SMC Networks PFA Series Bedienungsanleitung

CAT.ES100-31 C

Digital Flow Switch

Series PFA/PFW

For Air For Water

High flow rate type added to Series PFA (3000, 6000, 12000l)

Remote Type

Integrated Type

Series PFW

Series PFA

Bright and easy to read

LED display/digital setting

Two independent flow rate settings are possible.

PFA710

750

711

721

751

703H

706H

712H

PFA510

550

511

521

551

PFA30m

PFW31m

30m

32m

31m

— —

1 to 10

5 to 50

10 to 100

20 to 200

50 to 500

150 to 3000

300 to 6000

6000 to 12000

Series variations

Digital Flow Switch for Air

Flow rate setting and detection are

possible on digital display.

Digital Flow Switch

Two types for different applications

Integrated and remote type displays

Digital Flow Switch for Water

Switch output

Output specifications Port size (Rc, NPT, G)

Analog output

Accumulated

pulse output

1/8 1/4 3/8 1/2 11/21 2

Integrated

display type

Remote type

Display unit Sensor unit

Flow rate

measurement

range l/min

PFW704

720

740

PFW504

520

540

0.5 to 4

2 to 16

5 to 40

P P

Switch output

Output specification

Port size (Rc, NPT, G)

3/8 1/2 3/4

Integrated

display type

Remote type

Display unit Sensor unit

50l/min

10l/min

500l/min

200l/min

100l/min

12000l/min

6000l/min

3000l/min

New

Size (port size)

Flow rate

16l/min

4l/min

40l/min

Size (port size)

For Air

Series variations

For Water

Can be switched from real-time flow rate

to accumulated flow.

Water resistant construction

equivalent to IP65

A new LCD display is used for the high flow

rate types (PFA703H/706H/712H) in order to

reduce the power consumption without

losing visibility.

Flow rate

measurement

range l/min

Features 1

Maximum Flow Rate

3000, 6000, 12000l/min types

have been newly released!

Detection principle of digital flow switch for air

A heated thermistor is installed in the passage, and the fluid absorbs heat from

the thermistor as it flows past it. The thermistor's resistance value increases as

heat is absorbed, and since the increase ratio has a uniform relationship to the

fluid velocity, it is possible to detect the fluid velocity by measuring this

resistance value. To further compensate the fluid and ambient temperatures,

there is also a built-in temperature sensor, which allows stable measurement

within the operating temperature range.

Application examples

Fluid velocity

detection element

Temperature

compensation element

Detection principle of digital flow switch for water

When a bar shaped object (vortex generator) is placed in the flow,

reciprocal vortexes are generated on the downstream side. These

vortexes are stable under certain conditions, and their frequency is

proportional to the flow velocity, resulting in the following formula.

f = k x v

f: Frequency of vortexes, v: Flow velocity, k: Proportional constant

(determined by the vortex generator's dimensions, shape, etc.) Therefore,

the flow rate can be measured by detecting this frequency.

Fluid

Vortex generator Vortex detector

Flow control of cooling water for welding gun

Flow rate measurement range

PFA703H: 150 to 3000l/min

PFA706H: 300 to 6000l/min

PFA712H: 3000 to 12000l/min

Main line flow control

Flow control for each equipment line

Machine

100l/pulse

Pulse counter

This flow switch uses

"l/min" as the flow rate

indicator unit, and the mass

flow is converted and

notated under conditions of

0°C and 101.3kPa.

The conversion conditions

can be switched to 20°C

and 101.3kPa for the high

flow rate types.

Flow control of N2gas to prevent

detection camera shimmering and

lead frame oxidation

Flow control of high frequency

electric power supply cooling water,

for wafer temperature regulation

MThe accumulated pulse output

function (100l/pulse) enables remote

detection of accumulated flow.

• Analog output (1 to 5VDC, 4 to

20mA) and switch output can

also be applied.

The addition of the high flow rate types supports

energy saving measures.

Air flow rates can be controlled from the main line

to each equipment line.

