Keithley 2651A Bedienungsanleitung

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Model 2651A High Power

System SourceMeter®Instrument

Reference Manual

2651A-901-01 Rev. A / March 2011

Model 2651A

High Power System SourceMeter®Instrument

Reference Manual

Cleveland, Ohio, U.S.A.

Any unauthorized reproduction, photocopy, or use the information herein, in whole or in part,

without the prior written approval of Keithley Instruments, Inc. is strictly prohibited.

All Keithley Instruments product names are trademarks or registered trademarks of Keithley

Instruments, Inc. Other brand names are trademarks or registered trademarks of their respective

holders.

PUC-Rio. Terms of license for the Lua software and associated documentation can be accessed at

the Lua licensing site (http://www.lua.org/license.html).

Document number: 2651A-901-01 Rev. A / March 2011

11/07

Safety Precautions

The following safety precautions should be observed before using this product and any associated instrumentation. Although

some instruments and accessories would normally be used with nonhazardous voltages, there are situations where hazardous

conditions may be present.

This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions

required to avoid possible injury. Read and follow all installation, operation, and maintenance information carefully before using

the product. Refer to the user documentation for complete product specifications.

If the product is used in a manner not specified, the protection provided by the product warranty may be impaired.

The types of product users are:

Responsible body is the individual or group responsible for the use and maintenance of equipment, for ensuring that the

equipment is operated within its specifications and operating limits, and for ensuring that operators are adequately trained.

Operators use the product for its intended function. They must be trained in electrical safety procedures and proper use of the

instrument. They must be protected from electric shock and contact with hazardous live circuits.

Maintenance personnel perform routine procedures on the product to keep it operating properly, for example, setting the line

voltage or replacing consumable materials. Maintenance procedures are described in the user documentation. The procedures

explicitly state if the operator may perform them. Otherwise, they should be performed only by service personnel.

Service personnel are trained to work on live circuits, perform safe installations, and repair products. Only properly trained

service personnel may perform installation and service procedures.

Keithley Instruments products are designed for use with electrical signals that are rated Measurement Category I and

Measurement Category II, as described in the International Electrotechnical Commission (IEC) Standard IEC 60664. Most

measurement, control, and data I/O signals are Measurement Category I and must not be directly connected to mains voltage or

to voltage sources with high transient over-voltages. Measurement Category II connections require protection for high transient

over-voltages often associated with local AC mains connections. Assume all measurement, control, and data I/O connections are

for connection to Category I sources unless otherwise marked or described in the user documentation.

Exercise extreme caution when a shock hazard is present. Lethal voltage may be present on cable connector jacks or test

fixtures. The American National Standards Institute (ANSI) states that a shock hazard exists when voltage levels greater than

30V RMS, 42.4V peak, or 60VDC are present. A good safety practice is to expect that hazardous voltage is present in any

unknown circuit before measuring.

Operators of this product must be protected from electric shock at all times. The responsible body must ensure that operators

are prevented access and/or insulated from every connection point. In some cases, connections must be exposed to potential

human contact. Product operators in these circumstances must be trained to protect themselves from the risk of electric shock. If

the circuit is capable of operating at or above 1000V, no conductive part of the circuit may be exposed.

Do not connect switching cards directly to unlimited power circuits. They are intended to be used with impedance-limited

sources. NEVER connect switching cards directly to AC mains. When connecting sources to switching cards, install protective

devices to limit fault current and voltage to the card.

Before operating an instrument, ensure that the line cord is connected to a properly-grounded power receptacle. Inspect the

connecting cables, test leads, and jumpers for possible wear, cracks, or breaks before each use.

When installing equipment where access to the main power cord is restricted, such as rack mounting, a separate main input

power disconnect device must be provided in close proximity to the equipment and within easy reach of the operator.

For maximum safety, do not touch the product, test cables, or any other instruments while power is applied to the circuit under

test. ALWAYS remove power from the entire test system and discharge any capacitors before: connecting or disconnecting

cables or jumpers, installing or removing switching cards, or making internal changes, such as installing or removing jumpers.

