Agilent Technologies Eyesys Mini-B/A Bedienungsanleitung

INSTRUCTION MANUAL

vacuum technologies

Eyesys Mini-B/A

Gauge Controller

Manual No. 699908205

Revision H

November 2002

NOTICE: This document contains references to Varian.

Please note that Varian, Inc. is now part of Agilent

Technologies. For more information, go to

www.agilent.com/chem.

Eyesys Mini-B/A Gauge Controller

Varian Vacuum Technologies

Eyesys Mini-B/A Gauge Controller

iii

Preface

Warranty

Products manufactured by Seller are warranted against defects in materials and workmanship for twelve

(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty

claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the

purchase price of the Product. Items expendable in normal use are not covered by this warranty. All

warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole

opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of

Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of

the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired

portion of the original warranty period applicable to the repaired or replaced parts. After expiration of

the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,

and transportation.

Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or

damage caused by use of its Products other than in accordance with proper operating procedures.

Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of

law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any war-

ranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements made

by any person, including representatives of Seller, which are inconsistent or in conflict with the terms of

this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of

Seller.

Warranty Replacement and Adjustment

All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,

and must be received within the applicable warranty period by Seller or its authorized representative.

Such claims should include the Product serial number, the date of shipment, and a full description of

the circumstances giving rise to the claim. Before any Products are returned for repair and/or adjust-

ment, written authorization from Seller or its authorized representative for the return and instructions as

to how and where these Products should be returned must be obtained. Any Product returned to Seller

for examination shall be prepaid via the means of transportation indicated as acceptable by Seller.

Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on

any item that has been altered or has been returned by non-acceptable means of transportation. When

any Product is returned for examination and inspection, or for any other reason, Customer shall be

responsible for all damage resulting from improper packing or handling, and for loss in transit, notwith-

standing any defect or non-conformity in the Product. In all cases, Seller has the sole responsibility for

determining the cause and nature of failure, and Seller’s determination with regard thereto shall be

final.

If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will

be notified and the Product returned at its expense; in addition, a charge for testing and examination

may be made on Products so returned.

3/1/00

Eyesys Mini-B/A Gauge Controller

Hazard and Safety Information

This manual uses the following standard safety protocols:

WARNING The warning messages are for attracting the attention of the

operator to a particular procedure or practice which, if not

followed correctly, could lead to serious injury.

CAUTION The caution messages are displayed before procedures, which

if not followed, could cause damage to the equipment.

NOTE The notes contain important information.

Operators and service personnel must be aware of all hazards associated with this

equipment. They must know how to recognize hazardous and potentially hazardous

conditions, and know how to avoid them. The consequences of unskilled, improper, or

careless operation of the equipment can be serious. This product must only be operated and

maintained by trained personnel. Every operator or service person must read and

thoroughly understand operation/maintenance manuals and any additional information

provided by Varian Vacuum Technologies. All warning and cautions should be read

carefully and strictly observed. Consult local, state, and national agencies regarding specific

requirements and regulations. Address any safety, operation, and/or maintenance questions

to your nearest Varian Vacuum Technologies office.

Eyesys Mini-B/A Gauge Controller

EMC Warnings

EN 55022 Class A Warning

This is a Class A product. In a domestic environment this product may cause radio

interference in which case the user may be required to take adequate measures.

FCC

This device complies with Part 15 of the FCC rules. Operation is subject to the following

two conditions: (1) This device may not cause harmful interference, and (2) this device must

accept any interference received, including interference that may cause undesirable

operation.

NOTE The equipment has been tested and found to comply with the

limits for a Class A digital device, pursuant to Part 15 of the FCC

rules. These limits are designed to provide reasonable

protection against harmful interference when the equipment is

operated in a commercial environment. This equipment

generated, uses, and can radiate radio frequency energy and, if

not installed and used in accordance with the instruction

manual, may cause harmful interference to radio

communications. Operation of this equipment in a residential

area is also likely to cause harmful radio communications

interference in which case the user will be required to correct

the interference at his own expense.

Installation Requirements

To maintain compliance with both the FCC Part 15 rules and the European Union’s EMI

directives, the user must use a shielded cable constructed of a braided shield and metal or

metalized plastic backshells directly connected to the cable shield at the 15 pos D-Sub

connector of the Eyesys Mini-BA. The shield must be connected to ground at the user’s

equipment. Failure to install the equipment in this way may result in the unit no longer

meeting the requirements for radiated emissions and susceptibility.

