EBARA EV-SA20 Bedienungsanleitung

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EBARA CORPORATION

“Model EV-SA20” in this INSTRUCTION MANUAL is EBARA model code.

INSTRUCTION MANUAL

MULTI-STAGE DRY VACUUM PUMP

CE / NRTL MODEL

200-240V (1Phase 50/60Hz)

200-240V (3Phase 50/60Hz)

CAUTION

READ AND UNDERSTAND THIS INSTRUCTION MANUAL THOROUGHLY

BEFORE USING THIS EQUIPMENT.

BE SURE TO KEEP THIS INSTRUCTION MANUAL ON HAND FOR FUTURE

REFERENCE.

To Facility and Tool Manufactures:

Be sure to distribute this INSTRUCTION MANUAL to all end-user personal

actually operation this equipment.

EVSA_CN_E_Rev.0

MODEL EV-SA20

ISSUED BY PRECISION MACHINERY COMPANY

PM10U EBARA CORPORATION

The Products described herein fall under “the goods listed in row 16 of the appended

table 1 of the Export Trade Control Order of Japan”, so in cases of export of such

products, you need to confirm “use” and “purchaser and/or end-user” and, as case may

be, obtain the approval of the Minister of Economy, Trade and Industry. (Please confirm

these conditions on your own.) Furthermore, some of the Products fall under row 1-15 of

the appended table 1(listed items). In case of export of these listed items, you are

required to obtain the export license from the Minister of Economy, Trade and Industry.

For more information, please contact our sales office located near you.

Do not reproduce or reprint any portion of this manual without permission.

Manufacture reserves the right to discontinue or change any specifications or designs

with out notice and without incurring obligations.

MODEL EV-SA20 in this instruction manual is our model code.

P.3

PM10U EBARA CORPORATION

Environmental Basic Policies

It is our responsibility to protect irreplaceable treasure of the nature and to hand it over to our future

generations as people of Earth.

As we undertake our business activities, we will establish environmental management systems and

implement ongoing improvements and reviews, while striving to promote harmony between

technology and nature, prevent environmental pollution, and improve the overall results of our

environmental management activities. We are aware that environmental protection and management

activities are the responsibility of all managers and employees of the Corporation, and each person

will demonstrate this awareness when carrying out his or her duties.

We will widely publicize these basic policies to regional societies and the general public and work to

make Ebara’s position on the environment clear to society in general.

P.4

PM10U EBARA CORPORATION

Foreword

Design of EBARA MODEL EV-SA20 DRY VACUUM PUMP is based on superior engineering and

long experience. To prevent any possible trouble and provide satisfactory operation and long life, it is

important to thoroughly understand this EBARA MODEL EV-SA20 DRY VACUUM PUMP by careful

study of this manual. If any questions arise regarding this manual, please direct them to EBARA or

your dealer. Your questions will be promptly answered and your suggestion may be considered for

incorporation into our future product.

WARNING

BEFORE USING THIS EQUIPMENT, READ THIS INSTRUCTION

MANUAL THOROUGHLY. MANUFACTURES WARRANTY WILL BE

VOID, IF THE MODEL EV-SA20 DRY VACUUM PUMP HAS BEEN

INCORRECTLY INSTALLED, OPERATED OR MAINTAINED OR IF IT

HAS BEEN MODIFIED OR REPAIRED WITH PARTS NOT SPECIFIED

BY MANUFACTURE.

SINCE THE OPERATIONS OR WORKS THAT ARE NOT DESCRIBED IN

THIS MANUAL COULD RESULT IN SERIOUS OR POSSIBLY EVEN

FATAL INJURY OR DAMAGE TO THE PUMP, DO NOT THESE THAT

ABSOLUTELY.

EBARA IS NOT LIABLE FOR ANY INJURY OR DAMAGE ARISING FROM

AN INDIVIDUAL’S CARELESSNESS, OR MISUSE.

P.5

PM10U EBARA CORPORATION

(1) Limited Warranty

The liability of EBARA CORPORATION under this Warranty covers the following.

Unless otherwise specified in the contact, the warranty period shall be either one year from the

first date of operation or 18 months after the shipment from EBARA, whichever comes first.

1. When the purchased pump cause failure that owe to its design, manufacturing processes or

other faultiness that EBARA is responsible to, EBARA will either repair the troubling parts or

replace the pump at free of charge. No extension of warranty is available even when the pump

was replaced during the original warranty program.

2. Fees will be charged for repair in the following circumstances and for consumable parts:

1) If the trouble occurs after Warranty has expired.

2) If the trouble is caused by operating in the manner not described in the instruction manuals

or using under special condition.

3) If the trouble is caused by repair or remodeling of the pump by other than EBARA or

authorization suppliers by EBARA.

4) If the trouble is caused be corrosion or by-products due to pumping the corrosive or reactive

substance.

5) If the trouble is caused by fire, flood, earthquake, or other circumstances beyond EBARA’s

control.

3. EBARA will not be liable for any compensation for damage or injury resulting from breakdown

of the pump.

(2) Repair and Servicing

Requests for repair or servicing of the pump shall be made to your dealer or to EBARA.

If any abnormal symptoms other than those displayed on the operational panel appear, take

action in accordance with the instruction of Section 9 “Troubleshooting”.

If trouble occurs, to order repairs or servicing. Please contact EBARA CORPORATION or an

authorized Agent/Distributor, and provide the information on the nameplate and details of the

problem.

If you have any inquiries about the pump, please contact EBARA.

