LEYBOLD TURBOVAC i(X) Bedienungsanleitung

Part Nos.

84007xVxxxx

84008xVxxxx

84009xVxxxx

84010xVxxxx

850092Vxxxx(U)

850102Vxxxx(U)

850122Vxxxx(U)

850132Vxxxx(U)

x = 0 to 9

TURBOVAC i(X)

TURBOVAC 850 i(X), 950 i(X), 1350 i, 1450 i

Turbomolecular Pumps with Integrated

Frequency Converter

Operating Instructions 300855170_002_C8

Contents

2 300855170_002_C8 - 08/2021 - © Leybold

Page

0 Important Safety Information 5

Safety symbols 5

0.1 Mechanical hazards 6

0.2 Electrical hazards 7

0.3 Thermal hazards 7

0.4 Danger through materials and substances 7

0.5 Dangers in connection with safety-related

measures and precautions 7

1 Description 8

1.1 Design 10

1.2 Standard equipment 10

1.3 Technical data 11

1.3.1 Technical data for the integrated drive electronics 12

1.3.2 Pumping speed curves 13

1.3.3 Operation diagrams 15

1.4 Ordering data 19

2 Transport and storing 23

3 Installation 24

3.1 Conforming utilization 24

3.1.1 Non-conforming utilization 24

3.2 Operating environment 25

3.3 Fitting accessories 26

3.4 Attach the pump to the vacuum chamber 27

3.5 Forevacuum connection 35

3.6 Connect the cooling 36

3.6.1 Air cooling 36

3.6.2 Water cooling 37

3.6.3 Water quality 38

3.7 Connect a power failure venting valve or a venting valve 40

3.8 Connect purge gas 41

3.9 Connect a flange heater 42

3.10 Connect a vacuum gauge head (only for TURBOVAC iX) 43

3.11 Electrical connection 44

Contents

3300855170_002_C8 - 08/2021 - © Leybold

The TURBOVAC allows through both standard and optional interfaces con-

trolling of the pump and setting up of some pump functions according to

specific requirements. The Operating Instructions 300450826 Serial

Interfaces for TURBOVAC i/iX offers detailed information on the RS 232,

RS 485, Profibus and USB interfaces of the TURBOVAC.

The Operating Instructions 300687441 TURBOVAC iX EtherCAT Interface

offers information on the EtherCAT Interface.

The Operating Instructions 300905828 TURBOVAC i Interface Module

describes the Anybus modules.

These Operating Instructions are a translation of the German original instruc-

tions 300855170_001_C8.

4 Operation 49

4.1 Media compatibility / purge gas 49

4.2 Interfaces 49

4.3 Switching on 51

4.4 Shutting down 52

4.5 Venting 53

4.6 Bakeout 54

4.7 Operation after a longer storage period 54

4.8 Removing the pump from the system 55

5 Maintenance 56

5.1 Cleaning 56

5.2 Leybold Service 56

5.3 Bearing monitoring and conditioning 57

6 Troubleshooting 59

7 Waste Disposal 61

Certificates 62

EU Declaration of Conformity 63

Safety Information

4 300855170_002_C8 - 08/2021 - © Leybold

Obligation to Provide Information

Before installing and commissioning the pump, carefully read these

Operating Instructions and follow the information so as to ensure optimum

and safe working right from the start.

The Leybold TURBOVAC has been designed for safe and efficient operation

when used properly and in accordance with these Operating Instructions. It is

the responsibility of the user to carefully read and strictly observe all safety

precautions described in this section and throughout the Operating

Instructions. The pump must only be operated in the proper condition and

under the conditions described in the Operating Instructions. It must be oper-

ated and maintained by trained personnel only. Consult local, state, and

national agencies regarding specific requirements and regulations. Address

any further safety, operation and/or maintenance questions to our nearest

office.

“Trained personnel” for the operation of this pump are

■skilled workers with knowledge in the fields of mechanics, electrical engi-

neering and vacuum technology and

■personnel specially trained for the operation of vacuum pumps.

WARNING indicates a potentially hazardous situation which, if not

avoided, could result in death or serious injury.

CAUTION indicates a potentially hazardous situation which, if not avoided,

could result in minor or moderate injury.

NOTICE is used to notify users of installation, operation, programming or

maintenance information that is important, but not hazard related.

We reserve the right to alter the design or any data given in these Operating

Instructions. The illustrations are not binding.

Retain the Operating Instructions for further use.

NOTICE

WARNING

CAUTION

NOTICE

Safety Information

5300855170_002_C8 - 08/2021 - © Leybold

0 Important Safety Information

Safety symbols

The safety symbols on the products shows the areas where care and atten-

tion is necessary.

The safety symbols that follow are used on the product or in the product

documentation.

General warning sign

Warning vacuum

Warning of falling loads

Warning - Dangerous voltage

Warning - Hot surfaces

Warning - Risk of explosion

Safety Information

6 300855170_002_C8 - 08/2021 - © Leybold

0.1 Mechanical hazards

WARNING: EJECTION OF PARTS

If the mounting is not sturdy enough, pump blockage could cause the pump to break loose;

internal pump components could be thrown in all directions.

Mount the pump firmly to the vacuum chamber. Never operate the pump without proper flanging

to the vacuum chamber (in bench testing, for example).

In case of rotor destruction a sudden twisting of the entire pump is possible. The vacuum cham-

ber must be able to absorb the torque of max. 5 kNm (TURBOVAC 850/950 i) or 9 kNm

(TURBOVAC 1350/1450 i) around the rotor‘s axis of rotation in the event of sudden rotor

destruction.

