Ulvac UTM-MS Series Bedienungsanleitung

SK00-2200-AI-145-00(263-13238W)

INSTRUCTION MANUAL

Turbo Molecular Pump

UTM-MS Series

Model

UTM300A-MS

UTM400A-MS

ULVAC KIKO, Inc.

Before using this product, be sure to read this operation manual.

Keep this manual with care to use at any time.

No Text

Introduction

Thank you for choosing the ULVAC KIKO Turbo Molecular Pump.

Please read the instruction manual carefully before using turbo molecular pump, and

save the instruction manual for future reference.

Copyrights and Disclaimers

This document is copyrighted by ULVAC KIKO, Inc. Please refrain from reproducing or copying

part or all of this document without permission from ULVAC KIKO.

In an effort to improve the product, this document may be revised in the future without notice.

Every effort has been made to prepare an accurate and complete manual, but if an error or

omission should be discovered, revisions might not be possible immediately.

ULVAC KIKO does not take responsibility for any effects that may result from the use of this

manual.

Introduction

Precautions for Safe Operation

The instruction manual's nomenclature for warnings and precautions complies

with the following safety warning symbols.

Indicates a potentially hazardous situation which, if not avoided, could

result in serious injury or possibly death.

Indicates a potentially hazardous situation which, if not avoided, may

result in minor to moderate injury or equipment damage.

Emphasizes additional information that is provided to ensure the proper

use of this product.

Turbo molecular pump repair and/or controller repair can be very hazardous.

Only trained technicians who are authorized by ULVAC KIKO may do service of products.

Neither overhaul nor modify the pump proper and controller without admission.

Doing so would impair safety of the pump proper, or cause injury by electrical shock.

Decisions on system compatibility should be made by the system designer or the person

deciding the specifications after conducting tests as necessary. The responsibility for

guaranteeing the expected performance and safety of the system lies with the person who

decides system compatibility.

WARNING

CAUTION

NOTICE

iii

Introduction

Do not operate the turbo molecular pump until safety is confirmed.

・The rotor assembly of the turbo molecular pump rotates at high speed. Large rapid shutdown

torque should be generated when abnormality occurs in the pump by any chance. Incidental

accident will cause the pump to drop out and to make a catastrophe if the pump is fixed by

insufficient method.

・The method to fix the pump is different depending on the pump model and the size of inlet

flange of the pump.

・Host equipment should be fixed to the floor so as not to move. Host equipment should be

designed to have enough margins in strength, in preparation for an emergency accident.

Ensure that no oil mist or hazardous substances are present in process line as safe ducting

procedure when turbo molecular pump is installed to host equipment.

Do not remove or do maintenance the turbo molecular pump, before safety has been

confirmed.

・Improper turbo molecular pump use may be hazardous to operator's health in applications not

recommended or approved by ULVAC KIKO. In the event removal of the turbo molecular pump

from an application is required, full protective measures including purging of the turbo

molecular pump with an inert gas and/or apparel are recommended when the turbo molecular

pump has been used in applications that required the use of corrosive, reactive, stimulative, or

toxic gasses.

・Please take an adequate safety precaution based on the result of risk assessment of

explosion, fire, corrosion, and toxicity, etc. that depends on process gasses.

・Please execute the maintenance task of the turbo molecular pump after shutting power off by

following proper procedure and confirming that the rotor has stopped completely.

WARNING

Introduction

If the equipment is used in a manner not specified by the manufacturer, the protection provided

by the equipment may be impaired.

After having operated the turbo molecular pump for evacuation of corrosive gas, keep the

pump internal as vacuumed even after shutdown. Inflow of water content in the air to the pump

internal would cause rapid corrosion trouble of the pump internals. The pump corrosion may

result in damaging the vacuum vessel interior and other units, causing pressure fluctuation by

stopping the pump and dispersal of parts.

Avoid to install the pump at the following places.

(1)Place where the pump is inevitably exposed to significant vibration and impact.

(2)Unstable place.

(3)Place where the pump is inevitably exposed to magnetic field and radioactive ray.

The pump proper is a precision machine. Be careful not to apply abnormal vibration, shock/

impact to it during transportation. This pump is not connected to ground. Please provide PE

(Protective earth) connection to the chassis of pump in final application. This pump is not an

explosion-proof product. This pump is not intended to be used in a potentially explosive

atmosphere.

The pump surface may get hot, there are risk of burn.

Prevent the installation, operation, maintenance, and service personnel from contacting the

pump surface easily in all tasks that they are intended to perform.

WARNING

CAUTION

Introduction

When pump is removed from a equipment, drain the water from water pipe. If remained water

leak from water pipe, pump body will be corroded.

After the water drained, shut water pipe by the cap which is attached at shipment.

The following "CAUTIONS" are to prevent operation anomalies.

○Operating Precautions

(1)Do not interrupt the electrical power operating the turbo molecular pump while the turbo

molecular pump is in operation.

(2)Do not connect or disconnect the turbo molecular pump control cable during the time the

controller is "ON".

(3)Protect the pump from any and all types of impact during operation.

(4)Do not operate any equipment (i.e. drill motor, welding machine, etc.) that produces

electro-magnetic pollution, noise, etc., in the immediate proximity of an operating turbo

molecular pumping system (pump, controller, cables, etc.).

(5)This turbo molecular pump is not approved for use in applications exhausting process gas

containing gallium (Ga, e.g., triethyl gallium, etc.).

(6)Plasmas may cause the pump rotor to discharge electrically thus damaging the electrical

components.

(7)Be sure to use the chemical type pumps to exhaust of gas which contain chlorine, or

fluorine.

(8)When using the variable speed function to change the pump rotation rate, use a rotation

rate that does not cause resonance with other devices installed at the site.

(9)Be careful to prevent a rapid pressure rise or air rush during operation.

CAUTION

Introduction

○Explanation of Label

(1) HOT SURFACE Label

Risk of burn. Keep off from touching surface of the

pump as it is heated.

(2) INSTALL PUMP Label

Incidental accident will cause the pump to drop out

and to make a catastrophe if the pump is fixed by

insufficient method.

Fix the pump to host equipment according to

Section 5.1.2 "Installation of the Pump".

(3) SECURITY Seal

This label certificates that the product was made

or maintenanced by ULVAC KIKO or by ULVAC KIKO

authorized facility.

In case "this label is removed" or "there is a mark

showing once this label has been removed",

ULVAC KIKO warranty shall not be applied to the

product.

vii

Introduction

○Location of Label

viii

Introduction

○Installation Precautions

Do not apply abnormal loads to the turbo molecular pump control cable plug and/or connector.

Abnormal loads may cause cable disconnection.

(1) Do not pull the turbo molecular pump control cable by the connector or plug.

(2) Do not allow any electrical cables to be in tension or to have very tight bending radii.

(3) Unbend the turbo molecular pump cable not to make any kink during connection.

○ Part Replacement

The lifetime of parts are specified as below.

The request for changing parts exceeding the estimated lifetime should be made to

ULVAC KIKO or an approved service company in order for safety and adequate performance

of the pump and controller.

Table 1 Estimated Part Life

Part list Estimated part life

Cooling fan 5 years

240mm

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