SMC Networks CYV Series Bedienungsanleitung

(Conceptual drawing)

Vacuum chamber

(Transfer unit)

Series CYV

CAT.ES20-158 A

Simplifies and reduces

the size of equipment

Since the cylinder can be installed inside a vacuum

chamber, it contributes to simplifying

and reducing the size of a transfer system.

Air cylinder for transfer

in vacuum environments (1.3 x 10

4Pa)

Rodless Cylinder for Vacuum

Series CYV

ø15, ø32

0.1

Stainless steel

linear guide &

low particulate generation

vacuum grease

Operation cycles

Particulate generation [particles/cycle]

5.0

0.0 1000000 200000 1000000

There is no particulate generation due

to friction, since the construction does

not allow contact between the cylinder

tube's exterior surface and the slide

table's internal surface.

Non-contact construction

No contact

Cylinder tube

Slide table

Note 1) This data indicates deterioration with age of the average number

of particles per operation under the following test conditions.

• Cylinder: CYV32-100 •Work piece weight: 5kg

• Average speed: 100mm/s

• Measurement environment: Operation in the atmosphere after

baking at 150°C for 48 hours.

Note 2) This data is considered typical but not guaranteed.

Note 3) A particulate generation test has been conducted in a vacuum

environment of 10-⁵Pa.

A special cylinder tube using extruded

aluminum material is employed.

No deflection or contact occurs even

for long strokes, since the cylinder is

rigidly attached to the base and the

slide table is independently supported

by a linear guide.

Special cylinder tube

Long strokes

(Max. 700mm)

Air cylinder for transfer

Low particulate generation

Speed [mm/s]

Relationship between speed and impact acceleration

Impact acceleration [m/s²]

50 100 150 200 250 300

Low particulate generation at the stroke ends

Particulate generation

has been reduced at

the stroke ends by

reducing impact using

a sine cushion and by

stopping the stroke

using an internal

stopper.

Rodless Cylinder for Vacuum

Series CYV

ø15, ø32

Particulate generation from the linear

guide unit has been reduced with the use

of a stainless steel linear guide and low

particulate generating vacuum grease.

Reduced initial

particulate

generation

Cleaned, assembled,

inspected and first-stage

packaged in a clean

environment.

Average particle generation (particles >0.1 µ)

is 0.1 particles/cycle. (Atmospheric conditions)

Features 1

in vacuum environments

(1.3 x 10-⁴Pa)

1.3 x 10

⁷Pa⋅m³/sec

Leakage:1.3 x 10

⁷Pa⋅m³/sec or less

(at normal temperatures, excluding gas permeation)

O-ring seals separate vacuum and atmosphere.

Static O-ring seals are used for

all the seals between vacuum

and atmosphere.

Laser marking

Note 1) The chart above shows the leakage test results

based on a test conducted using this cylinder

construction.

Note 2) To allow fine stroke adjustments, O-ring seals

are installed to separate vacuum and atmos-

phere. Consult SMC if the sealing method

needs to be altered.

Reduction of outgassing

due to surface treatment

All the external parts (made of

aluminum alloy) such as the body

and slide table are electroless nickel

plated.

Furthermore, external magnets are

coated with titanium nitride.

Note 1) Consult SMC if other specifications

for surface treatment are required.

Resin materials

eliminated

Laser marking is employed for

the model designation.

Note 1) The data indicates the leakage

measured in a vacuum environment

of 10-⁵Pa.

Note 2) The leakage test result shown is

based on a test conducted for 10

minutes after the cylinder was

pressurized with helium at 0.1 MPa.

Note 3) This data is considered typical but

not guaranteed.

O-ring seal

Employs a

magnetically

coupled rodless

cylinder with no

air leakage from

moving parts.

Fine adjustments

at the end of the stroke

Fine adjustments between –2to 0mm

can be made on one side (–4to 0mm

for both sides).

Reduced outgassing

Leakage [Pa⋅m3/sec]

Time [min]

10-⁷

10-⁸

10-⁹

10-¹⁰

0510

Standard value

Leakage test result

Low leakage

Hexagon wrench

Carefully designed for low particulate generation, low leakage,

and low outgassing.

