Inficon Modul1000 Bedienungsanleitung

OPERATING MANUAL

jinb80en1-j (1501) Translation of the original manual

Catalog-No.

550-300A

550-310A

550-330A

from software version V1.75

Modul1000

Modular Leak Detector

0-2

jinb80en1-j Operating Manual(1501)

Legal notice

INFICON GmbH

Bonner Straße 498

50968 Cologne

Germany

in any form with the permission of INFICON GmbH, Cologne.

Content 1-1

jinb80e1-h Operating Manual(1501)

Content

1 Operating instructions 1-5

1.1 How to use this manual 1-5

1.2 Warning and danger symbols 1-5

1.3 Graphic conventions 1-6

1.4 Definition of Terms 1-6

2 Important safety instructions 2-1

2.1 Intended use 2-1

2.2 User requirements 2-1

2.3 Restrictions of use 2-2

2.4 Hazards in the event of intended use 2-2

3 Description of equipment 3-1

3.1 The housing 3-1

3.2 Interfaces 3-3

3.3 Operating options 3-3

3.3.1 Desktop operation 3-4

3.3.2 Installation in switch cabinet 3-4

3.3.3 Remote control RC1000 3-5

3.4 Scope of delivery 3-6

3.5 Accessories 3-6

3.5.1 Sniffer line SL200 3-6

3.5.2 Test chamber TC1000 3-6

3.5.3 Set of male connectors for Interfaces 3-7

4 Installation 4-1

4.1 Mechanical Installation 4-1

4.2 Electrical installation 4-1

4.2.1 Mains socket 4-1

4.2.2 Electrical interfaces 4-2

4.2.3 Vacuum connections 4-6

5 Working Modes 5-1

5.1 Vacuum 5-1

5.2 Partial Flow Mode 5-2

5.3 Auto Leak Test 5-3

5.3.1 Auto Leak Test Settings 5-3

5.4 Commander mode 5-4

5.4.1 Design of a leak detector system 5-5

5.4.2 Test sequence of events 5-6

5.5 Sniff mode tips 5-8

1-2 Content

jinb80e1-h Operating Manual(1501)

6 Operation 6-1

6.1 Switching ON 6-1

6.2 Status LED 6-1

6.3 Control 6-2

6.4 Control commands 6-3

6.5 Display 6-6

6.6 Calibration in Vacuum mode 6-9

6.7 Calibration in Sniff mode 6-10

6.8 Calibration in Auto Leak Test 6-11

6.9 Calibration in Commander mode 6-11

6.10 Machine factor 6-12

6.11 Menu structure 6-13

6.12 Explanation of Menu Items 6-15

6.12.1 Main menu



Return 6-15

6.12.2 Main menu



View 6-15

6.12.3 Main menu



Mode 6-16

6.12.4 Main menu



Trigger & Alarms 6-16

6.12.5 Main Menu



Calibration (CAL) Mode Vacuum 6-18

6.12.6 Main menu



Settings 6-20

6.12.6.1 Main menu



Settings



Vacuum settings 6-20

6.12.6.2 Main menu



Settings



Zero & Background 6-23

6.12.6.3 Main menu



Settings



Mass 6-23

6.12.6.4 Main menu



Settings



Interfaces 6-23

6.12.6.5 Main menu



Settings



Miscellaneous 6-26

6.12.6.6 Main menu



Settings



Load/Save Parameters 6-27

6.12.6.7 Main menu



Settings



Monitoring 6-28

6.12.7 Main menu



Info 6-30

6.12.8 Main menu



Access Control 6-31

7 Maintenance tasks 7-1

7.1 Maintenance and service at INFICON 7-1

7.2 General Maintenance Instructions 7-1

7.3 Maintenance schedule 7-3

7.4 Maintenance intervals 7-3

7.5 Description of the maintenance work 7-5

7.5.1 Opening of the Device 7-6

7.6 TMH 071 Replace the Lubricant Reservoir 7-7

7.7 Fuse replacement 7-10

7.7.1 Overview on Electrical Fuses 7-10

7.7.2 Replace mains fuse 7-11

7.7.3 Replace fuses on interface board 7-12

7.8 Replacing of parameter memory (I•STICK) 7-13

7.9 Replace Vent Filter 7-14

8 Transport and disposal 8-1

8.1 Transporting after Contamination 8-1

Content 1-3

jinb80e1-h Operating Manual(1501)

