Telemark 880 Bedienungsanleitung

Telemark

Model 880

Thin Film

Deposition Controller

Users Manual

June 7 2003,

518-030 Preliminary

MANUAL

CONTROL

RATE-A/SEC POWER-% THICKNESS-KA

START

STOP

MANUAL ZERO

MODEL 880

DEPOSITION CONTROLLER

STATUS

Model 880 DEPOSITION CONTROLLER

SECTION 0.XX epage 1 of 275 ^

TFC-2002 JM

USERS MANUAL 518-030

Rev <preliminary> June 7, 2003

.current:

Telemark Model 880 Deposition Controller

MANUAL

CONTROL

RATE-A/SEC POWER-% THICKNESS-KA

START

STOP

MANUAL ZERO

MODEL 880

DEPOSITION CONTROLLER

STATUS

WARNING

The power cord protective

grounding conductor must be

connected to ground. No user

serviceable parts inside. Refer

servicing to qualified personnel.

FUSE: 2 x 2.00 AMP

QUICK-ACTING (F) 250v

90-264 vac, 50-60 Hz, 230VA MAX

INPUTS / OUTPUTS

SOURCE

SENSORS

I/O 4 1/O 3 I/O 2 I/O 1

COMM OPTION

RS232 MEM

7 5 3 1

8 6 4 2

7 5 3 1

8 6 4 2

.overview w/ generalizations only

intro to user interface, overview from general to specific

overview w/ generalizations and intro to specifics as generalizations are developed.

<Telemark reserves the right to change any information contained in this manual without notice

©Copyright Sycon Instruments, Inc. & Telemark 2003

AMPHENOL®is a registered trademark of Allied Corporation

AMP®is a registered trademark of Tyco/Amp, Inc.

ConFlat®is a registered trademark of Varian Associates, Inc.

IBM®Is a registered trademark of IBM Corporation

Microsoft®is a registered trademark of Microsoft Corporation

Microdot ®is a registered trademark of Microdot Inc.

SWAGELOK®is a trademark owned by Crawford Fitting Company

Windows® is a registered trademark of Microsoft Corporation

Model 880 DEPOSITION CONTROLLER

SECTION 0.XX epage 2 of 275 ^

Warranty.

The model 880 Deposition Controller is guaranteed against faulty materials, function, and workmanship for

a period of 12 months after delivery from Telemark. Components which are purchased by Telemark from

other manufactures will be guaranteed for any lesser time that such manufacturer warrants its product to

Telemark. This warranty is valid only for normal use where regular maintenance is performed as instructed.

This warranty shall not apply if repair has been performed or an alteration made by anyone other than an

authorized Telemark representative or if a malfunction occurs through abuse, misuse, negligence, or

accident. No charge will be made for repairs made under warranty at Telemark's facilities. Freight costs

both ways will be at customer's expense. Telemark reserves the right for final warranty adjustment.

User Responsibility

The user is responsible for proper operation an ordinary maintenance of the equipment, following

procedures described in this manual, including reference documents. Proper operation includes timely

replacement of parts that are missing, broken, or plainly worn. If the user has a reasonable doubt about

understanding the use or installation of a component, Telemark Technical Service should be called.

It is vitally important that the user properly install the equipment as described in the Installation sections of

this manual. The warranty will be void if the equipment is improperly installed.

Alteration of the design or any function of the equipment voids the warranty and is entirely the

responsibility of the user.

Safety Warning

General Precautions: Human contact with the voltages present within and around a vacuum system can be

fatal. Make sure that the input power is turned off before opening the doors or removing panels. Short all

HV feedthrough connections with a grounding hook before accessing the controller main body.

Disclosure

The disclosure of this information is to assist owners of Telemark equipment to properly operate and

maintain their equipment, and does not constitute the release of rights hereof. Reproduction of this

information and equipment described herein is prohibited without prior written consent from Telemark.

Model 880 DEPOSITION CONTROLLER

SECTION 1.XX epage 3 of 275 ^

SECTION 1.0 Introduction

.specifications/included materials

(no intro here) unpacking.

