Agilent Technologies VPI Series Bedienungsanleitung

INSTRUCTION MANUAL

Vacuum Products Division

Vacuum Pump

Isolation (VPI) Valve

Manual No. 699912117

Revision F

December 2012

Vacuum Pump Isolation (VPI) Valve

Agilent, Inc.

Vacuum Pump

Isolation (VPI) Valve

Dust-Off is a registered trademark of Falcon Safety Products, Inc.

Krytox is a registered trademarks of DuPont.

TriScroll is a trademark of Agilent, Inc.

Viton is a registered trademark of DuPont Dow Elastomers.

Apiezon L is a registered trademark of M & I Materials.

Vacuum Pump Isolation (VPI) Valve

Contents

Warranty ............................................................................................................................................ 9

Warranty Replacement and Adjustment ......................................................................................9

Hazard and Safety Information ..................................................................................................10

Contacting Agilent ...................................................................................................................... 11

Section 1. Introduction .....................................................................................................................13

1.1 Description ...........................................................................................................................13

1.2 Operating Principles.............................................................................................................. 13

1.3 Operation Sequence.............................................................................................................14

1.4 Technical Specifications .......................................................................................................16

Section 2. Installation .......................................................................................................................17

2.1 Electrical ..............................................................................................................................17

2.2 Installing VPI Valve to Agilent TriScroll™ Vacuum Pump.....................................................18

2.2.1 TriScroll 300, 320, 600, and 620..................................................................................18

2.2.2 Wiring........................................................................................................................... 18

2.2.3 TriScroll 300, 600 Inverter............................................................................................20

2.3 Mechanical............................................................................................................................22

Section 3. Service ............................................................................................................................23

3.1 Disassembly ......................................................................................................................... 23

3.2 Repair of Sub-Assemblies ....................................................................................................24

3.2.1 Piston/Diaphragm Sub-Assembly ................................................................................24

3.2.2 Nose Piece O-ring Replacement..................................................................................25

3.3 Reassembly .......................................................................................................................... 26

3.4 Troubleshooting ....................................................................................................................27

3.4.1 VPI Valve Cannot Be Pumped Down to High Vacuum................................................27

3.4.2 VPI Valve Leaks in Closed Position.............................................................................27

3.4.3 VPI Valve Closes Too Slowly.......................................................................................28

3.4.4 VPI Valve Opens Too Slowly or Not Completely ......................................................... 28

3.4.5 VPI Valve Fails to Open...............................................................................................28

3.4.6 Closing Causes Large Burst of Air into System...........................................................28

3.4.7 Solenoid Valve is Hot...................................................................................................29

3.5 Factory Repair ......................................................................................................................30

3.6 Replacement Parts ...............................................................................................................31

Vacuum Pump Isolation (VPI) Valve

This page intentionally left blank.

Vacuum Pump Isolation (VPI) Valve

Figures

1 Operating Sequence............................................................................................................14

2 Single Phase Motor Electrical Connections......................................................................... 19

3 Three Phase Motor Electrical Connections..........................................................................19

4 VPI Application in TriScroll 300, 600 Inverter Pumps.......................................................... 20

5 Installation Diagram............................................................................................................. 22

6 Assembly View and Replacement Parts.............................................................................. 23

7 Assembly View and Replacement Parts.............................................................................. 26

Vacuum Pump Isolation (VPI) Valve

Tables

1 Technical Specifications ..................................................................................................... 16

2 Operating Voltages............................................................................................................. 17

3 VPI Valve Installation Data ................................................................................................. 18

4 Replacement Parts/Kits ...................................................................................................... 31

Vacuum Pump Isolation (VPI) Valve

This page intentionally left blank.

Vacuum Pump Isolation (VPI) Valve

Warranty

Products manufactured by Seller are warranted against defects in materials and workmanship for twelve

(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty

claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the

purchase price of the Product. Items expendable in normal use are not covered by this warranty. All

warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole

opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of

Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of

the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired

portion of the original warranty period applicable to the repaired or replaced parts. After expiration of

the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,

and transportation.

Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or

damage caused by use of its Products other than in accordance with proper operating procedures.

Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of

law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any war-

ranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements made

by any person, including representatives of Seller, which are inconsistent or in conflict with the terms of

this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of

Seller.

Warranty Replacement and Adjustment

All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,

and must be received within the applicable warranty period by Seller or its authorized representative.

Such claims should include the Product serial number, the date of shipment, and a full description of

the circumstances giving rise to the claim. Before any Products are returned for repair and/or adjust-

ment, written authorization from Seller or its authorized representative for the return and instructions as

to how and where these Products should be returned must be obtained. Any Product returned to Seller

for examination shall be prepaid via the means of transportation indicated as acceptable by Seller.

Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on

any item that has been altered or has been returned by non-acceptable means of transportation. When

any Product is returned for examination and inspection, or for any other reason, Customer shall be

responsible for all damage resulting from improper packing or handling, and for loss in transit, notwith-

standing any defect or non-conformity in the Product. In all cases, Seller has the sole responsibility for

determining the cause and nature of failure, and Seller’s determination with regard thereto shall be

final.

