FILMETRICS F20 Bedienungsanleitung

Operations Manual

for the

FILMETRICS F20

Thin-Film Analyzer

Revision 6.9.2

Welcome

What is the F20 used for?

The Filmetrics F20 is used to measure the thickness and optical constants (nand k) of dielectric and

semiconductor thin films. Measured films must be optically smooth and within the thickness range

set by the system configuration requirements specified in Performance Specifications. Commonly

measured films include semiconductor process films such as oxides, nitrides, resists, and poly-

silicon, optical coatings such as hardness and anti-reflection coatings, flat panel display films such

as polyimides, resist, and cell gaps, and the various coatings used in CD and DVD manufacture.

Warning: Accurate measurements require suitable recipe settings and a valid baseline. Improper system setup or

an aged lamp may also lead to errors. It is the user’s responsibility to ensure that this instrument is being used

properly for its intended purpose. Please contact Filmetrics support for assistance with any questions.

Safety, Maintenance and Care

This symbol indicates information or instructions that must be read and carefully followed to pre-

vent hazards, injury to the operator, or damage to the instrument.

This symbol indicates a potential shock hazard. Areas marked with this symbol should be serviced

by a trained service technician.

This symbol indicates that the product conforms to the WEEE (Waste in Electrical and Electronic

Equipment) Directive 2002/96/EC.

This symbol indicates that the product meets the applicable EU safety, health and environmental

protection directive requirements.

This label indicates the Model Number and Serial Number of the instrument. This information may

be necessary when contacting Filmetrics for assistance.

Disclaimer:Use of this instrument in a manner inconsistent with the information and directions

included in this manual may impair the protections designed into the product resulting in danger to

the operator or damage to the instrument

Installation Location: When deciding on a location for the instrument, ensure that the instrument

in installed in a well-ventilated location. Enclosing the unit, or blocking the vent holes, may impair

the performance of the instrument of damage the internal components.

Cleaning:The need for periodic cleaning of the system is based on the cleanliness of the envi-

ronment in which the system is installed. Only the external surfaces are to be cleaned. Cleaning

and maintenance of all internal components is to be performed by a trained service technician. Do

not use aerosol, or spray, cleaners as they may contaminate the sensitive optical surfaces on the

instrument.

Before performing any service on the instrument ensure that the main power is disconnected.

Cleanroom, or low lint, wipes should be used to wipe down the system. A mixture of Isopropyl

Alcohol (IPA) and De-ionized Water (DI H2O) at 70% DI H2O: 30% IPA is to be used for clean-

ing. Undiluted IPA may be used, if the 70:30 DI and IPA mixture is not available, but extra care

must be taken. Avoid using stronger solvents, such as acetone, as these may compromise the sur-

face finish.

Avoid excessive pressure on any surface when cleaning. Excessive force may bend a component,

which would damage the system, or cause the system to be out of alignment.

Start with the top of the system and work down. Use slow motions, in a straight line, from the back

to the front of the surface being cleaned. Change the cleaning wipe periodically to avoid re-depos-

iting material back onto the surface being cleaned. Allow all cleaned surfaces to dry completely

before restoring power to the system.

CE Mandated Warnings

Please read the following instructions carefully to prevent potential shock or fire hazards. This

manual should be retained for future use

Bitte lesen Sie die nachstehende Anleitung sorgfältig durch um Stromschlag und Feuergefahr zu

vermeiden. Diese Betriebsanleitung sollte für späteren Gebrauch sorgfältig aufbewahrt werden.

Preghiamo di leggere accuratamente, le sequenti Instruzioni, per evitare Prossiomi Incendi e

Correnti.

Shock Hazard - Do Not Enter

Achtung Hochspannung - Nicht Berühren

Attenzione Corrent-Forte - Prego non toccare

The front panel’s switch is not the power disconnect device. The power cord should be removed

after use.

Der Kippschalter an der Vorderseite unterbricht nicht die Stromzuführung. Das Stromkabel sollte

nach Gebrauch aus dem Gerät herausgezogen werden.

L’interutore nella parete frontale non blocca le Corrente. La Corrente viene.

Never expose the unit to water or liquids. Avoid direct sun.

Bringe das Gerät nicht mit Wasser oder einer anderen Flüssigkeiten in Berührung. Vermeide

direkte Sonneneinstrahlung.

