Varian HS-32 Bedienungsanleitung

HS-32

Diffusion Pump

Instruction Manual

Manual No. 6999-01-132

Revision G

May 2000

Varian Vacuum Technologies

121 Hartwell Avenue

Lexington, MA 02421-3133

(781) 861-7200

(800) 8-VARIAN

America

Varian Vacuum Technologies

121 Hartwell Avenue

Lexington, MA 02421,

USA

Tel: (781) 861 7200

Fax: (781) 860 5437

Toll Free: 1 (800) 882 7426

Argentina

Varian Argentina Ltd.

Sucursal Argentina

Av. Ricardo Balbin 2316

1428 Buenos Aires

Argentina

Tel: (54) 1 783 5306

Fax: (54) 1 786 5172

Australia

Varian Australia Pty., Ltd.

6/81 Frenchs Forest Road

Frenchs Forest, NSW 2086

Australia

Tel: (61) 2 9975 8805

Fax: (61) 2 9452 2600

Brazil

Varian Industria e Comercio Ltda.

Avenida Dr. Cardoso de Mello 1644

Vila Olimpia

Sao Paulo 04548 005

Brazil

Tel: (55) 11 820 0444

Fax: (55) 11 820 9350

Canada

Varian Canada

6705 Millcreek Drive, Unit 5

Mississauga, Ontario L5N 5R9

Canada

Tel: (905) 819 8188

Fax: (905) 819 8348

China

Varian China Ltd.

Room 1201, Jinyu Mansion

No. 129A Xuanwumen Xidajie

Xicheng District

Beijing 100031

P.R. China

Tel: (86) 10 6641 1530

Fax: (86) 10 6641 1534

Varian Shanghai

Service Station

716 Yishan Road Shanghai

P.R. China 200233

Tel: (86) 21 6483 5576

Fax: (86) 21 6485 9031

England

Varian Ltd.

28 Manor Road

Walton-On-Thames

Surrey KT 12 2QF

England

Tel: (44) 1932 89 8000

Fax: (44) 1932 22 8769

France

Varian s.a.

7 avenue des Tropiques

Z.A. de Courtaboeuf – B.P. 12

Les Ulis cedex (Orsay) 91941

France

Tel: (33) 1 69 86 38 38

Fax: (33) 1 69 28 23 08

Germany

Varian GmbH

Alsfelder Strasse 6

Postfach 11 14 35

64229 Darmstadt

Germany

Tel: (49) 6151 703 353

Fax: (49) 6151 703 302

Hong Kong

Varian Technologies Asia, Ltd.

Rm 2611 Concordia Plaza

New Mandarin Plaza

1 Science Museum Rd.,

Tsimshatsui East, Kowloon

Hong Kong

Tel: (852) 26206173

Fax: (852) 26206338

India

Varian India PVT LTD

1010 Compotent House

7, Nangal Raya Business Centre

New Delhi 110 046

India

Tel: (91) 11 5548444

Fax: (91) 11 5548445

Italy

Varian Vacuum Technologies

via Flli Varian 54

10040 Leini, (Torino)

Italy

Tel: (39) 011 997 9111

Fax: (39) 011 997 9350

Japan

Varian Vacuum Technologies

Sumitomo Shibaura

Building, 8th Floor

4-16-36 Shibaura

Minato-ku, Tokyo 108

Japan

Tel: (81) 3 5232 1253

Fax: (81) 3 5232 1263

Korea

Varian Technologies Korea, Ltd

Shinsa 2nd Bldg. 2F

966-5 Daechi Dong

Kangnam Gu, Seoul

Korea 135-280

Tel: (82) 2 3452 2452

Fax: (82) 2 3452 2451

Netherlands

Varian Vacuum Technologies

Rijksstraatweg 269 H,

3956 CP Leersum

The Netherlands

Tel: (31) 343 469910

Fax: (31) 343 469961

Mexico

Varian S.A.

Concepcion Beistegui No 109

Col Del Valle

C.P. 03100

Mexico, D.F.

Tel: (52) 5 523 9465

Fax: (52) 5 523 9472

Singapore

Varian Asia, Ltd.

