Agilent Technologies 4UHV Bedienungsanleitung

Agilent 4UHV Ion Pump Controller

User Manual

2 Agilent 4UHV Ion Pump Controller User Manual

Notices

Manual Part Number

87-900-137-01

Edition F.00, May 2023

No part of this manual may be

reproduced in any form or by any

means (including electronic storage

and retrieval or translation into a

foreign language) without prior

agreement and written consent from

Agilent Technologies, Inc. as governed

by United States and international

Agilent Technologies Italia S.p.A.

Vacuum Products Division

Via F.lli Varian, 54

10040 Leinì (TO)

ITALY

www.agilent.com

Instrument Manufacturing

Agilent Technologies Italia S.p.A.

Vacuum Products Division

Via F.lli Varian, 54

10040 Leinì (TO)

ITALY

Printed in Italy

Warranty

The material contained in this

document is provided “as is,” and is

subject to being changed, without

notice, in future editions. Further, to the

maximum extent permitted by

applicable law, Agilent disclaims all

warranties, either express or implied,

with regard to this manual and any

information contained herein, including

but not limited to the implied

warranties of merchantability and

fitness for a particular purpose. Agilent

shall not be liable for errors or for

incidental or consequential damages in

connection with the furnishing, use, or

performance of this document or of

any information contained herein.

Should Agilent and the user have a

separate written agreement with

warranty terms covering the material

in this document that conflict with

these terms, the warranty terms in the

separate agreement shall control.

Technology Licenses

The hardware and/or software

described in this document are

furnished under a license and may be

used or copied only in accordance with

the terms of such license.

Restricted Rights Legend

U.S. Government Restricted Rights.

Software and technical data rights

granted to the federal government

include only those rights customarily

provided to end user customers.

Agilent provides this customary

commercial license in Software and

technical data pursuant to FAR 12.211

(Technical Data) and 12.212

(Computer Software) and, for the

Department of Defense, DFARS

252.227-7015 (Technical Data -

Commercial Items) and DFARS

227.7202-3 (Rights in Commercial

Computer Software or Computer

Software Documentation).

Safety Notices

A CAUTION notice denotes a hazard. It

calls attention to an operating

procedure, practice, or the like that, if

not correctly performed or adhered to,

could result in damage to the product

or loss of important data. Do not

proceed beyond a CAUTION notice

until the indicated conditions are fully

understood and met.

A WARNING notice denotes a hazard.

It calls attention to an operating

procedure, practice, or the like that, if

not correctly performed or adhered to,

could result in personal injury or death.

Do not proceed beyond a WARNING

notice until the indicated conditions

are fully understood and met.