CAUTION: CUTTING AND CRUSHING

When reaching into open flanges there is a risk of cutting and crushing your fingers.

Do not operate the vacuum pump with open flanges. Do not reach into the pump.

When installing the vacuum pump, first mechanically connect the inlets and outlets and then

make the electrical connections.

Disconnect the vacuum pump from the power supply before servicing. Only use trained service

personnel.

Before servicing, ensure that gas cannot flow through the pump. Only open the pump system

when it is under atmospheric pressure.

CAUTION: EJECTION OF PARTS

Ejection of parts through bursting of vacuum system as a result of excessive pressure.

When using the pump with purge gas, protect the purge gas supply such that in the event of a

malfunction no overpressure can occur within the system. The pressure in the pump must not

exceed 1.4 bar (absolute).

CAUTION: VACUUM

Pulling into the vacuum can cause injury to hands or fingers.

Do not operate the vacuum pump with open flanges.

CAUTION: FALLING PARTS

Errors during transport can cause the pump to fall down.

Transport the pump only in its transport packaging or at the eye-bolts provided for this purpose.

Safety Information

7300855170_002_C8 - 08/2021 - © Leybold

0.2 Electrical hazards

CAUTION: ELECTRICAL SHOCK

Contact with live parts may lead to electrical shock.

The electrical connection may only be carried out by a trained person. Observe the national reg-

ulations in the user country, e.g. for Europe EN 50110 - 1. Prior to servicing, disconnect the

vacuum pump from the power supply.

Electrical shock due to interruption of the protective conductor system. In the event of a fault,

life-threatening voltages may be present on electrically conductive components.

Before commissioning, check the resistance of the earthing cable and the suitability of the

assigned overcurrent protection device.

The pump must only be connected to power supplies which meet the requirements for functional

extra-low voltages with positive isolation in accordance with IEC 60364-4-41 (or local regulations)

(PELV). All interfaces must only be operated with PELV-fed components and devices.

0.3 Thermal hazards

CAUTION: BURNS

Touching hot surfaces may lead to burns.

Handle the pump only when ventilated and cooled down.

Wear suitable protective equipment.

0.4 Danger through materials and substances

WARNING: HAZARDOUS SUBSTANCES

Pumped process gases may escape from the exhaust and leaks in the vacuum system.

During servicing, toxic deposits may be present in the pump. The gases, vapours or substances

may be hazardous to health.

The pumping of toxic / explosive / flammable / pyrophoric / radioactive / oxidizing / corrosive

gases or gas mixtures, as well as oxygen of more than atmospheric concentration (21 %) is gen-

erally prohibited. The operator is responsible for assessing the hazard potential of the process

media or mixtures.

0.5 Dangers in connection with safety-related

measures and precautions

CAUTION: AUTOMATIC START-UP

The frequency converter is not equipped with its own emergency shut down switch. This may

lead to an unwanted pump start-up.

Install an emergency shut down switch in the system. The emergency shut down switch must be

■present in the building installation

■suitably arranged and easily accessible for the user

■marked as the disconnecting device for this device.

Description

8 300855170_002_C8 - 08/2021 - © Leybold

1 Description

The TURBOVAC 850 i(X), 950 i(X), 1350 i and 1450 i are turbomolecular

pumps designed to evacuate vacuum chambers down to pressure levels in

the high vacuum and ultra-high vacuum range.

They are suitable for pumping air and clean gases. A forevacuum pump and

a power supply are required for their operation.

Fig. 1.1 TURBOVAC models

TURBOVAC 850 i

DN 160 ISO-K

TURBOVAC 850 i

DN 160 CF

TURBOVAC 950 i

DN 200 ISO-K

TURBOVAC 950 i

DN 200 CF

TURBOVAC 850 iX

TURBOVAC 850 i

with optional interface

Description

9300855170_002_C8 - 08/2021 - © Leybold

Fig. 1.2 TURBOVAC models

TURBOVAC 1350 i

DN 200 ISO-K

TURBOVAC 1350 i

DN 200 ISO-F

TURBOVAC 1450 i

DN 250 ISO-K

TURBOVAC 1450 i

DN 250 ISO-F

TURBOVAC 1350 i

with optional interface

Description

10 300855170_002_C8 - 08/2021 - © Leybold

1.1 Design

The TURBOVAC models are wide-range TMPs equipped with an additional

Holweck stage.

With the built-in frequency converter as the electronic drive the TURBOVAC

forms one single unit. The electonic drive governs the pump’s speed and

serves as a monitor for all functions of the pump. Moreover, the TURBOVAC

iX is equipped with an integrated vacuum system controller for connection

and operation of various accessory components.

At the high vacuum side the bearing is of a non-wearing permanent magnetic

bearing type, at the forevacuum side a lifetime lubricated oil-free ceramic ball

bearing is used.

Water cooling or an air cooling fan is available for the TURBOVAC 850 i and

950 i as optional equipment. The TURBOVAC 1350 i and 1450 i are water-

cooled as standard.

The intake flange should be fitted with a wire mesh inlet screen to protect the

pump against mechanical damage caused by foreign objects.

The pumps are equipped with a venting and a purge gas facility. The connec-

tions are blanked off by default with G1/8” closure screws.

Venting and purge gas valves, or a venting screw, or a pressure regulator can

be connected directly to the pump.

1.2 Standard equipment

Turbomolecular pump with integrated electronic drive unit, two eye-bolts

High and fore-vacuum flanges are protective-capped.

Flange mounting elements and the inlet screen are not enclosed, but are

available as accessories.

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