LEYBOLD MAG integra Series Handbuch

MAG integra

Turbomolecular Pumps with Magnetic Bearing

and Frequency Converter

Installation & Operating Instructions 300324726_002_C0

Part Nos.

411300Vxxxx

411600Vxxxx

411700Vxxxx

412200Vxxxx

and pumps modified by

Leybold

Contents

2 300324726_002_C0 - 10/2016 - © Leybold

Page

0 Important Safety Information 5

0.1 Mechanical hazards 5

0.2 Electrical hazards 6

0.3 Thermal hazards 7

0.4 Hazards caused by materials and substances 7

0.5 Danger of ignition 8

0.6 Risk of damaging the pump 9

1 Description 10

1.1 Design and function 11

1.2 Supplied equipment 12

1.3 Technical data 13

1.4 Ordering data 20

1.5 Accessories 21

2 Transport and storing 22

3 Installation 23

3.1 Conforming utilization 23

3.1.1 Non-conforming utilization 23

3.2 Operating environment 25

3.3 Attach the pump to the vacuum chamber 25

3.4 Forevacuum connection 30

3.5 Connecting the cooling water 31

3.5.1 Water Quality 32

3.6 Connect the purge gas and venting valve 34

3.7 Electrical connection for the integrated frequency converter 35

3.8 Relays, LEDs, PLC interface 36

Contents

3300324726_002_C0 - 10/2016 - © Leybold

Original installation and operating instructions.

4 Operation 38

4.1 Media compatibility / purge gas 38

4.2 Interfaces 38

4.3 Switching on 39

4.4 Operation 39

4.5 Switching off 40

4.6 Venting 41

4.7 Removing the pump from the system 42

5 Maintenance 43

5.1 Cleaning 43

5.2 Changing the touch-down bearings 44

5.3 Leybold Service 44

6 Troubleshooting 45

7 Waste Disposal 46

EC Incorporation Declaration 47

EC Declaration of Conformity 48

Certificates 49

Page

Safety Information

4 300324726_002_C0 - 10/2016 - © Leybold

Obligation to Provide Information

Before installing and commissioning the pump, carefully read these

Operating Instructions and follow the information so as to ensure optimum

and safe working right from the start.

The Leybold MAG integra has been designed for safe and efficient opera-

tion when used properly and in accordance with these Operating Instructions.

It is the responsibility of the user to carefully read and strictly observe all safe-

ty precautions described in this section and throughout the Operating

Instructions. The pump must only be operated in the proper condition and

under the conditions described in the Operating Instructions. It must be oper-

ated and maintained by trained personnel only. Consult local, state, and

national agencies regarding specific requirements and regulations. Address

any further safety, operation and/or maintenance questions to our nearest

office.

DANGER indicates an imminently hazardous situation which, if not avoid-

ed, will result in death or serious injury.

WARNING indicates a potentially hazardous situation which, if not

avoided, could result in death or serious injury.

CAUTION indicates a potentially hazardous situation which, if not avoided,

could result in minor or moderate injury.

NOTICE is used to notify users of installation, operation, programming or

maintenance information that is important, but not hazard related.

We reserve the right to alter the design or any data given in these Operating

Instructions. The illustrations are not binding.

Retain the Operating Instructions for further use.

NOTICE

DANGER

WARNING

CAUTION

NOTICE

Safety Information

5300324726_002_C0 - 10/2016 - © Leybold

0 Important Safety Information

0.1 Mechanical hazards

1 Avoid exposing any part of the human body to the vacuum.

2 The pressure in the pump must not exceed 1.4 bar (absolute).

3 The pump is intended for generating a vacuum only. If there is a risk of

an overpressure within the system and the pump, then the pump must

be protected against this, by way of an overpressure safety valve, for

example.

4 Vent the pump only up to atmospheric pressure.

5 When using the pump with a purge gas valve, protect the purge gas

supply such that in the event of a malfunction no overpressure can

occur within the system.

6 The pump must be firmly mounted to the vacuum chamber. If the

mounting is not sturdy enough, pump blockage could cause the pump

to break loose; internal pump components could be thrown in all

directions. Never operate the pump (in bench testing, for example)

without proper flanging to the vacuum chamber. Observe the informa-

tion in Section 3.3.