Unpacking

The Model 880 comes with a power cord and connectors for the RS-232 interface, the I/O

interfaces and analog outputs (see the following spare parts included list). If the essential OSC-100A

oscillator or crystals were ordered at the same time, they will also be included. The unit operates from 90

to 264 VAC with no adjustments required. If it is ever necessary to return the unit to Telemark, for any

reason, call and obtain a Return Material Authorization number (RMA#).

Description

The Model 880 provides both automatic control of single or multi-layer film deposition in either a

production or development environment and improved predictability and repeatability of deposited film

characteristics through dependable digital control of the deposition process. It runs unattended in the fully

automatic mode and provides a wide number of benefits including performance limit access and setting by

the end user.

SECTION 1.1 MANUAL DESCRIPTION

.[please read and understand this manual before proceeding w/ equipment useage].

Please read and understand the contents of this manual before proceeding with equipment useage in a

working system. This manual will take the reader through the appropriate setup and example steps,

providing along the way, an understanding of how the Model 880 instrument is used. A test mode is

available from the SERVICE menu for simulated out of system experiments. Crystal sensor head

information is simulated (actually rate info is simulated for the film) allowing setup of various

parameters/programming elements without crystal failure halting the simulated process. The power supply

control voltage output is, however, active while in the test mode. All these terms will be described shortly.

This manual is organized into a number of main sections: specifications, generalized overview,

menu programming specifics and setup, hardware setup, detailed host communications, microbalance

theory and maintenance. If any further assistance is needed, please contact Telemark (see section 1.6).

The specifications section describes Model 880 product specifics, both hardware and software,

along with related necessary and optional product specifics. The software specifics include programmable

parameter lists. The generalized overview section answers the what, the how is it used and the how does it

work questions about the Model 880, that is, the solutions this product can provide. This section is intended

to discuss the concepts of main functions and elements with only enough detail to make the

conceptualization clear. In addition, rudimentary specifics are given in a number of other areas as an

introduction or a primer for the next section. This is information you typically only need to look at once.

Experienced users (those familiar with deposition controllers) should at least thumb through this section to

take an inventory of what is available. The menu programming specifics and operational details section

provides detailed information about product programming. Experienced users (those familiar with

deposition controllers) may decide to start here. If some elements are unclear, check back to the previous

section. The table of contents and index are helpful in this pursuit. This section provides descriptions for the

programming of film parameters and process steps, descriptions of menu navigation, descriptions of

screens, descriptions of fixed front panel keys, descriptions of run modes, parameter details, memory

defaults, programming summaries, etc. The hardware setup section describes and illustrates connectors,

interconnections, peripherals, mechanical connections, and the Model 880 as a component in a larger

system. Detailed host communications are found in the following section x6. See section x7 for

Model 880 DEPOSITION CONTROLLER

SECTION 1.XX epage 4 of 275 ^

Microbalance theory and thickness reading calibration with its attendant density, z factor (a material

reference table of elements is included) and tooling determination. Each section builds on the previous

sections such that no new elements are used that haven't been defined.

.Some sage advice that is

seldom heeded.

SECTION 1.2 DESCRIPTION OF SYMBOLS

.note the following warning/safety/caution symbols [desc. of each].

Please familiarize yourself with the following warning/safety/caution symbols found within this manual

and their general meaning:

Note: Highlights an important fact or condition.

Caution: Warns of a condition that could cause damage to deposition controller, connected or

associated equipment. Also warns if some action taken could result with an undesireable and/or

unexpected outcome.

!: Warns of a condition that will likely cause damage to the deposition controller, connected or

associated equipment. Also warns of a possible unsafe situation for the user. Examples are static

sensitivities, maximum component ratings, broken fuses, etc.

: Warns of a condition that is hazardous to user, deposition controller, connected or associated

equipment.

Note

Caution

Static

Sensitive

Hazardous

Voltages

Present

You can lead a customer to water

ut you can't make them read the

manual.

If all else fails

read the manual.