8.2 Disposal 8-2

9 Technical Data 9-1

9.1 Technical data of components 9-1

9.1.1 Power supply 9-1

9.1.2 Weight / dimensions 9-1

9.1.3 Characteristics 9-1

9.1.4 Environmental Conditions 9-2

9.2 Control via the PLC inputs and outputs 9-3

9.2.1 PLC inputs 9-3

9.2.2 PLC Outputs 9-6

9.3 The digital valve outputs 9-9

9.4 Analogue Output 9-10

9.4.1 Configuration of the analogue outputs 9-10

9.5 Pin Assignments 9-13

9.5.1 PLC IN / AUDIO 9-13

9.5.2 PLC OUT 9-15

9.5.3 Pressure Gauge 9-16

9.5.4 Valves 9-19

9.5.5 Recorder 9-21

9.6 Installation diagram of the control unit for rackinstallation 9-22

9.7 Commander mode 9-23

9.8 CE-Certificate 9-24

10 Error Messages and Warnings 10-1

11 Ordering Information 11-1

11.1 Service Centres World Wide 11-3

INDEX 11-5

1-4 Content

jinb80e1-h Operating Manual(1501)

Operating instructions 1-5

jinb80e1-h Operating Manual(1501)

1Operatinginstructions

1.1 How to use this manual

•ReadthismanualbeforeusingModul1000.

•Keepthemanualsothatyou can use it anytime.

•Enclosetheoperatingmanualifthedevice is ever passed on to third parties.

1.2 Warning and danger symbols

STOP Danger

This symbol refers to an immediate hazard, which may result in fatal or serious

injuries (crippling).

Warning

This symbol refers to a possibly hazardous situation, which may result in fatal or

serious injuries.

Caution

This symbol refers to a possibly hazardous situation, which may result in slight

injuries.

This symbol is also used to alert you to the risk of material or environmental

damage.

1-6 Operating instructions

jinb80e1-h Operating Manual(1501)

1.3 Graphic conventions

Notice: Points to very useful pieces of information.

1Points to an operation that you have to perform.

Points to the result of an operation you accomplished.

Points to the button you have to press.

• Shows a listing.

1.4 Definition of Terms

Autotune / Mass alignment

The Modul1000 adjusts its tuning voltage to determine the optimal voltage for peak

efficiency.

Autoranging

The range of the pre-amplifier is selected automatically. The Autoranging feature of

the Modul1000 covers the entire range or leak rates depending on the selected oper-

ating mode. Vacuum mode or Sniff mode Not only the leak rate signal, but also the

pressure in the test sample (inlet pressure PE) and the fore-vacuum pressure (PV)

are used for control purposes.

Auto zero

Determination and automatic adaptation of the helium background in the Vacuum

mode. Through this function, the internal zero level of the instrument is determined

which is then subtracted from the current leak rate signal. This function is run during

the calibration process or when operating the start push-button, provided the

Modul1000 has been running previously for at least 20 seconds in the Standby or

Vent mode. If the helium background previously suppressed should drop, the zero

level will be adapted automatically.

Fore pressure

Fore pressure between turbo pump and fore pressure pump.

Internal helium background

The existing helium partial pressure in the measurement system. The level of the

internal helium background is measured in the Stand-by mode and subtracted from

the measured signal. (see above: Auto zero)

Operating instructions 1-7

jinb80e1-h Operating Manual(1501)

Minimum detectable leak rate

The smallest leak rate the Modul1000 is able to detect. 

(5x10-12 mbar l/s).

The menu allows the user to program the Modul1000 according to the requirements.

The menu has a tree structure.

As-delivered condition

The default settings of the Modul1000 are as delivered by the factory.

Standby

The Modul1000 is ready for operation.

MEASURE

MEASURE mode is when the Modul1000 has achieved a pressure better than the

crossover and the unit is sampling the gas load for helium leak rate.

1-8 Operating instructions

jinb80e1-h Operating Manual(1501)

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