.1 Identifying the product 12

3.2 Product features 12

3.3 Function 12

3.4 Scope of delivery 12

3.5 Connections 13

4 Installation 14

4.1 Connection diagram 14

4.2 Connection "remote" 15

4.2.1 Voltage supply 17

4.2.2 Inputs 17

4.2.3 Outputs 18

4.2.4 Relay contacts (invertible) 18

4.2.5 RS-485 19

5 Interfaces 20

5.1 Interface RS-485 20

5.1.1 Connection options 20

5.1.2 Cross-linked via the RS-485 connection 21

5.2 Pfeiffer Vacuum protocol for RS-485 interface 21

5.2.1 Telegram frame 21

5.2.2 Telegram description 22

5.2.3 Telegram example 1 22

5.2.4 Telegram example 2 22

5.2.5 Data types 23

6 Parameter set 24

6.1 General 24

6.2 Control commands 24

6.3 Status requests 27

6.4 Set value settings 28

6.5 Additional parameters for the control unit 29

7 Operation 30

7.1 Configuring the connections with the Pfeiffer Vacuum parameter set 30

7.1.1 Configuring the digital inputs 30

7.1.2 Configuring digital outputs and relays 30

7.1.3 Configuring the analog input 31

Table of contents

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7.1.4 Configuring the analog output 31

7.1.5 Configuring the accessory connections 31

7.1.6 Select interfaces 32

7.2 Operating modes 33

7.2.1 Gas type-dependent operation 33

7.2.2 Set value power consumption 33

7.2.3 Run-up time 34

7.2.4 Rotation speed switch points 34

7.2.5 Rotation speed setting mode 35

7.2.6 Standby 35

7.2.7 Confirming speed specification 36

7.2.8 Backing pump operating modes 36

7.2.9 Backing pump standby mode 37

7.2.10Electric brake 37

7.2.11Operation with accessories 37

7.2.12Venting modes 38

7.2.13Safety bearing wear 38

7.2.14Balance 39

7.3 Switching on the turbopump 39

7.4 Switching off the turbopump 39

7.5 Operation monitoring 39

7.5.1 Operating mode display via LED 39

7.5.2 Temperature monitoring 40

8 Recycling and disposal 41

8.1 General disposal information 41

8.2 Dispose of electronic drive unit 41

9 Malfunctions 42

9.1 General 42

9.2 Error codes 42

9.3 Warning and malfunction messages when operating with control units 45

10 Service solutions by Pfeiffer Vacuum 46

EC Declaration of Conformity 48

UK Declaration of Conformity 49

Table of contents

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List of tables

Tbl. 1: Stickers on the product 8

Tbl. 2: Abbreviations used in this document 8

Tbl. 3: Permissible ambient conditions 11

Tbl. 4: Features of the device variants 12

Tbl. 5: Connection description of the electronic drive unit 13

Tbl. 6: Terminal lay-out of 26-pin "remote" connection 16

Tbl. 7: Features of the RS-485 interface 20

Tbl. 8: Terminal layout of the RS-485 connecting socket M12 20

Tbl. 9: Explanation and meaning of the parameters 24

Tbl. 10: Control commands 27

Tbl. 11: Status requests 28

Tbl. 12: Set value settings 29

Tbl. 13: Parameters for control unit functions 29

Tbl. 14: Configuring parameters [P:062], [P:063] and [P:064] 30

Tbl. 15: Configuring parameters [P.019] and [P:024], or [P:045], [P:046], [P:047] and

[P:028]

Tbl. 16: Configuring parameter [P:057] 31

Tbl. 17: Configuring parameter [P:055] 31

Tbl. 18: Accessory connections 32

Tbl. 19: Parameter [P:060] 32

Tbl. 20: Parameter [P:061] 32

Tbl. 21: Characteristic nominal rotation speeds of the turbopumps 36

Tbl. 22: Backing pump operating modes 36

Tbl. 23: Behavior and meaning of the LEDs on the electronic drive unit 40

Tbl. 24: Error messages of the electronic drive unit 44

Tbl. 25: Warning messages of the electronic drive unit 45

Tbl. 26: Warning and malfunction messages 45

List of tables

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List of figures

Fig. 1: Standard panel TM 700 12

Fig. 2: Connection diagram for the electronic drive unit. Example: external circuit for

"remote"

Fig. 3: Rotation speed setting mode pin 7 and pin 11 18

Fig. 4: Connection options via interface RS-485 20

Fig. 5: Networking of Turbopumps with integrated electronic drive unit via interface

RS-485

Fig. 6: Schematic diagram of power characteristics, example of heavy gases

[P:027] = 0

Fig. 7: Rotation speed switch point 1 active 34

Fig. 8: Rotation speed switch points 1 & 2 active, [P:701] > [P:719] 34

Fig. 9: Rotation speed switch points 1 & 2 active, [P:701] < [P:719] 35

List of figures

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1 About this manual

IMPORTANT

Read carefully before use.

Keep the manual for future consultation.

1.1 Validity

This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de-

scribe the functions of the named product and provide the most important information for the safe use of

the device. The description is written in accordance with the valid directives. The information in this op-

erating instructions refers to the product's current development status. The document shall remain valid

provided that the customer does not make any changes to the product.

1.2 Applicable documents

TM 700 Operating instructions

Declaration of conformity A component of these instructions

You can find this document in the Pfeiffer Vacuum Download Center.

1.3 Target group

These operating instructions are aimed at all persons performing the following activities on the product:

●Transportation

●Setup (Installation)

●Usage and operation

●Decommissioning

●Maintenance and cleaning

●Storage or disposal

The work described in this document is only permitted to be performed by persons with the appropriate

technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-

uum.

1.4 Conventions

1.4.1 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required ac-

tion is indicated by an individual step or multi-part action steps.