Do not touch any object that could provide a current path to the common side of the circuit under test or power line (earth)

ground. Always make measurements with dry hands while standing on a dry, insulated surface capable of withstanding the

voltage being measured.

The instrument and accessories must be used in accordance with its specifications and operating instructions, or the safety of

the equipment may be impaired.

11/07

Do not exceed the maximum signal levels of the instruments and accessories, as defined in the specifications and operating

information, and as shown on the instrument or test fixture panels, or switching card.

When fuses are used in a product, replace with the same type and rating for continued protection against fire hazard.

Chassis connections must only be used as shield connections for measuring circuits, NOT as safety earth ground connections.

If you are using a test fixture, keep the lid closed while power is applied to the device under test. Safe operation requires the use

of a lid interlock.

If a screw is present, connect it to safety earth ground using the wire recommended in the user documentation.

The

symbol on an instrument means caution, risk of danger. The user should refer to the operating instructions located in the

user documentation in all cases where the symbol is marked on the instrument.

The symbol on an instrument means caution, risk of electric shock. Use standard safety precautions to avoid personal

contact with these voltages.

The symbol on an instrument shows that the surface may be hot. Avoid personal contact to prevent burns.

The symbol indicates a connection terminal to the equipment frame.

If this Hg symbol is on a product, it indicates that mercury is present in the display lamp. Please note that the lamp must be

properly disposed of according to federal, state, and local laws.

The WARNING heading in the user documentation explains dangers that might result in personal injury or death. Always read

the associated information very carefully before performing the indicated procedure.

The CAUTION heading in the user documentation explains hazards that could damage the instrument. Such damage may

invalidate the warranty.

Instrumentation and accessories shall not be connected to humans.

Before performing any maintenance, disconnect the line cord and all test cables.

To maintain protection from electric shock and fire, replacement components in mains circuits - including the power transformer,

test leads, and input jacks - must be purchased from Keithley Instruments. Standard fuses with applicable national safety

approvals may be used if the rating and type are the same. Other components that are not safety-related may be purchased

from other suppliers as long as they are equivalent to the original component (note that selected parts should be purchased only

through Keithley Instruments to maintain accuracy and functionality of the product). If you are unsure about the applicability of a

replacement component, call a Keithley Instruments office for information.

To clean an instrument, use a damp cloth or mild, water-based cleaner. Clean the exterior of the instrument only. Do not apply

cleaner directly to the instrument or allow liquids to enter or spill on the instrument. Products that consist of a circuit board with

no case or chassis (e.g., a data acquisition board for installation into a computer) should never require cleaning if handled

according to instructions. If the board becomes contaminated and operation is affected, the board should be returned to the

factory for proper cleaning/servicing.

Table of Contents

Introduction.................................................................................................................1-1

Welcome .............................................................................................................................. 1-1

Extended warranty ............................................................................................................... 1-1

Contact information.............................................................................................................. 1-1

CD-ROM contents................................................................................................................ 1-2

Organization of manual sections ............................................................................................... 1-2

Capabilities and features ..................................................................................................... 1-2

General information.............................................................................................................. 1-3

Displaying the instrument's serial number................................................................................. 1-3

General operation.......................................................................................................2-1

General ratings..................................................................................................................... 2-1

Front and rear panel operation ............................................................................................ 2-1

Front panel................................................................................................................................ 2-1

Rear panel................................................................................................................................. 2-5

Cooling vents ....................................................................................................................... 2-7

Turning your instrument on and off ...................................................................................... 2-8

Procedure.................................................................................................................................. 2-8

System identification ............................................................................................................ 2-9

Beeper................................................................................................................................ 2-10

Display mode ..................................................................................................................... 2-10

Basic operation .................................................................................................................. 2-11

Operation overview ................................................................................................................. 2-11

Menu overview ........................................................................................................................ 2-15

Operation considerations ........................................................................................................ 2-22

Basic source-measure procedure ........................................................................................... 2-24

Triggering in local mode.......................................................................................................... 2-27