Features 2

How to Order

CYV 15

Rodless cylinder

for vacuum

32 15mm

32mm

Standard stroke

Bore size

200

Bore size (mm)

15, 32

Standard stroke (mm)

100, 150, 200, 250

300, 350, 400, 450

500, 600, 700

Specifications

Magnet Holding Force

Bore size (mm)

Operating environment pressure

Operating atmosphere

Fluid

Action

Proof pressure

Operating pressure range

Leakage

Maximum baking temperature

Ambient and fluid temperature

Piston speed

Stroke adjustment

Cushion

Port size

Lubrication

Atmosphere to 1.3 x 10-⁴ Pa (ABS)

Air and inert gases

Double acting

0.5MPa

0.05 to 0.3MPa

1.3 x 10

⁷Pa⋅m³/sec or less

(at normal temperatures, excluding gas permeation)

150°C

10 to 60°C

50 to 300mm/s

2 to 0mm on each side (

4 to 0mm total)

Sine cushion (Air cushion)

Vacuum grease for linear guide unit

and inside the cylinder tube

5/16-24UNF 7/16-20UNF

15 32

Bore size (mm)

Magnet holding

force (N)

268

Theoretical Output

Bore size

(mm)

176

804

0.1

0.2

161

0.3

241

Piston area

(mm²)

Operating pressure

(MPa)

(N)

(kg)

Weights

Model

CYV15

CYV32

Standard stroke (mm)

100

1.2

4.2

150

1.4

4.6

200

1.6

5.0

250

1.7

5.5

300

1.9

5.9

350

2.0

6.3

400

2.2

6.7

450

2.4

7.1

500

2.5

7.5

600

2.8

8.3

700

3.2

9.1

Rodless Cylinder for Vacuum

Series CYV

Construction

No.

Description Material Note

Parts list

Magnet A

Piston side yoke

Piston

Piston seal

Wear ring

Shaft

Cushion ring

Magnet B

External slider side yoke

Hold spacer

Slide table

Insertion guide plate

Round head Phillips screw

Side plate A

Side plate B

Hexagon socket head

cap screw

Spring washer

Flat washer

Plate A

Plate B

Cushion seal

Rare earth magnet

Rolled steel plate

Brass/

Aluminum alloy

Fluoro rubber

Special bearing

Stainless steel

Stainless steel/Brass

Rare earth magnet

Rolled steel

Aluminum alloy

Stainless steel

Aluminum alloy

Stainless steel

Aluminum alloy

Fluoro rubber

Aluminum chromated

Zinc chromated

Electroless nickel

plated/Chromated

—/Electroless nickel plated

Titanium nitride coating

Electroless nickel plated

No.

Description Material Note

Inner cover

Cylinder tube gasket

O-ring

Hexagon socket head

set screw

Hexagon socket head

cap screw

Flat washer

Round head Phillips screw

Hexagon socket head

cap screw

Base

Cylinder tube

Tube attaching bracket

Hexagon socket head

cap screw

Flat washer

Hexagon socket head

cap screw

Flat washer

Top cover

Cushion seal holder

O-ring

Linear guide

Aluminum alloy

Fluoro rubber

Stainless steel

Aluminum alloy

Stainless steel

Aluminum alloy

Fluoro rubber

Stainless steel

Electroless nickel plated

Chromated

CYV15

CYV32

Note) In the material and note columns of the parts list above, the first description is for CYV15 and the second description is for CYV32.

#7 #5 @9#0!4#6 !5

!1!9 #4 #8

@2 y

@6 #9

!9 $0 @1

!6 $2#2

#3 !7

#1 ty$1

@4 r

!0 i@8

Section E-E'

Rodless Cylinder forVacuum Series CYV

Dimensions

+0.030

H9 0

+0.030

H9 0

(mm)

Model

CYV15

CYV32

10.5

6.4

10.2

9.5

12.5

37.6

63.3

73.5

5.6

9.2

M6 x 1

M10 x 1.5

Model

CYV15

CYV32

115

M4 x 0.7

M6 x 1

4.5

7.5

5/16-24UNF

7/16-20UNF

100

112

147

79.5

22.5

0.5

115

2.5

3.5

132

165

2-P

2-Counter bore dia. øTB

Counter bore depth TC

4-J

Depth JK

Thread depth PC

(from counter bore surface)

TA TA

Stroke adjustment screw

(inner cover)

Inner cover holding screw Note)

4-MM

øE4-Counter

bore dia.øB

Counter bore

depth C

4-øLD

Thread depth M

Depth ED

PAK

Q + Stroke

Z + Stroke

Y L

E depth EK

Note) Refer to "Cushion Effect (Sine Cushion) and Stroke Adjustment" under Specific Product Precautions on page 11.

