Dektak XT Bedienungsanleitung

DektakXTStylusProfilometerUserInstructions(MMRC)

GLAs:EmilyWarren(ewarren@caltech.edu)andHeatherAudesirk(haudesir@caltech.edu)

DocumentUpdated:4/16/2012

ThesebasicinstructionsareforgeneraluseoftheDektakXTprofilometer.Thefulluser

guidecanbefoundonthedesktopofthecontrolcomputer.

Howthesystemworks:

TheDektakXTsystemtakesmeasurementselectromechanicallybymovinga

diamondtippedstylusoverthesamplesurfaceaccordingtoauserprogrammedscan

length,speed,andstylusforce.ThestylusislinkedtoaLinearVariableDifferential

Transformer(LDVT),whichproducesandprocesseselectricalsignalsthatcorrespondto

surfacevariationsofthesample.

Oursystemisonlyconfiguredin2Dmode,whichmeans:

ManualXYtranslation:101.6x101.6mm(4x4inches)ofXYtranslation,

manualleveling

manualthetarotation

Maximumsamplethickness:50mm(1.9inches)thick

Maximumscanlength:55mm(2.16inches)

StylusTipDiameter:2microns

Whenyouarrive,theinstrumentshouldbeoff,andthecovertotheisolationchambershouldbe

closed.

Thebottomofyoursamplemustbeclean(noHgorGa/Incontaminatedsamplesallowed!)

StartUp:

1.Turnonpowersupply(Blackboxonright)

2.Press(I)buttononwhitepowercontrolbox

3.StartVision64Software.Thefollowingshouldhappen:

Thetowerassemblywillmovetoitsupperlimit.Thesystemstopswiththestylus

intheTowerUpposition.

Thescanstageinitializes.

TheVision64Welcomescreenappears,followedbytheVision64“Instrument”

tab,whichincludestheDektakXTLiveVideoDisplay

4.Afterthesysteminitializes,itissafetoloadyoursampleontothestage(Brukerrecommends

lettingthesystemwarmupfor15minutes,butwehaven’tseenthatitmakesadifferencein

measurementquality).

*Putonglovesbeforetouchinganythinginsideofthelid*

5.Checkthattheflatglassblockisfreeofdust(thisflatsurfaceiswhatallowsustomeasure

accuratelyoverlongerdistances.Itshouldbekeptcleanatalltimes!)Ifyouseeanydust,

pleaseblowitoffwithcompressedairorN2.

Loadingyoursample:

1. Inthe“LiveVideo”Window,hit“UnloadSample”thestageshouldmovetowardyou(if

not,itwasalreadyinunload).

2. Youcannowpositionyoursampleonthechuck(vacuumcapabilitiesarecurrentlynot

installed,sojustcenteritcarefully)

3. Inthe“LiveVideo”Window,hit“LoadSample”

Note:Duringascan,themachinewillpullthestylustowardsthebackofthemachine,soyou

wanttomoveyoursamplesothatyouareatthefrontedgeofyourdesiredscanarea.

Adjustingsampleposition:

1.Topositionasampleusingthemanualsamplepositioningstagecontrols:

Ensurethestylusisnottouchingthesamplesurface.Ifitis,clicktheTowerUp

buttononthetoolbar.

PositionthescanstartsitebyusingtheXYpositioninglevers.

•PulltheleverbelowthefrontoftheplatformforcoarseXmovement.Pushthe

leverbackuptosecurecoarseposition

•PulltheleverbelowtheleftsideoftheplatformforcoarseYmovement.

Pushtheleverbackuptosecurecoarseposition

•Turntherespectiveknobstofinelypositionthesample.

2.Hit“TowerDown”tolowerthestylus.Thestyluswillhitthesample,andthenretractto~1mm

abovethesurface.Besurenottobumptheinstrumentduringthisprocess.

Calibration:

1.Ifdesired,youcanusethecalibrationstandards(inDektakXtdrawerorbyoldprofilometer)to

calibratetheinstrumentpriortousetocheckthatthesystemisworkingproperly.Todoso,

followtheinstructionsaboveforloadingandrunningascan,andensurethatthemeasurements

correspondtothecalibrationstandardspecs.Ifthestandardsareoffsignificantly,contactthe

GLA.

SoftwareScanParameters:

The“MeasurementSetup”windowallowsyoutocontrolscanparameters.Seteachofthe

following:

1.ScanType:StandardScan

2.Range:SetstheZrangeoftheinstrument.Setthistoarangeslightlylargerthanthefeature

youwanttomeasure.NoteifusingHillsandValleysmode,youcanonlymeasurehalfofthe

rangeabovethestartingpoint,andhalfbelow.

