Agilent Technologies TwisTorr Medium-TMP Rack Bedienungsanleitung

Agilent TwisTorr Medium-TMP Rack Controller

User Manual

2 Agilent TwisTorr Medium-TMP Rack Controller User Manual

Notices

Manual Part Number

87-901-049-01

Edition C.00, December 2022

No part of this manual may be

reproduced in any form or by any

means (including electronic storage

and retrieval or translation into a

foreign language) without prior

agreement and written consent from

Agilent Technologies, Inc. as governed

by United States and international

Agilent Technologies Italia S.p.A.

Vacuum Products Division

Via F.lli Varian, 54

10040 Leinì (TO)

ITALY

www.agilent.com

Instrument Manufacturing

Manufactured by Agilent Technologies

Italia S.p.A., Vacuum Products Division

Via F.lli Varian, 54, 10040 Leinì (TO),

ITALY

Printed in Italy

Operating Temperature

Operating Temperature: +5°C ÷ +45°C

Storage Temperature: -20°C ÷ +70°C

Warranty

The material contained in this

document is provided “as is,” and is

subject to being changed, without

notice, in future editions. Further, to the

maximum extent permitted by

applicable law, Agilent disclaims all

warranties, either express or implied,

with regard to this manual and any

information contained herein, including

but not limited to the implied

warranties of merchantability and

fitness for a particular purpose. Agilent

shall not be liable for errors or for

incidental or consequential damages in

connection with the furnishing, use, or

performance of this document or of

any information contained herein.

Should Agilent and the user have a

separate written agreement with

warranty terms covering the material

in this document that conflict with

these terms, the warranty terms in the

separate agreement shall control.

Technology Licenses

The hardware and/or software

described in this document are

furnished under a license and may be

used or copied only in accordance with

the terms of such license.

Restricted Rights Legend

U.S. Government Restricted Rights.

Software and technical data rights

granted to the federal government

include only those rights customarily

provided to end user customers.

Agilent provides this customary

commercial license in Software and

technical data pursuant to FAR 12.211

(Technical Data) and 12.212

(Computer Software) and, for the

Department of Defense, DFARS

252.227-7015 (Technical Data -

Commercial Items) and DFARS

227.7202-3 (Rights in Commercial

Computer Software or Computer

Software Documentation).

Safety Notices

A CAUTION notice denotes a hazard. It

calls attention to an operating

procedure, practice, or the like that, if

not correctly performed or adhered to,

could result in damage to the product

or loss of important data. Do not

proceed beyond a CAUTION notice

until the indicated conditions are fully

understood and met.

A WARNING notice denotes a hazard.

It calls attention to an operating

procedure, practice, or the like that, if

not correctly performed or adhered to,

could result in personal injury or death.

Do not proceed beyond a WARNING

notice until the indicated conditions

are fully understood and met.