Series CYV

The allowable load mass moment differs depending on the work piece mounting method, cylinder mounting orientation and piston speed.

To determine whether or not the cylinder can be operated, do not allow the sum (Σαn) of the load factors (αn ) for each mass and moment to exceed "1".

Load mass

Max. load mass

(Static moment/Dynamic moment)

Allowable moment

Model

CYV15

CYV32

mmax

(kg)

Model

CYV15

CYV32

 Pitch moment

M1 = m x g x (L + B) x 10–3

 Yaw moment

M3 = m x g x (L + A) x 10–3

 Roll moment

M2 = m x g x (L + B) x 10–3

 Pitch moment

Me1 = 1/3 ⋅ We(L + B) ⋅ 10-³∗ Yaw moment

Me3 =1/3 ⋅ We(L + A) ⋅ 10-³∗

We: Load equivalent to impact [N]

m: Load mass [kg] U: Max. speed [mm/s]

g: Gravitational acceleration [9.8m/s³]

M1, 2, 3:

Moment

[N⋅m]

Load mass

[kg]

Distance to load center of gravity [mm]

A, B:

Distance to guide shaft

[mm]

Gravitational acceleration

[9.8m/s2]

Moment generated by the load equivalent to impact at the stroke end

We = 5 x 10–3x m x g x U

∗Average load coefficient

Me1

Moment

Moment generated by the work piece weight even when the cylinder is stopped

(N⋅m)

Model

CYV15

CYV32

16.5

27.0

25.5

48.0

Static Moment

Dynamic Moment

0.3

0.6

0.3

Me3

Design Parameters 1

(mm)

Model

CYV15

CYV32

16.5

27.0

25.5

48.0

(mm)

M1M2

We We

mx g

m x g

mx g

Guide shaft

mounting surface

Guide shaft

mounting surface

Central axis of guide

Central axis of cylinder

Central axis of guide

Central axis of cylinder

Σαn = Load mass (m)

Max. load mass (mmax) + Static moment (M)

Allowable static moment (M max) + Dynamic moment (Me)

Allowable dynamic moment (Me max) ≤1

∗Average load coefficient

Series CYV

Model Selection 1

1. Maximum

load mass

2. Static moment

3. Dynamic moment

Selection Calculation

Item

1. Max. load mass

2. Static moment

3. Dynamic moment

Load factor αn

α1 = m/m max

α2 = M/M max

α3 = Me/Me max

Note

Review m.

m max is the maximum load mass.

Review M1, M2, M3.

Mmax is the allowable moment.

Review Me1, Me3.

Me max is the allowable moment.

The selection calculation finds the load factors (αn) of the items below, where the total (Σαn) does not exceed "1".

Σαn = α1 + α2 + α3 ≤1

Operating conditions

Cylinder: CYV32

Mounting: Horizontal wall mounting

Maximum speed: U = 300 [mm/s]

Load mass: m = 1 [kg] (excluding mass of the arm section)

L1 = 50 [mm]

L2 = 50 [mm]

Item Load factor αnNote

α1 = m/m max

= 1/5

= 0.20

Review m.

Σαn = α1+ α2+ (α3a + α3b)

= 0.20 + 0.24 + (0.13 + 0.16)

= 0.73

The result Σαn = 0.73 ≤1 allows operation.

L1B

mx g

Me3

We W

L1B

Me1

Central axis

of guide

Guide shaft

mounting surface

M2 = m ⋅ g ⋅ (L1+ B) ⋅ 10–3

= 1 ⋅ 9.8 ⋅ (50 + 48) ⋅ 10–3

= 0.96 [N⋅m]

α2 = M2/M2 max

= 0.96/4

= 0.24

Review M2.

Since M1 andM3are not generated,

review is unnecessary.

We = 5 x 10–3⋅m ⋅ g ⋅ U

= 5 x 10–3 ⋅ 1 ⋅ 9.8 ⋅ 300

= 14.7 [N]

Me3 = 1/3 ⋅ We(L2+ A) ⋅ 10–3

= 1/3 ⋅ 14.7 ⋅ (50 + 27) ⋅ 10–3

= 0.38 [N⋅m]

α3a = Me3/Me3 max

= 0.38/3

= 0.13

Review Me3.

Me1 = 1/3 ⋅ We⋅(L1 + B) ⋅ 10–3

= 1/3 ⋅ 14.7 ⋅ (50 + 48) ⋅ 10–3

= 0.48 [N⋅m]

α3b = Me1/Me1max

= 0.48/3

= 0.16

Review Me1.

