Varian 947 Bedienungsanleitung

DRAFT 2/4/02

INSTRUCTION MANUAL

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Manual No. 699909985

Revision C

December 2001

Service Pendant

Hand-Held

Terminal

DRAFT 2/4/02

Service Pendant Hand-Held Terminal

Hazard and Safety Information

This manual uses the following standard safety protocols:

WARNING The warning messages are for attracting the attention of the

operator to a particular procedure or practice which, if not

followed correctly, could lead to serious injury.

CAUTION The caution messages are displayed before procedures, which

if not followed, could cause damage to the equipment.

NOTE The notes contain important information.

The Service Pendant has no user-serviceable parts.

The Service Pendant is used with the following leak detectors:

❑Model 947

❑Model 948

❑Model 960

This equipment is designed solely to be used with the leak detectors listed above. The

Service Pendant itself poses no inherent hazard or safety threat to an operator.

However, leak detector operators and service personnel must be aware of all hazards asso-

ciated with leak detector operation. They must know how to recognize hazardous and

potentially hazardous conditions, and know how to avoid them. The consequences of

unskilled, improper, or careless operation of the equipment can be serious. This product

must only be operated and maintained by trained personnel.

Every leak detector operator or service person must read and thoroughly understand leak

detector operation/maintenance manuals and any additional information provided by

Varian Vacuum Technologies. All warnings and cautions should be read carefully and

strictly observed. Consult local, state, and national agencies regarding specific requirements

and regulations. Address any safety, operation, and/or maintenance questions to your near-

est Varian Vacuum Technologies office.

Varian Vacuum Technologies

Service Pendant Hand-Held Terminal

DRAFT 2/4/02

The Service Pendant

The service pendant is used to set up and display parameters for the Model 947, 948 and

960 Leak Detectors. It is a hand-held terminal with a 40-key keypad and a 20 character

by 4 line backlit LCD display (see Figure 1). The service pendant is stored in the turret and

connects to the leak detector via a six-foot cable that connects to an RS-232 serial port (J1, a

9-pin D sub connector) located inside the lockable turret.

The service pendant is used to monitor and set up:

❑Reject set points

❑Crossover pressures

❑Auto sequence parameters

❑System setup parameters (such as the value of the calibrated leak)

❑Ion Source parameters (should only be performed by qualified service personnel)

When the pendant is powered by the 947, 948 or 960, the display indicates the model of

the leak detector to which it is connected.

Refer to Model 947, Model 948 Operations Manual or the Model 960 Operations Manual

for further information on the operation of the leak detector.

Figure 1 Service Pendant

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DRAFT 2/4/02

Service Pendant Hand-Held Terminal

Keypad Functions

Figure 2 shows the service pendant keypad. A glossary of the keys begins on page 8. Table 1

on page 8 explains the keys that perform special functions when entering information.

Table 2 on page 8 explains the remaining keys, which are used to input or display data.

To give you a better understanding of how to use the pendant, step-by-step instructions for a

few common leak detector functions follow this figure.

Figure 2 Service Pendant Keypad

Using the Service Pendant – Parameter Examples

Except for numbers and special function keys, most keys have three lines of text—the

parameter and two operations.

❑The function is generally printed in black in the center of the key (for example,

RNG ST on the top, left-most key).

Some functions require the input of a number before the function key is pressed. Other

functions, such as queries, do not require any numeric input. When a command or

request is successfully completed, the display ends with ok and a line feed. The pendant

is ready for the next command.

❑The operation to be performed on that parameter is printed in either blue (for

example, SHOW on the lower part of the key), or red (for example, SET on the upper

part of the key).

The keys to set the Reject Points and some of the service group keys are the exceptions.

On these keys, the operation (SET or SHOW) is the center text.

Service Pendant Hand-Held Terminal

DRAFT 2/4/02

Figure 3 has four illustrations of the keypad each highlighting a different functional group of

keys (Service, System Setup, Operation/Status, and Auto Sequence). As an operator, you will

primarily use the System Setup and the Operation/Status keys. We have not included an

illustration grouping the general entry keys, such as SHIFT, CANCEL and the numeric keys.

Figure 3 Keypad showing Four Functional Groups

Auto Sequence Setup Keys

Initial System Setup Keys

Operation / Status Keys

Service Keys

DRAFT 2/4/02

Service Pendant Hand-Held Terminal

Example 1 – Set Reject Set Point

Four individual reject set points can be set, but only one reject set point is enabled at a time.

To set a reject set point value and make it the active reject set point:

1. Display (show) the existing reject set point value and see if it is enabled (on or off).

❑Press 1(the number of the reject set point you want to display, i.e., 1 though 4)

❑Press:

The currently enabled set point is displayed along with its value and on or off. On

indicates that the displayed set point is enabled.

2. Set reject set point 1 value to 5.5E−5.

NOTE The pendant will display exponential values to 2 characters.

However, the single digit (in this case 5) or both digits (05) are

valid entries.

❑Press the following keys in order from left to right to enter the value:

The system displays INIT, followed by the value and ends the string with ok.