Model 880 DEPOSITION CONTROLLER

SECTION 1.XX epage 5 of 275 ^

SECTION 1.3 TABLE OF CONTENTS

TITLE PAGE................................................................................................................................................ 1

WARRANTY ................................................................................................................................................ 2

INTRODUCTION [1.XX] ............................................................................................................................ 3

SECTION 1.0 ................................................................................................................................................ 3

Unpacking Instructions........................................................................................................................... 3

SECTION 1.1 ................................................................................................................................................ 3

Manual Description: Usage, Organization, Section Contents Summary ............................................... 3

SECTION 1.2 ................................................................................................................................................ 4

Description of Symbols Found in Manual .............................................................................................. 4

SECTION 1.3 TABLE OF CONTENTS...................................................................................................... 5

SECTION 1.4 .............................................................................................................................................. 11

STC-Spare Parts (included w/ Model 880)........................................................................................... 11

STC-Optional Parts .............................................................................................................................. 11

SECTION 1.5 .............................................................................................................................................. 11

STC-Optional Crystal Sensor Parts...................................................................................................... 11

SECTION 1.6 .............................................................................................................................................. 12

Contact Information ............................................................................................................................. 12

SECTION 1.7 .............................................................................................................................................. 13

Product Specifications.......................................................................................................................... 13

SECTION 1.8 ............................................................................................................................................. 14

Programmable Parameter Lists........................................................................................................... 14

Programmable Parameter Dependency Lists ..................................................................................... 17

SECTION 1.9 .............................................................................................................................................. 19

Sensor Specifications............................................................................................................................ 19

SIMPLE QUICK GENERALIZED OVERVIEW [2.XX] ..................................................................... 21

SECTION 2.0 .............................................................................................................................................. 21

For What Is The Model 880 Used? [The Problem, The Solution]........................................................ 21

SECTION 2.1 .............................................................................................................................................. 22

How Is It Used?.................................................................................................................................... 22

SECTION 2.2 .............................................................................................................................................. 26

How Does It Work? .............................................................................................................................. 26

Hardware Setup Discussion ................................................................................................................. 29

Sensor Head: Hardware Generalizations............................................................................................. 30

Power Supply Connection .................................................................................................................... 32

Strip Chart Recorder Connection......................................................................................................... 32

RS-232 Communications Connection ................................................................................................... 32

Grounding Stud .................................................................................................................................... 33

Input Card Options............................................................................................................................... 33

Installation/Removal Of Sensor Cards, Input Cards, Output Cards .................................................... 34

Pendant (hand controller) .................................................................................................................... 35

LCD Contrast/Bias ............................................................................................................................... 35

Graphical Display ................................................................................................................................ 35

Mounting .............................................................................................................................................. 35

System Hardware Connections............................................................................................................. 35

Programmable Hardware Setup Discussion ........................................................................................ 36

Select RunTime Mode: Sequencing/Non-Sequencing, Manual Mode, Test Mode............................................ 36

Memory Storage of Menu Parameters ............................................................................................................... 36

Films & Processes / Active, Non-Active ........................................................................................................... 36

Menu Parameter Dependencies.......................................................................................................................... 36

Tooling: Material Density & Z-Factor............................................................................................................... 37

Model 880 DEPOSITION CONTROLLER

SECTION 1.XX epage 6 of 275 ^

Power Related Menu Parameters ....................................................................................................................... 37

Power Related Menu Parameter Dependencies ................................................................................................. 38

Initial Programming Setups (menu parameters) .................................................................................. 40

Menu Parameter Values & Programming After Memory Purge........................................................................ 40

Menu Parameter Values & Programming After Factory Restored Memory ...................................................... 41

I/O Programming Introduction ............................................................................................................ 42

Boolean Logic Discussion ................................................................................................................................. 43

Simple I/O Program Examples .......................................................................................................................... 44

How To Develop I/O Programs............................................................................................................ 48

MENU PROGRAMMING AND OPERATION DETAILS [3.XX] ...................................................... 49

SECTION 3.0 .............................................................................................................................................. 49

