TELEVAC MC300 Bedienungsanleitung

The Fredericks Company

MC300 Vacuum Sensor Controller

Instruction Manual

The Fredericks Company - Televac

2400 Philmont Avenue

Huntingdon Valley, PA 19006

web: www.frederickscompany.com

email: [email protected]

tel: +1 215 947 2500

fax: +1 215 947 7464

CONTENTS CONTENTS

Contents

1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

1.1 Disclaimer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

1.2 Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

1.3 Operating Speciﬁcations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

1.4 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

1.5 Safety Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

2 Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

2.1 Quick Start Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

2.1.1 Check What You’ve Received . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

2.1.2 Safey Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

2.1.3 Connect power . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

2.1.4 Turn on MC300 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5

2.1.5 Check Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

2.1.6 Gas Correction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

2.1.7 Measurement Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

2.1.8 Set points . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

2.1.9 Lock Switch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

2.1.10 Power down MC300 and connect peripherals . . . . . . . . . . . . . . . . . . . . . . . 7

2.1.11 Restart MC300 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

2.2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

2.3 Electrical Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

2.3.1 Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

2.3.2 Supply Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

2.3.3 Electrostatic Discharge Sensitivity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

2.4 Set Points . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

2.4.1 Assigning Set Points and Values . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

2.4.2 Normally Closed . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

2.4.3 Normally Open . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

2.5 Analog Outputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

2.5.1 2A Thermocouple Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

2.5.2 4A Thermocouple Convection Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

2.5.3 7B Penning Magnetron Cold Cathode . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

2.5.4 7E/7F/7FC Double Inverted Magnetron Cold Cathode . . . . . . . . . . . . . . . . . . 15

2.5.5 Mini Bayard-Alpert Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17

2.6 Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

2.6.1 READ THIS BEFORE CALIBRATING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

2.6.2 2A Thermocouple Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

2.6.3 4A Thermocouple Convection Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

2.6.4 7B Penning Magnetron Cold Cathode . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

2.6.5 7E/7F/7FC Double Inverted Magnetron Cold Cathode . . . . . . . . . . . . . . . . . . 19

2.6.6 Mini Bayard-Alpert Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

3 Conﬁgurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

3.1 Sensor Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

3.1.1 2A Thermocouple Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

3.1.2 4A Thermocouple Convection Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

3.1.3 7B Penning Magnetron Cold Cathode . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

3.1.4 7E Double Inverted Magnetron Cold Cathode . . . . . . . . . . . . . . . . . . . . . . . 21

3.1.5 7F Double Inverted Magnetron Cold Cathode . . . . . . . . . . . . . . . . . . . . . . . 21

3.1.6 7FC Cleanable Double Inverted Magnetron Cold Cathode . . . . . . . . . . . . . . . 21

3.1.7 Mini Bayard-Alpert Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

3.2 Sensor and Cable Part Numbers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

4 High Vacuum Versions and Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

4.1 Cold Cathodes Conﬁgurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

4.2 Mini Bayard-Alpert Conﬁgurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

4.2.1 ON/OFF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

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LIST OF TABLES LIST OF FIGURES

4.2.2 Sensitivity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

4.2.3 Filament Select . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

4.2.4 Filament Degas . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

List of Tables

1 Operating Speciﬁcations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

2 MC300 Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

3 2A Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

4 4A Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

5 7B Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

6 7E/7F/7FC Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

7 Mini Bayard-Alpart Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18

8 MC300 Conﬁguration Part Numbers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

9 MC300 Startup Software Code . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

10 MC300 Cable Part Numbers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

11 Selected Sensor Part Numbers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

List of Figures

1 MC300 Dimensional Drawing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

2 Relay Wiring Diagram in the OFF State . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

3 2A Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

4 4A Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

5 7B Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

6 7E/7F/7FC Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

7 Mini Bayard-Alpert Analog Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17

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1 INTRODUCTION

1 Introduction

1.1 Disclaimer

All information in this manual is subject to change without notice. The Fredericks Company assumes

no responsibility for inaccuracies in product speciﬁcations or any liability arising from product use.

Please contact Televac at [email protected] or call 215-947-2500 with comments or questions.