3. Enable reject set point 1 (make it the active reject set point).

❑Press the following keys in order from left to right to enable reject set point 1:

The pendant displays the reject set point, its value and on to indicate reject set point 1 is

enabled.

SET

REJ #

SHOW

5 . 5 E SHIFT

. 5

REJ3

SET

REJ 1

1SHIFT

SET

REJ #

SHOW

Service Pendant Hand-Held Terminal

DRAFT 2/4/02

Example 2 – Check and Set the Value of the Crossover (Transfer) Pressure to Fine Test

The pressure at which a test transfers to fine (or gross) test can be set and verified using the

pendant. The value can also be verified on the test port pressure display on the front panel.

1. Verify the current fine test transfer value.

❑Press:

The pendant displays the current value and ends the string with ok.

2. Set the fine test transfer point to 5.0E−2.

❑Press the following keys in order from left to right to enter the value:

The system displays an INIT string, including the value, and ends the string with ok.

3. Verify the fine test transfer value.

a. Using the pendant:

❑Press:

The pendant displays the current value and ends the string with ok.

b. On the leak detector front panel:

❑Place the test mode switch to AUTO

❑Press and hold the Display button

The test port pressure bar graph display will show the transfer value (in this case,

50 mTorr).

SET

FN XFR

SHOW

5 . 0 E SHIFT

.2SHIFT

SET

FN XFR

SHOW

SET

FN XFR

SHOW

DRAFT 2/4/02

Service Pendant Hand-Held Terminal

Example 3 – Check and Set the Auto Sequence Parameters

The Auto Sequence rough time and test time intervals can be set and the Auto Sequence

option turned on using the pendant.

1. Display the currently set rough time and test time.

❑Press:

The pendant displays the current rough time interval and ends the string with ok.

❑Press:

The pendant displays the current test time interval and ends the string with ok.

2. Set the rough time interval to 12 seconds.

❑Press the following keys in order from left to right to enter the value:

3. Set the test time interval to 5 seconds.

❑Press the following keys in order from left to right to enter the value:

4. Verify the values by repeating steps 1 and 2.

5. Set Auto Sequence to on.

❑Press the following keys in order from left to right:

SET

RUF TM

SHOW

SET

TST TM

SHOW

1 2 SHIFT

SET

RUF TM

SHOW

5SHIFT

SET

TST TM

SHOW

SHIFT

A SEQ

OFF

Service Pendant Hand-Held Terminal

DRAFT 2/4/02

Example 4 – Check and Set the Value of the Internal Standard Leak

To set the value of the internal standard leak:

1. Display the current value of the internal standard leak.

❑Press:

The pendant displays the current value of the standard leak.

2. Enter and set the new standard leak value, for example, 1.6 E−7 atm cc/sec.

❑Press the following keys in order from left to right to enter the value:

3. Verify the new value of the standard leak on the LCD display.

❑Press:

The new leak rate should be displayed and the string should end with ok. If not, repeat

the procedure.

Example 5 – Display the Ion Source Parameter

Parameters such as Ion Source Voltage should only be changed by Varian qualified service

personnel. The example is included here because in determining the cause of a problem, a

service person may request that you display these values.

1. Display the Ion Voltage.

❑Press:

The pendant displays the current value of the ion voltage and ends the string with ok.

SET

STD LK

SHOW

    SHIFT

.7SHIFT

SET

STD LK

SHOW

SET

STD LK

SHOW

TURBO

SHOW

ION V

DRAFT 2/4/02

Service Pendant Hand-Held Terminal

Glossary

The keys listed in Table 2 start at the top left corner of the keypad and continue from left

to right.

Table 1 Glossary of Function Keys

SHIFT Performs the red function on the key that is pressed after the SHIFT

key is pressed.

LK RATE

EEnters the Efor exponential notation inputs such as reject set point.

[SHIFT] LK RATE

EDisplays the current leak rate.

.Enters a .(decimal point) for input values such as in range stop.

[SHIFT] _

.Enters a –(minus sign) for negative input values such as in

range stop.

CANCEL Erases an entry if a mistake is made.

All digits

from 2to 9

and 0.

Enters the digit pressed.

RAW DTA

1Enters the digit 1.

Table 2 Glossary of Input and Data Keys

SET

RNG ST

SHOW

Displays the value of the range stop, the lowest decade that the

leak detector will show on the bar graph.

[SHIFT] SET

RNG ST

SHOW

Sets the value of the range stop, the lowest decade that the leak

detector will show on the bar graph. Enter −XX (the desired value),

followed by the SHIFT and the function key. Example: −08, −10.

LOG

OUT V

LlN

Sets the analog leak rate output voltage on the rear panel to Linear

format. (Only functional on systems with the I/O option.)

[SHIFT] LOG

OUT V

LlN

Sets the analog leak rate output voltage on the rear panel to

2 V / Decade Log format. (Only functional on systems with the I/O

option.)

SET

GR XFR

SHOW

Displays the value of the Gross Leak Transfer Point.

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