SMC Networks EQFS Series Bedienungsanleitung

No. DOC1023125

NN58170201

PRODUCT NAME

e-Actuator / Slider type

Electric Actuator

Easy to Operate Integrated Controller

（

servo 24VDC

）

Model / Series / Product Number

EQFS series

Also check the e-Actuator setup software(e-Actuator setup tool)instruction manual.

Please download this software from our website.

http://www.smcworld.com/

- 1 - 
 
Contents 
Safety Instructions...................................................................3 
Precautions for product specific................................................................5 
１Outlines of Product........................................................23 
１.１System configuration example......................................................23 
１.２Features.....................................................................................................24 
１.３How to Order...........................................................................................25 
１.４Specification Table...............................................................................26 
１.５Construction............................................................................................27 
１.６Accessories.............................................................................................28 
２Installation and Initial Setting..................................29 
２.１Flow from installation to initial setting......................................29 
２.２Check the contents of the packag...............................................30 
２.３Preparation of necessary supplies.............................................31 
２.４Installation of electric actuators...................................................32 
２.５Wiring and Connection......................................................................33 
２.５.１Connection to input power supply..........................................33 
２.５.２Connection to PC..............................................................................38 
２.５.３Connection to PLCs, etc...............................................................38 
２.６Power ON alarm (error)......................................................................40 
２.７Setup of the operation parameters .............................................40 
２.８Test run.......................................................................................................41 
３Operation.............................................................................42 
３.１Operation flow........................................................................................42 
３.２Procedure for power set up.............................................................43 
３.２.１Procedure for power start up.....................................................43 
３.２.２Power Supply Startup.....................................................................43 
３.３Operation Instructions.......................................................................45 
３.３.１Outline of operation command..................................................45 
３.３.２Positioning operation.....................................................................45 
３.３.３Reset........................................................................................................48 
３.４Operation Examples............................................................................49 
３.４.１Positioning operation.....................................................................49 
４Operation Mechanism...................................................50 
４.１Positioning operation.........................................................................50 
４.２Return to the origin..............................................................................51 
４.３Response time in receiving an electric actuator input signal 52 

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４.４Methods of interrupting operation ..............................................52 
５Alarm detection................................................................53 
５.１Parallel signal output for the alarm group..............................53 
５.２Alarm details ...........................................................................................53 
６Troubleshooting...............................................................57 
７Specifications....................................................................62 
７.１Basic specifications of the product............................................62 
７.２Parts Description..................................................................................63 
７.３Power supply connector Specification.....................................64 
７.４I/O connector specification.............................................................65 
７.４.１Details of parallel input/output signals.................................65 
７.４.２Parallel input/output specification..........................................67 
７.４.３Parallel input/output type circuit (NPN and PNP specifications) 67 
８Setting ...................................................................................68 
８.１Operation data........................................................................................68 
８.２Parameter..................................................................................................70 
９Optional parts (sold separately）............................72 
９.１Power supply cable.............................................................................72 
９.２I/O cable.....................................................................................................72 
９.３Setup communication cable...........................................................73 
９.４Configuration software......................................................................73 
 
 

- 3 -

e-Actuator/ Slider Type

Safety Instructions

These safety instructions are intended to prevent hazardous situations and/or equipment damage.

These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or

“Danger.”

They are all important notes for safety and must be followed in addition to International Standards

(ISO/IEC)*1) , and other safety regulations.

*1) ISO 4414: Pneumatic fluid power -- General rules relating to systems.

ISO 4413: Hydraulic fluid power -- General rules relating to systems.

IEC 60204-1: Safety of machinery -- Electrical equipment of machines .(Part 1: General requirements)

ISO 10218: Manipulating industrial robots -Safety.

etc.

Caution

Caution indicates a hazard with a low level of risk which, if not avoided, could result

in minor or moderate injury.

Warning

Warning indicates a hazard with a medium level of risk which, if not avoided, could

result in death or serious injury.