Configuring trigger attributes in local mode............................................................................. 2-28

Sink operation and interface.................................................................................................... 2-29

Configuring for measure only tests using the MODE key........................................................ 2-30

Contact check measurements................................................................................................. 2-37

User setup............................................................................................................................... 2-39

DUT test connections......................................................................................................... 2-42

Input/output connectors........................................................................................................... 2-42

2-wire local sensing................................................................................................................. 2-43

4-wire remote sensing............................................................................................................. 2-44

Sense mode selection............................................................................................................. 2-44

Contact check connections ..................................................................................................... 2-45

Multiple SMU connections....................................................................................................... 2-46

Combining SMU outputs ......................................................................................................... 2-48

Guarding and shielding ........................................................................................................... 2-53

Test fixture .............................................................................................................................. 2-57

Floating a SMU ....................................................................................................................... 2-58

Table of Contents Model 2651A High Power System SourceMeter® Instrument Reference Manual

ii 2651A-901-01 Rev. A / March 2011

Output-off states...................................................................................................................... 2-59

USB storage overview........................................................................................................ 2-63

Connecting the USB flash drive .............................................................................................. 2-63

File system navigation............................................................................................................. 2-64

Error and status messages ................................................................................................ 2-65

Range................................................................................................................................. 2-65

Available ranges...................................................................................................................... 2-65

Maximum source values and readings.................................................................................... 2-66

Measure auto delay................................................................................................................. 2-66

Ranging limitations.................................................................................................................. 2-66

Manual ranging ....................................................................................................................... 2-67

Autoranging............................................................................................................................. 2-67

Low range limits ...................................................................................................................... 2-67

Range considerations ............................................................................................................. 2-68

Range programming ............................................................................................................... 2-69

Digits .................................................................................................................................. 2-71

Setting display resolution ........................................................................................................ 2-71

Remote digits programming .................................................................................................... 2-71

Speed................................................................................................................................. 2-71

Setting speed .......................................................................................................................... 2-72

Communications interfaces................................................................................................ 2-73

Selecting an interface.............................................................................................................. 2-73

Output queue .......................................................................................................................... 2-73

LAN communications .............................................................................................................. 2-74

GPIB operation........................................................................................................................ 2-76

General bus commands .......................................................................................................... 2-78

Front-panel GPIB operation .................................................................................................... 2-80

RS-232 interface operation ..................................................................................................... 2-81

Functions and features ..............................................................................................3-1

Rel........................................................................................................................................ 3-1

Front panel rel........................................................................................................................... 3-1

Remote rel programming .......................................................................................................... 3-2

Filters.................................................................................................................................... 3-3

Filter types................................................................................................................................. 3-3

Front panel filter control ............................................................................................................ 3-4

Remote filter programming........................................................................................................ 3-4

Reading buffers.................................................................................................................... 3-6

Front-panel reading buffer control............................................................................................. 3-6

Remote reading buffer programming ...................................................................................... 3-10

Sweep operation ................................................................................................................ 3-19

Overview ................................................................................................................................. 3-19

Sweep characteristics ............................................................................................................. 3-20

Configuring and running sweeps............................................................................................. 3-29

Sweeping using factory scripts................................................................................................ 3-30

Sweep programming examples............................................................................................... 3-30

Triggering ........................................................................................................................... 3-32

Remote triggering overview..................................................................................................... 3-32

Using the remote trigger model............................................................................................... 3-34

SMU event detectors............................................................................................................... 3-39

Using trigger events to start actions on trigger objects............................................................ 3-40

Digital I/O port and TSP-Link synchronization lines ................................................................ 3-41

Model 2651A High Power System SourceMeter® Instrument Reference Manual Table of Contents

2651A-901-01 Rev. A / March 2011 iii

Timers ..................................................................................................................................... 3-43

Event blenders ........................................................................................................................ 3-49

LAN triggering overview .......................................................................................................... 3-50

Command interface triggering ................................................................................................. 3-52

Manual triggering .................................................................................................................... 3-52

Interactive triggering................................................................................................................ 3-52