LCD Touch Panel Overlay ................................................................................................................... 49

Front Panel Definitions ........................................................................................................................ 50

SECTION 3.1 .............................................................................................................................................. 56

Navigating Through Model 880 Menus................................................................................................ 56

Menu Tree............................................................................................................................................. 57

SECTION 3.2 .............................................................................................................................................. 58

RunTime Screen Description ................................................................................................................ 58

SECTION 3.3 .............................................................................................................................................. 60

Main Menu Description........................................................................................................................ 60

SECTION 3.4 .............................................................................................................................................. 63

Films And Processes............................................................................................................................. 63

SECTION 3.5 .............................................................................................................................................. 63

Film Edit/Review Mode ........................................................................................................................ 63

Film Parameter Checksum................................................................................................................................. 67

Film Parameter Lock Code ................................................................................................................................ 67

Film Parameter: Source Sensor Map Select....................................................................................................... 68

Review SS MAP................................................................................................................................................ 68

Selecting the Active Film in Non-Sequencing Mode......................................................................................... 69

Detailed Film Parameter Descriptions ................................................................................................ 71

Detailed Map Parameter Descriptions................................................................................................. 79

SECTION 3.6 ............................................................................................................................................. 83

Editing Processes................................................................................................................................. 83

Process Lock Code ............................................................................................................................................ 93

Factory Restoration vs. Purged Settings ............................................................................................................ 93

Changing Memory Settings ............................................................................................................................... 93

SECTION 3.7 .............................................................................................................................................. 93

Set Active Process................................................................................................................................. 93

SECTION 3.8 .............................................................................................................................................. 94

Non-Sequencing Differences ................................................................................................................ 94

SECTION 3.9 .............................................................................................................................................. 96

Software Controlled RunTime Screen Keys.......................................................................................... 96

L/Q key (Crystal Quality).................................................................................................................................. 96

SMPL key (Sample and Hold)........................................................................................................................... 96

SECTION 3.10 ............................................................................................................................................ 97

Manual Power Control......................................................................................................................... 97

Using Pendent.................................................................................................................................................... 97

Using LCD keys ................................................................................................................................................ 98

SECTION 3.11 ............................................................................................................................................ 99

Model 880 Shutter Delay...................................................................................................................... 99

SECTION 3.12 ............................................................................................................................................ 99

Deposition Source Control Loop Description ...................................................................................... 99

SECTION 3.13 .......................................................................................................................................... 101

Film Phases And Parameter Groups.................................................................................................. 101

SECTION 3.14 .......................................................................................................................................... 102

System Configuration ......................................................................................................................... 102

SECTION 3.15 .......................................................................................................................................... 103

Model 880 DEPOSITION CONTROLLER

SECTION 1.XX epage 7 of 275 ^

Detailed System Configuration Related Parameters .......................................................................... 103

SECTION 3.16 .......................................................................................................................................... 105

Communications Configuration Related Parameters......................................................................... 105

Detailed Communications Configuration Related Parameters......................................................................... 106

SECTION 3.17 .......................................................................................................................................... 108

Model 880 Crystal Failure Processing............................................................................................... 108

SECTION 3.18 .......................................................................................................................................... 112

Process Accounting ............................................................................................................................ 112

SECTION 3.19 .......................................................................................................................................... 114

OPTions/INFo .................................................................................................................................... 114

Checksum Validation ........................................................................................................................ 115

Checksums And Parameters After Purge............................................................................................116

SECTION 3.20 .......................................................................................................................................... 118

Memory Module Programming & Usage ........................................................................................... 118

Memory Module Data Transfer ....................................................................................................................... 120

Memory Module Placement............................................................................................................................. 121

SECTION 3.21 .......................................................................................................................................... 122

Programming Example....................................................................................................................... 122

Entering The TEST Mode................................................................................................................................ 122

SECTION 3.22 .......................................................................................................................................... 130

Product Programming Summary........................................................................................................ 130

ELECTRICAL CONNECTIONS AND DESCRIPTIONS [4.XX] ..................................................... 135

SECTION 4.0 ............................................................................................................................................ 135