WARNING

CAUTION

Contents

Agilent 4UHV Ion Pump Controller User Manual 3

Contents

1Istruzioni per l’uso 13

Informazioni su questo manuale 14

Validità 14

Definizioni e terminologia 15

Definizione di Attenzione, Avvertenza e Nota 15

Simboli di avvertenza 16

Sicurezza 18

Uso corretto 18

Uso improprio 19

Attrezzatura di protezione 19

Linee guida per la sicurezza dei controller di pompe Ioniche 20

Trasporto e immagazzinamento 21

Descrizione del prodotto 21

Installazione 22

Preparazione per l’installazione 22

Set-up 23

Fissaggio del 4UHV 26

Avvio e funzionamento del Controller 4UHV

dal pannello frontale (modalità LOCAL) 28

Arresto del 4UHV 30

Arresto di Emergenza 30

Manutenzione 30

Pulizia 31

Compatibilità elettromagnetica 31

EN55011/CISPR11 31

Dichiarazione EMC di Classe A della Corea del Sud 32

ICES/NMB-001 32

Smaltimento 33

Servizio Post Vendita 34

Contents

4 Agilent 4UHV Ion Pump Controller User Manual

2Betriebsanleitung 35

Informationen über diese Betriebsanleitung 36

Gültigkeit 36

Definitionen und Terminologie 37

Definition von Vorsicht, Warnung und Hinweis 37

Warning Symbols 38

Sicherheit 40

Sachgemäße Verwendung 40

Unsachgemäße Anwendung 41

Schutzausrüstung 41

Sicherheitsrichtlinien für Ionische Pumpensteuerung 42

Transport und Lagerung 43

Produktbeschreibung 43

Installation 44

Vorbereitung zum Einbau 44

Set-up 45

Fixieren des 4UHV 48

Start und Betrieb des 4UHV-Controllers

von der Vorderteil (LOCAL-Modus) 50

Abschalten des 4UHV 52

Not-Aus 52

Wartung 52

Reinigen 53

Elektromagnetische Verträglichkeit 53

EN55011/CISPR11 53

Südkoreanische Klasse A EMV-Erklärung 54

ICES/NMB-001 54

Entsorgung 55

Service 56

Contents

Agilent 4UHV Ion Pump Controller User Manual 5

3Mode d’emploi 57

À propos de ce manuel 58

Validité 58

Définitions et terminologie 59

Signification des messages d’attention, d’avertissement et des notes 59

Symboles d'avertissement 60

Sécurité 62

Utilisation appropriée 62

Utilisation appropriée 63

Équipements de protection 63

Consignes de sécurité des contrôleurs de pompes ioniques 64

Transport et Emmagasinage 65

Description du produit 65

Installation 66

Préparation pour l’installation 66

Set-up 67

Fixation de l’4UHV 70

Démarrage et fonctionnement du contrôleur 4UHV

depuis le panneau avant (mode LOCAL) 72

Arrêt de l’4UHV 74

Arrêt d'urgence 74

Entretien 74

Nettoyage 75

Compatibilité électromagnétique 75

EN55011/CISPR11 75

Déclaration CEM Classe A Corée du Sud 76

ICES/NMB-001 76

Élimination 77

Service 78

Contents

6 Agilent 4UHV Ion Pump Controller User Manual

4Instrucciones de uso 79

Acerca del manual 80

Validez 80

Definiciones y terminología 81

Definición de Precaución, Advertencia y Nota 81

Símbolos de advertencia 82

Seguridad 84

Uso correcto 84

Uso incorrecto 85

Equipo de protección 85

Pautas de seguridad para Controladores de bombas iónicas 86

Transporte y Almacenamiento 87

Descripción del producto 87

Instalación 88

Preparación para la instalación 88

Instalación 89

Montaje del 4UHV 92

Puesta en marcha y funcionamiento del Controlador 4UHV

desde el Panel Frontal (Modo LOCAL) 94

Apagado del 4UHV 96

Parada de emergencia 96

Mantenimiento 96

Limpieza 97

Compatibilidad electromagnética 97

EN55011/CISPR11 97

Declaración EMC Clase A de Corea del Sur 98

CIEM/NMB-001 98

Eliminación 99

Servicio 100

Contents

Agilent 4UHV Ion Pump Controller User Manual 7

5使用说明101

关于本手册 102

有效性 102

定义与术语 103

小心、警告和注意的定义103

警告符号 104

安全 106

正确使用 106

使用不当 107

防护装备107

离子泵控制器安全指南 108

运输及存储109

产品描述 109

安装准备110

设置111

修复 4UHV 114

从前面板启动和操作 4UHV 控制器（本地模式） 116

4UHV 关机 118

紧急停止 118

维护 118

清洁119

电磁兼容 119

EN55011/CISPR11 119

韩国A类EMC 声明 120

ICES/NMB-001 120

处置121

服务122

Contents

8 Agilent 4UHV Ion Pump Controller User Manual

6取扱説明書 123

この説明書について 124

有効期 124

定義と用語 125

警告・注意・注の定義 125

警告の記号 126

安全性 128

適切な使用 128

不適切な使用 129

保護装具 129

イオンポンプコントローラーの安全ガイドライン 130

运输及存储131

製品説明 131

取り付け 132

取り付けの準備 132

セットアップ 133

4UHV の固定 136

フロントパネルからの 4UHV コントローラの起動と操作

（LOCAL モード） 138

4UHV 操作停止 140

緊急停止 140

メンテナンス 140

クリーニング 141

電磁両立性 141

EN55011/CISPR11 141

韓国クラス A EMC 宣言 142

ICES/NMB-001 142

処分 143

サービス 144

Contents

Agilent 4UHV Ion Pump Controller User Manual 9

7Instructions for Use 145

About this manual 146

Validity 146

Definitions and terminology 147

Definition of Caution, Warning and Note 147

Warning Symbols 148