Eyesys Mini-B/A Gauge Controller

Use with Combustibles and Mixtures

WARNING As with all ionization gauges, this device is not intrinsically

safe. Exercise extreme care when using this vacuum gauge

while pumping or backfilling a system or in any other system

condition which contains combustible gases or mixtures. The

filament, the end of a hot filament ion gauge and the high

voltage discharge of a cold cathode gauge can be ignition

sources.

When such a gas or mixture is present, do not turn on any such

vacuum gauge.

Failure to follow this instruction could result in serious injury to

personnel and damage to equipment.

Vacuum Equipment and Cleanliness

Cleanliness is vital when servicing any vacuum equipment.

CAUTION Do not use silicone oil or silicone grease.

Use powder-free butyl or polycarbonate gloves to prevent

skin oils from getting on vacuum surfaces.

Do not clean any aluminum parts with Alconox®. Alconox

is not compatible with aluminum and will cause damage.

NOTE Normally, it is unnecessary to use vacuum grease.

However, if it must be used, do not use silicone types, and

use it sparingly. Apiezon®L grease is recommended

(Varian Part Number 695400004).

Eyesys Mini-B/A Gauge Controller

vii

Contacting Varian Vacuum Technologies

In the United States, you can contact Varian Vacuum Technologies Customer Service at

1-800-8VARIAN.

Internet users:

❑Send email to Customer Service & Technical Support at

vpl.customer.support@varianinc.com

❑Visit our web site at www.varianinc.com/vacuum

❑Order on line at www.evarian.com

See the back cover of this manual for a listing of our sales and service offices.

Varian Vacuum Technologies

121 Hartwell Avenue

Lexington, MA, 02421-3133 USA

declare under our sole responsibility that the product,

erklären, in alleniniger Verantwortung, daß dieses Produkt,

déclarons sous notre seule responsabilité que le produit,

declaramos, bajo nuestra sola responsabilidad, que el producto,

verklaren onder onze verantwoordelijkheid, dat het product,

dichiariamo sotto nostra unica responsabilità, che il prodotto,

Declaration of Conformity

Konformitätserklärung

Déclaration de Conformité

Declaración de Conformidad

Verklaring de Overeenstemming

Dichiarazione di Conformità

We/Wir/Nous/Nosotros/Wij/Noi: Varian, Inc.

to which this declaration relates is in conformity with the following standard(s) or other normative documents.

auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.

auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).

al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).

waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.

a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.

Frederick C. Campbell

Operations Manager

Varian Vacuum Technologies

Lexington, Massachusetts, USA

October 2002

Eyesys Mini-B/A Gauge Controller

EN 55011 – 1991 . . . . . . . . . . . . . . . . . Group 1 Class A ISM emission requirements

EN 50082-2 – 1995 . . . . . . . . . . . . . . . EMC heavy industrial generic immunity standard

EN 61010-1 – 1993 . . . . . . . . . . . . . . . Safety requirements for electrical equipment for measurement, control, and

laboratory use incorporating Amendments Nos 1 and 2.

ara

on o

orm

ity

Eyesys Mini-B/A Gauge Controller

Table of Contents

Preface ............................................................................................................................................. iii

Warranty .......................................................................................................................................iii

Warranty Replacement and Adjustment.......................................................................................iii

Hazard and Safety Information.....................................................................................................iv

EMC Warnings.............................................................................................................................. v

EN 55022 Class A Warning .................................................................................................... v

FCC......................................................................................................................................... v

Installation Requirements ............................................................................................................. v

Use with Combustibles and Mixtures......................................................................................vi

Vacuum Equipment and Cleanliness......................................................................................vi

Declaration of Conformity............................................................................................................. viii

Eyesys Mini-B/A Gauge Controller ................................................................................................. 1

Description....................................................................................................................................1

Specifications................................................................................................................................1

Options .........................................................................................................................................2

Installation.....................................................................................................................................2

Electrical..................................................................................................................................2

Mounting ......................................................................................................................................4

Mini-BA Tube Replacement Procedure...................................................................................4

Dimensional Diagram..............................................................................................................6

Display ......................................................................................................................................... 7

Digital Display Option..............................................................................................................7

Front Panel Controls...............................................................................................................7

Emission ON/OFF Button........................................................................................................7

System Reset..........................................................................................................................8

Emission High/Low Switch......................................................................................................8

Degas ON/OFF Button............................................................................................................8

Setpoint 1 and Setpoint 2 Switches ........................................................................................9

Remote Control Lines ................................................................................................................ 10

Inputs ....................................................................................................................................10

Outputs..................................................................................................................................10

