MKS 390 Series Bedienungsanleitung

Series 390

Instruction Manual

Granville-Phillips®Series 390 Micro-Ion®ATM,

Four-Sensor Combination Vacuum Gauge Module

with RS-485 Interface and Analog Output

Instruction manual part number 390001

Revision H - November 2016

Series 390

Instruction Manual

This Instruction Manual is for use with all Granville-Phillips Series

390 Micro-Ion ATM Modules with RS-485 Interface and Analog

Output. A list of applicable catalog numbers is provided on the

following page.

These products are RoHS compliant.

Granville-Phillips®Series 390 Micro-Ion®ATM,

Four-Sensor Combination Vacuum Gauge Module

with RS-485 Interface and Analog Output

Customer Service / Technical Support:

MKS Pressure and Vacuum Measurement Solutions

MKS Instruments, Inc., Granville-Phillips®Division

6450 Dry Creek Parkway

Longmont, Colorado 80503 USA

Tel: 303-652-4400

Fax: 303-652-2844

Email: [email protected]

MKS Corporate Headquarters

MKS Instruments, Inc.

2 Tech Drive, Suite 201

Andover, MA 01810 USA

Tel: 978-645-5500

Fax: 978-557-5100

Email: [email protected]

Conductron®are registered trademarks, and mksinstTM is a trademark of MKS

Instruments, Inc. All other trademarks and registered trademarks are the properties of

their respective owners.

Granville-Phillips®Series 390 Micro-Ion®ATM, Four-Sensor Combination

Vacuum Gauge Module with RS-485 Interface and Analog Output

Catalog numbers for Series 390 Micro-Ion ATM Modules

Power supply and cable are not included.

Analog output only - no display: 390410 - 0 - # # - #

Analog output only - with digital display: 390411 - 0 - # # - #

RS-485 interface & analog output - no display: 390510 - # - # # - #

RS-485 interface & analog output - with digital display: 390511 - # - # # - #

Setpoints:

None 0

Two 2

Three 3

Ion Gauge Filaments:

Yttria-coated iridium Y

Tungsten T

Flange/Fitting:

NW16KF D

NW25KF E

NW40KF K

1.33 inch (NW16CF) Conflat-type F

2.75 inch (NW35CF) Conflat-type G

1/2 inch VCR-type male H

Measurement Units:

Torr T

mbar M

Pascal P

Table of Contents

Micro-Ion®ATM Module Instruction Manual - 390001 5

Table of Contents

Chapter 1 Before You Begin . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

