Edwards A528-44-404 Bedienungsanleitung

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Instruction

Manual

Interface Module

I'~

EOW"ARDS

Edwards

High

Vacuum

International

Manor Royal, Crawley, West Sussex, RH10 2LW, UK

Telephone: +44 (0)

1293528844

Fax: +44 (0) 1293533453

http://www.edwards.boc.com

A528-44-880

Issue B

1993 1996

Safety during maintenance

A528-44-BBO

Issue A

Amendmentl

Add

the following warning to the start

Section 5 (Maintenance):

Amendment 1

WARNING

you

need

open

the iQ Interface

Module

for maintenance,

support

the innermodule

before

you

remove its retainingscrews.

you

not, the

inner

module

will fall

and

may

injure

you

damaged.

P600-30-370

Issue B

Amendment

AS28-44-880

Interface Module -Item

Number

A528-44-404

Introduction

This

Amendment

describes

the

details

this

Interface

Module

Cards

fitted

The

following

Interface

Card

is fitted

this

Interface Module:

•

AIC

(Auxiliary Interface

Card).

Connectors

The

connectors

Table

are

fitted

the

interface

connector

panel

thisiQInterfaceModule:

Connector

name/number

Connector

type

Figure

reference

Tool

CPC

I7/I6-M

MCM

CPC

I7/I6-M

Gate

valve

CPC

I3/9-M

Remote

EMS

9-way

D.-conn.-F 4

Table

Connector

types

Amendment 1

Amendment

Use

connector

pins

The signals available

the connectors are

shown

inTables A2 to

AS.

Refer to the appropriate

sectionsof

thisinstruction

manual

forelectrical

data

for thesignalsavailable

theToolInterface

Card

and

Auxiliary Interface

Card

connectors

and

for information

the use of the signals.

Signal

Destination!

numbers

Source

and

2 Loadlock

pump

Va.c./d.c.

control

input

AIC, CH8 PLlO

3and4

Loadlock

pump

running

volt-free status

output

AIC, CH6 PL7

7and8

Loadlock

pump

not

warning

volt-free status

output

AIC,CHSPL7

and

10 Loadlock

pump

not

in alarm volt-free status

output

AIC,CH4

PL8

Table

-Tool connector signals

Signal

Destination!

numbers

Source

3and4

Loadlock

pump

running volt-free control

input

AIC, CH7 PLl4

Sand6

Loadlock

pump

volt-free status

output

AIC,CH3PL8

7and8

Loadlock

pump

not

warning

volt-free status

output

AIC, CH6

PUS

and

10 Loadlock

pump

not

in alarm volt-free status

output

AIC, CHS PLlS

Table A3 -MCM connector signals

Signal

Destination!

numbers

Source

and

2 Valve closed volt-free status

input

(from valve) AIC, CH1 PLl7

3and4

Valve

open

volt-free status

intput

(from valve) AIC, CH2 PLl7

7and9

Open

valve

V a.c. control

output

(to valve) AIC,CH1

PL9

Table

-Gate valve connector signals

Signal

Destination!

numbers

Source

and

EMS

input

from tool (closed in normal operation) EMO pins 1

and

EMS

output

to tool (closed in normal operation) EMO pins 3

and

Table

-Remote

EMS

connector signals

Tool connector

MCM connector

Gate valve connector

Remote EMS connector

Figure

-Interface connector panel

Amendment 3

)..

NETWORK

'---I

NTERF

ACE

MODULE

U;r~IC

(NET""'"

LON

CllHMUNICATlIlNS>

<TO

",IT)

<J----jf~

(F"RIJM

PREY

IDUS

InC>-

- -

..J

I I

OFT

4-f'IN

XLR

AIC

INTERFACE

MODULE

Cpt

17I16-M

I I

_...J

EITHER

NOTE'-

NETWORK

MODUlE

FInED.

CONNECT

SHOWN.

COMMUNICATIONS

4-9IN

XL.R

r--

.......

II--ELECTRICAL

SUPPLY

COMMS.