Danger

Danger indicates a hazard with a high level of risk which, if not avoided, will result

in death or serious injury.

Warning

1. The compatibility of the product is the responsibility of the person who designs the equipment

or decides its specifications.

Since the product specified here is used under various operating conditions, its compatibility with specific

equipment must be decided by the person who designs the equipment or decides its specifications based on

necessary analysis and test results.

The expected performance and safety assurance of the equipment will be the responsibility of the person

who has determined its compatibility with the product.

This person should also continuously review all specifications of the product referring to its latest catalog

information, with a view to giving due consideration to any possibility of equipment failure when configuring

the equipment.

2. Only personnel with appropriate training should operate machinery and equipment.

The product specified here may become unsafe if handled incorrectly.

The assembly, operation and maintenance of machines or equipment including our products must be

performed by an operator who is appropriately trained and experienced.

3. Do not service or attempt to remove product and machinery/equipment until safety is confirmed.

1.The inspection and maintenance of machinery/equipment should only be performed after measures to

prevent falling or runaway of the driven objects have been confirmed.

2.When the product is to be removed, confirm that the safety measures as mentioned above are

implemented

and the power from any appropriate source is cut, and read and understand the specific product precautions

of all relevant products carefully.

3. Before machinery/equipment is restarted, take measures to prevent unexpected operation and

malfunction.

4. Contact SMC beforehand and take special consideration of safety measures if the product is to

be used in any of the following conditions.

1. Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to

direct sunlight.

2. Installation on equipment in conjunction with atomic energy, railways, air navigation, space, shipping,

vehicles, military, medical treatment, combustion and recreation, or equipment in contact with food and

beverages, emergency stop circuits, clutch and brake circuits in press applications, safety equipment or

other applications unsuitable for the standard specifications described in the product catalog.

3. An application which could have negative effects on people, property, or animals requiring special safety

analysis.

4.Use in an interlock circuit, which requires the provision of double interlock for possible failure by using a

mechanical protective function, and periodical checks to confirm proper operation.

- 4 -

e-Actuator/ Slider Type

Safety Instructions

Caution

The product is provided for use in manufacturing industries.

The product herein described is basically provided for peaceful use in manufacturing industries.

If considering using the product in other industries, consult SMC beforehand and exchange

specifications or a contract if necessary.

If anything is unclear, contact your nearest sales branch.

Limited warranty and Disclaimer/Compliance Requirements

The product used is subject to the following “Limited warranty and Disclaimer” and “Compliance

Requirements”.

Read and accept them before using the product.

Limited warranty and Disclaimer

1.The warranty period of the product is 1 year in service or 1.5 years after the product is

delivered,whichever is first.*2)

Also, the product may have specified durability, running distance or replacement parts. Please

consult your nearest sales branch.

2. For any failure or damage reported within the warranty period which is clearly our responsibility,

a replacement product or necessary parts will be provided.

This limited warranty applies only to our product independently, and not to any other damage

incurred due to the failure of the product.

3. Prior to using SMC products, please read and understand the warranty terms and disclaimers

noted in the specified catalog for the particular products.

*2) Vacuum pads are excluded from this 1 year warranty.

A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.

Also, even within the warranty period, the wear of a product due to the use of the vacuum

pad or failure due to the deterioration of rubber material are not covered by the limited

warranty.

Compliance Requirements

1. The use of SMC products with production equipment for the manufacture of weapons of

mass destruction(WMD) or any other weapon is strictly prohibited.

2. The exports of SMC products or technology from one country to another are governed by

the relevant security laws and regulation of the countries involved in the transaction. Prior

to the shipment of a SMC product to another country, assure that all local rules governing

that export are known and followed.

Caution

SMC products are not intended for use as instruments for legal metrology.

Measurement instruments that SMC manufactures or sells have not been qualified by type approval tests

relevant to the metrology (measurement) laws of each country.

Therefore, SMC products cannot be used for business or certification ordained by the metrology

(measurement) laws of each country.