Features 2

How to order

PFA7 10 01 27

Nil

Wiring specification

3m lead wire with connector

Without lead wire

Flow rate range

1 to 10l/min

5 to 50l/min

10 to 100l/min

20 to 200l/min

50 to 500l/min

Symbol

Port size

1/8

1/4

3/8

1/2



100



200



500



Size

Applicable model

Flow rate (l/min) Nil

Output specification

NPN open collector 2 outputs

NPN open collector 1 output + Analog output (1 to 5V)

PNP open collector 2 outputs

PNP open collector 1 output + Analog output (1 to 5V)

Applicable model

Nil

Thread type

Unit specification

NPT

PFA710, 750

PFA711, 721, 751

PFA710, 750

PFA711, 721, 751

PFA710, 750

PFA711, 721

PFA751

Integrated

display type

For Air

1 to 10l/min 5 to 50l/min

Specifications

Note 1) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min or l).]

Note 2) The output functions operate only for the real-time flow rate display, and do not operate for the accumulated flow display.

Note 3) Window comparator mode —Since hysteresis is 3 digits, separate P1 and P2 by 7 digits or more. 1 digit is the minimum setting unit (refer to the table above).

Note 4) The flow rate unit is based on 0˚C and 101.3kPa.

PFA710 PFA750 PFA711 PFA721 PFA751

Model

Measured fluid

Detection type

Flow rate measurement range

Minimum setting unit

Operating pressure range

Withstand pressure

Pressure loss

Accumulated flow range

Operating temperature range

Linearity

Repeatability

Temperature characteristics

Output

specifications

Indicator lights

Response time

Hysteresis

Power supply voltage

Current consumption

Withstand voltage

Insulation resistance

Noise resistance

Vibration resistance

Impact resistance

Weight

Enclosure

Port size (Rc, NPT, G)

Display units

Note 1)

±1% F.S. or less

1/8, 1/4

Dry air, N₂

Heater type

10 to 100l/min

1% of maximum flow rate

l, ft³x 10-¹

0 to 0.5MPa

1.0MPa

3kPa (at 100l/min)

0 to 999999l

0 to 50°C (with no condensation)

±5% F.S. or less

±3% F.S. or less (15 to 35°C), ±5% F.S. or less (0 to 50°C)

1s or less

Hysteresis mode: Variable (can be set from 0), Window comparator mode: Fixed (3 digits)

12 to 24VDC (ripple ±10% or less)

1000VAC for 1 min. between external terminal block and case

50MΩ(500VDC) between external terminal block and case

1000Vp-p, Pulse width 1µs, Rise time 1ns

10 to 500Hz at the smaller of amplitude 1.5mm or acceleration 98m/s² in X, Y, Z directions, 2 hours each

490m/s² in X, Y, Z directions, 3 times each

Equivalent to IP65

NPN open collector

PNP open collector

3kPa (at 50l/min)

150mA or less

250g (without lead wire)

3/8 1/2

Real-time flow rate

Accumulated flow

l/min, CFM x 10-²

27, 67: Lights up when ON, OUT1: Green, OUT2: Red

––

27, 67: Lights up when ON, OUT1: Green, OUT2: Red

28, 68: Lights up when ON, OUT1: Green, OUT2: None

Output voltage: 1 to 5V

Load impedance: 100kΩor more

Maximum load current: 80mA, Internal voltage drop: 1V or less (with load current of 80mA)

Maximum applied voltage: 30V

Maximum load current: 80mA

Internal voltage drop: 1.5V or less (with load current of 80mA)

10kPa (at 200l/min) 30kPa (at 500l/min)

±2% F.S. or less

20 to 200l/min

l/min, CFM x 10-¹

50 to 500l/min

290g (without lead wire)

160mA or less 170mA or less

Switch

output

Analog

output

With unit switching function

Fixed SI unit Note)

Note 2)

Note 3)

Note) Fixed units:

Real-time flow rate: l/min

Accumulated flow: l

Digital Flow Switch

Series PFA

For Air

How to Order

PFA3

Remote Type

Display Unit 00A

Mounting Panel mount

DIN rail, wall mount

Flow rate range

10, 50l/min

100, 200, 500l/min

Nil

Output specification

NPN open collector 2 outputs

PNP open collector 2 outputs

NPN open collector 1 output + Analog output (1 to 5V)

