Edwards STP Series Bedienungsanleitung

MT-21E-AA2-D

STP Series Turbomolecular Pumps

TMS Unit for STP-301CVB3

(Second Edition - d)

Instruction Manual

Read through the Safety Precautions and

each section of this Manual carefully before

using the STP pump.

Keep this Manual in a place where you can

quickly access it at any time.

Read this Manual thoroughly and keep it with

the Turbomolecular Pump Instruction Manual.

September 2021

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TMS Unit INSTRUCTION MANUAL for STP-301CVB3

SAFETY PRECAUTIONS

The Safety Precautions in this Manual constitute guidelines to protect operators, the STP pump

and its peripheral equipment.

To avoid personal injury and prevent product and/or peripheral equipment damage, observe the

Safety Precautions as well as the general safety rules (your country’s laws, regulations, safety

standards and so on).

If the equipment is used in a manner not specified by Edwards, the protection provided by the

equipment may be impaired.

Symbols

The following symbols are used in this manual:

Death or Serious Personal Injury

Failure to follow the guidelines marked with this symbol may result in death or serious

personal injury.

Minor Personal Injury, Product and/or Peripheral equipment Damage

Failure to follow the guidelines marked with this symbol may result in minor personal

injury, product and/or peripheral equipment damage.

NOTICE

Items you must follow during operation and maintenance.

ATTENTION: refer to this manual.

Edwards Japan Limited (hereafter called Edwards) cannot perfectly anticipate circumstances of

all of hazards or problems. The scope of anticipation is limited to the precautions included in the

and specified in this manual.

TMS Unit INSTRUCTION MANUAL for STP-301CVB3

◇The STP pump operates at high temperatures while the baking heater is in operation.

NEVER touch the STP pump and its peripheral equipment while the baking heater is in

operation.

Operators can burn hands.

◇Execute the following to prevent an accident caused by the gas.

•Check the properties of the gas to be used, referring to the Material Safety Data Sheet

(MSDS) you obtain from the gas supplier. (explosive・combustible・toxic・corrosive, etc)

And, keep MSDS and a safety advice of gas supplier.

•Warn of the danger of the gas with the warning label when the use gas is hazardous

chemicals materials.

•Always execute gas purge in the pump with the inert gas, and then exhaust residual

gases thoroughly from the STP pump when removing the STP pump from the vacuum

equipment.

•Secure safety by wearing personal protective equipment when using the gas which

might influence damage health. In addition, take appropriate measure for depending

upon the properties of the gas to be used.

◇Exhaust residual gas thoroughly when disposing of the STP pump. If the STP pump is used

for any toxic or reactive gas, always clean the STP pump and dispose of it as industrial

waste in accordance with guidelines given by the national and/or local government.

Residual gas in the STP pump may cause an accident which, for certain gases, may involve

serious injury or death.

◇NEVER use any gas that is not specified as usable in this Manual. The use of such gas may

corrode the STP pump and damage it.

◇TMS unit does not stop automatically when an abnormality/error is detected.

Establish a sequence so that equipments can stop when an abnormality/error occurs.

◇Always check the STP pump has stopped, then turn OFF the primary power (disconnect the

power cable) and isolate the electrical energy source (Lockout/Tagout) on the vacuum

equipment before proceeding to any of the following operations. Failure to do so may cause

the STP pump to rotate accidentally, which may injure operators seriously or result in electric

shock.

•Connect or disconnect cables;

•Perform maintenance and inspections such as replacement of; or

•Perform investigations into probable causes and action/measures taken in the event of

occurrence of a problem.

◇Connect the cables securely. NEVER bend nor place heavy objects on the cable. Doing so

may result in electric shock or product damage.

◇Always use the power voltage specified on the nameplate for the primary power voltage of

the STP control unit. Wire the power cable securely. Incorrect wiring may result in electric

shock or product damage.

◇Perform investigations into probable causes and remove them before restarting the STP

pump in the event of the occurrence of a problem. The use of the abnormal STP pump may

result in product damage.

TMS Unit INSTRUCTION MANUAL for STP-301CVB3

INTRODUCTION

Thank you very much for purchasing Edwards’ Temperature Management System (TMS)

unit.

The Temperature Management System (TMS) maintains the temperature of the

turbomolecular pump by monitoring the temperature with thermistor in the base of the

turbomolecular pump, and performing the TMS valve and TMS heater ON/OFF control.

This manual covers all items necessary to ensure safe installation, operation and

maintenance of the TMS unit for STP-301CVB3:

Model name:

Pump type

STP-301CVB3:

Chemical specific*1

The pump with a TMS unit has some specifications which are different from the STP-301

series. Refer to Section 7 in this manual for details.

For the "Safety Precautions", installation, operation and maintenance, read the "STP-

301/451 Series Instruction Manual".

In this manual, the above Temperature Management System unit series is collectively

referred to as the "TMS unit".

PRECAUTIONS

1) No part of this manual may be reproduced in any form by any means without prior

written permission from Edwards.

2) Edwards pursues a policy of continuing improvement in design and performance of this

product. The right is, therefore, reserved to vary specifications and design without notice.

Understand that the product you purchased and its contents including specifications

described in this manual may differ.

REQUEST

If you find inaccuracies or errors in this manual, advise distributor or the nearest Service

office.

*1 Chemical specific: STP pump with anti-corrosive treatment (responding to chlorine, fluorine or other system gases)

TMS Unit INSTRUCTION MANUAL for STP-301CVB3

LIMITED WARRANTY

This WARRANTY applies to the customer to whom Edwards has delivered this product.

The warranty period is stated in the Edwards Terms and Condition of Supply of Goods and

Services, or during the period specified in the agreement made by and between the customer

and Edwards.

