Edwards STP-XF813 Series Bedienungsanleitung

MT-00E-1C1-D

STP Series Turbomolecular Pumps

Generic Instruction Manual

Instruction Manual (A)

STP pump consists of the four-volumed Instruction Manuals.

Instruction Manual (A):

(This Instruction Manual)

STP pump generic Instruction Manual

Instruction Manual (B):

STP pump specific information

Instruction Manual (C):

STP control unit Instruction Manual

Instruction Manual (D):

STC-U eTMS unit for Turbomolecular Pump

Applicable Models:

◼STP-XF813/XF1313 series

2023.08

The description of this product consists of the four-volumed Instruction Manuals. Read through each

Instruction Manual before operation.

The separate volume contents of each description are as follows:

Instruction Manual (A)

•STP pump generic Instruction Manual:

•Introduction

•Installation of the STP pump

•Installation of the STP control unit

•Operation

•Safety functions

•Maintenance and inspection

•Storage and disposal

•Service, Spares and accessories

Instruction Manual (B)

•STP pump specific information:

•Technical data

•How to Secure the STP pump

•Temperature Management System (TMS)

Instruction Manual (C)

•STP control unit Instruction Manual:

•Introduction

•Technical data

•Installation

•Operation

•Serial communication protocol

•STP-Link(except for SCU-350 series)

•EdCentra (for SCU-801/1601 series only)

•Maintenance

•Storage, transportation and disposal

•Service, spares, and accessories

Instruction Manual (D)

•STC-U eTMS unit for Turbomolecular Pump:

•Introduction

•Technical data

•Installation

•Operation

•Maintenance and inspection

•Storage, transportation and disposal

•Service, spares, and accessories

Keep the manuals in an easily accessible location.

 
STP Series Turbomolecular Pump 
 
 
MT-00E-1C1-D 
Page i 
PAGE 
i 
CONTENTS 
Section Title Page 
1INTRODUCTION 1 
1 Scope and definitions 1 
2 Electromagnetic compatibility 2 
3 Limited warranty 2 
3.1 Item warranted 2 
3.2 Disclaimer 3 
3.3 Spare parts 3 
4 Precautions for safe operation of the STP pump 4 
4.1 Usable gases 4 
5 Maintenance and inspection precautions 5 
6 Labels 5 
7 Operation principle of the STP pump 9 
8 Temperature management system 10 
9 Name of the STP pump 11 
2INSTALLATION OF THE STP PUMP 13 
1 Precautions before installation 13 
1.1 Operating environment 13 
1.2 Installation area 15 
1.3 Bench 16 
2 Unpacking 17 
2.1 Unpacking the STP pump 17 
3 How to install the STP pump 20 
3.1 Cleaning the seal 22 
3.2 STP pump installation positions 23 
3.3 Secure the STP pump 24 
3.4 Precautions of vacuum piping 24 
3.5 Vacuum piping method 25 
3.6 Connecting the purge port 26 
3.7 Connecting the water cooling pipe 26 
3.8 Attaching a baking heater 27 
3.9 Installation of the air cooling unit 27 
3.10 Installation of the TMS unit 27 
3INSTALLATION OF THE STP CONTROL UNIT 29 
1 STP control unit 29 
1.1 SCU-350 series 29 
1.2 SCU-800/801 30 
1.3 SCU-1600/1601 31 
2 Cable connection 32 
2.1 STP connection cable 32 
2.2 Power cable 33 
3 How to connect the cables 34 

