Edwards STP Series Bedienungsanleitung

Read through the Safety Precautions and

each section of this Manual carefully before

using the STP pump.

Keep this Manual in a place where you can

quickly access it at any time.

Read this Manual thoroughly and keep it with

the Turbomolecular Pump Instruction Manual.

Applicable Models

◼STP-iXA3307 series

◼STP-iXA3307 -HV series

◼STP-iXA4507 series

◼STP-iXA4507 -HV series

MT-91E-C01-0

Instruction Manual

STP Series Turbomolecular Pumps

I/O Remote Interface

2023.10

This page is intentionally blank.

 
I/O Remote Interface 
 
MT-91E-C01-0 
Page i 
PAGE 
i
 
CONTENTS 
Section Title Page 
1INTRODUCTION 1 
1.1 Scope and definitions 1 
1.2 General description 2 
2INSTALLATION 3 
2.1 Unpacking 3 
2.2 Precautions before installation 3 
2.3 User connections and indicator for I/O Remote 3 
2.3.1 X4 REMOTE socket 4 
2.3.2 X2 COM2 socket 4 
2.3.3 X3 VALVE socket 4 
2.3.4 "STATUS" LED 5 
2.3.5 X5 STP-LINK socket 5 
2.3.6 Cable connection to the I/O Remote interface 5 
3OPERATION 7 
3.1 Input operation port setting 7 
3.2 Starting/stopping the STP pump 8 
3.3 Starting the STP pump after stopping 8 
3.4 Starting the STP pump after a safety function operates 8 
3.5 Parallel port input/output signal 9 
3.5.1 Input signal pins 9 
3.5.2 Output signal pins 11 
4MAINTENANCE 15 
4.1 Inspect the electrical connections 15 
5SERVICE, SPARES AND ACCESSORIES 17 
5.1 Introduction 17 
5.2 Service 17 
5.3 Spares 17 
5.4 Accessories 17 
 
 
 

I/O Remote Interface

MT-91E-C01-0

Page ii

PAGE

ILLUSTRATIONS

Figure Title Page

1 I/O Remote Interface which integrated to the pump 2

2 User interface of I/O Remote Interface 3

3 X4 REMOTE connector 4

4 Cable connection to the I/O Remote interface 5

3 Example of cable installation in metallic duct 6

6 Pump operation method 8

7 X4 REMOTE input signal pins (contact input) 10

8 X4 REMOTE input signal pins (contact output) 13

9 X4 REMOTE output signal pin that the states change

according to abnormality notification/warning notification 14

10 X4 REMOTE output signal pin that the states changes

according to rotation speed 14

TABLES

Table Title Page

1 Starting/stopping the STP pump (X4 REMOTE) 8

2 Reset operation (X4 REMOTE) 8

3 X4 REMOTE input signal pins (contact input) 9

4 X4 REMOTE Pin function matrix for input signal

(Type-A PROG-IN) 10

5 X4 REMOTE Pin function matrix for input signal

(Type-B PROG-IN) 10

6 X4 REMOTE output signal pins 11

7 X4 REMOTE output signal pins (continued) 12

8 The rated specification of the seven photo relays' contacts 14

I/O Remote Interface

MT-91E-C01-0

Page 1

INTRODUCTION

1 INTRODUCTION

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions for the I/O Remote

Interface. You must use the I/O Remote Interface as specified in this manual otherwise the protection

provided by the equipment may be impaired. Edwards takes no responsibility for damage or injury

caused by improper use of the equipment.

Read this manual and the STP pump manual before you attempt to install, operate or maintain the

I/O Remote Interface.

Important safety information is highlighted as WARNING and CAUTION instructions; you must obey

these instructions. The use of WARNINGS and CAUTIONS is defined below.

WARNING

Warnings are given where failure to observe the instruction could result in serious injury

or death to people.

Throughout this manual, page, figure and table numbers are sequential.

The units used throughout this manual conform to the SI international system of units of

measurement; where appropriate, US equivalent units of measurement are also given.

The following IEC warning labels/symbols appear on this Instruction Manual:

Warning - This symbol denotes general warning

Refer to accompanying documentation and instruction manual.

CAUTION

Cautions are given where failure to observe the instruction could result in minor personal injury or

damage to the equipment, associated equipment and/or process.

