Pfeiffer Vacuum TPH 2201 Bedienungsanleitung

Operating Instructions

Turbomolecular Pumps

With Electronic Drive Units

TPH 2201 / TPU 2201

PM 800 567 BE/C (0008)

Index

Page Page

1. Safety Instructions.................................. 3

1.1. For Your Orientation........................................................... 3

1.2. Pictogram Definitions........................................................ 3

2. Understanding The Pumps

TPH/TPU 2201........................................... 4

2.1. Main Features..................................................................... 4

2.2. Differences Between The Pump Types.......................... 4

3. Installation............................................... 5

3.1. Preparations For Installation............................................ 5

3.2. Installing The Pump, Connecting The

High Vacuum Side.............................................................. 5

Fitting The Splinter Shield................................................. 5

3.3. Connecting The Fore-Vacuum Side................................ 6

3.4. Connecting The Cooling Unit............................................ 6

3.5. Connecting The Venting Valve......................................... 7

3.6. Connecting The Heating Unit........................................... 7

3.7. Connecting The Electronic Drive Unit TC 600................ 8

3.8. Installing The Power Pack Unit ....................................... 8

3.9. Connecting The Sealing Gas Valve................................. 8

3.10. Connecting The Remote Control Unit ............................. 9

3.11. Connecting The Serial Interface RS 485 ...................... 10

Connection........................................................................ 10

Connecting The RS 485 ................................................... 10

3.12. Connections Diagram...................................................... 11

Connections Diagram

For 3-phase Backing Pump ............................................ 12

4. Operations.............................................. 13

4.1. Filling In The Lubricant.................................................... 13

4.2. Before Switching ON....................................................... 13

4.3. Switching ON.................................................................... 13

4.4. Circulatory Lubrication.................................................... 14

4.5. Heating............................................................................... 14

4.6. Switching OFF And Venting............................................ 14

4.7. Gas Type Dependent Operations .................................. 14

4.8. Shutting Down For Longer Periods............................... 14

4.9. Operations With The DCU 001 / DCU 600 ..................... 15

4.10. Operations With The Remote Control Unit................... 15

Venting Release (Optional)............................................. 15

Motor, Turbopump .......................................................... 15

Pumping Station .............................................................. 15

Heating/Reset .................................................................. 15

Standby.............................................................................. 15

Rotation Speed Setting Operations

Via Input PWM ................................................................ 16

Switching Outputs............................................................ 16

5. Monitoring Operations ......................... 16

5.1. Operations Display Via LED............................................ 16

5.2. Turbopump Temperature Monitoring........................... 16

6. What To Do In Case

Of Breakdowns? .................................... 17

7. Service.................................................... 18

8. Maintenance.......................................... 19

8.1. Replacing The Lubricant................................................. 19

8.2. Cleaning Strainer And Floater........................................ 19

8.3. Cleaning And Changing

The Bearing On The Lubricant Pump............................ 19

9. Technical Data....................................... 21

9.1. Dimensions Diagram ....................................................... 22

10. Spare Parts............................................. 22

11. Accessories .......................................... 24

11.1. Lubricant............................................................................ 25

Declaration of Contamination.................... 26

Manufacturer´s Declaration..........(last page)

Please note: Current operating instructions are available via

www.pfeiffer-vacuum.de/Infoservice.

☞Read and follow all instructions in this manual.

☞Inform yourself regarding:

– Hazards which can be caused by the pump;

– Hazards which can be caused by your system.

– Hazards which can be caused by the media being

pumped.

☞Avoid exposing any part of the body to vacuum.

☞Observe the safety and accident prevention regulations.

☞Regularly check that all accident prevention measures are

being complied with.

☞Do not operate the turbopump with open high vacuum

flange.

☞Do not carry out any unauthorised conversions or alterati-

ons to the turbopump with TC 600.

☞When returning the turbopump observe the shipping

instructions.

☞Use at least 6 bracket screws to connect the high vacuum

flange (ISO-flange).

☞The turbopump must be anchored in accordance with the

installation instructions.

☞Do not disconnect the plug between the TC 600 and acces-

sory components during operations.

☞When the turbopump is open disconnect the voltage supp-

ly to the TC 600.

☞When working on the turbopump, the high vacuum flange

should only be opened once the rotor is at rest.

☞When using sealing gas, the pressure in the hose connec-

tion should be limited to 2 bar via the overpressure valve.

☞If a heater is in use high temperatures can arise of the

turbopump. Take care to avoid burns.