! Caution

SMC products are not intended for use as instruments for legal metrology.

Measurement instruments that SMC manufactures or sells have not been qualified by type approval

tests relevant to the metrology (measurement) laws of each country.

Therefore, SMC products cannot be used for business or certification ordained by the metrology

(measurement) laws of each country.

- 5 -

Precautions for product specific

Precautions for wiring and cable

Warning

①Adjustment, installation, inspection, or wiring changes should be conducted after the

power supply to this product has been turned off.

Electrical shock, malfunction, or damage can result.

②Never disassemble the cable.

③Never connect or disconnect the cable or connector with the power on.

Caution

①Wire the connector securely.

Do not apply any voltage to the terminals other than those specified in the Operation Manual.

②Wire the connector securely.

Check for correct connector wiring and polarity.

③Take appropriate measures against noise.

Noise in a signal line may cause malfunction.

As a countermeasure, high voltage and low voltage cables should be separated, and keep

wiring lengths short, etc.

④Do not connect power or high-voltage cables in the same wiring path as the unit.

The product can malfunction due to noise and surge voltage interference in the signal line from

power and high-voltage cables. Separate the wiring of the controller and its peripheral device

from that of power and high-voltage cables.

⑤Take care that actuator movement does not damage cables.

⑥Operate with cables secured.

Avoid bending cables at sharp angles where they enter the electric actuator.

⑦Avoid twisting, folding, rotating, or applying external force to the cable.

Electric shock, wire breakage, contact failure, or a loss of product control may occur.

⑧Fix the Communication cable for setting in place before using.

Communication cable for setting is not robotic type cable and can be damaged when moved.

⑨Select "Robotic type cables" when deflecting power cable and I/O cable repeatedly.

Do not put cables into a flexible moving tube with a radius smaller than the specified

value (minimum 50mm).

Risk of electric shock, wire damage, contact failure and loss of control of the product can occur

if "Standard cables" are used in case of inflecting the cables repeatedly.

⑩Confirm wiring insulation.

Poor insulation (interference with other circuits, poor insulation between terminals and etc.) can

apply excessive voltage or current to the product causing damage.

- 6 -

⑪The speed and force may change depending on the cable length, load, and mounting

conditions.

Furthermore, if the cable length exceeds 5 m, then it will decrease by up to 10% for every

additional 5 m.(If cable length is 15m: Maximum 20% reduction.)

⑫When checking the conductivity of the cable, be careful not to deform the connector’s

mating hole and terminals.

nserting a non-compatible connector, tool, cylinder-shaped object, etc., into the connector’s

mating hole can cause the mating hole or terminals to become deformed, which may cause

contact failure or disconnection.

⑬Refrain from plugging in and unplugging the connector frequently.

Doing so may result in contact failure or disconnection.

⑭Do not connect wires while power is being supplied.

It may cause the electric actuator to break or its peripheral devices could be damaged, causing

a malfunction.

【Transportation】

Caution

①Do not carry or swing the product by the cable and motor.

Electric Actuators / Common Precautions

■Design

Warning

①Be sure to read the Operation Manual (this manual ).

Handling or usage/operation other than that specified in the Operation Manual may lead to

breakage and product failure.

Any damage attributed to the use beyond the specifications is not guaranteed.

②There is a possibility of dangerous sudden action by the product if sliding parts of

machinery are twisted due to external forces etc.

In such cases, human injury may occur, such as by catching hands or feet in the machinery, or

damage to the machinery itself may occur. Design the machinery should be designed to avoid

such dangers.

③A protective cover is recommended to minimize the risk of personal injury.

If a driven object and moving parts of the product are in close proximity, personal injury may

occur. Design the system to avoid contact with the human body.

④Securely tighten all stationary parts and connected parts so that they will not

become loose.

When the product operates with high frequency or is installed where there is a lot of vibration,

ensure that all parts remain secure.