1.2 Description

The MC300 is a rack-mountable vacuum controller, which operates up to three vacuum sensors,

including cold cathode, mini Bayard-Alpert, thermocouple convection, and thermocouple sensors.

The capability of controlling a wide range of sensors allows the MC300 to provide a maximum vacuum

measurement range of 1×10−11 Torr to 1,000 Torr.

The MC300 includes up to three, red LED, seven segment displays. There are also four dome switches

for use in setting up the unit.

The Televac brand of Fredericks Company was created in 1935 and is an industry leader in vacuum

measurement technology. Our team of engineers and application specialists deliver broad practical

knowledge and experience across a wide range of markets and application areas. In keeping with

the company’s history of outstanding customer support, Televac provides the insight and guidance

needed to take design concepts to reality in a cost-effective manner. For more information, visit our

website at www.frederickscompany.com.

1.3 Operating Speciﬁcations

Table 1: Operating Speciﬁcations

Operating Range 1×10−11 to 1000 Torr

Communications N/A

Analog Output Resolution 12 bits

Display Output Resolution Up to 3 signiﬁcant digits

Programmable Set Points 4

Set Point Type Relay

Supply Voltage 115/230 VAC (0.3/.15A), 50-60 Hz

Maximum Power 35 W

Calibration Medium Dry air or nitrogen

Overpressure Sensor-dependent

Operating Temperature 0◦to 50◦

Storage Temperature −40◦to 85◦

Display Readable Distance 10 m (33 ft)

Maximum Sensors Controlled Up to 3

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1.4 Dimensions 1 INTRODUCTION

1.4 Dimensions

Figure 1: MC300 Dimensional Drawing

1.5 Safety Information

START BY READING THESE IMPORTANT

SAFETY INSTRUCTIONS AND NOTES

In these instructions the word “product” refers to the MC300 and all of its approved parts and

accessories. NOTE: These instructions do not and cannot provide for every contingency that may

arise in connection with the installation, operation, or maintenance of this product. Should you require

further assistance, please contact Televac at the email address found in the footer of this manual.

This product has been designed and tested to offer reasonably safe service provided in it is installed,

operated and serviced in strict accordance with these safety instructions.

These safety precautions must be observed during all phases of operation, installation, and service

of this product. Failure to comply with these precautions or with speciﬁc warnings elsewhere in this

manual violates safety standards of design, manufacture, and intended use of the instrument. Televac

disclaims all liability for the customer’s failure to comply with these requirements.



READ instructions – Read all safety and operating instructions before operating the product.

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2 SETUP



RETAIN instructions – Retain the safety and operating instructions for future reference.



HEED warnings – Adhere to all warnings on the product and in the operating instructions.



FOLLOW instructions – Follow all operating and maintenance instructions.



ACCESSORIES – Do not use accessories not recommended in this manual as they may require a

technician to restore the product to its normal operation.

Do not substitute parts or modify instrument. Because of the danger onj introducing

additional hazards, do not install substitute parts or perform any unauthorized modiﬁcations

to the product. Return the product to Televac for service and repair to ensure that safety

features are maintained. Do not use this product if it has unauthorized modiﬁcations.



The unit should only be serviced by trained technicians. Contact Televac with requests for

training.



Always power down and disconnect power from the unit before attempting to perform service.



This unit can be used with 110 V AC or 220 V AC power. There is a switch on the back of the unit

to change between the two settings. Failure to use a correct power source may cause damage

to the unit. See Section 5 for more information.



Hazardous high voltages (2 kV to 4 kV) are present when any cold cathode modules are installed.

This includes the 7B/E/F/FC/FCS modules.



Strong magnetic ﬁelds are present near cold cathode sensors.



Take proper precautions to avoid hazardous overpressure conditions.



Televac and Fredericks Company are not liable for any direct or indirect damages that result from

the use of the MC300 or its peripherals.

2 Setup

2.1 Quick Start Guide

Follow the steps outlined in this section to quickly verify your MC300 for use.

2.1.1 Check What You’ve Received

Compare what you’ve received to your purchase order. Check for any damage to the unit that may

have occurred during shipping. In the unlikely event that your MC300 or related item is damaged,

please contact Fredericks Company immediately.