Sensor Head Installation .................................................................................................................... 135

SECTION 4.1 ............................................................................................................................................ 138

Electrical Connections And Descriptions........................................................................................... 138

SECTION 4.2 ............................................................................................................................................ 138

Line Power ......................................................................................................................................... 138

SECTION 4.3 ............................................................................................................................................ 138

Rack Mounting.................................................................................................................................... 138

SECTION 4.4 ............................................................................................................................................ 138

Vacuum System Grounding ................................................................................................................ 138

SECTION 4.5 ............................................................................................................................................ 140

Sensor Connections ............................................................................................................................ 140

SECTION 4.6 ............................................................................................................................................ 140

Analog Control Voltage Connections................................................................................................. 140

Control Voltage Output Connection................................................................................................... 140

SECTION 4.7 ............................................................................................................................................ 141

Analog Recorder Output Connection ................................................................................................. 141

Analog Recorder Output Specifications ............................................................................................. 141

SECTION 4.8 ............................................................................................................................................ 143

I/O Interface ....................................................................................................................................... 143

SECTION 4.9 ............................................................................................................................................ 146

Relay Outputs (Factory I/O Program) ............................................................................................... 146

SECTION 4.10 .......................................................................................................................................... 147

Remote Inputs (Factory I/O Program) ............................................................................................... 147

SECTION 4.11 .......................................................................................................................................... 147

RS-232 Serial Communications Interface........................................................................................... 147

SECTION 4.12 .......................................................................................................................................... 148

Communications Options ................................................................................................................... 148

I/O PROGRAMMING [5.XX]................................................................................................................ 149

SECTION 5.1 ............................................................................................................................................ 149

I/O Programming Introduction .......................................................................................................... 149

SECTION 5.2 ............................................................................................................................................ 153

Model 880 DEPOSITION CONTROLLER

SECTION 1.XX epage 8 of 275 ^

Boolean Definitions ............................................................................................................................ 153

SECTION 5.3 ............................................................................................................................................ 154

States And Events ............................................................................................................................... 154

SECTION 5.4 ............................................................................................................................................ 159

Steady State vs. Edges ........................................................................................................................ 159

SECTION 5.5 ............................................................................................................................................ 159

Input Functions................................................................................................................................... 159

SECTION 5.6 ............................................................................................................................................ 160

Output Functions................................................................................................................................ 160

SECTION 5.7 ............................................................................................................................................ 160

Softnodes And Sync Events ................................................................................................................. 160

SECTION 5.8 ............................................................................................................................................ 161

Internal Operations ............................................................................................................................ 161

SECTION 5.9 ............................................................................................................................................ 162

Operate Menu..................................................................................................................................... 162

SECTION 5.10 .......................................................................................................................................... 162

Memory Menu..................................................................................................................................... 162

SECTION 5.11 .......................................................................................................................................... 163

Editing An I/O Program ..................................................................................................................... 163

I/O Programming Tree ....................................................................................................................... 165

SECTION 5.12 .......................................................................................................................................... 168

I/O Setup Edit Menu ........................................................................................................................... 168

SECTION 5.13 .......................................................................................................................................... 169

Edit/Change Menu.............................................................................................................................. 169

COMPUTER INTERFACING [6.XX] .................................................................................................. 191

SECTION 6.0 ............................................................................................................................................ 191

Host Port Interface ............................................................................................................................. 191

THEORY AND CALIBRATION [7.XX] .............................................................................................. 261

SECTION 7.0 MEASUREMENT THEORY.................................................................................................... 261

Equation 1 .......................................................................................................................................... 261

SECTION 7.1 CALIBRATION..................................................................................................................... 262

Thickness ............................................................................................................................................ 262

Density Determination....................................................................................................................... 262

Z-Factor Determination ..................................................................................................................... 262

Tooling Dtermination ......................................................................................................................... 262

Material Reference Table:.................................................................................................................. 264

Aluminum Through Indium............................................................................................................................. 264

Indium Intimonide Through Terium................................................................................................................ 265