☞Keep leads and cables well away from hot surfaces

( > 70 °C).

☞Operate the turbopump with TC 600 only in conjunction

with the relevant Power Pack Unit (accessory).

☞The unit has been accredited protection class IP 30. When

the unit is operated in environments which require other

protection classes, the necessary measures must be

taken.

☞The mains connection must be subject to a safe

connection to the PE (protection class 1).

☞If the turbopump and the TC 600 are operated separately

(only permissible with the agreement of the manufacturer)

the turbopump must be connected to the PE.

☞The cause of any operating voltage leakage to earth (red

LED flashes) must be eliminated to avoid the danger of an

electric shock.

Modifications reserved.

1. Safety Instructions

1.1. For Your Orientation

Instruction in the text

➡Working instruction: here, you have to do something.

Symbols used

The following symbols are used throughout in illustrations:

High vacuum flange

Fore-vacuum flange

Electric connection

Sealing gas connection

Venting connection

Cooling water connection

Measuring connection

Abbreviations used

DCU = Operating and display control unit

TC = Electronic drive unit, turbopump

TPS = Power pack unit

Position numbers

The same pump and accessory parts have the same position

numbers in all illustrations.

1.2. Pictogram Definitions

Danger of burns from touching hot parts.

Danger of an electric shock.

Danger of personal injury.

Danger of damage to the pump or to the system.

Danger of injury from rotating parts.

2.1. Main Features

Turbopumps TPH/TPU 2201 with the TC 600 form a complete

unit. Voltage is supplied by Power Pack Unit (see

”Accessories”).

Turbomolecular Pump TPH/TPU 2201

1 High vacuum flange

2 Fore-vacuum flange

3 Cooling water connection

8 Electronic Drive Unit TC 600

42 Venting connection

66 Sealing gas connection

71 Lubricant filler srew

72 Lubricant drain screw

73 Sight glass

100 Measuring connection

Cooling

Standard: Water cooling

Integrated protective measures against excess temperatures:

The Electronic Drive Unit TC 600 reduces

the rotor rotation speed.

Bearings

The pump rotor has bearings at both ends. Each ball bearing

has its own circulatory lubrication system.

The turbopumps must not be transported when

filled with lubricant.

Feature TPH 2201 TPU 2201

High vacuum flange DN 250 ISO-K DN 250 CF-F

High vacuum seal Viton Metal

Attainable final < 1 · 10-8 mbar < 1 · 10-10 mbar

pressure (without baking-out) (with baking-out)

2. Understanding The Pumps TPH/TPU 2201

Proper use

– The Turbomolecular Pumps TPH/TPU 2201 may only be

used for the purpose of generating vacuum.

– The turbopumps may only be used to pump those media

against which they are chemically resistant. For other

media the operator is required to qualify the pumps for the

processes involved.

– If the process produces dust, the maintenance intervals

must be specified accordingly and sealing gas must be

used.

– If the pump is to be operated with more than 50% of the

permissible gas load, sealing gas must be used.

– The turbopump must be connected to a backing pump in

accordance with Section 3.3.

– Only PFEIFFER power pack units may be used to operate

the TC 600. These power pack units guarantee voltage

which is safely separated from the mains accordance with

Standard EN 60 742. The use of other power pack units

requires the express agreement of the manufacturer.

– The pumps may only be operated providing the ambient

conditions in compliance with Protection Type IP 30 are

observed.

Improper use

The following is regarded, inter alia, as improper:

– The pumping of explosive gases.

– Operating the pumps in areas where there is a danger of

explosion.

– The pumping of gases and vapours which attack the mate-

rials of the pumps.

– The pumping of corrosive gases without sealing gas.

– The pumping of condensating vapours.

– Operations involving impermissibly high levels of gas

loads.

– Operations with impermissibly high fore-vacuum pressure.

– Operations with improper gas modes.

– Operations involving too high levels of heat radiation

power (see Section 9. ”Technical Data”).

– Operating the pump in environments which require a pro-

tection class superior to IP 30.

– The use of other power pack units or accessories which

are not named in this manual or which have not been

agreed by the manufacturer.

– The connection to power pack units with earthing of a

direct voltage pole.

Improper use will cause all claims for liability and guarantees

to be forfeited.

2.2. Differences Between The Pump Types

166 8

73 72 71 342 100 2

3. Installation

3.1. Preparations For Installation

Do not carry out any unauthorised conversions

or alterations to the turbopump.