-~-L=-

4-9IN

XL.R

PUMPING

SYSTEM

0000

<lOt>

,q~~

r-lfu

RD4DTE

EMS

INPUT

IDUTPIJT

SIGNALS

(C~

No.A53208401)

CONTROl'

POSN.

SIGNALS

(CABL£

No.A53208403)

L_ (IIL.TE:RNIITIYE) J

PUMP

DISPLAY

----

MODULE

CPCLOO

11/~

cpc

lClJofM:

17/~'

LOADLOCK

PUMP

SET

INPUT/OUTPUT

SIGNALS

Til

TOOL

GATE

VALVE

Notes

The Pump Display Module can be used with the

iQ pumping system on its own without extemal

communication.

2. Vacant XLR-4 pin communications connectors

must have terminator plugs fitted.

ELECTRICAL

SUPPLY

Figure A2 -Schematic diagram of the electrical connections

Interface Module -Item

Number

A528-44-410

P600-30-040

Issue C

Amendment to

A528-44-880

Introduction

This

Amendment

describes the details of this iQ Interface Module

Cards

fitted

The following Interface Card is fitted

this iQ Interface Module:

• TIC (Tool Interface Card).

Connectors

The connector

Table

fitted to the interface connector panel

this iQ Interface Module:

Connector

name/number

Connector type Figure

reference

Tool EMS]I epe 11/4-M 1

Tool EMSP2 cpe 11/4-F 2

Tool CPC I7/16-M 3

EMS

XLR-6

Table

-Connector types

4 Use

connector

pins

Amendment

The signals available

the connectors are shown

Table A2

and

Table A4. Refer to the

appropriatesections of this instruction manual for electrical

data

for the signalsavailable on the

Tool Interface Card connectors

and

for information

the use of the signals.

Signal Destination!

numbers

Source

EMS

output

(closed in normal operation)

EMS

chain

2and3

Internal link -

4 Internal link Tool

EMS

pin 1

Table

-Tool Tool

EMS

connector signals

Signal

Destination!

numbers

Source

1 Internal link Tool

EMS

2and3

Internal link -

4 EMS

output

(closed in

normal

operation)

EMS

chain

Table

-Tool

EMS

P2 connector signals

Signal Destination!

numbers

Source

and

Pumps

V control

input

TIC, CH3 PL12

3and4

Pumps

running

volt-free status

output

TIC,CH3PL8

7and8

Pumps

not

in warning volt-free status

output

TIC, CH4PL8

and

Pumps

not

in alarm volt-free status

output

TIC,CHSPL7

and

Gas flow

not

in alarm volt-free status

output

TIC,CH6PL7

and

Final valve volt-free status

output

TIC,CH7PL6

and

Pumps

volHree

control

input

TIC, CH3 PL16

Note:"

Only one type

oj'pumps

on' control signal may

used

Table A4 -Tool connector signals

o.:s-o

Tool EMS J1 connector

Tool EMS

connector

Tool connector

EMS connector

Figure

-Interface connector

panel

Amendment 2

(NETWORK

LON

COMMUNICATIONS)

NETWORK

INTERFACE

MODULE

r----,

Nit

<TU

.....

<l-----n-~

2 orr

(fROM

UNIT>

C>-

- - _...J I I

I I

NDTE,-

4-PIN

XLR

INTERFACE

MODULE

I I

NETWORK

MODULE

TTED.

CONNECT

SHOWN.

_..J

EITHER

TIC

-..--

---"--L

-i

EMS

TOOL

EMS

....

TOOL

...--

....

4III--ELECTRICAL

SUPPLY

PUMPING

SYSTEM

L _

-...!..AL.!~~)

0000

Notes

The Pump Display Module can be used with the

iQpumping system on its own without extemal

communication.

Vacant XLR-4 pin communications connectors

must have terminator plugs filted.

INPUTIOUTPUT

SIGNALS

....

TOOL

Figure A2 -Schematic

diagram

of the electrical connections

)

PUMP

DISPLAY

MODULE

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