LEYBOLD IONIVAC Series Bedienungsanleitung

IONIVAC

ITR 90

ITR 90 P

Operating Manual GA09420_002_C0

Part Numbers

120 90

120 91

120 92

120 94

230 030

230 031

General Information

2GA09420_002_C0 – (2016-10) – Leybold

Product Identification

In all communications with Leybold, please specify the information on the product

nameplate. For convenient reference copy that information into the space provided

below.

Validity

This document applies to products with the following part numbers:

ITR 90 (without display)

120 90 (vacuum connection DN 25 ISO-KF)

120 92 (vacuum connection DN 40 CF-R)

ITR 90 (with display)

120 91 (vacuum connection DN 25 ISO-KF)

120 94 (vacuum connection DN 40 CF-R)

ITR 90 P (with Profibus interface and switching functions)

230030 (vacuum connection DN 25 ISO-KF)

230031 (vacuum connection DN 40 CF-R)

The part number (No.) can be taken from the product nameplate.

If not indicated otherwise in the legends, the illustrations in this docu-

ment correspond to the KF vacuum connection. They apply to other

vacuum connections by analogy.

All ITR 90 versions are shipped with an instruction sheet (→[1]). ITR 90 P

comes with a supplementary instruction sheet describing the fieldbus interfaces

and the switching functions (→[2]).

We reserve the right to make technical changes without prior notice.

All dimensions in mm.

Intended Use

The ITR 90 transmitters have been designed for vacuum measurement of gases

and gas mixtures in a pressure range of 5×10-10 … 1000 mbar.

They must not be used for measuring flammable or combustible gases in mixtures

containing oxidants (e.g. atmospheric oxygen) within the explosion range.

The transmitters can be operated in connection with a Leybold controller or with

other control devices.

General Information

GA09420_002_C0 – (2016-10) – Leybold 3

Functional Principle

Over the whole measuring range, the transmitters has a continuous characteristic

curve and its measuring signal is output as logarithm of the pressure.

The transmitters functions with a Bayard-Alpert hot cathode ionization measure-

ment system (p < 2.0×10-2 mbar) and a Pirani measurement system

(p > 5.5×10-3 mbar). In the overlapping pressure range of

2.0×10-2 … 5.5×10-3 mbar, a mixed signal of the two measurement systems is

output. The hot cathode is switched on by the Pirani measurement system only

below the switching threshold of 2.4×10-2 mbar (to prevent filament burn-out). It is

switched off when the pressure exceeds 3.2×10-2 mbar.

Contents

4GA09420_002_C0 – (2016-10) – Leybold

Contents

Product Identification 2

Validity 2

Intended Use 2

Functional Principle 3

1Safety 5

1.1 Symbols Used 5

1.2 Personnel Qualifications 5

1.3 General Safety Instructions 6

1.4 Liability and Warranty 6

2Technical Data 7

3Installation 12

3.1 Vacuum Connection 12

3.1.1 Making the Flange Connection 13

3.1.2 Removing and Installing the Electronics Unit 14

3.1.3 Using the Optional Baffle 15

3.2 Electrical Connection 17

3.2.1 Use With Leybold Transmitter Controllers 17

3.2.2 Use With Other Controllers 18

3.2.3 Using the Optional Power Supply (With RS232C Line) 23

4Operation 25

4.1 Measuring Principle, Measuring Behavior 25

4.2 Operational Principle of the Transmitter 27

4.3 Putting the Transmitter Into Operation 27

4.4 Degas 27

4.5 Display 28

4.6 RS232C Interface 29

4.6.1 Description of the Functions 29

4.7 Profibus Interface (ITR 90 P) 32

4.7.1 Description of the Functions 32

4.7.2 Operating Parameters 33

4.8 Switching Functions (ITR 90 P) 34

4.8.1 Setting the Switching Functions 34

5Deinstallation 36

6Maintenance, Repair 37

6.1 Maintenance 37

6.1.1 Cleaning the Transmitter 37

6.2 Adjusting the Transmitter 37

6.2.1 Adjustment at Atmospheric Pressure 37

6.2.2 Zero Point Adjustment 39

6.3 What to Do in Case of Problems 39

6.4 Replacing the Sensor 41

7Options 43

8Spare Parts 43

9Storage 43

10 Returning the Product 44

11 Disposal 44

Appendix 45

A: Relationship Output Signal – Pressure 45

B: Gas Type Dependence 46

C: Literature 48

Declaration of Contamination 49

For cross-references within this document, the symbol (→XY) is used, for cross-

references to further documents, listed under literature, the symbol (→[Z]).