– The maximum permissible rotor temperature of the pump is

120 °C. If the vacuum chamber or parts in the vacuum

chamber are heated, the values stated in the technical

data relating to the level of heat which may be radiated

into the pump must not be exeeded. If necessary, suitable

shielding must be fitted in the vacuum chamber before the

turbopump (constructional suggestions available on

request).

– Only remove the blank flange from the high and for-vacu-

um side immediately before connection.

– The turbopumps must not be transported when filled with

lubricant.

– Where magnetic fields of > 13.4 mT are involved suitable

shielding must be provided (available on request).

– If the pump is baked out, the body of the pump must be

insulated to prevent burns from accidental contact.

– Both the TPH and TPU 2201 must be anchored to the

surface.

– In the event of a sudden standstill of the rotor, torques of

up to 8960 Nm can arise and these must be taken up by the

turbopump and frame. Pumps must be anchored as

follows:

– ISO flange with 6 bracket screws,

– CF flange with the complete set of M8 screws,

– underside of the pump with 6 screws M6,

screws quality 8.8.

3.2. Installing The Pump,

Connecting The High Vacuum Side

Important

The utmost cleanliness must be observed when fitting all high

vacuum parts. Unclean components prolong the pumping

time.

Use a splinter shield

The use of a splinter shield in the high vacuum flange protec-

ts the turbopump against foreign bodies coming from the

vacuum chamber but does reduce the volume flow rate of the

pump by approximately 15%. For fitting splinter shields please

refer to “Fitting the splinter shield”.

The high vacuum side can be flanged onto the vacuum cham-

ber either directly or via a bellows or a vibration compensator

(see ”Accessories”).

Connecting via bellows

If the high vacuum side is to be flanged via a bellows, the tur-

bopump must be secured for example via the holes on the

underside of the turbopump (please see dimensions). The

fastening must be able to withstand the torque referred to in

Section 3.1.

Connecting Via A Vibration Compensator

The maximum permissible temperature at the

vibration compensator is 100 °C.

Where a vibration compensator is in use, a freely suspended

turbopump can be flanged onto the vacuum chamber.

Additional protective casing must be provided to take up the

energy of the rotor in the event of a malfunction (please

discuss this question with the manufacturer).

The maximum loading capacity of the high vacu-

um flange is 3000 N (equivalent to 300 kg).

This does not apply to pumps with flanges on the

side or below.

Asymmetric loading on the high vacuum flange

must be avoided.

If a vacuum chamber is fitted to the high vacuum flange with-

out support, it must be ensured that no torque is transmitted

to the flange (asymetrical weight of the vacuum chamber).

Even with side and under flanges, pumps can be flanged to

the vacuum chamber with a freely suspended horizontal rotor

shaft. It is a pre-condition that the vacuum chamber be firmly

anchored.

No forces from the piping system must be

allowed to act on the pump where turbopumps

are anchored.

Suspend or support all pipes to the pump.

Fitting The Splinter Shield

➡Insert the splinter shield in the ISO-K flange in condition on

delivery.

Inserting the splinter shield in ISO-K flage

A Strap (Condition on delivery)

3.3. Connecting The Fore-Vacuum Side

Backing pump: Fore-vacuum pressure ≤0.1 mbar

Recommendation: Rotary Vane Vacuum Pumps from the

PFEIFFER range.

Where large volumes of gas are

involved, we recommend a backing

pump combination of rotary vane

vacuum pump and roots vacuum pump.

Connecting the backing pump

All connections of the fore-vacuum line: With the usual small

flange or clamping flange components.

Be sure to conduct away the exhaust gases

from the backing pump. Do not reduce the free

cross section of the fore-vacuum flange with

following components.

The exhausted process gases and vapours can

represent a health hazard and can also be envi-

ronmentally damaging.

Comply with all the gas manufacture's safety

instructions.

➡With rigid pipe connections: Fit a bellows in the

connecting line to reduce vibration.

➡The electrical connection of the backing pump is made via

a relay box (Accessory) whose control line is connected to

”FV PUMP” on the TC 600.

Please refer to Operating Instructions PM 800 544 BN for

details on the relay box (1 phase backing pump and its instal-

lation).

Please refer to Section 3.12. for electrical connection of the

3 phase backing pump

Oxygen content: max. 4 mg/kg

Chloride content: max. 100 mg/kg

Carbonate hardness: max. 10 ° dH

Conaumption of potassium

permanganate: max. 10 mg/kg

Carbon dioxide: Undetectable

Ammonia: Undetectable

pH-value: 7 – 9

Max. fore-line over pressure: max. 6 bar

Minimum flow rate at gas load max.: 100 l/h at 15 °C

Connection to the cooling water mains

➡Fit the dirt trap (Accessory) in the supply line.