7 We recommend to change the rotor after 80,000 hours of operation or

20,000 cycles at the latest. Due to high-speed and temperature, the

service life of the rotor is limited. If the rotor is changed too late, it may

be destroyed. Thus in the flange mounts high forces and torque condi-

tions can occur. The mounting screws for the pump may be torn off.

When using clamped flange connections at the housing or with com-

ponents above the housing, sudden twisting of the entire pump can be

experienced.

8 Turbopumps as described in the following operation manual contain a

high portion of kinetic energy due to their high rotational speed in

combination with the specific rotor mass. In case of a malfunction of

the system, for example rotor/stator contact or even a rotor crash, the

rotational energy is released.

9 To avoid the destruction of the equipment and to prevent injuries of the

operating staff the leading European manufacturers of vacuum pumps

strictly recommend to follow the installation instructions as given in this

manual.

WARNING

Safety Information

6 300324726_002_C0 - 10/2016 - © Leybold

0.2 Electrical hazards

1 The electrical connection must only be provided by a trained person.

Please observe the national regulations in the country of use like EN

50110-1 for Europe, for example.

2 Lethal voltages are present at the mains connections. Before starting

with any maintenance and service work, de-energise (lockout/tagout)

the product first.

3 Unplug any connectors only when the mains voltage is switched off

and the pump does no longer turn

4 At speeds approximately below 200 Hz, there will not be enough

power any more for the LEDs, i.e. the pump may still turn with out any

of the LEDs being on.

5 Unauthorized device conversion and modifications are prohibited for

safety reasons.

6 Hazardous voltages are present within the frequency converter. When

coming into contact with these, death or severe injury can result. After

the pump has arrived at standstill, disconnect the frequency converter

from the mains power and prevent it against being switched on inad-

vertently (lockout/tagout) before opening it. Basically there is no reason

why the frequency converter should be opened. There are no user ser-

viceable parts inside.

Should, even so, changes be made to the pump-frequency converter

system then a trained electrician, as specified by the standard

EN50110-1, for example, must perform an electrical safety test again

in accordance with the locally applicable safety regulations.

7 Lay connecting lines so that they cannot be damaged. Protect the

lines against humidity and contact with water. Avoid any heat stress on

the line due to unfavourable laying conditions.

8 Suitably support the connecting lines so that the pumps are not

exposed to any major mechanical stress.

9 Do not expose pump, frequency converter and the connections to

dripping water. Note the information on the IP type of protection.

10 When storing pump, frequency converter and connecting lines in a

humid atmosphere, these can suffer corrosion. Corrosion gives rise to

conductive deposits which in turn can cause short-circuits and reduce

the insulation levels of electrical components

11 Transport pump, frequency converter and connecting cables only in

their original packaging so as to avoid any mechanical damage which

in turn may reduce air gaps and creepage distances.

12 When applying external voltages above 42 V to the connection termi-

nals, observe the applicable VDE safety regulations!

13 Make the electrical connections only after pump and accessories (e.g.

air cooler) have been installed mechanically

WARNING

Safety Information

7300324726_002_C0 - 10/2016 - © Leybold

0.3 Thermal hazards

1 Handle the equipment only while vented and cooled down.

2 During operation of the pump certain areas can get so hot (80 °C

max.) so that there is the risk of suffering burns. Protect hot parts

against being touched.

3 Note the warning information on the housing surface. If these warning

notices have been removed, covered or obstructed, include corre-

sponding additional warning notices.

0.4 Hazards caused by materials and substances

1 The pump is not suited for pumping of reactive, corrosive or toxic

media. If the rotor is attacked by process gases, it can suffer destruc-

tion. Thus in the flange mounts high forces and torque conditions can

occur. The mounting screws for the pump may be torn off. When

using clamped flange connections at the housing or with components

above the housing, sudden twisting of the entire pump can be experi-

enced.

2 The operator of the system must ensure that no plasma is to enter the

pump. Otherwise it may lead to a failure of the pump.