PNP open collector 1 output + Analog output (1 to 5V)

Applicable model

PFA30, 31

PFA31

Specifications

l/min, CFM x 10-²

Model

Flow rate measurement

range

Minimum setting unit

Accumulated flow range

Operating temperature range

Linearity

Repeatability

Response time

Hysteresis

Power supply voltage

Current consumption

Enclosure

Weight

Temperature

characteristics

Output

Specifications

Display

units

PFA301PFA300

Note 1) The flow rate measurement range can change depending on the setting.

Note 2) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min or l).]

Note 3) The system accuracy when combined with sensor unit.

Note 4) The output functions operate only for the real-time flow rate display, and do not operate for the accumulated flow display.

Note 5) Window comparator mode –– Since hysteresis is 3 digits, separate P1 and P2 by 7 digits or more. 1 digit is the minimum setting unit (refer to the table above).

Note 6) The flow rate unit is based on 0°C and 101.3kPa.

1% of maximum flow rate

l, ft³x 10-¹

0 to 999999l

0 to 50°C (with no condensation)

±5% F.S. or less

l/min, CFM x 10-¹

10 to 100l/min, 20 to 200l/min

50 to 500l/min

1 to 10, 5 to 50l/min

Lights up when On, OUT1: Green, OUT2: Red

––

Lights up when ON, OUT1: Green, OUT2: None

60mA or less

Equivalent to IP40

45g

1s or less

Hysteresis mode: Variable (can be set from 0), Window comparator mode: Fixed (3 digits) Note 4)

12 to 24VDC (ripple ±10% or less)

Indicator lights

50mA or less

PFA310 PFA311 PFA312 PFA313

±1% F.S. or less (15 to 35°C)

±2% F.S. or less (0 to 50°C)

Lights up when ON, OUT1: Green, OUT2: Red

±1% F.S. or less

±1% F.S. or less Note 3)

Switch

output

Analog

output

NPN open collector

PNP open collector

Maximum load current: 80mA

Maximum applied voltage: 30V

Internal voltage drop: 1V or less (with load current of 80mA)

Maximum load current: 80mA

Internal voltage drop: 1.5V or less (with load current of 80mA)

Output voltage: 1 to 5V

Load impedance: 100kΩor more

Nil

MWith unit switching function

Unit specification

∗ PFA302 and 303 combinations are not available.

Fixed SI unit Note)

Note) Fixed units:

Real-time flow rate: l/min

Accumulated flow: l

Note 1)

Note 2)

Real-time flow rate

Accumulated flow

Note 3)

Note 4)

Series PFA

For Air

Digital Flow Switch Series PFA

How to Order

PFA5

Remote Type

Sensor Unit

Specifications

Flow rate range

1 to 10l/min

5 to 50l/min

10 to 100l/min

20 to 200l/min

50 to 500l/min Nil

Thread type

NPT

Nil

Wiring specification

3m lead wire with connector

Without lead wire

Symbol

Port size

1/8

1/4

3/8

1/2



100



200



500



Size Applicable model

Flow rate (l/min)

PFA510, 550

PFA511, 521

PFA551

1/8, 1/4 3/8 1/2

200g (without lead wire)

Model

Measured fluid

Detection type

Flow rate measurement range

Operating pressure range

Withstand pressure

Pressure loss

Operating temperature range

Linearity Note 1)

Repeatability

Power supply voltage

Current consumption

Weight

Enclosure

Port size (Rc, NPT, G)

PFA510 PFA550

1 to 10l/min 5 to 50l/min

Note 1) The system accuracy will be adjusted to ±5% F.S. or less when combined with PFA3.

Note 2) The system accuracy will be adjusted to ±1% F.S. or less when combined with PFA30.

Note 3) The flow rate unit is based on 0°C and 101.3kPa.