Calculation Example

Guide shaft mounting surface

Series CYV

Model Selection 2

Vertical Operation

When using in vertical operation, prevention of

work piece dropping due to breaking of the

magnetic coupling should be considered. The

allowable load mass and maximum operating

pressure should be as shown in the table below.

Model

CYV15

CYV32

Allowable load mass

mv (kg)

Intermediate Stops

Table deflection due to pitch moment load Table deflection due to yaw moment load

Table deflection due to roll moment load

Moment (N⋅m)

Table Deflection

Note)

Deflection (mm)

Maximum

operating pressure

Pv (MPa)

50.3 Model

CYV15

CYV32

Stroke

(mm)

CYV15 (M1

)

CYV15 (M2) CYV15 (M3

)

CYV32 (M1

)

CYV32 (M2

)

CYV32 (M3

)

0.1 0.2 0.300.1 0.2 0.300.1 0.2 0.30

Moment (N⋅m)

0.02

0.01

0.04

0.05

0.03

0.5 1 1.5 20

0.02

0.01

0.04

0.05

0.03

0.5 1 1.5 20

0.02

0.01

0.04

0.05

0.03

0.5 1 1.5 20

0.02

0.01

0.04

0.05

0.03

0.02

0.01

0.04

0.05

0.03

0.02

0.01

0.04

0.05

0.03

Deflection (mm)

Central axis of guide

M2 = F x L M3 = F x L

Moment (N⋅m)

Deflection (mm)

Moment (N⋅m)

Deflection (mm)

Moment (N⋅m)

Deflection (mm)

Moment (N⋅m)

Deflection (mm)

Design Parameters 2

Cushion stroke

Note) Deflection: Displacement of point A when

force acts on point F

Point A: Indicates a measurement point

The cushion effect (smooth start-up, soft stop) is applied only before the stroke end in the stroke ranges

indicated in the table below.

The cushion effect (smooth start-up, soft stop) is not available an intermediate stop or return from an

intermediate stop using an external stopper, etc.

When using an intermediate stop with the above information taken into account, implement measures to

prevent particulate generation and set the operating pressure to no more than 0.3MPa.

M1 = F x L

Series CYV

Model Selection 3

Series CYV

Safety Instructions

Note 1) ISO 4414: Pneumatic fluid power -- Recommendations for the application of equipment to transmission and

control systems

Note 2) JIS B 8370: General Rules for Pneumatic Equipment

Warning

Caution : Operator error could result in injury or equipment damage.

Warning

: Operator error could result in serious injury or loss of life.

Danger : In extreme conditions, there is a possible result of serious injury or loss of life.

These safety instructions are intended to prevent a hazardous situation and/or

equipment damage. These instructions indicate the level of potential hazard by a

label of "Caution", "Warning" or "Danger". To ensure safety, be sure to

observe ISO 4414

Note 1),JIS B 8370 Note 2) and other safety practices.

1. The compatibility of pneumatic equipment is the responsibility of the person

who designs the pneumatic system or decides its specifications.

Since the products specified here are used in various operating conditions, their compatibility for the

specific pneumatic system must be based on specifications or after analysis and/or tests to meet your

specific requirements.

2. Only trained personnel should operate pneumatically operated machinery and

equipment.

Compressed air can be dangerous if handled incorrectly. Assembly, handling or repair of pneumatic

systems should be performed by trained and experienced operators.

3. Do not service machinery/equipment or attempt to remove components until

safety is confirmed.

1. Inspection and maintenance of machinery/equipment should only be performed after confirmation of

safe locked-out control positions.

2. When equipment is to be removed, confirm the safety process as mentioned above. Cut the supply

pressure for this equipment and exhaust all residual compressed air in the system.

3. Before machinery/equipment is restarted, take measures to prevent shooting-out of cylinder piston

rod, etc. (Bleed air into the system gradually to create back pressure.)

4. Contact SMC if the product is to be used in any of the following conditions:

1. Conditions and environments beyond the given specifications, or if product is used outdoors.

2. Installation on equipment in conjunction with atomic energy, railway, air navigation, vehicles, medical

equipment, food and beverages, recreation equipment, emergency stop circuits, press applications, or

safety equipment.

3. An application which has the possibility of having negative effects on people, property, or animals,

requiring special safety analysis.

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