Hardware trigger modes.......................................................................................................... 3-56

Understanding synchronous triggering modes ........................................................................ 3-60

High-capacitance mode ..................................................................................................... 3-65

Overview ................................................................................................................................. 3-65

Understanding high-capacitance mode................................................................................... 3-65

Enabling high-capacitance mode ............................................................................................ 3-68

Display operations.............................................................................................................. 3-70

Display functions and attributes .............................................................................................. 3-70

Display features ...................................................................................................................... 3-71

Display messages ................................................................................................................... 3-72

Input prompting ....................................................................................................................... 3-76

Indicators................................................................................................................................. 3-78

Local lockout ........................................................................................................................... 3-79

Load test menu ....................................................................................................................... 3-79

Key-press codes ..................................................................................................................... 3-81

Digital I/O ........................................................................................................................... 3-83

Digital I/O port ......................................................................................................................... 3-83

Using output enable ................................................................................................................ 3-88

TSP-Link synchronization lines ............................................................................................... 3-89

Theory of operation....................................................................................................4-1

Analog to digital converter ................................................................................................... 4-1

Source-measure concepts ................................................................................................... 4-2

Overview ................................................................................................................................... 4-2

Compliance principles ............................................................................................................... 4-2

Overheating protection.............................................................................................................. 4-3

Operating boundaries................................................................................................................ 4-5

Basic circuit configurations...................................................................................................... 4-14

Guard ...................................................................................................................................... 4-17

Cable considerations............................................................................................................... 4-20

Reduction in gain-bandwidth.............................................................................................. 4-20

Pulse rise times.................................................................................................................. 4-21

Cable specifications and connection configuration.................................................................. 4-22

Range and pulse setting ......................................................................................................... 4-22

Load and operating mode ....................................................................................................... 4-22

Pulse width......................................................................................................................... 4-23

Remote commands.....................................................................................................5-1

Introduction to remote operation.......................................................................................... 5-1

Controlling the instrument by sending individual command messages ..................................... 5-1

Queries ..................................................................................................................................... 5-3

Information on scripting and programming................................................................................ 5-3

About remote commands..................................................................................................... 5-3

Beeper control........................................................................................................................... 5-3

Bit manipulation and logical operations..................................................................................... 5-4

Table of Contents Model 2651A High Power System SourceMeter® Instrument Reference Manual

iv 2651A-901-01 Rev. A / March 2011

Data queue................................................................................................................................ 5-5

Digital I/O .................................................................................................................................. 5-5

Display ...................................................................................................................................... 5-6

Error queue ............................................................................................................................... 5-6

Event log ................................................................................................................................... 5-6

File I/O ...................................................................................................................................... 5-7

GPIB ......................................................................................................................................... 5-8

Instrument identification ............................................................................................................ 5-8

LAN and LXI.............................................................................................................................. 5-9

Miscellaneous ......................................................................................................................... 5-10

Parallel script execution .......................................................................................................... 5-10

Queries and response messages............................................................................................ 5-10

Reading buffer......................................................................................................................... 5-11

Reset....................................................................................................................................... 5-11

RS-232.................................................................................................................................... 5-11

Saved setups .......................................................................................................................... 5-11

Scripting .................................................................................................................................. 5-12

SMU ........................................................................................................................................ 5-13

SMU calibration....................................................................................................................... 5-14

Status model ........................................................................................................................... 5-15

Time ........................................................................................................................................ 5-16

Triggering................................................................................................................................ 5-17

TSP-Link ................................................................................................................................. 5-19

TSP-Net .................................................................................................................................. 5-19

Userstrings.............................................................................................................................. 5-20

Factory scripts.................................................................................................................... 5-20

Introduction ............................................................................................................................. 5-20

Running a factory script .......................................................................................................... 5-21

Retrieving and modifying a factory script listing ...................................................................... 5-21

KISweep factory script ............................................................................................................ 5-22

KIPulse factory script .............................................................................................................. 5-23

KIHighC factory script ............................................................................................................. 5-24

KIParlib factory script .............................................................................................................. 5-24