Thallium Through Zirconium Oxide................................................................................................................ 266

MAINTENANCE/PROBLEM SOLUTIONS [8.XX]........................................................................... 267

SECTION 8.0 ............................................................................................................................................ 267

Warnings/Cautions ............................................................................................................................. 267

User Correctable System Problems.................................................................................................... 267

SECTION 8.1 REPLACING A SENSOR CRYSTAL ....................................................................................... 268

Cautions/Procedural Steps................................................................................................................. 268

SECTION 8.2 PERSISTENT CRYSTAL FAIL INDICATION ........................................................................ 268

Discussion .......................................................................................................................................... 268

Hardware Issues................................................................................................................................. 269

SECTION 8.3 FAQS................................................................................................................................270

SECTION 8.4 SYSTEM BATTERY AND MEMORY CONSIDERATIONS ..................................................... 270

Procedure to Change Battery ............................................................................................................. 270

GLOSSARY .............................................................................................................................................. 271

Model 880 DEPOSITION CONTROLLER

SECTION 1.XX epage 9 of 275 ^

INDEX ....................................................................................................................................................... 273

COPY PARAMETER LISTS.................................................................................................................. 274

FIGURES

Standard Sensors.................................................................................................................................. 20

Sequencing / Non-Sequencing Modes................................................................................................... 23

Process / Film / Map Relationships...................................................................................................... 25

Back Panel Connections (Overview) .................................................................................................... 29

Electrical Connections From Crystal Through Remote Oscillator (Overview) ................................... 30

Input Bd. Jumpers (Overview).............................................................................................................. 33

Installation/Removal Of Back Panel PCB Cards ................................................................................. 35

I/O Programming Notation .................................................................................................................. 44

I/O Programming Description.............................................................................................................. 44

I/O Programming: User Programmable Front Panel Keys/LEDs ....................................................... 45

Example I/O Programs......................................................................................................................... 45

I/O Programming: Modulo 100 Counter Addresses............................................................................. 47

Touch Panel Overlay............................................................................................................................ 49

Front Panel and Key Descriptions ....................................................................................................... 50

Typical RunTime Screen....................................................................................................................... 50

Status Key Screens................................................................................................................................ 51

Manual Mode Screens .......................................................................................................................... 52

Status Screen Selector Function ........................................................................................................... 54

Start Key Menu..................................................................................................................................... 54

Start (Key) Process Flowchart ............................................................................................................. 55

Menu Tree............................................................................................................................................. 57

RunTime Screen.................................................................................................................................... 58

Main Menu Screen................................................................................................................................ 60

Executive Menu .................................................................................................................................... 62

Films & Process Storage...................................................................................................................... 63

Review Film Menu................................................................................................................................ 64

Non-Sequencing Mode Screen.............................................................................................................. 69

Rate Sampling, Sample And Hold Operation ....................................................................................... 75

Main Process Review/Edit Screen ........................................................................................................ 83

Service Menu, Memory Configurations................................................................................................ 93

Setting the Active Process (Sequencing Mode)..................................................................................... 94

Setting The Active Film (Non-Sequencing Mode.................................................................................. 94

RunTime Screen (Non-Sequencing Mode)............................................................................................ 95

RunTime Screen: L/Q ........................................................................................................................... 96

RunTime Screen: Sample & Hold......................................................................................................... 96

Hand Controller/Pendent ..................................................................................................................... 97

Manual Power Control......................................................................................................................... 98

Typical Run Cycle............................................................................................................................... 101

System Configuration Screens ............................................................................................................ 102

Communications Menu Screen ........................................................................................................... 105

Process Accounting Screens............................................................................................................... 112

Options Info Screens........................................................................................................................... 114

Memory Module.................................................................................................................................. 118

RunTime Screen With Test Mode Enabled ......................................................................................... 122

Electrical Connections To Back Panel ............................................................................................... 135

Crystal Head Mounting ...................................................................................................................... 135

Rear Panel.......................................................................................................................................... 138

Recommended System Grounding ...................................................................................................... 139