Edwards STP-XA2703BV155 Bedienungsanleitung

MT-66E-A01-D

STC-U eTMS unit

for Turbomolecular Pump

Instruction Manual (D)

Applicable pump model

◼STP-XA2703BV155 / XA3203BV155

Read through the Safety Precautions and

each section of this Manual carefully before

using the STC-U.

Keep this Manual in a place where you can

quickly access it at any time.

Read this Manual thoroughly and keep it with

the Turbomolecular Pump Instruction Manual.

STP pump consists of the four-volumed Instruction Manuals.

Instruction Manual (A):

STP pump generic Instruction Manual

Instruction Manual (B):

STP pump specific information

Instruction Manual (C):

STP control unit Instruction Manual

Instruction Manual (D):

(This Instruction Manual)

STC-U eTMS unit for Turbomolecular Pump

2023.08

The description of this product consists of the four-volumed Instruction Manuals. Read through each

Instruction Manual before operation.

The separate volume contents of each description are as follows:

Instruction Manual (A)

STP pump generic Instruction Manual:

•Introduction

•Installation of the STP pump

•Installation of the STP control unit

•Operation

•Safety functions

•Maintenance and inspection

•Storage and disposal

•Service, Spares and accessories

Instruction Manual (B)

STP pump specific information:

•Technical data

•How to Secure the STP pump

•Temperature Management System (TMS)

Instruction Manual (C)

STP control unit Instruction Manual:

•Introduction

•Technical data

•Installation

•Operation

•Serial communication protocol

•STP-Link

•EdCentra (for SCU-1601 series only）

•Maintenance

•Storage, transportation and disposal

•Service, spares, and accessories

Instruction Manual (D)

STC-U eTMS unit for Turbomolecular Pump:

•Introduction

•Technical data

•Installation

•Operation

•Maintenance and inspection

•Storage, transportation and disposal

•Service, spares, and accessories

Keep the manuals in an easily accessible location.his page is intentionally blank.

 
STC-U eTMS unit 
 
MT-66E-A01-D 
Page i 
 
PAGE 
i
CONTENTS 
Section Title Page 
1INTRODUCTION 1 
1 Scope and definitions 1 
2 Electromagnetic compatibility 2 
3Limited warranty 2 
3.1 Item warranted 2 
3.2 Disclaimer 2 
4 Labels 3 
5 Label affixing positions 5 
6 General description 6 
7 Cable set 7 
2TECHNICAL DATA 9 
1 STC-U specifications 9 
3INSTALLATION 13 
1 Unpacking 13 
2 Front panel 13 
3 Rear panel 14 
4 Precautions before installation 15 
4.1 Operating environment 15 
4.2 Installation test 15 
4.3 Installation area 16 
5 Attaching the STC-U to a rack 17 
6 Cable connection 18 
6.1 TMS heater cable 19 
6.2 TMS sensor cable 19 
6.3 TMS valve extension cable 20 
6.4 STC-U remote branch cable 21 
6.5 Power cable 22 
6.6 Power extension cable 25 
6.7 Cable installation 26 
7 Connecting to semiconductor equipment 27 
7.1 Connecting to power 27 
7.2 Emergency off circuit (EMO circuit) 27 

STC-U eTMS unit

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Page ii

PAGE

CONTENTS(CONTINUED)

Section Title Page

4OPERATION 29

4.1 Before starting 29

4.1.1 Confirmation before starting 29

4.1.2 Confirmation of communication parameters

of STP control unit 29

4.2 Power ON 30

4.3 Power OFF 30

4.4 Abnormality/Error in the STC-U 31

4.5 Troubleshooting immediately after power failure occurs 32

5MAINTENABCE AND INSPECTION 35

5.1 Inspection of connection cable 35

5.2 Cleaning 35

5.3 Maintenance 35

6STORAGE, TRANSPORTATION AND DISPOSAL 37

6.1 Storage of the STC-U 37

6.2 Transporting for repair or overhaul 37

6.3 Disposal 38

7SERVICE, SPARES AND ACCESSORIES 39

7.1 Introduction 39

7.2 Service 39

7.3 Spares 39

7.4 Accessories 40

 
STC-U eTMS unit 
 
MT-66E-A01-D 
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PAGE 
iii 
ILLSUTRATIONS 
Figure Title Page 
Safety instruction label 3 
"Use designated cable" caution label 3 
Connection caution label 4 
High voltage device caution label 4 
"Use designated control unit" caution label 4 
Applicable pump model label 4 
Label affixing positions 5 
STC-U 6 
System configuration 7 
Dimensions (mm) 11 
STC-U front panel 13 
STC-U rear panel 14 
Installation of STC-U 16 
Example of securing the STC-U 17 
TMS heater cable 19 
Sensor cable 19 
TMS valve cable 20 
STC-U remote branch cable (for STP control unit) 21 
Power cable (without plug) 22 
Power cable (with plug) 23 
Connecting method of the power cable without plug 24 
Power extension cable (for STP control unit) 25 
Example of cable installation in metallic duct 26 
 
 
TABELS 
Table Title Page 
STC-U front panel functions 13 
STC-U rear panel connection 14 
Power cable 23 
Communication parameters 29 
"POWER" LED and error messages 31 
Error messages related to STC-U 33 
Error messages related to STC-U (continued) 34 
 
 

STC-U eTMS unit

MT-66E-A01-D

Page iv

PAGE

This page is intentionally blank.