1.1 About these instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

1.2 Caution and warning statements . . . . . . . . . . . . . . . . . . . . . 9

1.3 System Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

1.4 Implosion / Explosion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

1.5 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

1.6 Reading and following instructions . . . . . . . . . . . . . . . . . . . 11

1.7 Definitions of terms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

1.8 Customer service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

Chapter 2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

2.1 Module components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

2.2 Pressure relief devices . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

2.3 Installation procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

Step 1 Locate the module . . . . . . . . . . . . . . . . . . . . . . . . 14

Step 2 Attach module to vacuum chamber . . . . . . . . . . . 16

VCR type fitting . . . . . . . . . . . . . . . . . . . . . . . . . . 16

KF flange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

ConFlat flange . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

Step 3 Assemble and connect wiring . . . . . . . . . . . . . . . . 17

Connecting cable . . . . . . . . . . . . . . . . . . . . . . . . . 17

Power supply wiring . . . . . . . . . . . . . . . . . . . . . . . 17

Gauge/degas wiring . . . . . . . . . . . . . . . . . . . . . . . 17

Wiring terminals . . . . . . . . . . . . . . . . . . . . . . . . . . 17

Chassis Ground . . . . . . . . . . . . . . . . . . . . . . . . . . 19

Step 4 Calibrate module at atmospheric pressure . . . . . . 20

2.4 Eliminating radio frequency interference . . . . . . . . . . . . . . . 20

Chapter 3 Operation Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

3.1 Analog operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

3.2 RS-485 operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

3.3 Automatic filament selection . . . . . . . . . . . . . . . . . . . . . . . . 23

Chapter 4 Analog Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

4.1 Output functions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

4.2 Preparing to operate the module . . . . . . . . . . . . . . . . . . . . . 25

4.3 Operational tasks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

4.4 LED status indicator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26

4.5 Reading pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

Reading vacuum pressure . . . . . . . . . . . . . . . . . . . . . . . . . . 27

Table of Contents

6Micro-Ion®ATM Module Instruction Manual - 390001

Reading differential pressure . . . . . . . . . . . . . . . . . . . . . . . . 28

4.6 Micro-Ion gauge OFF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

4.7 Micro-Ion gauge degas . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

4.8 Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

Atmospheric pressure calibration . . . . . . . . . . . . . . . . . . . . 32

Vacuum pressure calibration . . . . . . . . . . . . . . . . . . . . . . . . 32

Chapter 5 RS-485 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33

5.1 Pressure output and relay functions . . . . . . . . . . . . . . . . . . . 33

5.2 Preparing to operate the module . . . . . . . . . . . . . . . . . . . . . 33

5.3 RS-485 physical layer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34

5.4 Operational tasks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35

5.5 Error responses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35

5.6 Data timing and response . . . . . . . . . . . . . . . . . . . . . . . . . . 36

5.7 RS-485 commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37

Command structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37

Symbols used in this manual . . . . . . . . . . . . . . . . . . . . . . . . 38

5.8 RS-485 command set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

TLU Toggling locked functions . . . . . . . . . . . . . . . . . . . 41

UNL Unlock interface functions . . . . . . . . . . . . . . . . . . 41

SA Set address offset . . . . . . . . . . . . . . . . . . . . . . . . . 42

SB Set baud rate . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43

yuiop Restore RS-485 communication defaults . . . . . . . . 43

SU Set pressure unit . . . . . . . . . . . . . . . . . . . . . . . . . . 43

SD Set pressure indication for optional display . . . . . . 43

RU Read pressure unit . . . . . . . . . . . . . . . . . . . . . . . . 43

RD Read vacuum pressure . . . . . . . . . . . . . . . . . . . . . 44

RDD Read differential pressure . . . . . . . . . . . . . . . . . . . 44

PC Process control relay

trip points . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45

PCG Set trip point relay assignments . . . . . . . . . . . . . . . 49

PCE Set or read disable/enable state of relays . . . . . . . . 49

RPCS Read trip point relay status . . . . . . . . . . . . . . . . . . 50

IG Turn Micro-Ion gauge ON or OFF . . . . . . . . . . . . 50

IGS Read Micro-Ion gauge ON/OFF status . . . . . . . . . 50

IGM Set or read pressure indication when Micro-Ion gauge is

OFF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51

IOD Set or read Micro-Ion gauge delay ON/OFF state . 52

IDT Set or read Micro-Ion gauge delay time . . . . . . . . 53

SF Set Micro-Ion gauge filament mode . . . . . . . . . . . 54

RF Read Micro-Ion gauge filament status . . . . . . . . . . 58

DG Degas Micro-Ion gauge . . . . . . . . . . . . . . . . . . . . 58

DGS Read Micro-Ion gauge degas status . . . . . . . . . . . . 58

DGT Set or read Micro-Ion gauge degas time . . . . . . . . 59

SER Set emission current switch point . . . . . . . . . . . . . 59

Table of Contents

Micro-Ion®ATM Module Instruction Manual - 390001 7

RE Read Micro-Ion gauge emission current . . . . . . . . 61

TS Calibrate module at atmospheric pressure . . . . . . 61

TZ Calibrate module at vacuum pressure . . . . . . . . . . 62

ATM Set or read atmospheric pressure output . . . . . . . . 63

RS Read module status RS–485 strings . . . . . . . . . . . . 63

RSX Read module status hexadecimal bits . . . . . . . . . . 65

RST Reset module to power-up state . . . . . . . . . . . . . . 68

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68

FAC Reset values to factory defaults . . . . . . . . . . . . . . . 68

VER Read firmware version . . . . . . . . . . . . . . . . . . . . . 68

Chapter 6 Optional Display . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69

6.1 Display capabilities . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69

Vacuum pressure display . . . . . . . . . . . . . . . . . . . . . . . . . . 69

Differential pressure display . . . . . . . . . . . . . . . . . . . . . . . . 69

6.2 Display resolution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70

6.3 Error conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70

Chapter 7 Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73

7.1 Customer Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73

7.2 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74

Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74

Symptoms, causes, and solutions . . . . . . . . . . . . . . . . . . . . 75

RS-485 error responses . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76

7.3 Micro-Ion gauge continuity test . . . . . . . . . . . . . . . . . . . . . . 77

7.4 Replacing the gauge assembly . . . . . . . . . . . . . . . . . . . . . . 79

7.5 Returning a Micro-Ion module for service . . . . . . . . . . . . . . 79

Appendix A Specifications & Compliance . . . . . . . . . . . . . . . . . . . . . . . . . . 81

