MKS 248A Bedienungsanleitung

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Instra

107428-P1

Rev L, 8/06

MKS Type 248A/B/C

Control Valve

any means, electronic or mechanical, including photocopying and recording, or by any

information storage or retrieval system, except as may be expressly permitted in writing by MKS

Instruments, Inc.

Cajon

and VCR

are registered trademarks of Cajon Company, Macedonia, OH

Kalrez

and Viton

are registered trademarks of E. I. DuPont de Nemours and Co. Inc.,

Wilmington, DE

Neoprene

is a registered trademark of Vibration, Mountings & Controls, Inc., Bloomingdale,

Swagelok

is a registered trademark of Crawford Fitting Company, Solon, OH

Table of Contents

iii

Table of Contents

Safety Procedures and Precautions..............................................................................................1

Chapter One: General Information.............................................................................................5

Introduction.....................................................................................................................5

How This Manual is Organized......................................................................................6

Customer Support...........................................................................................................6

Chapter Two: Installation...........................................................................................................7

How To Unpack the Type 248 Unit ...............................................................................7

Unpacking Checklist..........................................................................................7

Interface Cables..............................................................................................................8

Generic Shielded Cable Description .................................................................8

Setup...............................................................................................................................10

Dimensions........................................................................................................10

Mounting Instructions........................................................................................11

Cables ................................................................................................................11

Chapter Three: Operation...........................................................................................................13

General Information........................................................................................................13

Chapter Four: Maintenance ........................................................................................................15

General Information........................................................................................................15

Orifice Adjustment and Replacement.............................................................................15

Disassembly, Inspection, and Cleaning..........................................................................18

Assembly ........................................................................................................................19

Chapter Five: Repair...................................................................................................................21

General Information........................................................................................................21

Appendix A: Product Specifications ..........................................................................................23

Specifications..................................................................................................................23

Appendix B: Model Code Explanation.......................................................................................25

Model Code ....................................................................................................................25

Table of Contents

Index ............................................................................................................................................27

List of Figures and Tables

Figures

Figure 1: Preferred Method To Connect a Shielded Cable ........................................................9

Figure 2: Alternate Method To Connect a Shielded Cable ........................................................9

Figure 3: Dimensions of a Type 248 Control Valve...................................................................10

Figure 4: Typical Valve Assembly.............................................................................................Error! Bookmark

Tables

Table 1: Type 248 Valve Components.........................................................................................17

List of Figures and Tables

Safety Procedures and Precautions

The following general safety precautions must be observed during all phases of operation of this

instrument. Failure to comply with these precautions or with specific warnings elsewhere in

this manual violates safety standards of intended use of the instrument and may impair the

protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the

customer’s failure to comply with these requirements.

Warning

Before performing mass flow controller valve adjustments,

you MUST purge your process equipment and the MFC with

an inert gas, such as argon or nitrogen, and isolate the MFC

from toxic and hazardous gases. Use an inert surrogate gas

while adjusting the valve preload as a safeguard against

inadvertent exposure to any toxic or hazardous gas. A release

of hazardous or toxic gas could cause serious injury. If

necessary, remove the MFC from the process equipment to

adjust the valve.

Questions concerning the safe handling of toxic or hazardous

gases may be answered by consulting your corporate policy,

a government agency such as OSHA or NIOSH, or experts

familiar with your process gas.

MKS assumes no liability for safe handling of toxic or

hazardous gases.

DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT

Do not install substitute parts or perform any unauthorized modification to the instrument.

Return the instrument to an MKS Calibration and Service Center for service and repair to ensure

that all safety features are maintained.

SERVICE BY QUALIFIED PERSONNEL ONLY

Operating personnel must not remove instrument covers. Component replacement and internal

adjustments must be made by qualified service personnel only.

USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS

If hazardous materials are used, users must take responsibility to observe the proper safety

precautions, completely purge the instrument when necessary, and ensure that the material used

is compatible with sealing materials.

Safety Procedures and Precautions

PURGE THE INSTRUMENT

After installing the unit, or before its removal from a system, be sure to purge the unit completely

with a clean dry gas to eliminate all traces of the previously used flow material.

USE PROPER PROCEDURES WHEN PURGING

This instrument must be purged under a ventilation hood, and gloves must be worn to protect

personnel.

DO NOT OPERATE IN EXPLOSIVE ATMOSPHERES

To avoid explosion, do not operate this product in an explosive atmosphere unless it has been

specifically certified for such operation.

USE PROPER FITTINGS AND TIGHTENING PROCEDURES

All instrument fittings must be consistent with instrument specifications, and compatible with the

intended use of the instrument. Assemble and tighten fittings according to manufacturer's

directions.

CHECK FOR LEAK-TIGHT FITTINGS

Before proceeding to instrument setup, carefully check all plumbing connections to the

instrument to ensure leak-tight installation.

OPERATE AT SAFE INLET PRESSURES

This unit should never be operated at pressures higher than the rated maximum pressure (refer to

the product specifications for the maximum allowable pressure).

INSTALL A SUITABLE BURST DISC

When operating from a pressurized gas source, a suitable burst disc should be installed in the

vacuum system to prevent system explosion should the system pressure rise.

KEEP THE UNIT FREE OF CONTAMINANTS

Do not allow contaminants of any kind to enter the unit before or during use. Contamination

such as dust, dirt, lint, glass chips, and metal chips may permanently damage the unit.

Safety Procedures and Precautions

Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.

Warning

The WARNING sign denotes a hazard. It calls attention to a

procedure, practice, condition, or the like, which, if not

correctly performed or adhered to, could result in injury to

personnel.

Caution

The CAUTION sign denotes a hazard. It calls attention to an

operating procedure, practice, or the like, which, if not correctly

performed or adhered to, could result in damage to or destruction of

all or part of the product.

Note

The NOTE sign denotes important information. It calls attention to a

procedure, practice, condition, or the like, which is essential to highlight.

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