➡Connect the supply line with hose clips onto one of the two

cooling water connections.

➡Connect the return line to the other cooling water connec-

tion of the turbopump.

➡Tighten all hose clips and check for firm seating of the

hoses.

➡Tighten the hollow screws on the cooling water

connection to a torque of 20 Nm.

3.4. Connecting The Cooling Unit

The Turbopumps TPH/TPU 2201 have been designed to be

water cooled.

The cooling water can be drawn either

– from the cooling water mains, or

– from Recycled Water Cooling Unit TZK in closed circuit.

Cooling from the cooling water mains

To prevent deposits collecting in the pump the cooling water

must be filtered.

Minimum cooling water requirements:

Mechanically clean, optically clear, no turbidity, no sediment,

chemically neutral, temperature >dew point.

➡Before insert the splinter shield in the CF-F flange the strap

must be bent.

Inserting the splinter shield in CF-F flage

A Strap (bent)

Cooling from the cooling water mains

3 Cooling water connection

31 Supply line

32 Return line

33 Dirt trap

Cooling With The Recycled Water Cooling Unit TZK

(Accessory)

Dirt traps are not permissible in the lines.

All other steps as for connecting to the cooling water mains.

TZK

Cooling with Recycled Water Cooling Unit TZK

3 Cooling water connection

35 Recycled Water Cooling Unit TZK

HEAT/TMS 46

46a 46c 46b

Installing the heating unit

8 Electronic Drive Unit TC 600

46 Heating

46a Control lead, heating/TC 600

46b Heating relay box

46c Mains cable

3.6. Connecting The Heating Unit

High temperatures are generated when

turbopump or vacuum chamber are baked out.

Contact with hot parts can cause burns, even

when the heating has been switched off. Pump

casing should be insulated when fitting.

Do not touch pump casing during baking out.

➡Lay heating round the pump body and fasten beside on the

claps to the high vacuum flange.

➡Plug control lead 46a into the connection "HEAT/TMS" of

the TC 600 (8) on the turbopump.

➡Connect mains cable 46c to the mains voltage.

Caution! Ensure correct mains voltage range.

The electrical connections must be carried out

by qualified personnel in compliance with local

regulations. The mains plug may only be

connected to the mains voltage after the casing

heating unit has been fitted to the turbopump.

3.5. Connecting The Venting Valve

The venting valve (Accessory) provides automatic venting in

the event of a power failure and switching off.

Fitting the venting valve

➡Screw in venting valve with seal (USIT ring) on hexagonal

SW 14.

Electrical connection

➡Plug control lead 42a into the connection ”VENT“ of the

TC 600 (8) on the turbopump.

The venting mode of the venting valve is selected via the DCU

or Serial Interface RS 485.

VENT

42b

42a

Connecting the venting valve

8 Electronic Drive Unit TC 600

42 Venting valve

42a Connector plug venting valve/TC 600

42b Plug

The maximum pressure at the venting valve is

1.5 bar absolute.

Please refer to Operating Instructions PM 800 507 BN for

details on Venting Valve TVV 005.

3.8. Installing The Power Pack Unit

Voltage may only be supplied with the PFEIFFER

power pack units (Accessory). These power

pack units guarantee voltage which is safely

separated from the mains (in accordance with

Standard

EN 60 742). The use of other power pack units requires the

express agreement of the manufacturer.

Please note:

Operations with TPS 600/DCU 600 only possible in the

connection voltage range 185-264 VAC.

Please refer to Operating Instructions PM 800 521 BN for

details on Power Pack Unit TPS 600.

3.7. Connecting The Electronic

Drive Unit TC 600

Please note:

The turbopump and the Electronic Drive Unit TC 600 are

connected and together form a single unit.

Connecting cable 8a has to be ordered separately (see

”Accessories”).

➡Connect plug X4 on connecting cable 8a with connection

X4 on the TC 600 and secure with screw 8b.

➡Connect plug X2 on connecting cable 8a with Power Pack

Unit TPS 600/DCU 600 (”Accessories”) on connection X2.

Once operations voltage has been supplied, the

TC 600 performs a self test on the supply

voltage.

The supply voltage for the turbomolecularpumps

is 140 VDC ± 5% in accordance with EN 60 742.