 
STP Series Turbomolecular Pump 
 
 
MT-00E-1C1-D 
Page ii 
PAGE 
ii 
CONTENTS (CONTINUED) 
Section Title Page 
4OPERATION 37 
1 Before starting the STP pump 37 
1.1 Tuning 37 
1.2 Operation of vacuum system 38 
2 Pump operation 38 
2.1 LED indication during operation 38 
2.2 Starting the STP pump after a safety function operates 39 
3 Gas pumping, cooling and baking the STP pump 39 
3.1 Gas pumping 39 
3.2 How to introduce a purge gas 40 
4 Cooling the STP pump 40 
4.1 Water-cooling method 40 
4.2 Air-cooling method 41 
5 Baking the STP pump 41 
6 How to use the TMS unit 42 
6.1 Parameter set mode 42 
6.2 Starting/stopping the TMS unit 42 
6.3 Temperature control 42 
5SAFETY FUNCTIONS 43 
1 Safety functions 43 
1.1 Power failure 43 
1.2 Operation after a power recovery 43 
1.3 Abnormal state of magnetic bearing 44 
1.4 Excessive vibration 44 
1.5 Motor driver overload 44 
1.6 Overheating inside the STP pump 44 
1.7 Overheating inside the STP control unit 45 
1.8 Overspeed 45 
1.9 Abnormality/Error in the TMS unit (for use with the TMS unit) 45 
1.10 Failure of the air-cooling fan 
(for SCU-800/801, SCU-1600/1601) 45 
6MAINTENANCE AND INSPECTION 47 
1 Maintenance and inspection 47 
2 Cleaning 48 
3 Inspecting the deposit 48 
4 Maintenance 49 
4.1 Recommended overhaul intervals 49 
4.2 Standard replacement parts 49 
4.3 Recommended maintenance intervals for main parts 50 
5 Transporting for repair or overhaul 51 

STP Series Turbomolecular Pump

MT-00E-1C1-D

Page iii

PAGE

iii

CONTENTS (CONTINUED)

Section Title Page

7STORAGE AND DISPOSAL 53

7.1 Storage of the STP pump 53

7.2 Disposal 54

8SERVICE, SPARES AND ACCESSORIES 55

8.1 Introduction 55

8.2 Service 55

8.3 Spares 55

8.4 Accessories 56

 
STP Series Turbomolecular Pump 
 
 
MT-00E-1C1-D 
Page iv 
PAGE 
iv 
ILLUSTRATIONS 
Figure Title Page 
STP pump installation warning label 5 
Hot surface warning label 5 
Heavy product caution label 6 
Connector caution label 6 
Caution label 6 
TMS heater caution label 7 
Rotation instruction label 7 
Prohibition of gripping and pulling label 7 
Water cooling pipe connection caution label 8 
Overhaul enlightenment label 8 
Cross sectional view of the STP pump 9 
Configuration of the STP pump (typical pump model) 11 
Example of lifting the STP pump 17 
Example of lifting the STP pump (horizontal positioning) 18 
Jack-up the STP pump 18 
STP pump with eyebolts 19 
Installation of the STP pump to the vacuum equipment 21 
STP pump installation positions 23 
Positions of the outlet port on the horizontally 
or slanted installed STP pump 23 
Positions of the cooling water port and baking heater 26 
SCU-350 series 29 
SCU-800 30 
SCU-801 30 
SCU-1600 31 
SCU-1601 31 
SCU-350 series STP connection cable 32 
SCU-800/801 STP connection cable 32 
SCU-1600/1601 STP connection cable 32 
SCU-350 series power cable 33 
SCU-800/801 power cable 33 
SCU-1600/1601 power cable 33 
 
 
 
 

STP Series Turbomolecular Pump

MT-00E-1C1-D

Page 1

INTRODUCTION

1 INTRODUCTION

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions for the Edwards

Turbomolecular Pump (abbreviated to "STP pump" throughout this manual). In this manual, the

control unit for the turbomolecular pump is referred to as the "STP control unit". You must use the

STP pump as specified in this manual otherwise the protection provided by the equipment may be

impaired.

Important safety information is highlighted as WARNING and CAUTION instructions; these

instructions are mandatory. The use of WARNINGS and CAUTIONS is defined below:

WARNING

Warnings are given where failure to observe the instruction could result in serious injury

or death to people.

CAUTION

Cautions are given where failure to observe the instruction could result minor personal injury in

damage to the equipment, associated equipment and/or process.

Note: Items you must follow during operation and maintenance.

Throughout this manual, page, figure and table numbers are sequential.

The units used throughout this manual conform to the SI international system of units of

measurement; US equivalent units of measurement are also given.

The following IEC warning labels/symbols appear on the STP Pump and Instruction Manual:

Warning -This symbol denotes general warning

Refer to accompanying documentation and instruction manual.

Warning - Hot surface

This symbol denotes the risk of burns.

Warning - Heavy object

This symbol denotes the risk of low back pain and fall.

STP Series Turbomolecular Pump

MT-00E-1C1-D

Page 2

INTRODUCTION

Warning - Hazardous Voltage

This symbol denotes the risk of electrical shock.

Protective earth (ground).

