SMC Networks LVD Series Bedienungsanleitung

High Purity Chemical Valve

Compact Type

Space saving, compact type is available.

Compact type is introduced as a new series to complement

conventional Series LVC with integral fittings.

Select a series according to the flow rate and

installation requirements.

Mounting base dimensions conform to SEMI

Standard, F65-1101. (Except for LVD10)

Body:

New

PFA

Diaphragm:

PTFE

Actuator section:

PPS

Body:

New

PFA

Diaphragm:

PTFE

Actuator section:

PPS

Body:

New

PFA

Diaphragm:

PTFE

Actuator section:

PPS

Space saving, compact type is available.

Class2

LVC20

54.5

LVD20

54.5

Class3

106

LVD30

79.5

Class4

131

LVC40

LVD40

Class5

LVC50

129

154

LVD50

105.5

114

(mm)

Dimension across inlet/

outlet ports: Reduced by up to

Dimension across inlet/

outlet ports: Reduced by up to

LVC

LV D

Body

Actuator section

Integral clean one-touch fitting construction

(Series KP is used.)

Can select female thread (M5 x 0.8).

Piping from 4 directions are possible.

(Made to Order)

Integral fittings construction

HYPER FITTING®‚

Series LQ1 is used.

Series LVD

Integral tubing (construction)

CAT.ES70-24 -UK

LVC30

LVD10

LVD20

LVD30

LVD40

LVD50

2.1

(0.09)

8.4

(0.35)

346810 12 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1

31.2

(1.3)

45.6

(1.9)

120

(5)

Applicable tubing size

Metric size Inch size

Flow

characteristics

-6

(Cv)

Series

Orifice

diameter

Variations

With flow rate adjustment With by-pass With flow rate adjustment & by-pass

Diaphragm (PTFE)

Special diaphragm construction ensures

gentle opening and closing that prevents

the formation of micro-bubbles.

Piston damper

Absorbs piston momentum to minimize

impact-induced particle generation.

Buffer

Protects diaphragm from deformation

and damage due to back pressure.

Integral fittings construction

Offers quadruple seal construction. Nut lock

mechanism. High flexural strength. Different

tubing sizes can be selected.

Pilot port

Integral clean one-touch fittings construction

Can select female thread (M5).

Body (New PFA)

Compatible with chemicals such as acids,

bases and ultra de-ionized water.

Guide ring

Eliminates lateral motion of the poppet

which reduces internal leakage.

Minimal residual liquid

Residual liquid is minimized by the tapered

shape and integral fitting construction,

allowing liquid to flow smoothly, achieving

improved swept flow characteristics.

Features 1

With reducer Basic size

LVD20

LVD30

LVD40

LVD50

8.4

(0.35)

31.2

(1.3)

681012 19 1/4 3/8 1/2 3/4

45.6

(1.9)

120

(5)

Applicable tubing size

Metric size Inch size

Flow

characteristics

-6

(Cv)

Series

Orifice

diameter

Option

Integral fittings

Integral tubing (construction)

How to Order

Integral Fitting Type (Hyper Fittings)

Series LVD

Connecting tubing

outside diameter

ø3

ø4

ø6

ø8

ø10

ø12

ø19

Body class

Basic size With reducer

345

Symbol

Metric sizes

Inch sizes

Applicable tubing size

Application

Ports A & B same size

Refer to the

applicable tubing

table to the left

Different diameter tubings can be selected within

the same body class.

Different diameter tubing can not be selected for the

body size 1.

Symbol

Nil

Port B (OUT) different dia. size

None

With flow rate adjustment

With by-pass

With flow rate adjustment & by-pass

Note) Refer to “Variations” in the table

below for option combinations.

Options can not be combined each

other.

Nil

Option

Body class

2, 3, 4, 5

1, 2, 3, 4, 5

Thread type

ø4 one-touch fitting

ø6 one-touch fitting

Symbol

Nil

Pilot port thread type

Body class

LVD 1 0 03S

Symbol

Body class

Orifice dia.