1. ITEM WARRANTED:

1) This warranty applies only to the product delivered from Edwards to the customer.

2) If any defect is found during this period, Edwards will, at its option, repair or

recondition the product free of charge. The costs for repair or replacement of the

product after the warranty period has passed will be at the customer's own charge.

2. DISCLAIMER:

Edwards makes no warranty with respect to any damage occurred due to any of the following

during the warranty period:

1) Handling, operation or maintenance other than that specified herein;

2) Failure to follow any of the warnings or cautions enumerated under

or ;

3) Installation, operation or maintenance using parts which are not specified by Edwards;

4) Maintenance personnel other than those authorized by Edwards or service office have

disassembled, reconditioned, or tampered the product;

5) Defect resulting from the not-specified use of the product.

6) When the product is used under special conditions without obtaining the written

consent of Edwards (Particular gases, strong magnetic field and the radiation are

added to the product.);

7) Defect resulting from deposit;

8) Water cooling system defect resulting from water quality used;

9) Defect resulting from the installation of the product (Exclude the installation by

authorized personnel.)

10) Deterioration in the external because of use (Discoloration, scratches and so forth)

11) Product damage occurred during transport or other factors not attributable to Edwards;

12) Product breakage or damage due to natural disasters, fire or other external factors;

13) Deterioration in the basic performance due to the use of the product beyond limits of

the use;

14) Any direct, incidental or consequential damage resulting from the use of the product;

15) When continuously operated without overhaul after the WARNING indication

("WARNING" message) on the LCD display;

16) Overhaul and replacement of maintenance parts;

3. SPARE PARTS:

⚫Fuse and air cooling fan for control unit

⚫Touch down bearing

⚫Heater

TMS Unit INSTRUCTION MANUAL for STP-301CVB3 
 
5 
TABLE of CONTENTS 
SAFETY PRECAUTION 
INTRODUCTION 
LIMITED WARRANTY 
1Configuration..................................................................................1-1
2Name and Function of Each Part....................................................2-1
2.1 TMS Control Unit ............................................................................................................2-1 
2.1.1 Remote Input/Output Signal Connector (“INTERFACE” Connector)......................2-3 
3Installation ......................................................................................3-1
3.1 Operating Environment...................................................................................................3-1 
3.2 Preparation for STP Pump..............................................................................................3-1 
3.2.1 Installation for the Water Cooling Unit.....................................................................3-1 
3.2.2 Installation for the TMS Heater................................................................................3-2 
3.2.3 Installation for the TMS Valve .................................................................................3-3 
3.3 Installation for the TMS Control Unit...............................................................................3-5 
3.4 Cable Connection ...........................................................................................................3-6 
3.4.1 Name and Dimensions of Each Cable....................................................................3-6 
3.4.2 STP Pump and TMS Control Unit Connection........................................................3-6 
4Operation........................................................................................4-1
4.1 Operation Start................................................................................................................4-1 
4.2 Temperature Control Operation......................................................................................4-1 
4.3 Operation Stop................................................................................................................4-1 
4.4 Operation when malfunction occur.................................................................................4-2 
5Maintenance...................................................................................5-1
5.1 Replacing the Fuse.........................................................................................................5-1 
6Specifications of the TMS Unit........................................................6-1
6.1 Specifications of the TMS Unit .......................................................................................6-1 
6.2 Accessories.....................................................................................................................6-1 
7Specifications of the STP Pump......................................................7-1
7.1 Specifications of the STP Pump.....................................................................................7-1 
 

TMS Unit INSTRUCTION MANUAL for STP-301CVB3

TABLES

Table 2.1 Remote Input/Output Signal Connector..................................................................2-3

Table 2.2 Rated Contacts for Relays CR3 and 4 ...................................................................2-4

Table 5.1 Recommended Spare Parts ...................................................................................5-1

Table 6.1 Specifications of the TMS Unit................................................................................6-1

Table 6.2 Accessories.............................................................................................................6-1

Table 7.1 Specifications of the STP Pump.............................................................................7-1

FIGURES

Figure 1.1 TMS Unit Block Diagram.......................................................................................1-1

Figure 2.1 TMS Control Unit...................................................................................................2-2

Figure 2.2 Pin Arrangement....................................................................................................2-3

Figure 2.3 “INTERFACE” Connector ......................................................................................2-4

Figure 3.1 Installation for the Water Cooling Unit...................................................................3-1

Figure 3.2 Installation for the TMS Heater..............................................................................3-2

Figure 3.3 Installation for the TMS Valve................................................................................3-4

Figure 3.4 External Dimensions of TMS Power Cable...........................................................3-6

Figure 3.5 External Dimensions of TMS Sensor Cable..........................................................3-6

Figure 6.1 External Appearance of the TMS Control Unit......................................................6-2

Figure 7.1 External Appearance of the STP Pump ................................................................7-2

TMS Unit INSTRUCTION MANUAL for STP-301CVB3

1-1

1 Configuration

1) TMS control unit

⚫It controls the TMS heater and the TMS valve.

2) TMS heater (for base)

⚫It heats the base of the STP pump.

Controlling the heater stabilizes the STP pump’s temperature.

A cable with connector is a standard accessory.

3) TMS valve (3 port)

⚫It controls the cooling water flow quantity, and stabilizes the STP pump’s

temperature.

A cable with connector is a standard accessory.

4) TMS power cable

⚫It supplies the power supply to the TMS heater and TMS valve.

5) TMS sensor cable

⚫For connections of the TMS control unit and TMS sensor.

The built-in sensor in the base of the STP pump detects the temperature through

this cable.

Figure 1.1 TMS Unit Block Diagram

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