WARNING

CAUTION

Contents

Agilent TwisTorr Medium-TMP Rack Controller User Manual 3

Contents

1Istruzioni per l’uso 12

Informazioni su questo manuale 13

Validità 13

Definizioni e terminologia 14

Definizione di Attenzione, Avvertenza e Nota 14

Simboli di avvertenza 15

Sicurezza 17

Uso corretto 17

Uso improprio 18

Attrezzatura di protezione 19

Linee guida di sicurezza per i Controller di pompe turbomolecolari 19

Trasporto & Immagazzinamento 20

Descrizione del prodotto 20

Installazione 21

Preparazione per l’installazione 21

Set-up 22

Fissaggio del TwisTorr Medium-TMP Rack Controller 23

Comandi, Indicatori e Connettori 24

Avvio e funzionamento del Controller TwisTorr Medium-TMP Rack 26

Accensione del Controller 26

Avvio della Pompa 26

Arresto della Pompa 26

Manutenzione 27

Messaggi di errore 28

Smaltimento 29

Servizio Post Vendita 30

Contents

4 Agilent TwisTorr Medium-TMP Rack Controller User Manual

2Betriebsanleitung 31

Informationen über diese Betriebsanleitung 32

Gültigkeit 32

Definitionen und Terminologie 33

Definition von Vorsicht, Warnung und Hinweis 33

Warnsymbole 34

Sicherheit 36

Sachgemäße Verwendung 36

Unsachgemäße Anwendung 37

Schutzausrüstung 38

Sicherheitsrichtlinien für Turbomolekularpumpen-Steuergeräte 38

Transport und Lagerung 39

Produktbeschreibung 39

Installation 40

Vorbereitung zum Einbau 40

Set-up 41

Montage von TwisTorr Medium-TMP Rack Controller 42

Steuerungen, Anzeigen und Verbinden des Controllers 43

Inbetriebnahme und Betrieb des Controller

TwisTorr Medium-TMP Rack 45

Einschalten des Controllers 45

Pumpenstart 45

Pumpenstopp 45

Wartung 46

Fehlermeldungen 47

Entsorgung 48

Service 49

Contents

Agilent TwisTorr Medium-TMP Rack Controller User Manual 5

3Mode d’emploi 50

À propos de ce manuel 51

Validité 51

Définitions et terminologie 52

Signification des messages d’attention, d’avertissement et des notes

Symboles d'avertissement

Sécurité 55

Utilisation appropriée 55

Utilisation inappropriée 56

Équipements de protection individuelle 57

Consignes de sécurité relatives aux contrôleurs de pompes

turbomoléculaires 57

Transport et Emmagasinage 58

Description du produit 58

Installation 59

Préparation pour l’installation 59

Set-up 60

Montage du Contrôleur TwisTorr Medium-TMP Rack 61

Commandes, Indicateurs et Connecteurs du Contrôleur 62

Démarrage et utilisation du Contrôleur TwisTorr Medium-TMP Rack 64

Allumage du Contrôleur 64

Mise en marche de la Pompe 64

Arrêt de la Pompe 64

Entretien 65

Messages d'erreur 66

Élimination 67

Service 68

Contents

6 Agilent TwisTorr Medium-TMP Rack Controller User Manual

4Instrucciones de uso 69

Acerca del manual 70

Validez 70

Definiciones y terminología 71

Definición de Precaución, Advertencia y Nota 71

Símbolos de advertencia 72

Seguridad 74

Uso correcto 74

Uso incorrecto 75

Equipo de protección 76

Pautas de seguridad para Controler de bombas turbomoleculares 76

Transporte y almacenamiento 77

Descripción del producto 77

Instalación 78

Preparación para instalación 78

Puesta en marcha 79

Montaje del TwisTorr Medium-TMP Rack Controller 80

Mandos, Indicadores y Conectores del Controler 81

Puesta en marcha y funcionamiento del

TwisTorr Medium-TMP Rack Controller 83

Encendido del controler 83

Puesta en marcha de la Bomba 83

Parada de la Bomba 83

Mantenimiento 84

Mensajes de error 85

Eliminación 86

Servicio 87

Contents

Agilent TwisTorr Medium-TMP Rack Controller User Manual 7

5使用说明88

关于本手册 89

有效性 89

定义与术语 90

小心、警告和注意的定义90

警告符号 91

安全 93

正确使用 93

使用不当 94

防护装备95

涡轮分子泵控制器安全指南 95

运输及存储96

产品描述 96

安装 97

安装准备97

设置98

TwisTorr Medium-TMP Rack Controller 遥控器安装 99

控件、指示器和连接器 100

TwisTorr Medium-TMP Rack Controller 的启动和运行 102

控制器启动102

启动泵 102

Pump Shutdown 102

停止泵102

维护 103

错误信息 104

处置105

服务106

Contents

8 Agilent TwisTorr Medium-TMP Rack Controller User Manual

6取扱説明書 107

この説明書について 108

有効期 108

定義と用語 109

警告・注意・注の定義 109

警告の記号 110

安全性 112

適切な使用 112

不適切な使用 113

保護装具 114

运输及存储115

製品説明 115

取り付け 116

取り付けの準備 116

取り付け 117

TwisTorrMedium-TMP onboard Controller の取り付け 118

コントロール、インジケーター、コネクター 119

TwisTorr Medium-TMP Rack Controller コンパクトの起動と操作 121

コントローラーの起動 121

ポンプの開始 121

ポンプの停止 Pump Shutdown 121

メンテナンス 122

エラーメッセージ 123

処分 124

サービス 125

Contents

Agilent TwisTorr Medium-TMP Rack Controller User Manual 9

7Instructions for Use 126

About this manual 127

Validity 127

Definitions and terminology 128

Definition of Caution, Warning and Note 128