Appendix B Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89

Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93

Table of Contents

8Micro-Ion®ATM Module Instruction Manual - 390001

Before You Begin

Micro-Ion®ATM Module Instruction Manual - 390001 9

Before You Begin Installation Operation Overview Analog Operation Optional DisplayRS-485 Operation

Chapter 1 Before You Begin

1.1 About these instructions These instructions explain how to install, operate, and maintain the

Granville-Phillips®Micro-Ion®ATM vacuum gauge module.

The module may have an RS-485 interface and one or two analog outputs.

The module with an RS-485 interface may have no trip point relays, two trip

point relays, or three trip point relays. Installation and operating procedures

depend on the outputs.

•This chapter explains caution and warning statements, which must be

adhered to at all times; explains your responsibility for reading and

following all instructions; defines the terms that are used throughout this

instruction manual; and explains how to contact customer service.

•Chapter 2 explains how to install the module.

•Chapter 3 is an operational overview of the module.

•Chapter 4 explains analog output operation.

•Chapter 5 explains RS-485 interface and relay operation.

•Chapter 6 explains how to use the optional display.

•Chapter 7 explains troubleshooting; Micro-Ion gauge testing, removal

and replacement; and module return procedures.

•Appendix A provides specifications for the module.

•Appendix B explains how the Micro-Ion gauge, Conductron®heat-loss

sensor, atmospheric pressure diaphragm sensor, and vacuum pressure

diaphragm sensor measure pressure.

1.2 Caution and warning

statements

This manual contains caution and warning statements with which you must

comply to prevent inaccurate measurement, property damage, or personal

injury.

CAUTION

Caution statements alert you to hazards or unsafe

practices that could result in inaccurate measurement,

minor personal injury or property damage.

Each caution statement explains what you must do to prevent or

avoid the potential result of the specified hazard or unsafe

practice.

Chapter 1

10 Micro-Ion®ATM Module Instruction Manual - 390001

Caution and warning statements comply with American Institute of

Standards Z535.1–2002 through Z535.5–2002, which set forth voluntary

practices regarding the content and appearance of safety signs, symbols,

and labels.

Each caution or warning statement explains:

a. The specific hazard that you must prevent or unsafe practice that you

must avoid,

b. The potential result of your failure to prevent the specified hazard or

avoid the unsafe practice, and

c. What you must do to prevent the specified hazardous result.

1.3 System Grounding Grounding, though simple, is very important! Be certain that ground circuits

are correctly used on your ion gauge power supplies, gauges, and vacuum

chambers, regardless of their manufacturer. Safe operation of vacuum

equipment, including the Series 390 ATM Module, requires grounding of all

exposed conductors of the gauges, the controller and the vacuum system.

LETHAL VOLTAGES may be established under some operating conditions

unless correct grounding is provided.

Ion producing equipment, such as ionization gauges, mass spectrometers,

sputtering systems, etc., from many manufacturers may, under some

conditions, provide sufficient electrical conduction via a plasma to couple

a high voltage electrode potential to the vacuum chamber. If exposed

conductive parts of the gauge, controller, and chamber are not properly

grounded, they may attain a potential near that of the high voltage electrode

during this coupling. Potential fatal electrical shock could then occur

because of the high voltage between these exposed conductors and ground.

1.4 Implosion / Explosion Danger of injury to personnel and damage to equipment exists on all

vacuum systems that incorporate gas sources or involve processes capable

of pressuring the system above the limits it can safely withstand.

For example, danger of explosion in a vacuum system exists during

backfilling from pressurized gas cylinders because many vacuum devices

such as ionization gauge tubes, glass windows, glass bellfars, etc., are not

designed to be pressurized.

WARNING

Warning statements alert you to hazards or unsafe

practices that could result in severe property damage or

personal injury due to electrical shock, fire, or explosion.

Each warning statement explains what you must do to prevent

or avoid the potential result of the specified hazard or unsafe

practice.

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