MKS MicroPirani 925 Series Anleitung zur Verwendung

™

P/N: 100017410

Short form manual

REV: A, December 2009

Product: 925-x1090-0051

Connector: 6 pin Hirschmann

Output: 19 (TPR280,TPR265)

RoHS Compliant

Measuring range (N2and Air): 1×10-5 Torr to Atmosphere

Accuracy(1) (N2) 5×10-4 to 1x10-3 Torr: ±10% of reading

1×10-3 to 100 Torr: ± 5% of reading

100 to Atm.: ± 25% of reading

Repeatability(1) (N2): 1×10-3 to 100 Torr ± 2% of reading

Supply Voltage: 9 –30 VDC

Power consumption: < 1.2 Watt

Fuse (thermal recoverable): 200 mA

Analog output 1: (100 Ω impedance): 2.199 –8.625 VDC

Analog output 1 resolution: 16 bit

Materials exposed to vacuum: 304 Stainless steel, Silicon

SiO2, Si3N4, gold, Viton® (2)

Low out gassing Epoxy resin

Internal volume: KF16 flange 2.80 cm3

KF16 long flange 6.63 cm3

KF25 flange 3.55 cm3

VCR4 flange 1.84 cm3

VCR8 flange 3.06 cm3

Housing material: Stainless steel 304

Weight (925 with KF16): 170g

Operating temperature: 0 to 40 oC

Bakeout temperature (Power off): 85 oC

(1) Accuracy and repeatability values are typical values measure in Nitrogen atmosphere at

ambient temperature after zero adjustment.

(2) Transducer without Viton seal is available for use in UHV applications.

MKS Instruments HPS Products

www.mksinst.com

™

The 925 transducer package contains these items:

1 pcs. 925 Transducer,

1 pcs. Short form manual (P/N: 100017410)

1 pcs. Documentation & Software CD (P/N: 100017096)

If any items are missing contact MKS customer service.

This short form manual provides the basic information for simple use and

setup. For system integration and advanced setup refer to Operation and

Installation manual.

The 925 MicroPirani vacuum transducer offers a wide measuring range from

1×10-5 Torr to atmosphere and is based on the measurement of thermal

conductivity in small cavity on MEMS silicon chip sensor.

RS232 or RS485 digital interface

Analog voltage output compatible with TPR265, TPR280

Standalone use or with PDR900 controller

The user switch can used to perform measurement adjustments. Refer to

Operation and Installation manual before pressing the user switch.

The transducer is factory calibrated when delivered. Additional adjustment is

normally not required. Refer to Operation and Installation manual for

calibration and adjustment recommendations.

Install the 925 away from pumps and gas sources and where vibration is

minimized to give the most representative pressure measurement.

The 925 can be mounted in any orientation, without compromising accuracy

and performance.

The 925 is not intended for use in corrosive or explosive

environments. Refer to materials exposed to vacuum for

process compatibility.

Refer to Operation and Installation manual for installation specifications and

recommendations.

™

Use a cable with a female 6-pin connector with strain reliefs to ensure proper

electrical connection and to reduce stress.



Ensure a low impedance electrical connection between the

901P transducer body and the grounded vacuum system to

shield the sensor from external electromagnetic sources.

To comply with EN61326-1 immunity requirements, use a braided, shielded

cable. Connect the braid to the metal hoods at both ends of the cable with

the end for power supply connected to earth ground.

925 I/O Connector (6 pin)

6 pin Hirschmann

Description

Identification resistor 3KΩ

Analog Output +

Analog Output –

Power + (9-30 VDC)

Power return -

Chassis

™

The analog pressure output (16 bit resolution) is based on the digital

pressure reading (PR1). Connect the signal to a differential input.



Do not connect the negative side of the analog output to

the power supply return or to any other ground. The

voltage drop from supply current will produce errors in the

analog output.

Converting voltage to pressure:

P = 10(Vout –c)

Vout = c + log10(P)

mbar

5.5

Torr

5.625

Pascal

3.5

Vout vs. Pressure (Torr / mbar, N2setup)

The transducer can provide other analog output characteristics than the

standard 1VDC/decade. Refer to Operation and installation manual.

Gas dependence

The MicroPirani™transducer is based on measurement of thermal

conductivity and consequently its reading depends on gas type and gas

concentration. The transducer is calibrated for Nitrogen, and will read higher

pressure values when exposed to atmospheric air.

US & ASIA:

MKS Instruments, Inc., HPS™

Products, Inc.,

5330 Sterling Drive, Boulder, CO

80301, USA,

Phone: (303) 449-9861

EUROPE:

MKS Denmark ApS

Ndr. Strandvej 119G

DK3150 Hellebaek, Denmark

Phone: +45 44 92 92 99,

Email: mksdenmark@mksinst.com

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