Contents
1. Safety precautions...............................................................1
DESCRIPTION OF WARNING SYMBOLS ..........................................................................1
ALIST OF SYMBOLS....................................................................................................2
WARNING AND CAUTION..............................................................................................3
2. Before operating the unit ....................................................4
PRECAUTIONS FOR INSTALLATION ................................................................................4
3. MAIN APPLICATIONS...........................................................5
APPLICATIONS............................................................................................................5
4. COMPONENTS AND FUNCTIONS.......................................6
MAIN UNIT .................................................................................................................6
BACK OF THE MAIN UNIT .............................................................................................7
5. INSTALLATION METHOD.....................................................8
REQUIRED EQUIPMENT /METHODS TO CONNECT CABLES AND TUBES ............................8
6. INSTALLING ELECTRODES ................................................9
LIST OF ELECTRODE RELATED ACCESSORIES.................................................................9
INTERNAL STRUCTURE AND OF THE CHAMBER AND PARTS NAMES..................................10
WHEN ONE-STAGE ELECTRODE IS USED......................................................................11
WHEN 2-STAGE ELECTRODE IS USED（INSTALLATION OF ELECTRODES）......................12
WHEN 2-STAGE ELECTRODE IS USED（RIE MODE）....................................................13
WHEN 2-STAGE ELECTRODE IS USED（DP MODE）.....................................................14
WHEN 3-STAGE ELECTRODE IS USED（INSTALLATION OF ELECTRODES）......................15
WHEN 3-STAGE ELECTRODE IS USED（RIE MODE）....................................................16
WHEN 3-STAGE ELECTRODE IS USED（DP MODE）.....................................................17
7. RUNNING PROCEDURE ....................................................18
OPERATION IN AUTO RUN..........................................................................................18
RUNNING PROCEDURE..............................................................................................19
TOUCH PANEL OPERATIONS ......................................................................................22
8. PRECAUTIONS FOR HANDLING ......................................30
WARNING AND CAUTION..................................................................................30
9. MAINTENANCE...................................................................31
DAILY INSPECTION ....................................................................................................31
PERIODIC INSPECTION...............................................................................................32
10. ALARMS AND CORRECTIVE ACTIONS..........................33
ALARMS AND CORRECTIVE ACTIONS ..........................................................................33
OPERATING PROCEDURES FOR AUTO TUNING ADJUSTING SWITCH...............................34
11. AFTER-SALE SERVICE AND WARRANTY......................35
REQUEST FOR REPAIR ..............................................................................................35
