SITEK SlickDevice S1 Bedienungsanleitung
Page 1
© SITEK Process Solutions
SlickDevice™ S1/F1 Intelligent SRD
Controller
Owner'sManual
SITEK Process Solutions
www.sitekprocess.com
916-797-9000
233 Technology Way, Bldg. 3
Rocklin, CA 95765
Cover Page 1
Page 2
© SITEK Process Solutions
Table of contents
Introduction..................................................................................................................................................................5
Benefits.....................................................................................................................................................................5
Layout ...........................................................................................................................................................................6
Process Description ......................................................................................................................................................8
Features....................................................................................................................................................................8
Initial Start Up...............................................................................................................................................................9
General Settings .........................................................................................................................................................10
Clock Setting ...........................................................................................................................................................11
Screen Brightness and Volume...............................................................................................................................12
Change Password ...................................................................................................................................................13
Recipe Program Settings.............................................................................................................................................14
Quality Rinse...........................................................................................................................................................17
Skip step or Dry only recipe....................................................................................................................................18
Editing Process Settings in a recipe ........................................................................................................................18
Process Setting Example.........................................................................................................................................20
Quick Reference of Operations Screens.....................................................................................................................21
IDLE.........................................................................................................................................................................21
Rinse .......................................................................................................................................................................22
Purge.......................................................................................................................................................................22
Dry1 ........................................................................................................................................................................23
Dry2 ........................................................................................................................................................................24
Q-rinse (Optional step) ...........................................................................................................................................24
Process Complete Successful..................................................................................................................................25
Process Complete Unsuccessfull ............................................................................................................................26
Alarms.........................................................................................................................................................................27
How to clear alarms................................................................................................................................................30
Maintenance Mode / Tool Down ...........................................................................................................................31
Error codes .............................................................................................................................................................32
Error Codes List.......................................................................................................................................................33
N2 Saver: Customized Nitrogen Parameters ..............................................................................................................35
Autocycle ....................................................................................................................................................................37
Manual Mode .............................................................................................................................................................39
Lamp test ................................................................................................................................................................41
Page 3
© SITEK Process Solutions
Valve Actuators.......................................................................................................................................................41
Valve Security Interlocks. ...................................................................................................................................42
Sensors Test f..........................................................................................................................................................44
How to check the sensors...................................................................................................................................45
Start and Stop Button test..................................................................................................................................46
Sensors Check List...............................................................................................................................................47
Actuators ................................................................................................................................................................48
Actuators – Anti-Static............................................................................................................................................49
Anti-Static unit working properly .......................................................................................................................49
Anti-Static unit failing .........................................................................................................................................50
Anti-Static unit not connected ...........................................................................................................................51
Actuators – N2 Heater............................................................................................................................................52
N2 Heater working properly...............................................................................................................................53
N2 Heater failing.................................................................................................................................................54
N2 Heater Security Interlock ..............................................................................................................................55
Actuators – Bowl Heater ........................................................................................................................................56
Bowl Heater working properly ...........................................................................................................................57
Bowl Heater failing .............................................................................................................................................58
Bowl Heater Process Switch ...............................................................................................................................59
Bowl Heater Overtemp Switch ...........................................................................................................................60
Motor and Tach – Manual Mode............................................................................................................................61
Motor/Tach Manual Mode For S1 Model ..............................................................................................................62
Motor/Tach Manual Mode For F1 Model ..............................................................................................................63
Open Speed Loop ...............................................................................................................................................64
Closed Speed Loop..............................................................................................................................................68
Resistivity Probe Test .............................................................................................................................................72
Resistivity Probe working properly.....................................................................................................................73
Resistivity Probe not connected .........................................................................................................................74
All Manual Operation .............................................................................................................................................75
Manual Mode Security Interlocks list.....................................................................................................................77
Analytics .....................................................................................................................................................................78
Logbook ......................................................................................................................................................................79
How to download SITEK SlickDevice™ log information onto your laptop..................................................................83
Program Installation: ..............................................................................................................................................83
USB Cable: ..............................................................................................................................................................83
Page 4
© SITEK Process Solutions
Operation: ..............................................................................................................................................................84
Download file: ........................................................................................................................................................89
Page 5
© SITEK Process Solutions
Introduction
The S1 and F1 models of SITEK's SlickDevice™ are the first intelligent replacement controllers for the
Semitool Spin Rinse Dryer.