P.6

PM10U EBARA CORPORATION

(3) Safety Notice

It is essential that those operating this pump should have the knowledge to identify and avoid

hazardous conditions associated with the pump. Inadequate or rush operation may cause

dangerous and serious accidents. Before installation and operation, the operator should first have

a good knowledge of the pump construction, operation procedure, and its hazards (e.g., electrical,

stored electrical, thermal). The operator should read through this instruction manual and other

documents issued by EBARA in detail.

The following symbols are used to highlight important information and instructions that must be

followed to prevent personal injury or damage to equipment. Please study the symbols carefully so

that the meaning of any warning you encounter is immediately clear.

DANGER : Indicates an imminently hazardous situation that, if not avoided, will result in

death or serious injury.

WARNING : Indicates a potentially hazardous situation that, if not avoided, could result

in death or serious situation.

CAUTION : Indicates a potentially hazardous situation that, if not avoided, may result in

minor or moderate injury. This term may also indicate situations that might

damage equipment.

NOTE : is used to call attention or to emphasize essential information.

The following symbols may appear on the model EV-SA20 dry vacuum pump.

: DANGER - Heavy Object

: WARNING - Hot Surfaces

: WARNING - Hazardous Voltage

P.7

PM10U EBARA CORPORATION

Precautions necessary for safe use of the EBARA MODEL EV-SA20 DRY VACUUM PUMP are detailed

in this instruction manual, while important items concerning precautions for handling EBARA MODEL

EV-SA20 DRY VACUUM PUMP are listed below.

DANGER

· Keep out from under the pump when it is elevated. Only qualified personnel shall

unload and lift the pump.

· Keep pump at horizontal position when lifted.

· Do not lift the pump without eyebolt spacer.

WARNING

· Be careful not to overturn the pump when pushing and pulling it sideways, because

the pump is narrow in comparison to its height.

· Be sure to turn off the power at the circuit protector (CP) and disconnect the power

cable from the power connector, when the pump installing, the wiring and

maintenance work. Never supply power to the pump, Until you have completed

these works.

· Only a qualified electrician, observing all national and local regulations, should

perform electrical work.

· Be sure to connect the grounding wire, otherwise an electric shock may be caused

by electric leakage.

· The earthing of the pump is realized by connecting the cable with qualified

electricians. The qualified electricians should have themselves a connection the

ground.

· The pump unit is not equipped with circuit breaker (CB). Please install CB based on

the law and the standard in the installation region.

· The pump must be connected to electrical power supply with a suitable circuit

beaker (lockout / tagout CB).

· Be sure to check for leaks after you have installed the pump. When checking for

gas leaks by pressurization, please pressurize by less than 0.05 MPa into the

exhaust piping.

· This pump is suitable for use on clean and non-corrosive gases. Do not use

explosive, flammable, toxic or corrosive substances.

· The pump and exhaust piping will remain at a high temperature during operation

and for a short time after the pump has stopped. Be sure to avoid contact and keep

inflammable substances out of reach. Do not remove the pump cover during

operation.

· Do not perform a withstand voltage test. Failure to comply could result in damage to

the sensitive devices.

· Do not insert any part of body to ventilation inlet. Moving parts of the cooling fan can

crash and cut.

· Check safety interlock functions periodically (every 6 months) to confirm the

interlocks will work correctly.

· Do not alter the pump member nor change any parts without the EBARA’s consent

or approval.

P.8

PM10U EBARA CORPORATION

CAUTION

· Do not step on the pump or place object on it.

· The exhaust piping made by polyvinyl chloride causes the noise through the pipe.

· Do not apply the power supply from the pump’s power pack to any other equipment

as this will result in malfunctioning of the control units and in pump failure.

· Use the correct wiring materials and size to match the operating conditions in

accordance with the power consumption rating and ambient air temperature of the

pump.

· Vents at both ends, both side, and top of the pump. Place the pump enough space

from the stationary section. If the cooling air supply is insufficient, the pump

temperature will rise and problems such as rotor contact will occur.

Front / Rear / Top : 100mm or more

Both side : 50mm or more

· Install pump in a location at an ambient not exceeding 40 deg C. Particular caution is

required when the pump is operated in an enclosed room.

· Never operate the pump without pump cover for safety.

NOTE

· Pump must be placed in an upright position. Do not stack as packing. When the

pump is overturned, this will result in accident.

· To fix the pump, the height-adjustment feet of four each are attaches. If the pump is

not stable, vibration and noise of the pump may be increased.

· Do not wire vacant pins.

· Apply a 24V DC power for input signals on the pump side. Do not apply this voltage

on the equipment side.

· Be sure to wire all signals with the correct polarity (+/-).

· When output signals are used to energize an inductive load such as a relay, be sure

to insert a diode (100V. 1A class) in order to absorb the back electromotive force due

to surge currents.

· The pump cannot start while the measuring instruments are booting after the ＣＰ is

placed in the ON position.

· The pump will not start when an ALARM has been generated. After you have taken

the remedial action, reset the pump.

P.9

PM10U EBARA CORPORATION

(4) Safety Warning Labels

Following safety labels are attached to pump covers.

1. Hazardous weight danger

2. Hazardous voltage warning

3. High temperature warning

4. Electric charge mark

1. Hazardous weight danger

Heavy object may cause injury or death due to overturning or falling pump. Keep out from

under the lifted pump. Raise all adjuster-feet fully when moving.

2. Hazardous voltage warning

Hazardous voltage may shock, burn, or cause death. Turn power off and lockout before

servicing.

3. High temperature warning

Hot surface may burn or cause injury. Allow the piping and casing to cool before servicing.

4. Electric charge mark

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