AVR200 and AVR300 User Guide
3 6106 Revision D
Table of Contents
1. About This Guide..................................................................................................................................5
1.1 Purpose........................................................................................................................................5
1.2 Scope...........................................................................................................................................5
1.3 Audience......................................................................................................................................5
1.4 Prerequisites................................................................................................................................5
1.5 Conventions.................................................................................................................................5
1.6 Warranty ......................................................................................................................................6
1.7 Disclaimer of Liabilities................................................................................................................6
1.8 Copyright and Trademark Information.........................................................................................6
1.9 Related Production Information...................................................................................................6
2. Regulatory and Environment Standards............................................................................................7
2.1 Regulatory Compliance ...............................................................................................................7
2.2 Environmental Conditions............................................................................................................8
2.3 Safety Considerations..................................................................................................................8
3. The AVR200 and AVR300 Systems...................................................................................................11
3.1 Overview....................................................................................................................................11
3.2
Features and Capabilities
........................................................................................................11
3.3 AVR Configurations and Options...............................................................................................12
3.4 AVR System Components.........................................................................................................13
3.4.1 X-Y Stage..........................................................................................................................13
3.4.2 Z-Column ..........................................................................................................................13
3.4.3 Motorized Z-Track.............................................................................................................13
3.4.4 MetLogix M3 Metrology Software .....................................................................................14
3.4.5 Lens Options.....................................................................................................................15
3.4.6 Lighting Control.................................................................................................................16
3.4.7 Touch Probe Option..........................................................................................................17
3.4.8 Rotary Stage Options........................................................................................................18
3.4.9 Operator Controls and Interfaces......................................................................................19
3.4.10 Workstation .......................................................................................................................19
4. System Specifications .......................................................................................................................21
4.1 Performance Specifications.......................................................................................................21
4.2 Hardware and Mechanical Specifications..................................................................................21
4.3
Electrical Specifications
...........................................................................................................23
4.3.1 Electrical Power ................................................................................................................23
4.4
Optical Specifications
...............................................................................................................24
4.5 Computer and Software Specifications .....................................................................................25
4.6 Touch Probe Specifications.......................................................................................................25
4.7 Rotary Stage Specifications.......................................................................................................27
4.8 Workstation Specifications.........................................................................................................29
5. Installation and Setup ........................................................................................................................31
5.1 Planning the Placement of Equipment ......................................................................................31
5.2 Moving the Equipment...............................................................................................................31
5.3 Uncrating the Equipment...........................................................................................................32
5.4 Removing Shipping Retainers...................................................................................................33
5.5
Setting Up the System
..............................................................................................................35
5.6 On-Site Installation, Calibration and Training............................................................................36