Individual action step

A horizontal, solid triangle indicates the only step in an action.

►This is an individual action step.

Sequence of multi-part action steps

The numerical list indicates an action with multiple necessary steps.

1. Step 1

2. Step 2

3. ...

1.4.2 Pictographs

Pictographs used in the document indicate useful information.

About this manual

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Note

Tip

1.4.3 Stickers on the product

This section describes all the stickers on the product along with their meanings.

TM 700

Made in Germany

Input:

Output:

Ser.-No.: 12345678

Mod.:

M.-No.:

48 V ± 10% DC 8.4 A

PM C01 850

0 - 48 V 9 A 0 - 1000 Hz

2020/08

Rating plate

The rating plate is located on the side of the electronic drive

unit.

warranty seal

Warranty seal

The product is sealed ex-factory. Damaging or removing a war-

ranty seal results in loss of the warranty.

Tbl. 1: Stickers on the product

1.4.4 Abbreviations

Abbreviation Meaning in this document

AI/AO Analog input/analog output

AIC Ampere Interrupting Capacity

DC Direct current

DI/DO Digital input/digital output

fRotation speed value of a vacuum pump (frequency, in rpm or Hz)

IElectric amperage

LED Light emitting diode

[P:xxx] Electronic drive unit control parameters. Printed in bold as a three-digit number in

square brackets. Frequently displayed in conjunction with a short description

Example: [P:312] software version

PElectrical power

PE Earthed conductor (protective earth)

RElectrical resistance

remote 26-pole D-Sub connecting socket on the turbopump electronic drive unit

RS-485 Standard for a physical interface for asynchronous serial data transmission (Recom-

mended Standard)

tTime

TM Drive and magnetic bearing electronics

TMS Temperature management system

UElectric voltage

Tbl. 2: Abbreviations used in this document

About this manual

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2 Safety

2.1 General safety information

The following 4 risk levels and 1 information level are taken into account in this document.

DANGER

Immediately pending danger

Indicates an immediately pending danger that will result in death or serious injury if not observed.

►Instructions to avoid the danger situation

WARNING

Potential pending danger

Indicates a pending danger that could result in death or serious injury if not observed.

►Instructions to avoid the danger situation

CAUTION

Potential pending danger

Indicates a pending danger that could result in minor injuries if not observed.

►Instructions to avoid the danger situation

NOTICE

Danger of damage to property

Is used to highlight actions that are not associated with personal injury.

►Instructions to avoid damage to property

Notes, tips or examples indicate important information about the product or about this docu-

ment.

2.2 Safety instructions

All safety instructions in this document are based on the results of the risk assessment carried out in

accordance with Low Voltage Directive 2014/35/EU. Where applicable, all life cycle phases of the prod-

uct were taken into account.

Risks during installation

DANGER

Danger to life from electric shock

Power supply packs that are not specified or are not approved will lead to severe injury to death.

►Make sure that the power supply pack meets the requirements for double isolation between

mains input voltage and output voltage, in accordance with IEC 61010-1 IEC 60950-1 and

IEC 62368-1.

►Make sure that the power supply pack meets the requirements in accordance with IEC 61010-1

IEC 60950-1 and IEC 62368-1.

►Where possible, use original power supply packs or only power supply packs that correspond

with the applicable safety regulations.

Safety

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DANGER

Danger to life from electric shock

When establishing the voltages that exceed the specified safety extra-low voltage (according to IEC

60449 and VDE 0100), the insulating measures will be destroyed. There is a danger to life from elec-

tric shock at the communication interfaces.

►Connect only suitable devices to the bus system.

WARNING

Risk of injury due to incorrect installation

Dangerous situations may arise from unsafe or incorrect installation.

►Do not carry out your own conversions or modifications on the unit.

►Ensure the integration into an Emergency Off safety circuit.

Risks in the event of malfunctions

WARNING

Risk of injury from parts moving after a power failure or troubleshooting

The "pumping station" function of the electronic drive unit will remain active after a power failure or if

errors occur that shut down the vacuum pump or the system. When power is restored or after ac-

knowledging a fault, the vacuum pump runs up automatically. There is a risk of injury to fingers and

hands if they enter the operating range of rotating parts.

►Always keep the mains connection freely accessible so you can disconnect it at any time.

►Remove present mating plugs or bridges from the electronic drive unit possibly before the mains

power returns, as these can cause an automatic run-up.

►Switch the pump off using the "Pumping station" function (parameter [P:010]).

2.3 Safety precautions

Duty to provide information on potential dangers

The product holder or user is obliged to make all operating personnel aware of dangers

posed by this product.

Every person who is involved in the installation, operation or maintenance of the product

must read, understand and adhere to the safety-related parts of this document.

Infringement of conformity due to modifications to the product

The Declaration of Conformity from the manufacturer is no longer valid if the operator

changes the original product or installs additional equipment.

●Following the installation into a system, the operator is required to check and re-evalu-

ate the conformity of the overall system in the context of the relevant European Direc-

tives, before commissioning that system.

General safety precautions when handling the product

►Use only power supply packs that comply with the applicable safety regulations.

►Observe all applicable safety and accident prevention regulations.

►Check that all safety measures are observed at regular intervals.

►Recommendation: Establish a secure connection to the earthed conductor (PE); protection class

III.

►Never disconnect plug connections during operation.

►Keep lines and cables away from hot surfaces (> 70 °C).

►Do not carry out your own conversions or modifications on the unit.

►Observe the unit protection class prior to installation or operation in other environments.

►Observe the protection class by ensuring the correct seating of the present sealing plugs.

►Disconnect the electronic drive unit only once everything has come to a complete standstill and

when the mains power supply of the turbopump is interrupted.

Safety

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