TheselectedscanrangeisscaledacrosstheLVDToutputofthestylushead

sensoranddigitized.Thegreatertheselectedscanrange,thelowerthevertical

resolutionofthemeasurement.The6.5umrangewillprovideaverticalbitresolutionof

approximately0.1nm.The65.5umrangehasaresolutionof1nm,the524umrangehasa

resolutionof8nm,andthe1mmrangehasaverticalresolutionof15nm.Sowhilethe

65.5um,524um,and1mmscanrangeswouldallworkfora10umstep,the65.5umisthe

best.

3.Profile:Willdeterminewhetheryoustartatbottom,middle,ortopofdesignatedrange.

Valleys:Provides90%ofthemeasurementrangebelowthezerohorizontalgrid

line.Thisoptionisusedprimarilyformeasuringetchdepths.

HillsandValleys:Provides50%ofthemeasurementrangeabovethezero

horizontalgridlineand50%below.Thisoptionisusedinmostapplications,

especiallyifthesurfacecharacteristicsofthesamplearenotwellknown,orifthesample

isoutoflevel.

Hills:Provides90%ofthemeasurementrangeabovethehorizontalgridline.This

optionisusedprimarilyformeasuringstepheights.

4.StylusTip:2microns(needtobesuretoresetthiseverytimeyoustarttheprogram!)

5.StylusForce:Standardrangeisbetween1and15mg.Defaultis3mg,butuselessforcefor

soft/fragilesamples.(*CanuseNLitemodeforverylowforce(downto0.03mg),butyouneed

toselectthebox...thislimitsyourscanlengthaswell)

6.Length:Ylengthofscan(canmeasureupto55000um(5.5cm))

7.Duration:Timeofscan(LengthandDurationdeterminetheresolutionofyourscan)

SavingData:

1.Underthe“AdvancedOptions”tab(in“MeasurementSetup),youcanselectwhetheryou

wantthesoftwaretoautosaveyourdata.

RunningaScan:

1.Youcanrunasinglescanormultiplescans.Torunasinglescan,clickthe“Single

Acquisition”button,andthescanwillbeginautomatically.

2.Torunmultipleidenticalscans,underthemeasurementsetupmenu,clickthe“Advanced

Options”tabandchangethenumberofmeasurements.Press“Measurement”tobegin

scanning.

ManualLeveling:

Note:Ifyounoticeasignificantslopetoyourdataduringthescan,youcanadjustthestagetilt

byturningthesilverknobinthefrontoftheinstrument.Turntheknobtocounteracttheslopein

yourdata.Youshouldnothavetoadjustthissignificantly(youcanfurtherlevelthedataduring

thedataanalysisstep).Ifsomethingseemswrong,contactaGLA.

3.Afterthescaniscomplete,the“DataAnalysis”windowshouldautomaticallyopen.Ifnot,you

canclickonit.Toexportyourdata,youcanrightclickontheplotandselect“ExportData”.

Tozero/leveldataoncomputer:

1.Under“DataAnalyzer”window,select“TermsRemoval(FOperator)”.Youshouldnowbe

abletorightclickonyourdatatosetyourreferencecursortozeroandlevelyourdata.

Analysis:

1.Selectthe“DataAnalysis”Screen(ifyou’renotalreadythere).Youshouldseeatraceof

yourdatainthe“DataAnalysis”box.

2.Rightclickinsidethe“AnalyticalResults”boxandselect“Append”.

Youcanthenselectwhateveritisthatyouwanttomeasure,andselectalocationforR

andMcursors.Whenyouhit“Calculate”youwillseeallofthosevalueslistedinthe

AnalyticalResultsbox.

UnloadingSample:

1.Hit“TowerUp”.

2.Hit“Unloadsample”.

3.Eitherloadanewsampleorpowerthesystemdown.

TopowerdowntheDektakXTsystem:

1.ClosetheVison64software.

2.PresstheblackOFFbuttonontheEMOBox.

3.Turnoffthepowerswitchontheblackpowersupplybox.

Calibrationnotes

4/16/2012:ELWmanuallyresetverticalcalibrationusing8.48kAstandard(measured704.105,

3x),Brukershouldbesendingthecorrectcalibrationprofilesometimesoon.

Forreference:BrukerCustomerService:8008739750.

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