⑤Consider a possible loss of power source.

Take measures to prevent injury and equipment damage even in the case of a power source

failure.

⑥Consider behavior of emergency stop of whole system.

Design the system so that human injury and/or damage to machinery and equipment will not be

caused, when it is stopped by a safety device for abnormal conditions such as a power outage

or a manual emergency stop of whole system.

⑦Consider the action when operation is restarted after an emergency stop or

abnormal stop of whole system.

Design the system so that human injury or equipment damage will not occur upon restart of

operation of whole system.

⑧Never disassemble or modify(including additional machining) the product.

An injury to failure can result. It will cause the loss of the product performance.

- 7 -

⑨Do not use the stop signal as the emergency stop of the system.

Stop by shutdown of M24V is for stopping the electric actuator with deceleration.

For the emergency stop of the equipment, design the system with a separate emergency stop

circuit conforming to relevant safety standards.

⑩When using it for vertical application, it is necessary to build in a safety device.

The rod may fall due to the weight of work. The safety device should not interfere with normal

operation of the machine.

⑪Do not exceed the product specifications even if a work load is supported by

external guides.

Although the Electric actuator moment is reduced by external guides, the required trans- port

ability (the relationship between the speed and the work load) is not reduced.

⑫In order to prevent danger and damage due to the breakdown and the malfunction of

this product, which may occur at a certain probability, a backup system should be

established in advance by giving a multiple-layered structure or a fail-safe design to the

equipment, etc.

⑬Avoid designing a system that allows the driving part of an electric actuator to operate

with a spring or other external force.

Caution

①Operate within the limits of the maximum usable stoke.

The product will be damaged if it is used with a stroke which exceeds the maximum stroke.

Refer to the specifications of the product.

②When the product repeatedly cycles with partial strokes, operate it at a full stroke at

least once a day or every 1000 strokes.

Otherwise, lubrication can be lost.

③Do not use the product in applications where exces- sive external force or impact

force is applied to it.

The product can be damaged. The components, including the motor, are manufactured to

precise tolerances. Even a slight deformation may cause a malfunction or seizure.

④Refer to the Auto Switches Precautions (Best Pneumatics No②) if an auto switch is to be

built in and used.

⑤When UL Standards compliance is required, the electric actuator and controller/driver

should be used with a UL1310 class 2 power supply.

⑥Do not exceed the product specifications even if a work load is supported by

external guides.

Although the actuator moment is reduced by external guides, the required trans- port ability

(the relationship between the speed and the work load) is not reduced.

■Mounting

Warning

①nstall and operate the product only after reading the Operation Manual carefully

and understanding its contents. Keep the manual in a safe place future reference.

②Observe the tightening torque for screws.

Tighten the screws to the recommended torque for mounting the product.

③

n o t

m a k e a n y a l t e r a t i o n s t o t h i s p r o d u c t .

Alterations made to this product may lead to a loss of durability and damage to the

product, which can lead to human injury and damage to other equipment and machinery.

④When an external guide is used, connect the moving parts of the product and the

load in such a way that there is no interference at any point within the stroke.

Do not scratch or damage the sliding part by hitting it with an object. Components are

manufactured to precise tolerances, so the slightest deformation may cause faulty operation.

- 8 -

⑤Prevent the seizure of rotating parts (pins, etc.) by ap- plying grease.

⑥Do not use the product until you verify that the equipment can operate properly.

After mounting or repair, connect the power supply to the product and perform appropriate

functional inspections to check it is mounted properly.

⑦When one side is fixed

When an actuator is operated at a high speed with one end fixed and the other free (basic,

flange, or direct mount types), a bending moment may act on the actuator due to the vibration

generated at the stroke end, which can damage the actuator. In such a case, install a mounting

bracket to suppress the vibration of the actuator body, or reduce the speed so that the actuator

does not vibrate. Also, use a mounting bracket when moving the actuator body or when a long

stroke actuator is mounted horizontally and fixed at one end.

