BOC Edwards IL70 Bedienungsanleitung

A533-71-880

Issue A

Manor Royal, Crawley, West Sussex, RH10 2LW, UK

Telephone: +44 (0) 1293 528844 Fax: +44 (0) 1293 533453

http://www.bocedwards.com

iL Dry Pumping Systems

Instruction Manual

Declaration of Conformity

We, BOC Edwards,

Manor Royal,

Crawley,

West Sussex RH10 2LW, UK

declare under our sole responsibility that the product(s)

iL Dry Pumping Systems: iL70 iL600 iL70✝iL600✝

460 V, 60 Hz, 3-phase A533-71-908 A533-72-908 A533-74-908 A533-75-908

200/208 V, 50/60 Hz, 3-phase A533-71-945 A533-72-945 A533-74-945 A533-75-945

380/415 V, 50 Hz, 3-phase A533-71-946 A533-72-946 A533-74-946 A533-75-946

230 V, 60 Hz, 3-phase A533-71-957 A533-72-957 A533-74-957 A533-75-957

✝Sensor Configured Systems

to which this declaration relates is in conformity with the following standard(s)

or other normative document(s)

EN50081-2 Electromagnetic Compatibility, General Emission Standard.

Generic Standard Class: Industrial Environment.

EN50082-2 Electromagnetic Compatibility, General Immunity Standard.

Generic Standard Class: Industrial Environment.

EN 60204-1 Electrical Safety; Machines.

EN 1012-2 Compressors and Vacuum Pumps - Safety Requirements;

Part 2 - Vacuum Pumps.

following the provisions of

73/023/EEC Low Votage Directive.

89/336/EEC Electromagnetic Compatibility Directive

98/37/EC Machinery Safety Directive.

Dr. S. Ormrod, Technical Director Date and Place

This product has been manufactured under a quality system registered to ISO9001

P900-75-000 Issue F 2B01-010

A533-71-880

Setup Password

iL Dry Pumping Systems - Setup Password

The setup password for this equipment is preset as follows:

SETUP PASSWORD: 202

You can remove this sheet from the instruction manual and retain it in a safe place to prevent

unauthorised access to the setup menus in the iL system.