2.1.2 Safey Instructions

Review all safety instructions outlined in Section 1.5, Safety Information.

2.1.3 Connect power

Connect the power cord provided with the MC300 to a suitable power supply.

2.1.4 Turn on MC300

Flip the power switch on the power supply on the back of the MC300 (next to where the power cord

is connected).

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2.1 Quick Start Guide 2 SETUP

2.1.5 Check Display

The unit will ﬁrst display the Software version number and instrument type in a four-digit code. The

ﬁrst two digits refer to the software version and the second two digits refer to the Instrument Sensor

type summarized in Table 9.

2.1.6 Gas Correction

The MC300 sensors are calibrated under dry nitrogen gas. Each MC300 is shipped in the default

nitrogen conﬁguration. The MC300 includes built in correction factors for the 2A Thermocouple Sensor

and 4A Thermocouple Convection Sensors for use in argon gas. To toggle between the default nitrogen

setting and correction factors for argon, complete the following steps.

1. Press SETUP once. The Nitrogen (N2) or Argon (Ar) indicator will ﬂash on the display.

2. Press UP or DOWN to select between the gas corrections.

3. Press TEST/OP to save the selection. If TEST/OP is not pressed within 60 seconds, the instrument

will return to normal operation and the change in gas parameter will not be saved.

The gas light will appear lit on the front panel if Argon mode is active on the MC300.

2.1.7 Measurement Units

The MC300 can be toggled between displaying pressure measurements in Pa, mbar, or mTorr and

Torr. The default conﬁguration is mTorr and Torr. To toggle between the default units setting and other

available units, complete the following steps.

1. Press SETUP twice. The Pa, mbar, and Torr light on the front panel will ﬂash.

2. Press UP and DOWN to select the desired units.

3. Press TEST/OP to save the selected unit. If TEST/OP is not pressed within 60 seconds, the

instrument will return to normal operation and the change in units will not be saved.

2.1.8 Set points

To conﬁgure the set points, complete the following steps. For more information, see Section 2.4.1,

Assigning Set Points and Values.

1. Press SETUP three times. SP 1 will appear on one display with CH 1,CH 2 or CH 3 (MC300 with

ion sensors only) on a second display.

2. Use the UP and DOWN arrows to select a channel to assign the set point to.

3. Press SETUP again and the display will read ON.

4. Use the UP and DOWN arrows to set the ON value.

5. Press SETUP again and the display will read OFF.

6. Use the UP and DOWN arrows to set the OFF value.

7. Press SETUP again to move to the next set point.

8. Repeat the previous steps to set up all four of the set points.

The MC300 will return to its normal operating mode after the fourth relay has been set up or 60

seconds have elapsed since the last button press. Changes are stored after the complete set up of

an individual relay channel. These set up parameters are stored in non-volatile memory and are not

lost during power outages.

Note that for MC300s with a Mini Bayard-Alpert conﬁguration, there are four extra steps in the setup

menu. See Section 4.2, Mini Bayard-Alpert Conﬁgurations, for more information.

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2.2 Installation 2 SETUP

2.1.9 Lock Switch

Move the lock switch into the upper position to lock out all changes from the front panel, including

set point assignments and values as well as the Mini BA sensitivity adjustment.

2.1.10 Power down MC300 and connect peripherals

Once you’ve conﬁrmed that the MC300 is functional, power it down. Connect all sensors using sensor

cables, and connect any analog output, or set point cables as necessary. Be sure to follow all safety

precautions associated with these items and your system.

2.1.11 Restart MC300

Restart your MC300. It should be ready for use. Contact the Fredericks Company with any comments

or questions.

2.2 Installation

The MC300 can be installed as a benchtop unit, rack mounted, or panel mounted. Please see Section

1.4, Dimensions, for the relevant mounting dimensions.