STC-U eTMS unit

MT-66E-A01-D

Page 1

INTRODUCTION

1 INTRODUCTION

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions for the external

temperature control unit STC-U eTMS unit (abbreviated to "STC-U" throughout this manual) for the

Turbomolecular pump (STP). You must use the STC-U as specified in this manual otherwise the

protection provided by the equipment may be impaired.

Important safety information is highlighted as WARNING and CAUTION instructions; these

instructions are mandatory. The use of WARNINGS and CAUTIONS is defined below:

WARNING

Warnings are given where failure to observe the instruction could result in serious

injury or death to people.

CAUTION

Cautions are given where failure to observe the instruction could result minor personal injury in

damage to the equipment, associated equipment and/or process.

Note : Items you must follow during operation and maintenance.

Throughout this manual, page, figure and table numbers are sequential.

The units used throughout this manual conform to the SI international system of units of

measurement; US equivalent units of measurement are also given.

The following IEC warning labels/symbols appear on the STC-U Instruction Manual:

Warning - This symbol denotes general warning

Refer to accompanying documentation and instruction manual.

Warning - Hazardous Voltage

This symbol denotes the risk of electrical shock.

Protective earth (ground).

Connect the ground wire to this terminal to prevent electric shock.

STC-U eTMS unit

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INTRODUCTION

1.2 Electromagnetic compatibility

•This product is a Class A product according to EN61326-1 (Group 1, Class A product according

to EN55011) and intended to be used in an industrial electromagnetic environment defined by

EN61326-1

This means that this product does not generate and/or use intentionally radio-frequency energy,

in the form of electromagnetic radiation, inductive and/or capacitive coupling, for the treatment

of material or inspection / analysis purpose and that it is suitable for use in all establishments

other than domestic and those directly connected to a low voltage power supply network which

supplies buildings used for domestic purposes.

•This product may have potential difficulties in ensuring electromagnetic compatibility in other

than industrial environments, due to conducted as well as radiated disturbances.

•This product must not be used in residential areas because it may cause interference if used in

residential areas.

1.3 Limited warranty

This WARRANTY applies to the customer to whom Edwards has delivered this product.

The warranty period is stated in the Edwards Terms and Condition of Supply of Goods and Services,

or during the period specified in the agreement made by and between the customer and Edwards.

1.3.1 Item warranted

1. This warranty applies only to the product delivered from Edwards to the customer.

2. If any defect is found during this period, Edwards will, at its option, repair or recondition the

product free of charge. The costs for repair or replacement of the product after the warranty

period has passed will be at your own charge

1.3.2 Disclaimer

Edwards makes no warranty with respect to any damage occurred due to any of the following during

the warranty period:

1. Handling, operation or maintenance other than that specified herein.

2. Failure to follow any of the warnings or cautions enumerated in this manual.

3. Installation, operation or maintenance using parts which are not specified by Edwards.

4. Maintenance personnel other than those authorized by Edwards or Service office have

disassembled, reconditioned, or tampered the product.

5. Defect resulting from the not-specified use of the product.

STC-U eTMS unit

MT-66E-A01-D

Page 3

INTRODUCTION

6. When the product is used under special conditions without obtaining the written consent of

Edwards (strong magnetic field and the radiation are added to the product).

7. Defect resulting from the installation of the product (exclude the installation by authorized

personnel).

8. Deterioration in the external because of use (discoloration, scratches and so forth).

9. Product damage occurred during transport or other factors not attributable to Edwards.

10. Product breakage or damage due to natural disasters, fire or other external factors.

11. Deterioration in the basic performance due to the use of the product beyond limits of the use.

12. Any direct, incidental or consequential damage resulting from the use of the product.

13. Overhaul and replacement of maintenance parts.

1.4 Labels

The following labels are affixed or printed to the STC-U. Read the contents of the labels before

operation.

1. Safety instruction label

This label describes instructions before operating the STC-U

Figure 1 - Safety instruction label

2. "Use designated cable" caution label

This label describes precautions for operating the STC-U. When using STC-U, use the

designated cable.

Figure 2 - "Use designated cable" caution label

STC-U eTMS unit

MT-66E-A01-D

Page 4

INTRODUCTION

3. Connection caution label

This label describes lock of the connector.

The label instructs operators to prevent the connectors from being disconnected while the STP

pump is in operation.

Figure 3 - Connection caution label

4. High voltage device caution label

The STC-U is equipped with a high voltage device. This label warns operators to pay attention

to the high voltage device at the maintenance and inspection

Figure 4 - High voltage device caution label

5. "Use designated control unit" caution label

This label describes precautions for operating the STC-U. When using STC-U, use the

designated control unit. "Applicable pump model label" is affixed on the front panel of

designated control unit.

Figure 5 - "Use designated control unit" caution label

6. Applicable pump model label

This label describes an applicable pump model to STC-U. Use this model of STP pump when

using STC-U. (xxxxxxxxxxxx: is the model name of the pump)

Figure 6 - Applicable pump model label

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