1123 Serangoon Road

#03-02

Singapore 328207

Tel: (65) 296 9688

Fax: (65) 296 9733

Spain

Varian Iberica

Avda Pedro Diez 25

28019 Madrid

Spain

Tel: (34) 91 4727612

Fax: (34) 91 4725001

Russia

Varian Moscow

19A Khlebny per

121019 Moscow

Russia

Tel: (70) 95 9374280

Fax: (70) 95 9374281

Taiwan

Varian Technologies Asia Ltd.,

Taiwan Branch

18F-13 No.79, Hsin Tai Wu Road

Sec. 1, Hsi Chih

Taipei Hsien

Taiwan

Tel: (886) 2 2698 9555

Fax: (886) 2 2698 9678

Internet Users:

Visit us on the web at:

www.eVarian.com

Representatives in most countries

Sales and Service Offices

SAFE INCORPORATION OF VARIAN DIFFUSION PUMPS INTO VACUUM SYSTEMS IS THE

RESPONSIBILITY OF THE SYSTEMS DESIGNER. TAKE APPROPRIATE ACTION THROUGH

REDUNDANCY, AND/OR OTHER SAFEGUARDS TO PROTECT PERSONNEL AND PROPERTY

FROM THE HAZARDS DESCRIBED BELOW AND IN THE INSTALLATION, OPERATION, AND

MAINTENANCE INSTRUCTION MANUAL. SAFE OPERATION IS THE RESPONSIBILITY OF THE

USING ORGANIZATION AND ITS PERSONNEL. READ THE INSTRUCTION MANUAL AND

UNDERSTAND HOW TO AVOID HAZARDS PRIOR TO OPERATING THE DIFFUSION PUMP. ALL

PERSONS WHO WORK WITH OR ARE EXPOSED TO DIFFUSION PUMPS OR EQUIPMENT

WHICH UTILIZES SUCH PUMPS OR DIFFUSION PUMP FLUID MUST TAKE PRECAUTIONS TO

PROTECT THEMSELVES AGAINST POSSIBLE SERIOUS BODILY INJURY OR DEATH. DO NOT

BE CARELESS AROUND SUCH PRODUCTS.

THESE SHEETS AND THE INSTALLATION, OPERATION, AND MAINTENANCE INSTRUCTIONS

CAN HELP YOU TO OPERATE THIS PUMP SAFELY AND EFFICIENTLY. READ THEM. SPECIAL

OPERATING CONSIDERATIONS AND PRECAUTIONS WILL BE FOUND IN THE OPERATION

INSTRUCTIONS. UNINFORMED OR CARELESS OPERATION OF THIS PUMP CAN RESULT IN

POOR PERFORMANCE, DAMAGE TO THE PUMP OR OTHER PROPERTY, SERIOUS BODILY

INJURY, AND POSSIBLE DEATH.

USERS OF THIS EQUIPMENT SHOULD BE ALERT TO TWO LEVELS OF HAZARDS IDENTIFIED

BY THE FOLLOWING SYMBOLS:

Designers of systems which utilize diffusion pumps must design out hazards wherever possible; pro-

vide guards, safety features, and interlocks for hazards which cannot be designed out; warn with

respect to hazards which cannot be designed out and which remain after utilizing guards, safety fea-

tures, and interlocks;and lastly, provide procedures and instructions on proper use, servicing, etc., so

as to minimize risk.

WARNING

Warnings are used when failure to observe instructions or precautions

could result in injury or death to humans.

CAUTION

Cautions are used when failure to observe instructions could result in

significant damage to equipment and/or facilities.

viii

WARNING

High voltages (up to 480 V) can kill. Always break the primary circuit to

the power supply before starting to work on the heater and/or its wiring.

WARNING

Varian has no control over the types of gases passing through this

pump. These are entirely under the control of the process user and/or

the hardware systems integrator. Frequently, process gases are toxic,

flammable, corrosive, explosive, or otherwise reactive. Since these

gases can cause serious injury or death, it is very important to plumb

the exhaust of the pump to the facility’s hazardous gas exhaust system

which incorporates appropriate filters, scrubbers, etc., to insure that the

exhaust meets all air and water pollution control regulations.

WARNING

Diffusion pumps are typically cleaned with acetone, alcohol, or other

solvents.

When heated, sprayed or exposed to high temperature equipment,

these solvents become flammable and explosive, causing serious injury

or death. Do not use near a high-temperature source. Ventilate work-

ing area with a blower and use in large, well-ventilated room. When

heated or sprayed, solvents also becomes 4 to 5 times heavier than air

and will flow down, settling in tanks, pits, and low areas, thus displacing

air which can kill by asphyxiation. Use in a large, well-ventilated room.