Evitare contatto con acqua oppure liquidi Infiammabili al Macchineggio. Auche entrate di Sole.

Do not insert any objects into the unit.

Keinen Gegenstand in das Gerät einbringen. Do non inseriamo any obietta into gli unità.

Non mettere ogetti dentro la Macchina.

Do not use near open flame or heat.

Das Gerät nicht in der Nähe einer offenen Flamme oder Hitze benutzen.

Non mettere la Macchina vicino a fuochi oppure Riscaldamenti.

The unit should never be enclosed or blocked.

Das Gerät darf nicht eingeschlossen oder blockiert werden.

La Macchina non chinderla per nessun motivo.

Connect unit only to a properly measured supply. Use only three wire cord which is provided

with the unit.

Schließen Sie das Gerät nur an eine ordnungsgemäss vermessene Stromsversorgung an.

Verwende nur ein dreiadriges Kabel, wie es auch mit dem Gerät ausgeliefert wird.

Montare solo con misura normata. Adoperando solo 3 cavi elettrici cosi come e fornita la

Macchina.

Software Overview

The way that light reflects off of a thin film is determined by the characteristics of the film, such as

its thickness, optical constants, and roughness. The F20 is able to determine thin-film char-

acteristics by first carefully measuring the amount of light reflected from the thin film over a range

of wavelengths (i.e., by measuring the reflectance spectrum), and then analyzing this data by com-

paring it to a series of calculated reflectance spectra. Most of the features of the FILMeasure soft-

ware that runs the F20 can be divided into reflectance acquisition and reflectance analysis

functions. The following pages outline the main features of the FILMeasure software.

The basic steps for any F20 measurement are selecting and editing the film structure, taking a base-

line measurement, and then making and evaluating the measurement. The details of each of these

steps are explained below, followed by descriptions of other FILMeasure functions.

Measure Tab

1. Standard Windows File menu for saving and retrieving data, printing, etc.

2. The Edit menu is used for viewing and editing the material library.

3. Used to Setup various parameters and the graphic display.

4. For starting and stopping continuous reflectance acquisition and data measurement.

5. Used to access the Help,Diagnostic and Support functions of the software.

6. Shows that the Measure tab is currently selected.

7. Used to select the History tab.

8. This is the thickness result from the measured spectrum.

9. This button causes spectra to be acquired and analyzed.

10. The baseline measurement sequence, which is required before measurements are made, is ini-

tiated by pressing the Baseline button.

11. This button analyzes the selected spectra.

12. This is used to select Recipe settings that correspond to different samples to be measured.

13. This is where the Recipe (the film stack definition and data acquisition and analysis settings) is

set. Hundreds of recipes can be saved and later recalled.

14. This box provides more details about the calculated thickness, as well as any additional param-

eters that were solved for, including Roughness,nand k, and Non-Uniformity as well as the

Goodness of Fit (GOF).

15. Graphical display for spectra. A click of the right mouse button while the cursor is within the

graphical display activates a blue line (one click for measured curve) for easy reading of cursor

values in the main FILMeasure window. Keyboard up/down and right/left arrows move the line to

a desired location.

The graph limits can be changed by double-clicking on the graph display. The Horizontal Axis

Minimum and Maximum fields are used to control the wavelength range displayed on the screen.

Use the Vertical Axis Minimum and Maximum fields to control the vertical-axis display. Check

the Autoscale Maximum checkbox to activate y-axis autoscaling. The lower value is always 0 for

autoscaling; the maximum y-axis upper limit is 5000. Changing the Vertical Axis will change the

reflectance axis, the Vertical Axis 2 will change the transmittance axis. The axes can be set to dis-

play in percent or as a decimal value (100% = 1).

Graph Options can be accessed and edited by double-clicking on the main graph window.

16. This allows the user to enter information about the Operator and Sample for tracking purposes.

History Tab

1. Standard Windows File menu for saving and retrieving data, printing, etc.

2. The Edit menu is used for viewing and editing the material library.

3. Used to Setup various parameters and the graphic display.

4. For starting and stopping continuous reflectance acquisition and data measurement.

5. Used to access the Help,Diagnostic and Support functions of the software.

6. Used to select the Measure tab.

7. Shows that the History tab is currently selected.

8. Selecting the Measurement Trend tab will allow the user to see a plot of the measurement

results versus measurement number.

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