CONTENTS

Section Title Page

1 INTRODUCTION 1-1

1.1 Scope and definitions 1-1

1.2 Overview 1-2

1.2.1 The iL system 1-2

1.2.2 Applications 1-2

1.3 The LCDP dry pump 1-4

1.4 The LCDP gas system (sensor-configured iL systems only) 1-4

1.5 The LCMB mechanical booster pump (iL600 only) 1-5

1.6 Temperature control system 1-5

1.6.1 LCDP pump temperature control system 1-5

1.6.2 LCMB pump temperature control system (iL600 only) 1-6

1.7 Exhaust system 1-7

1.8 Electrical system 1-7

1.8.1 Introduction 1-7

1.8.2 Electrics and Pump Control Module 1-7

1.8.3 Sensor Monitoring Module (sensor-configured iL systems only) 1-15

1.8.4 Gas Module (sensor-configured iL systems only) 1-15

1.9 Controls and indicators 1-15

1.10 Control functions 1-16

1.10.1 Priority of control 1-16

1.10.2 Setpoints, warning and alarm conditions 1-17

1.10.3 Safety sensors 1-17

1.11 Pump Display Module (optional accessory) 1-18

1.12 Accessories 1-20

2 TECHNICAL DATA 2-1

2.1 General 2-1

2.2 Performance 2-1

2.3 Temperature control system 2-9

2.4 Cooling-water supply 2-9

2.5 Lubrication 2-10

2.5.1 LCDP pump 2-10

2.5.2 LCMB pump (iL600 only) 2-10

2.6 Electrical data 2-10

2.7 Gas system (sensor-configured iL systems only) 2-11

2.8 Construction materials 2-11

2.9 Default setpoints 2-12

2.10 Connections 2-12

2.11 Item Numbers 2-14

2.11.1 Standard iL systems 2-14

2.11.2 Sensor-configured iL systems 2-14

3 INSTALLATION 3-1

3.1 Safety 3-1

iL Dry Pumping Systems i

dcs/0017/0399

Section Title Page

3.2 Installation checklist 3-1

3.3 Unpack and inspect 3-3

3.4 Remove the enclosure panels 3-6

3.5 Reconfigure the nitrogen and cooling-water connections (if required) 3-6

3.6 Locate the iL system 3-10

3.7 Check the pump oil-levels 3-11

3.7.1 iL70 systems 3-11

3.7.2 iL600 systems 3-11

3.8 Install or replace the Pump Display Module and other optional

accessories (if necessary) 3-11

3.8.1 Install the Pump Display Module (optional) 3-11

3.8.2 Install other optional accessories 3-12

3.9 Connect the iL inlet to your vacuum system 3-12

3.10 Connect the iL exhaust outlet to your exhaust-extraction system 3-14

3.11 Connect to your factory extraction system (optional) 3-14

3.12 Connect the nitrogen supply (sensor-configured iL systems only) 3-15

3.13 Leak test the system 3-15

3.14 Install additional safety equipment (optional) 3-16

3.15 Connect to your emergency stop circuit (optional) 3-16

3.16 Electrical supply and RF earth (ground) connections 3-18

3.16.1 Reconfigure the iL system for your electrical supply (if necessary)3-18

3.16.2 Reconfigure the pump(s) for your electrical supply (if necessary) 3-18

3.16.3 Connect the electrical supply to the iL system 3-20

3.16.4 Connect an additional RF earth (optional) 3-22

3.17 Refit the enclosure panels 3-22

3.18 Connect the cooling-water pipelines 3-24

3.19 Commission the iL system 3-25

3.19.1 Switch on an iL70 system 3-25

3.19.2 Configure and switch on an iL600 system 3-26

4 PUMP DISPLAY MODULE MENUS AND DISPLAY FORMATS 4-1

4.1 Introduction 4-1

4.2 General operation 4-2

4.3 The CANCEL button 4-3

4.4 Display text and variable text 4-3

4.5 Wrap-around 4-4

4.6 Timeout 4-4

4.7 Menu structure 4-4

4.8 Example 4-4

5 OPERATION 5-1

5.1 Introduction 5-1

5.2 Change the display format 5-1

5.2.1 Change the normal display 5-1

5.2.2 Change the display units 5-2

5.3 Take and release control 5-2

ii iL Dry Pumping Systems

Section Title Page

5.4 Start-up 5-3

5.5 Check the nitrogen pressure and adjust if necessary

(sensor-configured iL systems only) 5-4

5.6 Monitor the status of the iL system 5-4

5.7 Warning and alarm indications 5-6

5.8 Manual shut-down 5-6

5.8.1 Normal manual shut-down 5-6

5.8.2 Fast manual shut-down 5-7

5.9 Automatic shut-down 5-7

5.10 Emergency stop 5-8

5.11 Restart the LCMB pump after automatic pump shut-down (iL600 only) 5-8

5.12 Restart the iL system after emergency stop or automatic shut-down 5-9

5.13 Operation of iL system components 5-9

5.14 Operation of the load-lock pump 5-10

6 MAINTENANCE 6-1

6.1 Safety 6-1

6.1.1 General requirements 6-1

6.1.2 Recommended purge method 6-2

6.2 Correct use of Swagelok connectors 6-2

6.2.1 Fit a Swaelok connector 6-2

6.2.2 Reconnect Swagelok connector 6-4

6.3 Maintenance frequency 6-4

6.4 Inspect the connections, pipelines, cables and fittings 6-4

6.5 Inspect and clean the exhaust-pipe and check-valve 6-5

6.5.1 Dismantle, clean and refit the exhaust-pipe 6-5

6.5.2 Clean and refit the check-valve (if fitted) 6-6

6.6 Check the LCMB pump oil-level (iL600 only) 6-8

6.7 Check the LCDP pump oil-level 6-9

6.8 Change the LCDP pump oil 6-10

6.9 Change the LCMB pump oil (iL600 only) 6-11

6.10 Adjust the Pump Display Module display viewing angle (if fitted) 6-11

6.11 Replace a fuse 6-12

6.12 Replace the Pump Display Module 6-12

6.13 Relocate the iL system for maintenance 6-13

6.14 Fault finding 6-14

6.14.1 Warning and alarm message fault finding 6-14

6.14.2 Other fault finding 6-14

6.15 Check for free rotation of the LCDP pump 6-25

7 STORAGE, DISPOSAL AND TRANSPORTATION 7-1

7.1 Storage 7-1

7.2 Disposal 7-1

7.3 Transportation 7-2

iL Dry Pumping Systems iii

Section Title Page

8 SERVICE, SPARES AND ACCESSORIES 8-1

8.1 Introduction 8-1

8.2 Service 8-1

8.3 Spares 8-2

8.4 Ordering Accessories 8-2

8.4.1 iL Enclosure Extraction Fan Kit 8-2

8.4.2 Pump Display Module 8-2

8.4.3 iL Pump Display Module extension cables 8-2

8.4.4 Active Gauge Connection Kit (sensor-configured iL systems only) 8-3

8.4.5 iL Interface Modules 8-3

8.4.6 iL PC Interface Kits 8-3

8.4.7 iL Central Monitoring System 8-4

8.4.8 iL600 Pressure Control Kit (sensor-configured iL systems only) 8-4

8.4.9 iL Communications Module 8-4

8.4.10 iL Alternative Nitrogen Connection Kit 8-4

RETURN OF BOC EDWARDS EQUIPMENT

Tables

Table Title Page

1-1 Safety sensors 1-18

2-1 Technical data 2-2

2-2 Full load current ratings 2-11

2-4 Sensor Monitoring Module default setpoints (sensor-configured iL systems only) 2-13