Use of a self-contained breathing apparatus may be necessary.

Acetone, alcohol, and other solvents are irritants, narcotics, depres-

sants, and/or carcinogenics. Their inhalation and/or ingestion may pro-

duce serious effects. Prolonged or continued contact with the skin will

result in absorption through the skin and moderate toxicity. Always

ensure that cleaning operations are carried out in large, well-ventilated

rooms, and wear eyeshields, gloves, and protective clothing.

WARNING

Certain gases can become corrosive and toxic when trapped in oil.

Always wear protective gloves when handling dirty pump oil, drain it into

a closable container, and do not breathe the fumes of the oil. Always

use fully self-contained breathing apparatus.

WARNING

When lifting some Varian diffusion pumps, use power-assisted equip-

ment and trained moving/installation personnel to avoid dropping, slip-

ping, and/or overturning the pump and severely injuring personnel.

Check weight of equipment before lifting and do not stand under equip-

ment being moved.

CAUTION

Alcohol, acetone, and other solvents degrade O-ring materials reducing

their ability to hold a vacuum. Do not use acetone or other solvents on

O-rings. If necessary to clean O-rings, wipe with lint-free, clean cloth,

wash in detergent and water, or use a small amount of pump oil.

Note

Always dispose of used or dirty oil properly and in compliance with all

local, state, and federal environmental laws and regulations.

WARNING

If hazardous gas, vapors, chemicals, or combustible mixtures are

pumped, sufficient quantities may exist during operation.This pump may

contain decomposed and/or overheated pump oils or poisonous and/or

overheated pump oils or poisonous and/or corrosive process materials

which are highly toxic and also can be an asphyxiant. Proper operation

will not always ensure that all hazardous materials have been removed.

WARNING

Hot oils can cause serious burns. Wear protective gloves and long

sleeved, loose fitting, heat resistant garments when draining pump oil.

Installation

1-5

1-4 UNPACKING

Pumps are factory-packaged to permit prolonged storage in suitably protected areas without special

precautions.

a. Remove flange covers, blank plugs, protective plugs from water connections, etc. Be careful

not to scratch or otherwise damage or mar the sealing surface – usually an O-ring groove on

top of the large inlet flange.

b. Carefully remove the outer shipping container and save it for evidence if damaged. Notify

the carrier immediately.Visually inspect the pump for damage that may have occurred

during shipping. Discard any internal packing which may have been used to protect the

internal components.

c. For non-critical work, after making sure that there are no foreign materials inside the pump, it

may be charged with fluid and used without disassembly. Otherwise, it should be disassembled

and cleaned. In general, cleaning may be required if the expected vacuum level is to be below

the 10-6 Torr (.000133 Pa) range.

d. Check the internal jet assembly. It should be concentric and firmly seated on the bottom of

the pump.The jet assembly should not rotate because of an indexing pin at the bottom.

1-5 CLEANING A NEW PUMP

a. Read cold cap maintenance and installation data which will be found in Section III,

para.3-4, of this manual. Remove the cold cap in accordance with these instructions.

b. Disassemble the internal jet system from the body of the pump. See Figure 3-2 for a section

drawing of a typical jet assembly.

c. Remove fill and drain plugs and gaskets if supplied.

d. Thoroughly clean all components of the jet assembly and pump casing interior (but not

O-ring gaskets) with acetone followed by an alcohol rinse.

WARNING

When lifting some Varian diffusion pumps, use power-assisted equip-

ment and trained moving/installation personnel to avoid dropping, slip-

ping, and/or overturning the pump and severely injuring personnel.

Check weight of equipment before lifting and do not stand under equip-

ment being moved.

Installation

e. Remove all traces of the cleaning fluid by carefully drying with clean, dry, oil-free

compressed air.

f. For reassembly, reverse the above procedure.

g. Clean the flanges and O-ring grooves thoroughly with alcohol, using clean, lint-free rags.

1-6

WARNING

Diffusion pumps are typically cleaned with acetone, alcohol, or other

solvents.

When heated, sprayed or exposed to high temperature equipment,

these solvents become flammable and explosive, causing serious injury

or death. Do not use near a high-temperature source. Ventilate work-

ing area with a blower and use in large, well-ventilated room. When

heated or sprayed, solvents also become 4 to 5 times heavier than air