8a X2

X1 X2

105

Connecting the TC 600 with Power Pack Unit TPS 600/DCU 600

X1 Mains connection

X2 Connection, Power Pack Unit TPS 600

X4 Connection TC 600

S1 ON/OFF switch

8 Electronic Drive Unit TC 600

8a Connecting cable, TC 600 – TPS/DCU

8b Screw

105 Power Pack Unit TPS 600

3.9. Connecting The Sealing Gas Valve

To protect the pump, particularly where corrosive or dust pro-

ducing processes are involved, it is necessary to use sealing

gas. Connection is made via the sealing gas valve (please see

“Accessories”).

Please refer to Section 9.1. ”Dimensions Diagram” for the

sealing gas connection.

Please refer to Operating Instructions PM 800 229 BN for

details on installing the sealing gas valve and adjusting the

sealing gas flow.

Pin arrangement and remote plug functions

Pin Nr. Input open (low) Input closed (high) On + 24 V (pin 1)

1 +24 V

2 venting blocked (see Section 3.5.) venting release (see Section 3.5.)

3 motor, turbopump off motor, turbopump on:

the turbopump is driven, current flows through the motor coils.

4 pumping station off pumping station on:

the turbopump is driven, backing pump is activated.

5 heating off heating on:

the heating is switched on once the rotation speed switchpoint is attained and

off when the rotation speed switchpoint is unattained.

5 Reset:

by supplying a pulse (T < 2s) with an amplitude of 24V a malfunction

acknowledgement can be processed.

6 standby off standby on:

pump is accelerated to 66% of its nominal rotation speed.

7 rotation speed setting mode off the rotation speed can be changed by feeding a PWM signal to this pin or

via Serial Interface RS 485 (see Section 4.10. ”Rotation Speed Setting Mode”)

8Output (low) Output (high)

rotation speed set rotation speed switchpoint attained;

switchpoint not attained output can be loaded with 24 V/50 mA

9Output (low) Output (high)

collective malfunction message; malfunction-free operations

output can be loaded with 24 V/50 mA

10 Mass (ground)

3.10. Connecting The Remote Control Unit

Remote control options for various functions are provided

with the connection ”REMOTE” on the TC 600 via the 10 pole

screw connector plug (maximum cable cross section

0.14 - 1.5 mm2/connection).

Shielded cable should be used. Shielding has to be

connected with the TC casing on the plug side of the TC 600

by using cable clamps.

The inputs 2 - 6 are activated by connecting them to the + 24V

on pin 1 (active high) (please see Section 3.12. ”Connections

Diagram”).

Pin Arrangement And Remote Plug Functions

(please see following table).

When connecting supply voltage, the turbopump

is started.

On delivery:

Pin 1, Pin 2, Pin 3 and Pin 4 are bridged in the

mating plug.

3.11. Connecting The Serial

Interface RS 485

An external operating component (DCU 001/DCU 600) or an

external computer can be connected via the connection

”RS 485” on the TC 600 with the use of an 8 pole modular

connecting cable.

The serial interface is galvanically and safely separated from

the maximum supply voltage from the TC 600.

Connection

Connecting The RS 485

Connecting to a fixed bus system:

➡Connect all units with D+ (pin 5/RS 485) and

D- (pin7/RS 485) to the bus.

➡The bus must be connected at both ends.

The connections should be made in accordance with the

specification of the Serial Interface RS 485.

PIN Arrangement

1 not connected

2 +24V output (≤210 mA loading

capacity)

3 not connected

4 not connected

5 RS 485: D+ (DO / RI)

6 Gnd

7 RS 485: D- (DO / RI)

8 not connected

All units connected to the bus must have differing serial inter-

face addresses (parameter 797).

The group address of the TC 600 is 960.

Only safety low voltages (SELV) may be connec-

ted to Serial Interface RS 485 .

All switched on remote functions have priority over the serial

interface functions.

Please Note:

Please refer to the separate Operating Instructions

PM 800 488 BN for more detailed information on operations

via Serial Interface RS 485 and its electronic data.

1 ... 8

Description Value

Serial Interface Type: RS 485

Baudrate: 9600 baud

data word lenghts: 8 bit

Parity: no (no parity)

Startbits: 1

Stopbits: 1..2

The electrical connections are internally optically decoupled.

Please note:

It is possible to connect an RS 232 (e.g. PC) via a level conver-

ter (please see ”Accessories”).

(View from the

plug side of the

TC 600)

RS 485

5:D+, 7:D–

RTRT

Level Converter

TC TC

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