Dry air, N2

Heater type

10 to 100l/min

0 to 0.5MPa

1.0MPa

3kPa (at 100

/min)

0 to 50°C (with no condensation)

Temperature

characteristics

3kPa (at 50l/min)

100mA or less

20 to 200l/min 50 to 500l/min

10kPa (at 200l/min) 30kPa (at 500l/min)

±20% F.S. or less

±1% F.S. or less

±25% F.S. or less

±1% F.S. or less Note 2)

±2% F.S. or less (15 to 35°C)

±3% F.S. or less (0 to 50°C)

Equivalent to IP65

240g (without lead wire) 110mA or less

PFA511 PFA521 PFA551

12 to 24VDC (ripple ±10% or less)

Sensor Unit Construction

Parts list

No.

Description

Attachment

Seal

Mesh

Body

Sensor

Parts list

Material

ADC

NBR

Stainless steel

PBT

Material

ADC

NBR

PBT

Stainless steel

PBT

PFA710/750

PFA510/550

PFA711/721/751

PFA511/521/551

Flow direction

No.

Description

Attachment

Seal

Spacer

Mesh

Body

Sensor

Operating Unit Descriptions

Output (OUT1) Indicator/Green

Output (OUT2) Indicator/Red

LED Display

UP Button ( Button)

SET Button (Button)

DOWN Button (Button)

DOWN

U P

OUT2OUT1

SET

RESET Buttons

Error Correction

Take the following corrective actions when errors occur.

LED display Connector size

M12

Number of pins

Manufacturer

C. CORRENS & CO., LTD.

OMRON Corporation

Yamatake-Honeywell Co., Ltd.

Hirose Electric Company

DDK Ltd.

Applicable series

VA-4D

XS2

PA5-4I

HR24

CM01-8DP4S

Problem

A current of more than

80mA is flowing to OUT1.

A current of more than

80mA is flowing to OUT2.

The setting data has

changed due to some

influence.

The flow rate is over the

flow rate measurement

range. (For air only)

Corrective action

Check the load and wiring

for OUT1.

Check the load and wiring

for OUT2.

Perform the RESET

operation, and set all

data again.

Reduce the flow rate until it

is within the flow rate

measurement range, using

an adjustment valve, etc.

Connectors

Pressing the UP and DOWN buttons

simultaneously activates the RESET

function.

This clears the unit when an

abnormality occurs and clears the

accumulated flow display to "0".

Lights up when OUT1 is ON.

It also blinks when an overcurrent

error occurs on OUT1.

Displays the real-time flow rate,

accumulated flow, and setting

value. The mark blinks when the

accumulated flow is being

measured.

Use when decreasing a setting

value.

Use when changing a setting value

or any of the modes.

Use when increasing a setting

value.

Lights up when OUT2 is ON.

It also blinks when an overcurrent

error occurs on OUT2.

Since the connectors (female contacts) shown below can be used,

please refer to the respective manufacturers.

Note) C. CORRENS & CO., LTD. is the general agent in Japan for Hirschmann.

Series PFA

Performs setting of display units.Note 1)

Switches with the button and button.

(Refer to Table 1 .)

Flow Rate Setting

Setting procedure

Performs setting of the

flow rate automatically.

Initial setting

YES

"P"

"n"

OUT1 Output

mode

≥

P-1P-2

P-2

n-1n-2

n-1 n-2

H (fixed hysteresis) = 3 digits

∗OUT2 is the same.

OFF

High flow rate →

OFF

•Hysteresis mode

Display

Real-time flow rate

l/min

CFM x 10-²

Accumulated flow

ft³x 10-¹

Output type

Initial setting

Manual flow

rate setting

Manual flow

rate setting

Key lock

mode

Normal

operation

P-1

Performs setting of the display mode.

Switches with the button.

: Real-time flow rate display

: Accumulated flow display

1. Initial Setting Mode

2. Selection of the Display Mode

3. Selection of Display Units

Performs setting of the OUT2 output mode.

Switches the OUT2 output mode with the

button.

: Non-inverted output

: Inverted output

4. Selection of OUT1 Output Mode 5. Selection of OUT2 Output Mode

Setting is completed

when the SET button

is pressed.