Safety

GA09420_002_C0 – (2016-10) – Leybold 5

1 Safety

1.1 Symbols Used

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Caution

Information on correct handling or use. Disregard can lead to malfunctions or mi-

nor equipment damage.

Notice

Hint, recommendation

The result is O.K.

The result is not as expected

Optical inspection

Waiting time, reaction time

1.2 Personnel Qualifications

Skilled personnel

All work described in this document may only be carried out by persons who

have suitable technical training and the necessary experience or who have been

instructed by the end-user of the product.

Safety

6GA09420_002_C0 – (2016-10) – Leybold

1.3 General Safety Instructions

•Adhere to the applicable regulations and take the necessary precautions for the

process media used.

Consider possible reactions between the materials (→10) and the process

media.

Consider possible reactions (e.g. explosion) of the process media due to the

heat generated by the product.

•Adhere to the applicable regulations and take the necessary precautions for all

work you are going to do and consider the safety instructions in this document.

•Before beginning to work, find out whether any vacuum components are con-

taminated. Adhere to the relevant regulations and take the necessary precau-

tions when handling contaminated parts.

Communicate the safety instructions to all other users.

1.4 Liability and Warranty

Leybold assumes no liability and the warranty becomes null and void if the end-

user or third parties

•disregard the information in this document

•use the product in a non-conforming manner

•make any kind of interventions (modifications, alterations etc.) on the product

•use the product with accessories not listed in the corresponding product docu-

mentation.

The end-user assumes the responsibility in conjunction with the process media

used.

Transmitter failures due to contamination or wear and tear as well as

expendable parts (filaments) are not covered by the warranty.

Technical Data

GA09420_002_C0 – (2016-10) – Leybold 7

2 Technical Data

Measurement

Display range (air, O2, CO, N2,) 5×10-10 … 1000 mbar, continuous

Measuring range (air, O2, CO, N2,) 1×10-8 … 10-2 mbar, continuous

Accuracy 15% of reading

(after 5 min stabilization)

Repeatability 5% of reading

(after 5 min stabilization)

Gas type dependence →Appendix B

Emission

Switching on threshold

Switching off threshold

2.4×10-2 mbar

3.2×10-2 mbar

Emission current

p ≤7.2×10-6 mbar

7.2×10-6 mbar <p <3.2×10-2 mbar

5 mA

25 µA

Emission current switching

25 µA 5 mA

5 mA 25 µA

7.2×10-6 mbar

3.2×10-5 mbar

Degas

Degas emission current

(p <7.2×10-6 mbar)

≈16 mA (Pde

as ≈4 W)

Control input signal 0 V/+24 VDC, active high

(control via RS232 →29)

Duration max. 3 min, followed by automatic stop

In degas mode, ITR 90 transmitters keep supplying measurement values, however

their tolerances may be higher than during normal operation.

Output signal

Output signal (measuring signal) 0 … +10 V

Display range 0.774 V … +10 V

(5×10-10 mbar … 1000 mbar)

Relationship voltage-pressure logarithmic, 0.75 V/decade

(→Appendix A)

Error signal <0.3 V/0.5 V (→39)

Minimum load impedance 10 kΩ

Display (120 91 and 120 94)

Display panel

Dimensions

Pressure units (pressure p)

LCD matrix, 32×16 pixels,

with background illumination

16.0 mm × 11.2 mm

mbar (default), Torr, Pa

(selecting the pressure unit →29)

Technical Data

8GA09420_002_C0 – (2016-10) – Leybold

Power supply

DANGER

The transmitter must only be connected to power supplies, instru-

ments or control devices that conform to the requirements of a

grounded extra-low voltage (PELV). The connection to the transmitter

has to be fused (Leybold controllers fulfill these requirements).