KISavebuffer factory script ...................................................................................................... 5-24

Instrument programming...........................................................................................6-1

Fundamentals of scripting for TSP....................................................................................... 6-1

What is a script?........................................................................................................................ 6-2

Runtime and nonvolatile memory storage of scripts.................................................................. 6-2

What can be included in scripts?............................................................................................... 6-2

Commands that cannot be used in scripts ................................................................................ 6-2

Manage scripts.......................................................................................................................... 6-3

Working with scripts in nonvolatile memory............................................................................. 6-10

Programming example ............................................................................................................ 6-12

Fundamentals of programming for TSP............................................................................. 6-14

Introduction ............................................................................................................................. 6-14

What is Lua? ........................................................................................................................... 6-14

Lua basics............................................................................................................................... 6-14

Standard libraries .................................................................................................................... 6-30

Programming example ............................................................................................................ 6-36

Using Test Script Builder (TSB) ......................................................................................... 6-37

Installing the TSB software...................................................................................................... 6-37

Project Navigator..................................................................................................................... 6-37

Script Editor............................................................................................................................. 6-37

Programming interaction ......................................................................................................... 6-37

Working with TSB Embedded ............................................................................................ 6-37

Model 2651A High Power System SourceMeter® Instrument Reference Manual Table of Contents

2651A-901-01 Rev. A / March 2011 v

Using instrument commands................................................................................................... 6-37

Advanced scripting for TSP ............................................................................................... 6-39

Global variables and the script.user.scripts table .................................................................... 6-39

Create a script using the script.new() command ..................................................................... 6-40

Restore a script to the runtime environment............................................................................ 6-43

Rename a script...................................................................................................................... 6-43

Delete user scripts from the instrument................................................................................... 6-45

Memory considerations for the runtime environment .............................................................. 6-46

TSP-Link system expansion interface................................................................................ 6-47

Overview ................................................................................................................................. 6-47

Connections ............................................................................................................................ 6-49

Initialization ............................................................................................................................. 6-50

Resetting the TSP-Link network.............................................................................................. 6-51

Using the expanded system.................................................................................................... 6-52

TSP advanced features........................................................................................................... 6-53

Using groups to manage nodes on TSP-Link network ............................................................ 6-56

Running parallel test scripts .................................................................................................... 6-57

Using the data queue for real-time communication ................................................................. 6-59

Copying test scripts across the TSP-Link network .................................................................. 6-59

Removing stale values from the reading buffer....................................................................... 6-60

TSP-Net ............................................................................................................................. 6-60

Overview ................................................................................................................................. 6-60

TSP-Net capabilities................................................................................................................ 6-61

Using TSP-Net with any Ethernet-enabled device .................................................................. 6-61

TSP-Net versus TSP-Link to communicate with TSP-enabled devices................................... 6-62

Instrument commands: General device control....................................................................... 6-63

Instrument commands: TSP-enabled device control............................................................... 6-63

Example: Using tspnet commands.......................................................................................... 6-64

Command reference...................................................................................................7-1

Command programming notes ............................................................................................ 7-1

Placeholder text ........................................................................................................................ 7-1

Syntax rules .............................................................................................................................. 7-2

Logical instruments ................................................................................................................... 7-3

Time and date values................................................................................................................ 7-4

Using the command reference............................................................................................. 7-4

Command name and standard parameters summary ............................................................... 7-5

Command usage....................................................................................................................... 7-6

Command details ...................................................................................................................... 7-7

Example section........................................................................................................................ 7-7

Related commands and information.......................................................................................... 7-7

Commands........................................................................................................................... 7-8

beeper.beep()............................................................................................................................ 7-8

beeper.enable ........................................................................................................................... 7-8

bit.bitand() ................................................................................................................................. 7-9

bit.bitor().................................................................................................................................... 7-9

bit.bitxor() ................................................................................................................................ 7-10

bit.clear() ................................................................................................................................. 7-11

bit.get().................................................................................................................................... 7-11

bit.getfield() ............................................................................................................................. 7-12

bit.set() .................................................................................................................................... 7-13

bit.setfield().............................................................................................................................. 7-14

bit.test() ................................................................................................................................... 7-15

bit.toggle() ............................................................................................................................... 7-15

bufferVar.appendmode ........................................................................................................... 7-16