3 When pumping dusty media, use a dust filter.

4 If low concentration corrosive or reactive gases are being pumped,

then operate the pump with purge gas.

5 Please consult us as to which types of pump are required for specific

processes and applications.

6 The forevacuum line must be tight. Hazardous gases can escape at

leaks or the gases being pumped can react with air or humidity.

A leak search will always be required after having installed the pump

and after service work on the vacuum.

Upon delivery the pump has an integral leak rate of < 5 · 10-7 mbar·l/s.

7 If the pump has previously handled hazardous gases, implement the

proper precautionary measures before opening the intake or exhaust

connection.

Before opening the pump, purge it for a longer period of time with an

inert gas.

If necessary, use gloves, a respirator and/or protective clothing and

work under an exhaust hood. Firmly seal off the pump.

When shipping the contaminated pump for servicing, please also state

the type of hazard. For this you must use a form which we have pre-

pared for you.

8 Contaminated parts can be detrimental to health and environment.

Before beginning with any work, first find out whether any parts are

contaminated. Adhere to the relevant regulations and take the neces-

sary precautions when handling contaminated parts.

CAUTION

DANGER

Safety Information

8 300324726_002_C0 - 10/2016 - © Leybold

0.5 Danger of ignition

1 During operation the pressure inside the turbomolecular pump is so

low that there is no danger of ignition (at pressures below about 100

mbar). A hazardous condition will be created if flammable mixtures

enter the hot pump at pressures above 100 mbar. During operation

the pump can reach temperatures as high as 120°C internally, and at

parts of the outside surfaces 80 °C. Sparks could occur in case of

damage to the pump and these could ignite explosive mixtures.

Also note the safety information provided by the gas supplier.

CAUTION

Safety Information

9300324726_002_C0 - 10/2016 - © Leybold

0.6 Risk of damaging the pump

1 Never touch the rotor. Touching the rotor may cause injury and

damage the rotor bearing.

2 Foreign objects which enter the pump through the intake would cause

serious damage to the rotor. That’s why we recommend installing an

inlet screen. Damages caused during operation without the inlet screen

are excluded from warranty.

3 The contact surfaces of pump housing, vacuum system and centering

ring must be free of grease and dry so as to ensure sufficient stability

in case the rotor seizes.

4 Connect a purge gas or venting valve to the correct flange. Confusing

the forevacuum and purge gas flange can cause shock venting of the

pump.

5 The interface connectors have UNC 4-40 threads. Do not use connec-

tors with M3 treads.

6 Disconnect and connect the cable connections only while the pump is

turning no longer (green status LED off) and with the mains power

switched off (yellow power LED off). Otherwise there is the risk of dam-

aging the frequency converter.

7 Do not stop the MAG with the mains. Switching off the mains while the

pump is running will wear out the touch down bearings.

8 Exposure of the pump to accelerating forces must be avoided or

reduced to such an extent that the rotor unit will not be excited by

vibrations. In the case of critical applications you must consult our

Applications Dept. first.

9 Connect the pump in an EMC compliant manner so as to avoid line

related interference.

Pressures given in bar or mbar are absolute values. If exceptionally a gauge

pressure is meant, a “g” is added (bar(g)).

NOTICE

Description

10 300324726_002_C0 - 10/2016 - © Leybold

1 Description

The Leybold MAG integra pumping system consists of:

■The MAG integra turbo pump

The MAG are turbomolecular pumps utilizing magnetic bearings.They are

designed to evacuate vacuum chambers down to pressure values in the

high-vacuum range.

The required frequency converter is integrated into the pump for the

MAG ... iP models.

■The MAG.DRIVE electronic frequency converter

The MAG.DRIVE iM frequency converter is connected to the mains.

It outputs an AC voltage synchronised to the speed for the pump’s motor.

Moreover, the electronic frequency converter processes the measured sig-

nals and controls the magnetic levitation arrangement.

Fig. 1.1 MAG integra models

MAG W 1300 iP

MAG W 1600 iP

MAG W 2000 iP

MAG W 1600 iPL Booster

MAG W 1700 iPL

MAG W 1600 iP Booster

MAG W 1700 iP

MAG W 2200 iPL MAG W 2200 iP

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