ø2

ø4

ø8

ø10

ø16

Valve type

N.C.

N.O.

Double acting

Variations

N.C.

N.O.

N.C.

Double

acting

N.C.

Double

acting

N.C.

Double

acting

N.C. N.O.

Double

acting

Inch

Valve type

Model

Orifice diameter

Metric

Tubing O.D.

Symbol

Type

Basic type

With flow

rate

adjust-

ment

With

by-pass

With flow

rate

adjust-

ment &

by-pass

LVD10

ø2

ø3, 1/8

LVD20

ø4

4, 6

1/8, 3/16, 1/4

LVD30

ø8

6, 8, 10

1/4, 3/8

LVD50

ø16

12, 19

1/2, 3/4

LVD40

ø10

10, 12

3/8, 1/2

Body

Diaphragm

Note

Actuator section

End plate

Symbol

PFA

PPS

PTFE

—

Ammonium hydroxide

compatible

Nil

Material

Note) Refer to “Variations”

in the table below

for valve type

combinations.

1/8

3/16

1/4

3/8

1/2

3/4

Double

acting

Double

acting

Double

acting

Double

acting

Series LVD

Standard Specifications

Model LVD10

3, 4

1/8

ø2

2.1

0.09

ø4 x ø3 tubing

ø6 x ø4 tubing

LVD20

4, 6

1/8, 3/16, 1/4

ø4

8.4

0.35

0 to 0.5

0.3 or less

0 to 0.3

0.2 or less

0 (with water pressure)

0.3 to 0.5

0 to 100

0 to 60

LVD30

6, 8, 10

1/4, 3/8

ø8

31.2

1.3

LVD50

12, 19

1/2, 3/4

ø16

120

LVD40

10, 12

3/8, 1/2

ø10

45.6

1.9

0.04 0.09 0.16 0.400.19

Orifice diameter

Withstand pressure (MPa)

Operating pressure (MPa) <A씮B flow>

Valve leakage (cm3/min)

Pilot air pressure (MPa)

Fluid temperature (°C)

Ambient temperature (°C)

Weight (kg)

Metric

Inch

Av x 10-6m2

Tubing O.D.

Back pressure (MPa)

Specific Product Precautions

1. Connect tubing with special tools.

Refer to pages 9 through 11 regarding tubing connection and special tools.

2. Tighten the nut to the end surface of the body. As a guide, refer to the

proper tightening torques shown below.

Piping

Caution

Tightening torque for piping

Body class Torque (Nm)

0.3 to 0.4

0.8 to 1.0

1.0 to 1.2

2.5 to 3.0

Different Diameter Tubing Applicable with Reducer

Different diameter tubing can be selected (within a body class) by using a nut and

insert bushing (reducer).

Different diameter tubing can not be selected for the body size 1.

Note) Refer to page 9 for information on changing tubing sizes.

Body class

Tubing O.D.

Metric sizes Inch sizes

With reducer

Be sure to read before handling. Refer to pages15 through 18 for safety

instructions and high purity chemical valve precautions.

Flow

characteristics

Pilot port

size

One-touch fitting

Threaded

3 1/8 3/164 1/48 3/810 12 19 1/2 3/46

Integral Fitting Type (Hyper Fittings)

Series LVD

Construction

No.

Description Material

Parts list

Actuator section

Body

Diaphragm

End plate

Insert bushing

Nut

Collar

Flow rate adjuster section

PPS

PFA

PTFE

PPS

PFA

PPS

Standard type

N.C. type N.O. type Double acting type

With flow rate adjustment With by-pass

With reducer

tyrw

ABAB

Series LVD

Dimensions

Model

LVD1-S

LVD2-S

LVD3-S

LVD4-S

LVD5-S

114

11.5

14.5

17.5

4.5

ø6

31.5

38.5

22.5

54.4

79.5

105.5

9.5

17.5

28.5

45.5

(mm)