Warning Symbols 129

Safety 131

Proper use 131

Improper use 132

Protective equipment 133

Safety guideline for Turbomolecular Pump Controllers 133

Transport & Storage 134

Product description 134

Installation 135

Preparation for installation 135

Set-up 136

TwisTorr Medium-TMP Rack Controller Mounting 137

Controls, Indicators and Connectors 138

Startup and Operation of the TwisTorr Medium-TMP Rack Controller 140

Controller Startup 140

Starting the Pump 140

Pump Shutdown 140

Maintenance 141

Error Messages 142

Disposal 143

Service 144

Contents

10 Agilent TwisTorr Medium-TMP Rack Controller User Manual

8Technical Information 145

Description of the TwisTorr Medium-TMP Rack Controller 147

Technical specification 148

Controller Outline 150

Fuse Holder Assembly 151

Connection J1 Remote I/O Interconnections 152

Signal Description 153

Connection P1 Vent 159

Connection P2 EXTERNAL FAN 159

Controller-to-Pump Connection 160

Input / Output Electrical Specifications 161

Vent Valve Operation – Automatic Opening Delay (AUTO TIME) 162

Vent Valve Operation – Manual Venting (SERIAL COMMAND) 163

Vent Valve Operation – Pulsed Venting (AUTO PUMP SPEED) 164

Controlled Venting 165

Stop Speed Reading 165

Serial Communication (J2 Connector) 166

Procedure to Connect the Serial and I/O Ports to an External Cable 167

RS 232/RS 485 Communication Description 168

Communication Format 168

Communication Protocol 168

Examples 171

Window Meanings 173

Soft Start 177

Agilent serial communication software - A-plus 178

Drive the External Fan 179

Dieses Handbuch passt für folgende Modelle

Inhaltsverzeichnis

Andere Agilent Technologies Controller Handbücher

Agilent Technologies

Agilent Technologies Turbo -V 1001 Bedienungsanleitung

Agilent Technologies

Agilent Technologies PCG-750 Bedienungsanleitung

Agilent Technologies

Agilent Technologies 78581B Montage- und Wartungsanleitung

Agilent Technologies

Agilent Technologies W2642A Bedienungsanleitung

Agilent Technologies

Agilent Technologies ETC 60 Bedienungsanleitung

Agilent Technologies

Agilent Technologies TwisTorr 84 FS PCB Bedienungsanleitung

Agilent Technologies

Agilent Technologies Eyesys Mini-B/A Bedienungsanleitung

Agilent Technologies

Agilent Technologies AIC 5000 Bedienungsanleitung

Agilent Technologies

Agilent Technologies 929-0022 Bedienungsanleitung

Agilent Technologies

Agilent Technologies TwisTorr Medium-TMP X3501-64016 Bedienungsanleitung

Agilent Technologies

Agilent Technologies Turbo-V 2000HT Bedienungsanleitung

Agilent Technologies

Agilent Technologies TwisTorr 305 FS Series Bedienungsanleitung

Agilent Technologies

Agilent Technologies X3501-64005 Bedienungsanleitung

Agilent Technologies

Agilent Technologies Multiple Channel Controller 85330A Service-Handbuch

Agilent Technologies

Agilent Technologies 969-9871 Bedienungsanleitung

Agilent Technologies

Agilent Technologies 8169A Bedienungsanleitung

Agilent Technologies

Agilent Technologies RS-232 Bedienungsanleitung

Agilent Technologies

Agilent Technologies XGS-600 Bedienungsanleitung

Agilent Technologies

Agilent Technologies Turbo-V 81-AG Bedienungsanleitung

Agilent Technologies

Agilent Technologies 4UHV Bedienungsanleitung

Agilent Technologies

Agilent Technologies 4UHV Bedienungsanleitung

Agilent Technologies

Agilent Technologies 929-0196 Bedienungsanleitung

Agilent Technologies

Agilent Technologies Turbo-V 2300 TwisTorr Bedienungsanleitung

Agilent Technologies

Agilent Technologies Turbo-V 550 Bedienungsanleitung

Beliebte Controller Handbücher anderer Marken

Digiplex

Digiplex DGP-848 Betriebsanleitung

YASKAWA

YASKAWA SGM series Bedienungsanleitung

Sinope

Sinope Calypso RM3500ZB Bedienungsanleitung

Isimet

Isimet DLA Series Style 2 Installationshandbuch

LSIS

LSIS sv-ip5a Bedienungsanleitung

Rockwell Automation

Rockwell Automation 1769-L31 Bedienungsanleitung

Airflow

Airflow Uno hab Bedienungsanleitung

ABB

ABB ACS580-01 drives Bedienungsanleitung

Panasonic

Panasonic GM1 Series Bedienungsanleitung

Emerson

Emerson SW93 Bedienungsanleitung

AutoAqua

AutoAqua Smart ATO micro SATO-120P Bedienungsanleitung

Panasonic

Panasonic FP? Positioning Unit RTEX Bedienungsanleitung

Samson

Samson Type 5824 Service-Handbuch

Alpha IP

Alpha IP MIOB 21001 Bedienungsanleitung

Siemens

Siemens OpenAir GMA 1 Series Bedienungsanleitung

Surecom

Surecom SR-629 Bedienungsanleitung

Fishman

Fishman TriplePlay Bedienungsanleitung

Regulus

Regulus SRS1 T Bedienungsanleitung