⑧When mounting the actuator or attaching to the work piece, do not apply strong

impact or large moment.

If an external force over the allowable moment is applied, it may cause looseness in the guide

unit, an increase in sliding resistance or other problems.

⑨Maintenance space

Allow sufficient space for maintenance and inspection.

⑩The electric actuator and its peripheral devices should be installed on a fire-proof

material.

Direct installation on or near a flammable material may cause a fire.

⑪Do not install the product in a place subject to vibrations and impacts.

It will cause failure or malfunction.

⑫Take measures to ensure that the operating temperatures of the electric actuator and its

peripheral devices are within the range of the specifications.

also should be installed with 50mm or larger spaces between each side of it and the

other structures or components.

It may cause a malfunction of the controller and its peripheral devices and a fire.

⑬Do not mount the controller and its peripheral devices near a large electromagnetic

contactor or no-fuse breaker which generates vibration on the same panel. Mount them

on different panels, or keep the controller and its peripheral devices away from such a

vibration source.

⑭Install the electric actuator and its peripheral devices on a flat surface.

If the mounting surface is distorted or uneven, an unacceptable force may be added to the

housing, etc., causing problems.

■Handling

Warning

①Do not touch the motor while in operation.

The surface temperature of the motor can increase to approx. 80oC due to operating conditions.

Energizing alone may also cause this temperature increase. As it may cause burns, do not

touch the motor when in operation.

②If abnormal heating, smoking or fire, etc., occurs in the product, immediately shut off the

power supply.

③Immediately stop operation if abnormal operation noise or vibration occurs.

If abnormal operation noise or vibration occurs, the product may have been mounted incorrectly.

Unless operation of the product is stopped for inspection, the product can be seriously damage

④Never touch the rotating part of the motor or moving part of the actuator whileoperation.

- 9 -

⑤

When installing, adjusting, inspecting or performing maintenance on the product, controller and

related equipment, be sure to shut off the power supply to them. Then, lock it so that no one other

than the person working can turn the power on, or implement measures such as a safety plug.

⑥The inside of the electric actuator and its connector should not be touched.

It may cause an electric shock or damage to the controller.

⑦Do not perform the operation or setting of the product with wet hands.

Doing so may cause an electric shock.

⑧Products with damage or those missing any components should not be used.

An electric shock, fire, or injury may result.

⑨Be careful not to be caught or hit by the workpiece while the electric actuator is moving.

It may cause an injury.

⑩Do not connect the power supply or power on the product before confirming the

area to which the work- piece moves is safe.

The movement of the workpiece may cause an accident.

⑪Before installation, wiring, and maintenance, the voltage should be checked with a tester

5 minutes after the power supply has been turned off.

Otherwise, an electric shock, fire, or injury may result.

⑫Do not use the product in an area where dust, powder dust, water, chemicals, or oil is in

the air.

It will cause failure or malfunction.

⑬Do not use the product in an area where a magnetic field is generated.

It will cause failure or malfunction.

⑭Do not install the product in an environment containing flammable gas, explosive gas, or

corrosive gas.

It could lead to fire, explosion and corrosion.

⑮Radiant heat from strong heat sources, such as a furnace, direct sunlight, etc., should

not be applied to the product.

It will cause failure of the electric actuator or its peripheral devices.

⑯Do not use the product in an environment subject to a temperature cycle.

It will cause failure of the electric actuator or its peripheral devices.

⑰Do not use the product in a place where surges are generated.

When there are units that generate a large amount of surge around the product (e.g. solenoid

type lifters, high-frequency in- duction furnaces, motors, etc.), this may cause deterioration or

damage to the product’s internal circuit. Avoid sources of surge generation and crossed lines.

⑱Do not install the product in an environment under the effect of vibrations and impacts.

It will cause failure or malfunction.

⑲When a surge-generating load, such as a relay or solenoid valve, is driven directly, use a

product that incorporates a surge absorption element.

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