Operating voltage at the

IONIVAC ITR 90

+24 VDC (20 … 28 VDC) 1)

ripple max. 2 V

Power consumption

Standard

Degas

Emission start (<200 ms)

≤0.5 A

≤0.8 A

≤1.4 A

Power consumption

ITR 90

ITR 90 P

≤16 W

≤18 W

Fuse necessary 1.25 AT

Sensor cable

For reasons of compatibility, the expression "sensor cable" is used for all

ITR 90 versions in this document, although the pressure reading of the

transmitters with fieldbus interface (ITR 90 P) is normally transmitted via

the corresponding bus.

Electrical connector

ITR 90

ITR 90 P

D-Sub,15-pin, male (→19)

D-Sub,15-pin, male (→20)

Cable for ITR 90

Analog values only

Without degas function

Analog values

With degas function

Analog values

With degas function

And RS232C interface

Cable for ITR 90 P

4 conductors plus shielding

5 conductors plus shielding

7 conductors plus shielding

depending on the functions used,

max. 15 conductors plus shielding

Max. cable length (supply voltage 24 V1))

Analog operation

RS232C operation

≤35 m, conductor cross-section 0.25 mm²

≤50 m, conductor cross-section 0.34 mm²

≤100 m, conductor cross-section 1.0 mm²

≤30 m

Transmitter identification 42 kΩresistor between Pin 10 (sensor

cable) and GND

1) Measured at sensor cable connector (consider the voltage drop as function of

the sensor cable length).

Technical Data

GA09420_002_C0 – (2016-10) – Leybold 9

Switching functions

ITR 90

ITR 90 P

Adjustment range

none

2 (setpoints A and B)

1×10-9 mbar … 100 mbar

Setpoints adjustable via potentiometers

(setpoints A and B), one floating, nor-

mally open relay contact per setpoint

(→20, 34)

Adjusting the setpoints via field bus is

described in the corresponding bus sec-

tions.

Relay contact rating

Voltage

Current

≤30 V

≤0.5 ADC

RS232C interface

Data rate

Data format

Connections (sensor cable connector)

TxD (Transmit Data)

RxD (Receive Data)

GND

9600 Baud

binary

8 data bits

one stop bit

no parity bit

no handshake

Pin 13

Pin 14

Pin 5

Function and interface protocol of the RS232C interface →29

Profibus interface (ITR 90 P)

Fieldbus name Profibus

Standard applied →[5]

Interface protocol data format →[3], [5]

Interface, physical RS485

Data rate ≤12 MBaud (→[3])

Node address

Local

(Adjustable via hexadecimal

"ADDRESS", "MSD", "LSD"

switches)

Via Profibus

(hexadecimal "ADDRESS" switches

set to >7dhex (>125dec))

00 … 7Dhex (0 … 125dec)

Profibus connection D-Sub, 9-pin, female

Cable Shielded, special Profibus cable

(→22 and [4])

Cable length, system wiring According to Profibus specifications

(→[4], [5])

Technical Data

10 GA09420_002_C0 – (2016-10) – Leybold

Vacuum

Materials exposed to vacuum

Housing, supports, screens

Feedthroughs

Insulator

Cathode

Cathode holder

Pirani element

stainless steel

NiFe, nickel plated

glass

iridium, yttrium oxide (Y2O3)

molybdenum

tungsten, copper

Internal volume

DN 25 ISO-KF

DN 40 CF-R

≤24 cm3

≤34 cm3

Max. Pressure 2 bar (absolute)

Weight

Part numbers

120 90, 120 91

120 92, 120 94

230 030

230 031

≈290 g

≈550 g

≈430 g

≈695 g

Ambiance

Admissible temperatures

Storage

Operation

Bakeout

-20 … 70 °C

0 … 50 °C

+150 °C (without electronics unit)

Relative humidity

(year's mean / during 60 days)

≤65 / 85% (no condensation)

Use indoors only

altitude up to 2000 m NN

Type of protection IP 30

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