For air

CFM = ft³/min

Display

Real-time flow rate

l/min

GPM

Accumulated flow

gal (US)

For water

GPM = gal (US)/min

Unit number

OUT1 OUT2 OUT1 OUT2 OUT1 OUT2

OUT1 OUT2 OUT1 OUT2

Press the SET button.

SET

Press the SET button.

SET

SET SET

Press the SET button.

Note) Operation is the same for the integrated display type and the remote type (display unit).

Table 1 Table 2

Performs setting of the OUT1 output mode.

Switches the OUT1 output mode with the

button.

: Non-inverted output

: Inverted output

(Refer to Table 2 .)

Note 1)

For -M (fixed SI unit)

Does not perform mode

switching even if the

button is pressed during

operation.

Initial setting: Sets the

display mode (real-time

flow rate/accumulated

flow), unit mode, and out-

put mode (non-inverted/

inverted). Auto preset

Can perform fine adjust-

ment of data which is

automatically set with

the auto preset.

Press the SET button for 1 second or more.

Since the display will change from to

or , release the SET button after

it has changed.

•Window comparator

mode

•Window comparator

mode

Displays the flow rate

and performs switch

operation.

Note 1) For the type with unit switching function

[The type without the unit switching function will have a

fixed SI unit (l/min or l).]

Performs setting of the

flow rate which

performs switch output.

For Air

Digital Flow Switch Series PFA

Flow rate setting mode (manual)

Flow rate setting mode (auto preset)

Flow Rate Setting

The display shows .

Press the SET button. Display changes to input of OUT1 setting value (1).

The setting value and (or ) are

displayed alternately.

Button: Increases the setting value

Button: Decreases the setting value

Press the SET

button.

Display changes to input of OUT2 setting value (1).

The setting value and (or ) are

displayed alternately.

Button: Increases the setting value

Button: Decreases the setting value

Display changes to input of OUT2 setting value (2).

The setting value and (or ) are

displayed alternately.

Button: Increases the setting value

Button: Decreases the setting value

Display changes to input of OUT1 setting value (2).

The setting value and (or ) are

displayed alternately.

Button: Increases the setting value

Button: Decreases the setting value

SET

Press the button to switch

the display to .

OUT1 OUT2 OUT1 OUT2 OUT1 OUT2

Press the SET

button.

SET

Press the SET

button.

SET

Setting is completed

when the SET button

is pressed.

SET

Press the SET

button.

SET

Setting is completed

when the SET button

is pressed.

SET

Press the SET

button.

SET

OFF point

ON point = C.C1

OFF point = C-3 digits, C1-3 digits,

(1 digit is the minimum setting unit.)

1. Setting Value Input

Mode (Manual) 2. Setting in the

Manual Mode 3. OUT1 Setting

Value (1) Input

Press the SET button.

(Refer to Table 2 for the relationship

of each value to the switch output.)

4. OUT1 Setting

Value (2) Input 5. OUT2 Setting

Value (1) Input 6. OUT2 Setting

Value (2) Input

1. Setting Value

Input Mode 2. Setting in the Auto

Preset Mode 3. Auto Preset

Preparations

In this condition, preparations are performed on

equipment for the OUT1 setting, and flow is

started.

In case the OUT1 setting is not

required, press the button and the

button simultaneously while in this

condition.

Press the SET button, and then

release it when is displayed.

6. OUT2 Auto Preset

5. Auto Preset

Preparations

4. OUT1 Auto Preset

When the SET button is pressed at this point,

the flow rate values are read automatically,

and the optimum setting value is input.

and the input value are displayed

alternately.

Hysteresis

(3 digits)

ON point

(C.C1)

Preparations are performed on

equipment for the OUT2 setting, and

flow is started.

In case the OUT2 setting is not

required, press the button and the

button simultaneously while in this

condition.

When the SET button is pressed at

this point, the flow rate values are

read automatically, and the optimum

setting value is input.

and the input value are

displayed alternately.

Series PFA

Andere Handbücher für PFA Series

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