Table of Contents Model 2651A High Power System SourceMeter® Instrument Reference Manual

vi 2651A-901-01 Rev. A / March 2011

bufferVar.basetimestamp ........................................................................................................ 7-17

bufferVar.cachemode.............................................................................................................. 7-18

bufferVar.capacity ................................................................................................................... 7-18

bufferVar.clear() ...................................................................................................................... 7-19

bufferVar.clearcache()............................................................................................................. 7-20

bufferVar.collectsourcevalues ................................................................................................. 7-21

bufferVar.collecttimestamps.................................................................................................... 7-21

bufferVar.fillcount .................................................................................................................... 7-22

bufferVar.fillmode.................................................................................................................... 7-23

bufferVar.n .............................................................................................................................. 7-24

bufferVar.timestampresolution ................................................................................................ 7-24

ConfigPulseIMeasureV() ......................................................................................................... 7-25

ConfigPulseIMeasureVSweepLin() ......................................................................................... 7-27

ConfigPulseIMeasureVSweepLog() ........................................................................................ 7-29

ConfigPulseVMeasureI() ......................................................................................................... 7-31

ConfigPulseVMeasureISweepLin() ......................................................................................... 7-34

ConfigPulseVMeasureISweepLog() ........................................................................................ 7-36

dataqueue.add()...................................................................................................................... 7-38

dataqueue.CAPACITY ............................................................................................................ 7-39

dataqueue.clear() .................................................................................................................... 7-39

dataqueue.count ..................................................................................................................... 7-40

dataqueue.next()..................................................................................................................... 7-41

delay() ..................................................................................................................................... 7-42

digio.readbit() .......................................................................................................................... 7-43

digio.readport()........................................................................................................................ 7-43

digio.trigger[N].assert()............................................................................................................ 7-44

digio.trigger[N].clear().............................................................................................................. 7-44

digio.trigger[N].EVENT_ID ...................................................................................................... 7-45

digio.trigger[N].mode............................................................................................................... 7-46

digio.trigger[N].overrun............................................................................................................ 7-47

digio.trigger[N].pulsewidth....................................................................................................... 7-48

digio.trigger[N].release().......................................................................................................... 7-48

digio.trigger[N].reset() ............................................................................................................. 7-49

digio.trigger[N].stimulus........................................................................................................... 7-49

digio.trigger[N].wait() ............................................................................................................... 7-51

digio.writebit().......................................................................................................................... 7-51

digio.writeport() ....................................................................................................................... 7-52

digio.writeprotect..................................................................................................................... 7-53

display.clear().......................................................................................................................... 7-54

display.getannunciators() ........................................................................................................ 7-54

display.getcursor()................................................................................................................... 7-56

display.getlastkey() ................................................................................................................. 7-56

display.gettext()....................................................................................................................... 7-58

display.inputvalue() ................................................................................................................. 7-59

display.loadmenu.add()........................................................................................................... 7-61

display.loadmenu.catalog() ..................................................................................................... 7-62

display.loadmenu.delete() ....................................................................................................... 7-63

display.locallockout ................................................................................................................. 7-64

display.menu()......................................................................................................................... 7-64

display.numpad....................................................................................................................... 7-65

display.prompt() ...................................................................................................................... 7-66

display.screen ......................................................................................................................... 7-67

display.sendkey() .................................................................................................................... 7-68

display.setcursor()................................................................................................................... 7-69

display.settext()....................................................................................................................... 7-70

display.smuX.digits ................................................................................................................. 7-71

display.smuX.measure.func .................................................................................................... 7-71

display.trigger.clear()............................................................................................................... 7-72

display.trigger.EVENT_ID ....................................................................................................... 7-72

display.trigger.overrun............................................................................................................. 7-73

display.trigger.wait() ................................................................................................................ 7-73

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