I/O Remote Interface

MT-91E-C01-0

Page 2

INTRODUCTION

1.2 General description

The remote input/output signal connector, "X4 REMOTE", is used for input/output remote signals for

I/O Remote Interface. The connectors for the I/O Remote Interface are on the front panel of the STP

pump. Refer to Figure 1.

(a) Front panel of STP Pump with I/O Remote Interface

(b) Enlarged view of the front panel

Figure 1 - I/O Remote Interface which integrated to the pump

I/O Remote Interface connector

Front panel

I/O Remote Interface

MT-91E-C01-0

Page 3

INSTALLATION

2 INSTALLATION

2.1 Unpacking

Check outer package for damage and that the delivery note corresponds to the purchase order.

Note : The I/O Remote Interface is implemented into the STP Pump by Edwards

Note : It is recommended to keep the packaging materials, such as the corrugated fibreboard

container and cushioning material for possible re-use. If the product is damaged, return it in

its original package and contact Edwards or their distributor.

2.2 Precautions before installation

2.3 User connections and indicator for I/O Remote

Figure 2 - User interface of I/O Remote Interface

CAUTION

Read this manual and the STP pump manual before you attempt to install, operate or maintain.

1. X4 REMOTE socket

2. X2 COM2 socket

3. X3 VALVE socket

4. “STATUS” indicator

5. X5 STP-LINK socket

I/O Remote Interface

MT-91E-C01-0

Page 4

INSTALLATION

2.3.1 X4 REMOTE socket

X4 REMOTE connector is of D-Sub type (37 pins, socket type). The screws for the connector are

M2.6.

Note : The connector (pin type) is not included with the STP pump. Prepare it at your company.

Note : It is recommended to use a shielded cable and connect both sides of the shells to the ground.

Figure 3 - X4 REMOTE connector

2.3.2 X2 COM2 socket

The serial port COM2 is available for the serial communication via RS232 or RS485. When using a

user application, connect it to this port.

Refer to the STP pump instruction manual for detailed specifications.

2.3.3 X3 VALVE socket

Connect the cable of the TMS valve. This TMS valve controls the cooling water in order to maintain a

constant temperature inside the STP pump.

Refer to the STP pump instruction manual for detailed specifications.

I/O Remote Interface

MT-91E-C01-0

Page 5

INSTALLATION

2.3.4 "STATUS" LED

The STP pump operation status is indicated by the colors and flashing patterns of the "STATUS"

LED. Refer to the STP pump instruction manual for detailed specifications.

2.3.5 X5 STP-LINK socket

Connects the communication cable for the STP-Link (optional accessory) or the Display unit iDT-002

(optional accessory). This optional accessory can operate the STP pump, confirm the operation state,

or change various settings.

See the Instruction Manual of "STP-Link" or “Display unit iDT-002”for the detailed specification and

operating method.

2.3.6 Cable connection to the I/O Remote interface

Connect the cable to the I/O Remote interface as shown in Figure 4.

Figure 4 - Cable connection to the I/O Remote interface

*1 The equipment and part within the parentheses must be prepared by the customer.

to TMS valve

TMS valve cable

to iDT-002

iDT-002 cable

(to Vacuum device control circuit)*1

(Serial cable)*1

(to Vacuum device control circuit)*1

(Remote cable)*1

I/O Remote Interface

MT-91E-C01-0

Page 6

INSTALLATION

CAUTION

Locate and secure the cables.

It may be difficult to measure the reproducibility of the communication failure without securing the

cables.

CAUTION

Avoid installing a power line and a communication line in the same metallic duct.

When unavoidable, separate a line with a metal separator certainly, and connect the duct containing

a metal separator certainly to GND, or installing a communication line put into conductive pipes,

such as metal.

Figure 5 - Example of cable installation in metallic duct

CAUTION

Connect each cable securely with caution, avoiding any obstacles. DO NOT place heavy objects on

the cables or bend them excessively. Support each cable so as not to apply direct force to the

connectors or terminals. If any problem occurs in cables, connectors or terminals, the STP pump

may not function normally. DO NOT apply voltage to each connector pin and DO NOT cause any

short-circuiting between pins. Install cables so that personnel are not exposed to risk of tripping or

falling.

CAUTION

DO NOT bundle a communication line with a protective earth conductor or a power line.

Moreover, keep away a communication line from the apparatus used as a noise source as much as

possible.

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