Connect the ground wire to this terminal to prevent electric shock.

Note: An alarm function is incorporated into this STP series. Alarm and cautionary messages are

displayed on the LCD of the STP control unit. Note that the words "WARNING" and

"CAUTION" displayed on the LCD indicate the need for overhaul of the pump or precautions

during the operation. They do not have the same meaning as the much more serious

symbols for "WARNING" and "CAUTION" used in the instruction manual.

1.2 Electromagnetic compatibility

•This product is a Class A product according to EN61326-1 (Group 1, Class A product according to

EN55011) and intended to be used in an industrial electromagnetic environment defined by

EN61326-1.

This means that this product does not generate and/or use intentionally radio-frequency energy, in

the form of electromagnetic radiation, inductive and/or capacitive coupling, for the treatment of

material or inspection / analysis purpose and that it is suitable for use in all establishments other

than domestic and those directly connected to a low voltage power supply network which supplies

buildings used for domestic purposes.

•This product may have potential difficulties in ensuring electromagnetic compatibility in other than

industrial environments, due to conducted as well as radiated disturbances.

•This product must not be used in residential areas because it may cause interference if used in

residential areas.

1.3 Limited warranty

This WARRANTY applies to the customer to whom Edwards has delivered this product.

The warranty period is stated in the Edwards Terms and Condition of Supply of Goods and Services,

or during the period specified in the agreement made by and between the customer and Edwards.

1.3.1 Item warranted

1. This warranty applies only to the product delivered from Edwards to the customer.

2. If any defect is found during this period, Edwards will, at its option, repair or recondition the

product free of charge. The costs for repair or replacement of the product after the warranty

period has passed will be at your own charge.

STP Series Turbomolecular Pump

MT-00E-1C1-D

Page 3

INTRODUCTION

1.3.2 Disclaimer

Edwards makes no warranty with respect to any damage occurred due to any of the following during

the warranty period:

1. Handling, operation or maintenance other than that specified herein.

2. Failure to follow any of the warnings or cautions enumerated in this manual.

3. Installation, operation or maintenance using parts which are not specified by Edwards.

4. Maintenance personnel other than those authorized by Edwards or Service office have

disassembled, reconditioned, or tampered the product.

5. Defect resulting from the not-specified use of the product.

6. When the product is used under special conditions without obtaining the written consent of

Edwards (particular gases, strong magnetic field and the radiation are added to the product).

7. Defect resulting from deposit.

8. Water cooling system defect resulting from water quality used.

9. Defect resulting from the installation of the product (exclude the installation by authorized

personnel).

10. Deterioration in the external because of use (discoloration, scratches and so forth).

11. Product damage occurred during transport or other factors not attributable to Edwards.

12. Product breakage or damage due to natural disasters, fire or other external factors.

13. Deterioration in the basic performance due to the use of the product beyond limits of the use.

14. Any direct, incidental or consequential damage resulting from the use of the product.

15. When continuously operated without overhaul after the WARNING indication ("WARNING"

message) on the LCD.

16. Overhaul and replacement of maintenance parts.

1.3.3 Spare parts

•Touch down bearing.

(Touch down bearing should be replaced at Edwards, contact Edwards).

•Heater

STP Series Turbomolecular Pump

MT-00E-1C1-D

Page 4

INTRODUCTION

1.4 Precautions for safe operation of the STP pump

1.4.1 Usable gases

1. Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the

following gases, contact Edwards.

•Gases including alkaline metals except Li gas.

•Gases including Ga, Hg, In, or Sn.

•HBr gas.

2. Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine system

gases.

WARNING

To prevent an accident, confirm the characteristics of gases to be used, referring to the

Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep MSDS

and a safety advice of gas supplier.

WARNING

Warn of the danger of the gas with the warning label when the use gas is hazardous

WARNING chemical material.

WARNING

Secure safety by wearing personal protective equipment when using the gas which

might influence damage health. In addition, take appropriate measure for depending

upon the properties of the gas to be used.

CAUTION

NEVER use any gas that is not specified as usable in this Manual. The use of such gas may

corrode the STP pump and damage it.

CAUTION

Introduce a dry N2gas (purge gas) to protect the inside of the STP pump when using reactive or

corrosive gas, gas including hydrogen. The use of these gases may result in product damage.

CAUTION

Cool the STP pump to prevent the STP pump from overheating when pumping gases.

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