Alcatel IPUP A100 Bedienungsanleitung

ALCATELVACUUMTECHNOLOGYFRANCE

98,avenuedeBrogny --- BP 2069

74009 ANNECYCedex--- France

TEL.(33)4 50 65 77 77

FAX :(33)4 50 65 77 89

IPUPA100 Instruction manual

Edition:10

Date:09/00

ManualP/N107782

AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual1/2

IPUPA100

DearCustomer,

You havejustpurchasedanAlcateldry

pump.Wethankyouandareproudtoinclude

youasoneofourcustomers.

ThisproducthasbenefitedfromAlcatel’s

many yearsofexperienceinsemiconductor

processesand drypumping.

Foroptimumperformanceandto obtain

full satisfactionfromthisequipment,we

recommendthatyoustudythismanual

beforeanyinterventiononyourpump,in

particular,thechapteroninstallationand

startup.

Applications

lP/PIversion:forcorrosive,reactive,flammable,pyrophoric,

oxidizingprocesses.

lL/LIversion:forcleanpumping.

Advantages

lReducedvolumeandfootprint.

lLowoperatingcost.

lHighperformance(pumpingspeedandultimatepressure).

lAdvancedmonitoringfunctions.

2/2AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual

IPUPA100

Specialfeatures

lMulti---stageRootstechnology.

lWater---cooledmotor.

Multi---stage pumpwithroots

technology

lEstablishedtechnology.

Lownoiseandvibration

Genuinedrypump

lTotaltightness withtheenvironment.

Compactfootprint

lReducedsize23.84 inchesx11.02 inchesx11.81 inches.

(605.5mm x280 mm x300 mm).

Reducedcost ofownership

lDesignforreliability.

lReducedpowerconsumption.

lReducedwaterconsumption.

lReducedweight.

Newcontrolinterface

lAmatSPIinterface.

lAmatdevicenetinterface.

lRS232/485 interface.

Contents

AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual1/3

IPUPA100 instructionmanual

IntroductionIPUPA100 operatingprincipleA10...............

IPUPA100 descriptionA20.....................

IPUPA100 monitoringsystemA30...............

IPUPA100 technicalcharacteristicsA40..........

TableofIPUPA100 partnumbersA50............

CEmarkingcertificateA60.....................

SEMIS2certificateA70........................

StartupSafetyinstructionsB00........................

Unpacking/Handling/StorageB10.............

PositioningthepumpinthepumpinginstallationB20

ConnectiontothecoolingcircuitB30.............

Inertgaspurgeconnection(N2connection)B40....

ElectricalconnectionB50......................

AmatsmartpumpinterfaceconnectionB60.......

RS232 orRS485 linkwiringB70................

ConnectiontothepumpingcircuitB80...........

OperationOperatingmodeC10..........................

StartupofthemonitoringsystemC20............

Useofthemonitoringsystemforpumping

operationC30...............................

MonitoringsystemparametersC40..............

Monitoringsystemfunctiontable

IPUPA100PversionC50.......................

Contents

2/3AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual

IPUPA100 instructionmanual

Operation(cont’d)Monitoringsystemfunctiontable

IPUPA100LversionC51.......................

Gaspurgeandtemperatureaccordingtothe

semiconductorprocessesC60..................

Savingandloadingofpumpconfiguration

(withmonitoringsystem)C70.....................

MonitoringsystemsettingfortransportC80.......

Useoftheserial linkC90.......................

TroubleshootingFirstleveloftroubleshootingD 10..................

DiagnosisandtroubleshootingD 20................

MessagenumbersD 30..........................

Pump doesnotstart.

Handheld displaymoduleisnotilluminatedD 40....

Pump doesnotstart.

IPUPA100 withouthandheld displaymoduleD 50...

Pump doesnotstart.

Handheld displaymoduleisilluminatedD 60.......

Pump doesnotstart.

Displayis showingamessageoranalarmD 70.....

Faultmessagedisplay.

FacilitiesproblemD 80...........................

Faultmessagedisplay.

TemperatureproblemD 90........................

Faultmessagedisplay.

PressureproblemD 100...........................

Faultmessagedisplay.

MaintenanceproblemD 110........................

Pumpisrunning.

NomessageD 120................................

Contents

AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual3/3

IPUPA100 instructionmanual

MaintenanceinstructionsMaintenancefrequencyE10....................

Shippingprocedureforcontaminated pumpsE20. .

MaintenancecomponentsN2pressurizationkitF10.........................

AppendixIPUPA100 electricalblockdiagramG 10............

SafetydatasheetG 20...........................

AccessorypartnumbersG 30.....................

NOTE

Warningsareusedwhenfailuretoobserveinstructionscould

resultininjuryordeath.

Cautionsareusedwhenfailuretoobserveinstructionscould

resultinsignificantdamagetoequipmentand/orfacilities.

ChapterA

AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual1/1

IPUPA100 instructionmanual

IntroductionIPUPA100 operatingprincipleA10...............

IPUPA100 descriptionA20.....................

IPUPA100 monitoringsystemA30...............

IPUPA100 technicalcharacteristicsA40..........

TableofIPUPA100 partnumbersA50............

CEmarkingcertificateA60.....................

SEMIS2certificateA70........................

A10

1/3

AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual

IPUPA100 operatingprinciple

DESIGNTOMINIMIZE

POTENTIELRESIDUES

The equipmentwasdesignedtominimizepotentielresiduedeposits:

lbylimitingtheinternalvolumesthatcontaingas,

lbyinjectingN2purgeoneachpumpstagetodilutetheprocess

gas(Pversiononly),

lbyregulatingthepumptemperatureandadjustingittoeach

process inordertolimitgascondensation(Pversiononly),

lbyintegratingthesilencerinsidethepumptoreduceby---product

deposition.

MULTI---STAGEPUMPWITH

ROOTSTECHNOLOGY

IPUPA100 pumpconsistsof5Rootstypestages.

Thetworotorsrotatewithout touchingeachother.

EXHAUST

INLET

Stage5

Highpressurestage

(exhauststage)

Stage4

Transferstage

Stage3

Transferstage

Stage2

Transferstage

Stage1

Lowpressurestage

(inletstage)

A10

2/3AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual

IPUPA100 operatingprinciple

TIGHTNESS WITH ENVIRONMENT

Tightness atlowpressuresideThepumpisfittedwithball bearingslubricatedwithfluorinatedgrease.

Anoverpressurezoneiscreatedaroundthebearingbyinjectinga

neutralgas.

Thepressurizationandthesealspreventpumpedgasesand powders

from migratingtowardsthebearings.

Neutralgaspurgingforthebearingsisimperativeforcorrosive

processes.

Tightness athighpressuresideThebearingsarelubricated bysplashingoil.

Theoiltrapis sealedfromstage5byatrapandadeflector.

A10

3/3

AlcatelVacuumTechnologyFrance--- IPUPA100 Instructionmanual

IPUPA100 operatingprinciple

TIGHTNESS WITH ENVIRONMENT

(CONT’D)

Tightness atmotorside

(shaftpassage) Thevacuumtightness isensured bythemotordesignwithbuilt---in

jacket(hermeticallysealed).

This systemprovidestotalsafetyregardingleaksoutsidethepump

andrequiresnomaintenance.

Motorcasing

Electrical liner

Incorporatedliner

Tightness atshutdownThepumpisfittedwithanantisuckbackvalveinthe exhaust tube

whichpreventsthe exhaustfrombeingsucked back.

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