2.3 Electrical Information

2.3.1 Power Requirements

Table 2: MC300 Power Requirements

Supply Voltage 110 VAC ±10% or 220 VAC ±10%

Supply Current .3A at 115 VAC, .15A at 230 VAC

Maximum Power 35 W

Power Connection Power cord (IEC 60320 C-13)

2.3.2 Supply Voltage

The MC300 can be conﬁgured to operate with either a 110 VAC ±10% or 220 VAC ±10% supply. The

conﬁguration can only be set at the factory. The default setting is 110 VAC compatibility and 220 VAC

operation must be speciﬁed upon order. Changing the conﬁguration requires the user to return the

unit to Fredericks Company.

2.3.3 Electrostatic Discharge Sensitivity

The MC300 contains ESD-sensitive components but is designed to withstand

2 kV discharges using

the human body model.

2.4 Set Points

There are four set point relays available for use to control ON/OFF or open/close (binary state) devices.

The relays are assignable to any one of the vacuum signal input channels through front panel software

control. When the pressure is lower than the ON value of the set point, the NO and C terminals are

connected (normally open and common). When the pressure is higher than the OFF value of the

set point, the NC and C terminals are connected (normally closed and common). When the unit is

powered down, the NC and C terminals remain connected. The relays are single pole double throw

(SPDT) and rated for 6 A at 24 V DC or 10 A at 120 V AC.

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2.4 Set Points 2 SETUP

Figure 2: Relay Wiring Diagram in the OFF State

2.4.1 Assigning Set Points and Values

The instrument has four relays that are assignable to any of the vacuum measurement channels.

The default setting is thermocouple (or convection) Channel 1 is Channel 1 (CH 1), thermocouple (or

convection) Channel 2 is Channel 2 (CH 2) and the ion sensor is Channel 3 (CH 3), if applicable. Set

point SP 1 is relay 1, set point SP 2 is relay 2, and etc. The default assignments for each set point to

each channel are SP 1 to Channel 1 and SP 2 to Channel 2 for all versions. For conﬁgurations with an

ion sensor, SP 3 and SP 4 will be assigned to Channel 3. For conﬁgurations without an ion sensor, SP

3 and SP 4 are assigned to Channel 2 by default.

To change the assignment of the set points or change their values, follow the steps below.

1. Press SETUP three times. SP 1 will appear on one display with CH 1,CH 2 or CH 3 (MC300 with

ion sensors only) on a second display.

2. Use the UP and DOWN arrows to select a channel to assign the set point to.

3. Press SETUP again and the display will read ON.

4. Use the UP and DOWN arrows to set the ON value.

5. Press SETUP again and the display will read OFF.

6. Use the UP and DOWN arrows to set the OFF value.

7. Press SETUP again to move to the next set point.

8. Repeat the previous steps to set up all four of the set points.

2.4.2 Normally Closed

In this state there is an electrical continuity path between terminals C and NC. This continuity path is

broken when the software set point values dictates an ON state for the speciﬁc measurement channel.

Continuity is returned when the OFF state is dictated by software control. In the power off mode of

the MC300 (due to failure of the main power source or turning off the instrument), the relay will revert

to this state.

2.4.3 Normally Open

In this state there is no electrical continuity path between terminals C and NO. This Path is established

ONLY when the Instrument control software satisﬁes conditions for the ON state. It will break continuity

under the instrument control parameters for the OFF condition or the power off mode of the MC300

(due to failure of the main power source or turning off the instrument).

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2.5 Analog Outputs 2 SETUP

2.5 Analog Outputs

Each sensor on the MC300 ships with two different analog output formats for ease of use by the

customer. Consult the appropriate section below to learn more about each sensor output. The MC300

will return to its normal operating mode after the fourth relay has been set up or 60 seconds have

elapsed since the last button press. Changes are stored after the complete set up of an individual

relay channel. These set up parameters are stored in non-volatile memory and are not lost during

power outages.

2.5.1 2A Thermocouple Sensor

The 2A Thermocouple sensor has two analog output formats. The Traditional Output option mimics

the output of the raw signal from the 2A sensor. The voltage can be converted to a pressure by using

a linear interpolation table.

The Linear Output option provides a linear signal from .001 Torr to 1 Torr. The voltage can be converted

to a pressure via an equation.

Pressre (Torr) = V(Vots)×.1(1)

Figure 3: 2A Analog Output

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Emerson

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