Dimensions

ø4

(5/32")

Basic type

(Q)

(F)

2-Pone-touch fitting

4-øM

Sensor (Breathing port)

2-V

Pilot port threaded type

Integral Fitting Type (Hyper Fittings)

Series LVD

With flow rate adjustment

With by-pass

With flow rate adjustment & by-pass

Model

LVD1-S

LVD2-S

LVD3-S

LVD4-S

LVD5-S

11.5

29.5

(mm)

Dimensions

Model

LVD2-S

LVD3-S

LVD4-S

LVD5-S

9.6

17.5

(mm)

Dimensions

Model

LVD2-S

LVD3-S

LVD4-S

LVD5-S

11.5

29.5

9.6

17.5

(mm)

Dimensions

(Max. S)

(Max. T)

(Max. S)

Tube Extensions

Series LVD

Note) Refer to “Variations” in the table

below for option combinations.

N.C.

N.O.

N.C.

Type

Basic type

With flow

rate

adjust-

ment

Variations

Inch

Model

Orifice diameter

Metric

Tubing O.D.

Symbol

LVD20-T

ø4

1/4

LVD30-T

ø8

3/8

LVD50-T

ø16

3/4

LVD40-T

ø10

1/2

Valve type

None

With flow rate adjustment

Nil

Option

Body class

ø6 one-touch fitting

Symbol

Nil

Pilot port thread type

Body class

LVD 2 0 06T

Symbol

Body class

Orifice dia.

ø4

ø8

ø10

ø16

Valve type

N.C

N.O

Double acting

Tubing O.D.

ø6

ø10

ø12

ø19

1/4

3/8

1/2

3/4

Body class

2345

Symbol

Metric sizes

Inch sizes

Tubing O.D.

N.C.

Double

acting

N.C. N.O.

Double

acting

Body

Symbol

PFA

Nil

Diaphragm

Note

Actuator section

End plate

PPS

PTFE

—

Ammonium hydroxide

compatible

Material

How to Order

Note) Refer to “Variations”

in the table below

for valve type

combinations.

Double

acting

Double

acting

High Purity Chemical Valve (Compact Type)

Series LVD

Specific Product Precautions

Be sure to read before handling.

Refer to pages 15 through 18 for

safety instructions and high purity

chemical valve precautions.

Standard Specifications

ø6 x ø4 tube

LVD20

1/4

ø4

8.4

0.35

0 to 0.5

0.3 or less

0 to 0.3

0.2 or less

0 (with water pressure)

0.3 to 0.5

0 to 100

0 to 60

LVD30

3/8

ø8

31.2

1.3

LVD50

3/4

ø16

120

LVD40

1/2

ø10

45.6

1.9

0.09 0.15 0.360.17

Construction

Standard type

N.C. type N.O. type Double acting type

No.

Description Material

Parts list

Actuator section

Body

Diaphragm

End plate

Flow rate adjuster section

PPS

PFA

PTFE

PPS

With flow rate adjustment

Orifice diameter

Withstand pressure (MPa)

Operating pressure (MPa)

<A씮B flow>

Valve leakage (cm3/min)

Pilot air pressure (MPa)

Fluid temperature (°C)

Ambient temperature (°C)

Weight (kg)

Metric

Inch

Av x 10-6m2

Tubing O.D.

Back pressure (MPa)

Flow

characteristics

Pilot port

size

One-touch fitting

Threaded

Model

Series LVD

Dimensions

Model

LVD2-T

LVD3-T

LVD4-T

LVD5-T

104

136

137

169.5

17.5

ø6

31.5

38.5

79.5

105.5

14.5

17.5

42.5

(mm)

(Max. S)

Model

LVD2-T

LVD3-T

LVD4-T

LVD5-T

29.5

(mm)

Dimensions

Breathing port

(F)

(Q)

2-Pone-touch fitting

K4-øM

Basic type

With flow rate adjustment

Pilot port threaded type

2-U

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