Safety 150

Proper use 150

Improper use 151

Protective equipment 151

Ion pump controller safety guidelines 152

Transport & Storage 153

Product Description 153

Installation 154

Preparation for Installation 154

Set-up 155

Fixing the 4UHV Ion Pump Controller 157

Startup and Operation of the 4UHV Ion Pump Controller

from the Front Panel (LOCAL Mode) 159

4UHV Ion Pump Controller Shutdown 161

Emergency Stop 161

Maintenance 161

Cleaning 162

Electromagnetic Compatibility 162

EN55011/CISPR11 162

South Korean Class A EMC declaration 163

ICES/NMB-001 163

Disposal 164

Service 165

Contents

10 Agilent 4UHV Ion Pump Controller User Manual

8Technical Information 166

4UHV Ion Pump Controller Description 168

Technical Specifications 171

Controller Outline 173

Front Panel Description 174

Keys 174

Graphic Signals 175

Rear Panel Description 176

Fuse Holder 177

Interlock connection 177

Procedure to Connect the Serial and I/O ports to an External Cable 178

Operating Mode 179

Start-Up 180

Selecting “Operating Mode” from Front Panel 180

Functions 181

Step-mode / Fixed mode 181

Protect 182

Device Number 183

Spare Pump 184

How to select the Ion pump 184

How to work with non Agilent pump 184

Set Point 185

Autostart 186

How to set the Analog signal 193

Connection of Input Remote 193

Serial 194

Connector Examples 195

Window Protocol 196

Communications Format 196

Communications Protocol 196

Error Description 205

Error Code 205

Andere Handbücher für 4UHV

Dieses Handbuch passt für folgende Modelle

Inhaltsverzeichnis

Andere Agilent Technologies Controller Handbücher

Agilent Technologies

Agilent Technologies 78581B Montage- und Wartungsanleitung

Agilent Technologies

Agilent Technologies M9405A Handbuch

Agilent Technologies

Agilent Technologies G2743A Bedienungsanleitung

Agilent Technologies

Agilent Technologies Turbo-V 2300 TwisTorr Bedienungsanleitung

Agilent Technologies

Agilent Technologies Agilent 35900E Bedienungsanleitung

Agilent Technologies

Agilent Technologies ETC 60 Bedienungsanleitung

Agilent Technologies

Agilent Technologies 8169A Bedienungsanleitung

Agilent Technologies

Agilent Technologies XGS-600 Bedienungsanleitung

Agilent Technologies

Agilent Technologies Turbo-V 750/850-AG Bedienungsanleitung

Agilent Technologies

Agilent Technologies X3501-64005 Bedienungsanleitung

Agilent Technologies

Agilent Technologies TwisTorr 84 FS PCB Bedienungsanleitung

Agilent Technologies

Agilent Technologies TwisTorr Medium-TMP Rack Bedienungsanleitung

Agilent Technologies

Agilent Technologies AGC-100 Bedienungsanleitung

Agilent Technologies

Agilent Technologies Turbo-V 2000HT Bedienungsanleitung

Agilent Technologies

Agilent Technologies 929-0196 Bedienungsanleitung

Agilent Technologies

Agilent Technologies 969-9871 Bedienungsanleitung

Agilent Technologies

Agilent Technologies Eyesys Mini-B/A Bedienungsanleitung

Agilent Technologies

Agilent Technologies W2642A Bedienungsanleitung

Agilent Technologies

Agilent Technologies TwisTorr 74 FS PCB 24 Bedienungsanleitung

Agilent Technologies

Agilent Technologies Turbo-V 1000HT Bedienungsanleitung

Agilent Technologies

Agilent Technologies 11896A Handbuch

Agilent Technologies

Agilent Technologies TV70 Navigator Series Bedienungsanleitung

Agilent Technologies

Agilent Technologies X3501-64003 Bedienungsanleitung

Agilent Technologies

Agilent Technologies 4UHV Bedienungsanleitung

Beliebte Controller Handbücher anderer Marken

Digiplex

Digiplex DGP-848 Betriebsanleitung

YASKAWA

YASKAWA SGM series Bedienungsanleitung

Sinope

Sinope Calypso RM3500ZB Bedienungsanleitung

Isimet

Isimet DLA Series Style 2 Installationshandbuch

LSIS

LSIS sv-ip5a Bedienungsanleitung

Rockwell Automation

Rockwell Automation 1769-L31 Bedienungsanleitung

Airflow

Airflow Uno hab Bedienungsanleitung

ABB

ABB ACS580-01 drives Bedienungsanleitung

Panasonic

Panasonic GM1 Series Bedienungsanleitung

Emerson

Emerson SW93 Bedienungsanleitung

AutoAqua

AutoAqua Smart ATO micro SATO-120P Bedienungsanleitung

Panasonic

Panasonic FP? Positioning Unit RTEX Bedienungsanleitung

Samson

Samson Type 5824 Service-Handbuch

Alpha IP

Alpha IP MIOB 21001 Bedienungsanleitung

Siemens

Siemens OpenAir GMA 1 Series Bedienungsanleitung

Surecom

Surecom SR-629 Bedienungsanleitung

Fishman

Fishman TriplePlay Bedienungsanleitung

Regulus

Regulus SRS1 T Bedienungsanleitung