rbd instruments IG2 Bedienungsanleitung
IG2 Quick Start Guide
Unpacking the IG2
1. Inspect the boxes for any visible damage. If there is any damage, please report it to the shipping
company immediately.
2. Remove all components and inspect them for damage. If there is any damage, please report it to
the shipping company immediately.
3. Verify that you have the following items. If any are missing, please contact RBD Instruments at
541-330-0723 or e-mail us at tech@rbdinstruments.com.
•04-165 Ion Source
•32-175 Control
•IG2-CA1 Cable
•AC Power Cord
•IG2 USB ve (includes IG2 Manual)
1. Install the 04-165 Ion Source in the vacuum system.
2. Bake the system at 150° C to 200° C for 4 to 8 hours. You may use heat tape to bake only the 04-
165.
3. Install the 32-175 Control in a 19" electronics rack or use on a desktop.
4. Verify that the 32-
5. Connect the 04-165 Ion Source to the 32-175 Control using the IG2-CA1 cable.
6. Connect the AC power cord (120 VAC OR 230 VAC) to the 32-175 and then plug the AC power cord
into the power outlet. DO NOT TURN ON THE POWER to the 32-.
7. Set the following switches and controls on the 32-175 Control front panel:
a.
b. Set the Beam Voltage Select dial
c. Turn the Focus Adjust dial arrow to center (straight up).
d. Turn the Filament Adjust dial fully counterclockwise (set to 0).
8. On the 32-175 Control back panel, set the Filament Select Switch (labeled F1 and F2) to the F1
p
9. -175, which appear on the next page.
The IG2 is now ready for use.
32-175 Controller
32-175 Front Panel Controls and Meter
•Main power ON / OFF: Turns the 32-175 ON and OFF
•Switch:
remotely. In the remote mode TTL low (or shorted relay contacts) = Beam ON
•: Sets the Beam Voltage to 500, 1000, 1500, or 2000 volts DC. The Beam
voltage accelerates the ions to the target.
•Focus: Adjusts the size of the ion beam.
•:
the emission meter.
•: Displays the emission current, 25mA nominal.
-gassing of the 04-165 Ion Source
NOTE: Before outgassing the 04-165 ion source the vacuum chamber needs to be baked out to
remove water vapor from the ion source.
1. With the 32-
ament current. 0 to 10 turns corresponds
2. Set the Beam Voltage Knob to 500 V and the Beam Voltage Switch to OFF.
3. Turn the 32-175 main power switch ON.
4. ve 1 to 2 mA of emission
current.
5.
emission current.
6.
emission current.
7. Repeat
8. mA and the Beam voltage set to 500 V, turn the beam
voltage ON.
9. Wait 5 minutes and then turn the beam voltage to 1000V.
10. Wait 5 minutes and turn the beam voltage to 1500V.
11. Wait 5 minutes and turn the beam voltage to 2000V.
12. Turn the beam voltage OFF.
13. Turn the emission current knob fully CCW.
14. Repeat steps 2-
15. -175 main power.
The 32-175 and 04-165 ion source are now ready to operate
-175 Control and 04-165 Ion Source
1. Make sure that the emission current knob is fully CCW.
2. Set the beam voltage to OFF.
3. 2 mA of emission current.
4. Let the emission current stabilize for a minute then slowly increase the emission current knob
5. Back-to 6 X 10-5 To rr.
6. Set the beam voltage knob to the
7. When you turn the beam voltage to ON the 04-
Ion BD
Method 1 - Measure the Target Current:
Using a picoammeter with a +90 V bias to measure the target current. Adjust the Focus knob on the
32-175 to maximize the target current (typically 5 A). The maximum current corresponds to the
highest current density (smallest beam diameter).
Method 2 – Focus on a Phosphor S
Insert a pho
sample. When the beam voltage is turned on the phosphor will illuminate. Adjust the 32-175 Focus
an also use this method to
de-
beam is defocuses.
RBD Instruments, Inc.
www.rbdinstruments.com
2437 NE Twin Knolls Dr
Suite 2
Bend, OR 97701
541-330-0723
Andere Handbücher für IG2
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