Error Conditions .........................................................................................................................11

Voltage Output ...........................................................................................................................12

Gas Correction ...........................................................................................................................13

Gas Correction Factor Table.................................................................................................13

Eyesys Mini-B/A Gauge Controller

Appendix A. Serial Communications Option .............................................................................. 17

Communication Setup.................................................................................................................17

Switching from Local to Remote................................................................................................. 17

Switching from Remote to Local................................................................................................. 17

Local/Remote Status................................................................................................................... 17

Remote Reset ............................................................................................................................ 18

Command/Response Format...................................................................................................... 18

Command Set............................................................................................................................. 18

Error Messages........................................................................................................................... 20

Recommended Cabling .............................................................................................................. 21

Address Selection.................................................................................................................22

Request for Return Health and Safety Certification.................................................................... 23

Returned Materials Report............................................................................................................. 25

Inhaltsverzeichnis

Andere Agilent Technologies Controller Handbücher

Agilent Technologies

Agilent Technologies 4UHV Bedienungsanleitung

Agilent Technologies

Agilent Technologies 6850 GCs Bedienungsanleitung

Agilent Technologies

Agilent Technologies ETC 60 Bedienungsanleitung

Agilent Technologies

Agilent Technologies 969-9871 Bedienungsanleitung

Agilent Technologies

Agilent Technologies 929-0022 Bedienungsanleitung

Agilent Technologies

Agilent Technologies M9405A Handbuch

Agilent Technologies

Agilent Technologies TwisTorr Medium-TMP X3501-64016 Bedienungsanleitung

Agilent Technologies

Agilent Technologies PCG-750 Bedienungsanleitung

Agilent Technologies

Agilent Technologies 8169A Bedienungsanleitung

Agilent Technologies

Agilent Technologies 11896A Handbuch

Agilent Technologies

Agilent Technologies Turbo-V 550 Bedienungsanleitung

Agilent Technologies

Agilent Technologies TwisTorr 74 FS PCB 24 Bedienungsanleitung

Agilent Technologies

Agilent Technologies Multiple Channel Controller 85330A Service-Handbuch

Agilent Technologies

Agilent Technologies AGC-100 Bedienungsanleitung

Agilent Technologies

Agilent Technologies Turbo-V 2300 TwisTorr Bedienungsanleitung

Agilent Technologies

Agilent Technologies 78581B Montage- und Wartungsanleitung

Agilent Technologies

Agilent Technologies Turbo-V 750/850-AG Bedienungsanleitung

Agilent Technologies

Agilent Technologies G2743A Bedienungsanleitung

Agilent Technologies

Agilent Technologies TwisTorr 305 FS Series Bedienungsanleitung

Agilent Technologies

Agilent Technologies 929-0196 Bedienungsanleitung

Agilent Technologies

Agilent Technologies Turbo-V 2000HT Bedienungsanleitung

Agilent Technologies

Agilent Technologies Turbo-V 1000HT Bedienungsanleitung

Agilent Technologies

Agilent Technologies TwisTorr Medium-TMP Rack Bedienungsanleitung

Agilent Technologies

Agilent Technologies TwisTorr 84 FS PCB Bedienungsanleitung

Beliebte Controller Handbücher anderer Marken

Digiplex

Digiplex DGP-848 Betriebsanleitung

YASKAWA

YASKAWA SGM series Bedienungsanleitung

Sinope

Sinope Calypso RM3500ZB Bedienungsanleitung

Isimet

Isimet DLA Series Style 2 Installationshandbuch

LSIS

LSIS sv-ip5a Bedienungsanleitung

Rockwell Automation

Rockwell Automation 1769-L31 Bedienungsanleitung

Airflow

Airflow Uno hab Bedienungsanleitung

ABB

ABB ACS580-01 drives Bedienungsanleitung

Panasonic

Panasonic GM1 Series Bedienungsanleitung

Emerson

Emerson SW93 Bedienungsanleitung

AutoAqua

AutoAqua Smart ATO micro SATO-120P Bedienungsanleitung

Panasonic

Panasonic FP? Positioning Unit RTEX Bedienungsanleitung

Samson

Samson Type 5824 Service-Handbuch

Alpha IP

Alpha IP MIOB 21001 Bedienungsanleitung

Siemens

Siemens OpenAir GMA 1 Series Bedienungsanleitung

Surecom

Surecom SR-629 Bedienungsanleitung

Fishman

Fishman TriplePlay Bedienungsanleitung

Regulus

Regulus SRS1 T Bedienungsanleitung