SlickDevice™ uses intelligent automation and control algorithms for smooth and safe tool operation
using a clear and easy-to-read interface showing the process in real-time.
Featuring an intuitive Graphic User Interface, advanced analytics, programmable process settin gs,
and built-in diagnostic tools, the SlickDevice™ S1/F1 SRD controllers provide all required functionality
for a reliable and continuous operation.
Benefits
Direct cost savings through the N2 Saver feature
Intuitive and user-friendly operator interface
Direct “plug and play” upgrade
Full-color Touch screen display that can be operated wearing any gloves
Intelligent controller technology featuring advanced automation and control algorithms
Real-time alerts and warnings
Programmable process settings and easy recipe editing interface
Quality rinse (Q-Rinse) option for enhanced operation
Advanced Diagnostic tools and maintenance mode with intuitive troubleshooting
Time-saving and better results with automatic checklists for sensors
Page 6
© SITEK Process Solutions
Layout
Front panel:
• Illuminated “Upload” push button for data transfer
• Crystal-Lex full color touch screen display
• Illuminated, industrial grade ON/OFF switch
• Protective cap over mini-USB port
The S1 Model of the SlickDevice™ is a highly efficient controller designed to operate
with SRDs that feature Brushless DC Motors and Servo Amps.
The SlickDevice™ F1 Model is specifically engineered to operate with SRDs that
have brushed DC motors and DC motor controllers.
Page 7
© SITEK Process Solutions
Rear panel F1 Model:
• Resistivity probe connector
• RPJ12 umbilical cord connector
• 50 pin ribbon cable RPJ2 connector
• Ground cable
• All connectors match existing Semitool 101 or 102 controllers. **Replacement to a
102 controller requires an adapter to account for an alternate pin format.
Rear panel S1 Model:
• Resistivity probe connector
• RPJ12 umbilical cord connector
• RPJ19 connector for servo amp
• 50 pin ribbon cable RPJ2 connector
• Ground cable
• All connectors match existing Semitool 101 or 102 controllers. **Replacement to a
102 controller requires an adapter to account for an alternate pin format.
Page 8
© SITEK Process Solutions
Process Description
The Spin Rinse Dryer (SRD) is a rinse and drying system that uses centrifugal forces to rinse and dry
the surface of a substrate.
The substrates are usually loaded into the SRD’s stainless-steel chamber and axially rotated while
injecting DI (deionized water) for the rinse process.
The liquid on the substrate surface is spun off and drained from the bowl, while liquid droplets on
the drying chamber surfaces are evaporated.
To improve with drying the substrates, ambient or heated N2 or CDA is introduced at controlled
RPM and time duration. Heater blanket(s) assist in drying by directly heating the chamber surface.
Features
• 6 total recipe capacity:
• 5 process recipes
• 1 auto cycles
• Data logging and analytics
• Safe Manual Mode operation with alarm diagnostics
• N2 waste reduction
• Heated or ambient N2 process configuration
Page 9
© SITEK Process Solutions
Initial Start Up
• Once the SlickDevice™ controller is installed into the SRD, connect the ground wire, and
complete all cable connections, including the 110v/220v power cord.
• Turn on the N2 and DI water facility supply to the tool.
• Turn on the SlickDevice™ controller.
The controller is now ready for the initial run.
Note: The controller will self-calibrate to the motor controller and motor.
First, the Time & Date must be set. A
screen requiring this step will
automatically populate.
To set the time, use the up/down
arrows under “H,M,S” in “Set Time”.
To set the date, use the up/down
arrows under “Set Date”.
Next, a password must be set. A screen
requiring this step will automatically
populate.
The initial password is 0-0-0-0.
The password can now be changed to
any 4 numbers combination.
The password can be changed later in
the Settings section of the controller.
Page 10
© SITEK Process Solutions
General Settings
Adjustment of general settings (Clock, Brightness, Volume and Password).
When the Idle screen appears,
Press “Menu”.
Enter the password that was set
on initial startup.
Select “Controller Settings”
from the Main Menu page 1
of 2.
Dieses Handbuch passt für folgende Modelle
1
Inhaltsverzeichnis