If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will

be notified and the Product returned at its expense; in addition, a charge for testing and examination

may be made on Products so returned.

3/1/00

Vacuum Pump Isolation (VPI) Valve

Hazard and Safety Information

This manual uses the following standard safety protocols:

WARNING

The warning messages are for attracting the attention of the

operator to a particular procedure or practice which, if not

followed correctly, could lead to serious injury.

CAUTION

The caution messages are displayed before procedures, which

if not followed, could cause damage to the equipment.

NOTE

The notes contain important information.

Operators and service personnel must be aware of all hazards associated with this

equipment. They must know how to recognize hazardous and potentially hazardous

conditions, and know how to avoid them. The consequences of unskilled, improper, or

careless operation of the equipment can be serious. This product must only be operated and

maintained by trained personnel. Every operator or service person must read and

thoroughly understand operation/maintenance manuals and any additional information

provided by Agilent, Inc. All warning and cautions should be read carefully and strictly

observed. Consult local, state, and national agencies regarding specific requirements and

regulations. Address any safety, operation, and/or maintenance questions to your nearest

Agilent, Inc. office.

Vacuum Equipment and Cleanliness

Cleanliness is vital when servicing any vacuum equipment.

CAUTION

Do not use silicone oil or silicone grease.

Use powder-free butyl or polycarbonate gloves to prevent

skin oils from getting on vacuum surfaces.

Do not clean any aluminum parts with Alconox®. Alconox

is not compatible with aluminum and will cause damage.

NOTE

Normally, it is unnecessary to use vacuum grease.

However, if it must be used, avoid silicone types, and

use it sparingly. Apiezon®L grease is recommended

(Agilent Part Number 695400004).

Dieses Handbuch passt für folgende Modelle

Inhaltsverzeichnis

Andere Agilent Technologies Steuereinheit Handbücher

Agilent Technologies

Agilent Technologies E1476A Bedienungsanleitung

Agilent Technologies

Agilent Technologies 81618A Bedienungsanleitung

Agilent Technologies

Agilent Technologies 83487A Bedienungsanleitung

Agilent Technologies

Agilent Technologies CrossLab RapidFire 400 Bedienungsanleitung

Agilent Technologies

Agilent Technologies G1157A Bedienungsanleitung

Agilent Technologies

Agilent Technologies 83482A Bedienungsanleitung

Agilent Technologies

Agilent Technologies N5102A Bedienungsanleitung

Agilent Technologies

Agilent Technologies N5532A Handbuch

Agilent Technologies

Agilent Technologies NW16 Bedienungsanleitung

Agilent Technologies

Agilent Technologies 81650A Bedienungsanleitung

Agilent Technologies

Agilent Technologies 8498A Service-Handbuch

Agilent Technologies

Agilent Technologies 81570A Bedienungsanleitung

Agilent Technologies

Agilent Technologies TwisTorr Medium-TMP X3512-64016 Bedienungsanleitung

Agilent Technologies

Agilent Technologies E2261A Betriebsanleitung

Agilent Technologies

Agilent Technologies 81610A Bedienungsanleitung

Agilent Technologies

Agilent Technologies G1323B Bedienungsanleitung

Agilent Technologies

Agilent Technologies G4315A Bedienungsanleitung

Agilent Technologies

Agilent Technologies 8494A Service-Handbuch

Agilent Technologies

Agilent Technologies 355C Service-Handbuch

Agilent Technologies

Agilent Technologies 1100 Series Bedienungsanleitung

Agilent Technologies

Agilent Technologies LC Series Bedienungsanleitung

Agilent Technologies

Agilent Technologies HP E1355A Bedienungsanleitung

Agilent Technologies

Agilent Technologies 34946A Bedienungsanleitung

Agilent Technologies

Agilent Technologies 8495D Service-Handbuch

Beliebte Steuereinheit Handbücher anderer Marken

Festo

Festo Compact Performance CP-FB6-E Stücklistenhandbuch

Elo TouchSystems

Elo TouchSystems DMS-SA19P-EXTME Bedienungsanleitung

JS Automation

JS Automation MPC3034A Bedienungsanleitung

JAUDT

JAUDT SW GII 6406 Series Kurzanleitung

Spektrum

Spektrum Air Module System Bedienungsanleitung

BOC Edwards

BOC Edwards Q Series Bedienungsanleitung

KHADAS

KHADAS BT Magic Bedienungsanleitung

Etherma

Etherma eNEXHO-IL Bedienungsanleitung

PMFoundations

PMFoundations Attenuverter Bedienungsanleitung

GEA

GEA VARIVENT Bedienungsanleitung

Walther Systemtechnik

Walther Systemtechnik VMS-05 Bedienungsanleitung

Altronix

Altronix LINQ8PD Montageanleitung

Eaton

Eaton Powerware Series Bedienungsanleitung

WAGO

WAGO 750-407/040-000 Bedienungsanleitung

Sony

Sony CCU-590 Bedienungsanleitung

Graco

Graco 25D614 Bedienungsanleitung

Task Force Tips

Task Force Tips YE-RF-900 Programmierhandbuch

Shini

Shini SPV-U Series Bedienungsanleitung