2-5 Gas Module default setpoints (sensor-configured iL systems only) 2-13

3-1 Installation checklist 3-2

3-2 Checklist of components 3-4

3-3 Pins in the iL Tool Interface Module plug 3-16

3-4 Pins in the electrical supply connector 3-22

4-1 Menu structure 4-5

5-1 Status menu display options 5-5

6-1 Warning messages 6-15

6-2 Alarm messages 6-20

6-3 Fault messages 6-22

6-4 Fault parameters 6-23

6-5 Fault types 6-26

Illustrations

Figure Title Page

1-1 The iL system (iL600 shown, with side panels removed) 1-3

iv iL Dry Pumping Systems

Illustrations (continued)

Figure Title Page

1-2 Schematic diagram of the LCDP pump gas system

(sensor-configured iL systems only) 1-5

1-3 Schematic diagram of the electrical system 1-9

1-4 Services and electrical connections on the rear of the iL system 1-12

1-5 Electrical components (shown without enclosure for clarity) 1-14

1-6 Controls and indicators on the front panel 1-16

1-7 Front panel of the Pump Display Module (optional accessory) 1-20

2-1 iL70 dimensions (mm) 2-3

2-2 iL600 dimensions (mm) 2-4

2-3 Services connections dimensions (mm) 2-5

2-4 Centre of mass dimensions (mm) and mass distribution 2-6

2-5 Typical pumping speeds for iL70: pumping speed against pressure 2-7

2-6 Typical pumping speeds for iL600: pumping speed against pressure 2-7

2-7 iL70 power curves: electrical power input against inlet pressure 2-8

2-8 iL600 power curves: electrical power input against inlet pressure 2-8

3-1 Remove the iL system from the pallet 3-4

3-2 Lifting-bolt positions 3-5

3-3 Remove/refit the enclosure panels 3-7

3-4 Reconfigure the cooling-water connections (if required) 3-9

3-5 Remove the vibration isolator transit brackets 3-10

3-6 Fit the Pump Display Module (optional accessory) 3-13

3-7 Leak-test port position 3-17

3-8 Reconfigure the iL system for your electrical supply (if necessary) 3-19

3-9 Reconfigure the pump-motor terminal-box (if necessary) 3-21

3-10 Connect the electrical supply cable to the connector mating-half 3-23

4-1 Front panel of the Pump Display Module (optional accessory) 4-2

4-2 Menu logic 4-6

4-3 Switch on menu 4-7

4-4 Switch off menu 4-8

4-5 Normal menu 4-9

4-6 Status menu: sheet 1 of 2 4-10

4-7 Control menu 4-12

4-8 Setup menu: sheet 1 of 3 4-13

4-9 Run til crash menu 4-16

4-10 Units menu 4-17

4-11 Normal display menu 4-18

4-12 Service menu: sheet 1 of 2 4-19

4-13 Serial menu 4-21

4-14 Zero sensors menu 4-22

4-15 Gas valve control menu 4-23

4-16 Manual menu: sheet 1 of 3 4-24

4-17 View Status menu: sheet 1 of 2 4-27

4-18 Messages menu 4-29

4-19 Warning and alarm messages menu 4-30

iL Dry Pumping Systems v

Illustrations (continued)

Figure Title Page

6-2 Retighten a Swagelok fitting 6-3

6-1 Fit a Swagelok fitting 6-3

6-3 Clean the exhaust check-valve 6-7

6-4 Try to turn the LCDP pump 6-24

vi iL Dry Pumping Systems

1 INTRODUCTION

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions for the BOC

EdwardsiL70andiL600DryPumpingSystems(abbreviatedtoiLsystemintheremainderofthis

manual). You must use the iL systems as specified in this manual.

Read this manual before you install and operate the iL system. Important safety information is

highlighted as WARNING and CAUTION instructions; you must obey these instructions. The

use of WARNINGS and CAUTIONS is defined below.

WARNING

Warnings are given where failure to observe the instruction could result in injury

or death to people.

CAUTION

Cautions are given where failure to observe the instruction could result in damage

to the equipment, associated equipment or process.

Throughout this manual, page, figure and title numbers are in the form 'S-N', where 'S' specifies

the section and 'N' specifies the number of the page, figure or table in the section.

The units used throughout this manual conform to the SI international system of units of

measurements. Also, throughout this manual, wherever nitrogen flow rates are specified, the

abbreviation 'slm' is used to mean 'standard l.min-1': this is a flow of 1 l.min-1 at an ambient

temperature of 0 oC and a pressure of 1013 mbar (1.013 x 105Pa).

The following symbols may appear on the iL system:

iL Dry Pumping Systems 1-1

Caution - refer to accompanying

documentation.

Caution - risk of electric shock.

Caution - hot surfaces.

Caution - static sensitive devices.

Protective earth (ground)

RF earth (ground)

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